Patents by Inventor Karthik Balakrishnan

Karthik Balakrishnan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10297686
    Abstract: A vertical field effect transistor includes a first source/drain region formed on or in a substrate. A tapered fin is formed a vertical device channel and has a first end portion attached to the first source/drain region. A second source/drain region is formed on a second end portion of the tapered fin. A gate structure surrounds the tapered fin.
    Type: Grant
    Filed: July 25, 2017
    Date of Patent: May 21, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10297512
    Abstract: A memory device includes six field effect transistors (FETs) formed with semiconductor nanowires arranged on a substrate in an orientation substantially perpendicular to the substrate. The semiconductor nanowires have bottom contacts, gate contacts separated in a direction perpendicular to the substrate from the bottom contacts, and top contacts separated in a direction perpendicular to the substrate from the gate contacts. The necessary connections are made among the bottom, gate, and top contacts to form the memory device using first, second, and third metallization layers, the first metallization layer being separated in a direction perpendicular to the substrate from the top contacts, the second metallization layer being separated in a direction perpendicular to the substrate from the first metallization layer, and the third metallization layer being separated in a direction perpendicular to the substrate from the second metallization layer.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: May 21, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Michael A. Guillorn, Pouya Hashemi, Alexander Reznicek
  • Publication number: 20190140109
    Abstract: A semiconductor device that is composed of an epitaxial semiconductor material stacked structure that includes a first epitaxial channel for a first junction field effect transistor (JFET) atop a supporting substrate and a second epitaxial channel region for a second junction field effect transistor (JFET). A commonly electrically contacted source/drain region for each of the first JFET and the second JFET is positioned at an interface of the first and second epitaxial channel region. A channel length for each of the first and second is substantially perpendicular to an upper surface of the supporting substrate. An epitaxial semiconductor gate conductor in direct contact with each of said first epitaxial channel region and the second epitaxial channel region.
    Type: Application
    Filed: January 8, 2019
    Publication date: May 9, 2019
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Tak H. Ning, Alexander Reznicek
  • Patent number: 10283601
    Abstract: A semiconductor structure is provided including a strained silicon germanium alloy fin that can be employed as a channel material for a FinFET device and having a gate spacer including a lower portion that fills in a undercut region that lies adjacent to the strained silicon germanium alloy fin and beneath raised source/drain (S/D) structures and silicon pedestal structures that can provide improved overlay capacitance.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: May 7, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10283516
    Abstract: Semiconductor device, memory arrays, and methods of forming a memory cell include or utilize one or more memory cells. The memory cell(s) include a first nanosheet transistor located on top of a substrate and connected to a first terminal, a second nanosheet transistor located on top of the first nanosheet transistor and connected in parallel to the first nanosheet transistor and connected to a second terminal, where the first and second nanosheet transistors share a common floating gate and a common output terminal, and an access transistor connected in series to the common output terminal and a low voltage terminal, the access transistor configured to trigger hot-carrier injection to the common floating gate to change a voltage of the common floating gate.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: May 7, 2019
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Karthik Balakrishnan, Jeng-Bang Yau, Tak H. Ning
  • Publication number: 20190128841
    Abstract: A method for making a hydrophobic biosensing device includes forming alternating layers over a top and sides of a fin on a dielectric layer to form a stack of layers. The stack of layers are planarized to expose the top of the fin. The fin and every other layer are removed to form a cathode group of fins and an anode group of fins. A hydrophobic surface on the two groups of fins.
    Type: Application
    Filed: December 13, 2018
    Publication date: May 2, 2019
    Inventors: Ali Afzali-Ardakani, Karthik Balakrishnan, Stephen W. Bedell, Pouya Hashemi, Bahman Hekmatshoartabari, Alexander Reznicek
  • Patent number: 10276714
    Abstract: A semiconductor diode including a first conductivity type region on an upper surface of a semiconductor substrate, a fin structure atop the first conductivity type region providing a vertically orientated semiconductor base region, and a second conductivity type region at a second end of the fin structure opposite a first end of the fin structure that is in contact with the first conductivity type region. The semiconductor diode may also include a vertically orientated dual gate that is present around the fin structure. The vertically orientated dual gate including a first gate structure that is present abutting the semiconductor substrate and a second gate structure that is in closer proximity to the second conductivity type region than the first conductivity type region. The first gate structure separated from the second gate structure by a dielectric inter-gate spacer.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: April 30, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, Pouya Hashemi, Bahman Hekmatshoartabari, Alexander Reznicek
  • Publication number: 20190123141
    Abstract: A semiconductor device including a base region present within a fin semiconductor structure that is present atop a dielectric substrate. An epitaxial emitter region and epitaxial collector region are present on opposing sides and in direct contact with the fin semiconductor structure. An epitaxial extrinsic base region is present on a surface of the fin semiconductor substrate that is opposite the surface of the fin semiconductor structure that is in contact with the dielectric base.
    Type: Application
    Filed: December 11, 2018
    Publication date: April 25, 2019
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Alexander Reznicek, Jeng-Bang Yau
  • Patent number: 10256317
    Abstract: After forming a trench extending through a sacrificial gate layer to expose a surface of a doped bottom semiconductor layer, a diode including a first doped semiconductor segment and a second doped semiconductor segment having a different conductivity type than the first doped semiconductor segment is formed within the trench. The sacrificial gate layer that laterally surrounds the first doped semiconductor segment and the second doped semiconductor segment is subsequently replaced with a gate structure to form a gated diode.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: April 9, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Alexander Reznicek
  • Patent number: 10256230
    Abstract: A method of forming a vertical finFET and vertical diode device on the same substrate, including forming a channel layer stack on a heavily doped layer; forming fin trenches in the channel layer stack; oxidizing at least a portion of the channel layer stack inside the fin trenches to form a dummy layer liner; forming a vertical fin in the fin trenches with the dummy layer liner; forming diode trenches in the channel layer stack; oxidizing at least a portion of the channel layer stack inside the diode trenches to form a dummy layer liner; forming a first semiconductor segment in a lower portion of the diode trenches with the dummy layer liner; and forming a second semiconductor segment in an upper portion of the diode trenches with the first semiconductor segment, where the second semiconductor segment is formed on the first semiconductor segment to form a p-n junction.
    Type: Grant
    Filed: February 7, 2017
    Date of Patent: April 9, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10249630
    Abstract: After forming a first functional gate stack located on a first body region of a first semiconductor material portion located in a first region of a substrate and a second functional gate stack located on a second body region of a second semiconductor material portion located in a second region of the substrate, a ferroelectric gate interconnect structure is formed connecting the first functional gate stack and the second functional gate stack. The ferroelectric gate interconnect structure includes a U-shaped bottom electrode structure, a U-shaped ferroelectric material liner and a top electrode structure.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: April 2, 2019
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10249622
    Abstract: A method of forming a semiconductor device that includes providing regions of epitaxial oxide material on a substrate of a first lattice dimension, wherein regions of the epitaxial oxide material separate regions of epitaxial semiconductor material having a second lattice dimension are different than the first lattice dimension to provide regions of strained semiconductor. The regions of the strained semiconductor material are patterned to provide regions of strained fin structures. The epitaxial oxide that is present in the gate cut space obstructs relaxation of the strained fin structures. A gate structure is formed on a channel region of the strained fin structures separating source and drain regions of the fin structures.
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: April 2, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Keith E. Fogel, Sivananda K. Kanakasabapathy, Alexander Reznicek
  • Patent number: 10242990
    Abstract: After forming a first functional gate stack located on a first body region of a first semiconductor material portion located in a first region of a substrate and a second functional gate stack located on a second body region of a second semiconductor material portion located in a second region of the substrate, a ferroelectric gate interconnect structure is formed connecting the first functional gate stack and the second functional gate stack. The ferroelectric gate interconnect structure includes a U-shaped bottom electrode structure, a U-shaped ferroelectric material liner and a top electrode structure.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: March 26, 2019
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10229921
    Abstract: After forming a first functional gate stack located on a first body region of a first semiconductor material portion located in a first region of a substrate and a second functional gate stack located on a second body region of a second semiconductor material portion located in a second region of the substrate, a ferroelectric gate interconnect structure is formed connecting the first functional gate stack and the second functional gate stack. The ferroelectric gate interconnect structure includes a U-shaped bottom electrode structure, a U-shaped ferroelectric material liner and a top electrode structure.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: March 12, 2019
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Karthik Balakrishnan, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10229996
    Abstract: A method for manufacturing a semiconductor device comprises epitaxially growing a plurality of silicon layers and compressively strained silicon germanium (SiGe) layers on a substrate in a stacked configuration, wherein the silicon layers and compressively strained SiGe layers are alternately stacked on each other starting with a silicon layer on a bottom of the stacked configuration, patterning the stacked configuration to a first width, selectively removing a portion of each of the silicon layers in the stacked configuration to reduce the silicon layers to a second width less than the first width, forming an oxide layer on the compressively strained SiGe layers of the stacked configuration, wherein forming the oxide layer comprises fully oxidizing the silicon layers so that portions of the oxide layer are formed in place of each fully oxidized silicon layer, and removing part of the oxide layer while maintaining at least part of the portions of the oxide layer formed in place of each fully oxidized silicon
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: March 12, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10230005
    Abstract: A semiconductor device that is composed of an epitaxial semiconductor material stacked structure that includes a first epitaxial channel for a first junction field effect transistor (JFET) atop a supporting substrate and a second epitaxial channel region for a second junction field effect transistor (JFET). A commonly electrically contacted source/drain region for each of the first JFET and the second JFET is positioned at an interface of the first and second epitaxial channel region. A channel length for each of the first and second is substantially perpendicular to an upper surface of the supporting substrate. An epitaxial semiconductor gate conductor in direct contact with each of said first epitaxial channel region and the second epitaxial channel region.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: March 12, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Tak H. Ning, Alexander Reznicek
  • Patent number: 10229917
    Abstract: A memory device includes six field effect transistors (FETs) formed with semiconductor nanowires arranged on a substrate in an orientation substantially perpendicular to the substrate. The semiconductor nanowires have bottom contacts, gate contacts separated in a direction perpendicular to the substrate from the bottom contacts, and top contacts separated in a direction perpendicular to the substrate from the gate contacts. The necessary connections are made among the bottom, gate, and top contacts to form the memory device using first, second, and third metallization layers, the first metallization layer being separated in a direction perpendicular to the substrate from the top contacts, the second metallization layer being separated in a direction perpendicular to the substrate from the first metallization layer, and the third metallization layer being separated in a direction perpendicular to the substrate from the second metallization layer.
    Type: Grant
    Filed: July 29, 2016
    Date of Patent: March 12, 2019
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Michael A. Guillorn, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10224403
    Abstract: A semiconductor device including a base region present within a fin semiconductor structure that is present atop a dielectric substrate. An epitaxial emitter region and epitaxial collector region are present on opposing sides and in direct contact with the fin semiconductor structure. An epitaxial extrinsic base region is present on a surface of the fin semiconductor substrate that is opposite the surface of the fin semiconductor structure that is in contact with the dielectric base.
    Type: Grant
    Filed: March 15, 2017
    Date of Patent: March 5, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Alexander Reznicek, Jeng-Bang Yau
  • Publication number: 20190067459
    Abstract: A method of manufacturing a vertical transistor device comprises forming a bottom source region on a semiconductor substrate, forming a channel region extending vertically from the bottom source region, forming a top drain region on an upper portion of the channel region, forming a first gate region having a first gate length around the channel region, and forming a second gate region over the first gate region and around the channel region, wherein the second gate region has a second gate length different from the first gate length, and wherein at least one dielectric layer is positioned between the first and second gate regions.
    Type: Application
    Filed: August 29, 2017
    Publication date: February 28, 2019
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Alexander Reznicek, Jeng-Bang Yau
  • Publication number: 20190067280
    Abstract: A semiconductor device comprises a substrate, a first source/drain region on the substrate, a first channel region extending vertically with respect to the substrate from the first source/drain region, a second source/drain region on the first channel region, a third source/drain region on the second source/drain region, a second channel region extending vertically with respect to the substrate from the third source/drain region, a fourth source/drain region on the second channel region, a first gate region formed around from the first channel region, and a second gate region formed around the second channel region.
    Type: Application
    Filed: August 29, 2017
    Publication date: February 28, 2019
    Inventors: Karthik Balakrishnan, Bahman Hekmatshoartabari, Alexander Reznicek, Jeng-Bang Yau