Abstract: An exhaust pipe device according to an embodiment includes a dielectric pipe; a radio-frequency electrode; a ground electrode; and a plasma generation circuit. The radio-frequency electrode is disposed on an outer periphery side of the dielectric pipe and a radio-frequency voltage is applied to the radio-frequency electrode. The ground electrode is disposed on an end portion side of the dielectric pipe such that a distance from the radio-frequency electrode is smaller on an inner side than on an outer side of the dielectric pipe, and a ground potential is applied to the ground electrode. The plasma generation circuit generates plasma inside the dielectric pipe. The exhaust pipe device functions as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump that exhausts gas inside the film forming chamber.

Abstract: An exhaust pipe device according to an embodiment includes a dielectric pipe; a radio-frequency electrode; a ground electrode; and a plasma generation circuit. The radio-frequency electrode is disposed on an outer periphery side of the dielectric pipe and a radio-frequency voltage is applied to the radio-frequency electrode. The ground electrode is disposed on an end portion side of the dielectric pipe such that a distance from the radio-frequency electrode is smaller on an inner side than on an outer side of the dielectric pipe, and a ground potential is applied to the ground electrode. The plasma generation circuit generates plasma inside the dielectric pipe. The exhaust pipe device functions as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump that exhausts gas inside the film forming chamber.

Abstract: An exhaust pipe device according to an embodiment includes a pipe body, a coil, an inner pipe, and a plasma generation circuit. The coil is disposed inside the pipe body. The inner pipe is a dielectric and is disposed inside the coil. The plasma generation circuit is configured to generate plasma inside the inner pipe using the coil. The exhaust pipe device functions as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump for exhausting an inside of the film forming chamber.

Abstract: An exhaust pipe device according to an embodiment includes a pipe body; a dielectric formed in an annular and disposed along an inner wall of the pipe body; an internal electrode formed in an annular, disposed along an inner wall of the dielectric with a part of an inner wall surface of the dielectric left and configured to expose the part of the inner wall surface of the dielectric left without being disposed to a center side of the pipe body; and a plasma generation circuit configured to generate plasma on an exposed surface of the dielectric by using the internal electrode, wherein the exhaust pipe device functions as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump for exhausting an inside of the film forming chamber.

Abstract: A thermoelectric generator includes a perovskite dielectric substrate containing Sr and Ti and having electric conductivity by being doped to n-type; an energy filter formed on a top surface of the perovskite dielectric substrate, the energy filter including a first perovskite dielectric film, which contains Sr and Ti, has electric conductivity by being doped to n-type, and has a conduction band at an energy level higher than that of the perovskite dielectric substrate; a first electrode formed in electrical contact with a bottom surface of the perovskite dielectric substrate; and a second electrode formed in electrical contact with a top surface of the energy filter. The thermoelectric generator produces a voltage between the first and second electrodes by the top surface of the energy filter being exposed to a first temperature and the bottom surface of the perovskite dielectric substrate being exposed to a second temperature.

Abstract: A rotary machine includes a rotary shaft with an axial disc; an axial magnetic bearing which supports the rotary shaft; a motor which rotates the rotary shaft; a turbine impeller mounted on one end portion of the rotary shaft; a compressor impeller mounted on the other end portion; a cooling gas flow passage where a cooling gas for cooling the motor flows; and a housing for at least the motor, the axial magnetic bearing, and the axial disc. The motor includes a rotor unit on the rotary shaft, and a stator unit facing the rotor unit, the axial disc is equipped with a pair of load receiving surfaces sandwiched between the axial magnetic bearings, and the cooling gas flow passage is equipped with a first flow passage between the rotor unit and the stator unit, and a second flow passage extending along at least one of the load receiving surface.

Abstract: A thermoelectric conversion element includes a film composed of a conductive oxide, a first electrode disposed on one end of the film composed of the conductive oxide, and a second electrode disposed on another end of the film composed of the conductive oxide, wherein the conductive oxide has a tetragonal crystal structure expressed by ABO3-x, where 0.1<x<1, wherein the conductive oxide has a band structure in which a Fermi level intersects seven bands between a ? point and an R point, and wherein the first electrode and the second electrode are disposed on the film composed of the conductive oxide so that electrical charge moves in a direction of a smallest vector among three primitive translation vectors of the crystal structure.

Abstract: An exhaust pipe device according to an embodiment includes a pipe body; an internal electrode disposed in the pipe body; and a plasma generation circuit configured to generate plasma in the pipe body by using the internal electrode, wherein the exhaust pipe device is used as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump for exhausting an inside of the film forming chamber.

Abstract: A thermoelectric generator includes a perovskite dielectric substrate containing Sr and Ti and having electric conductivity by being doped to n-type; an energy filter formed on a top surface of the perovskite dielectric substrate, the energy filter including a first perovskite dielectric film, which contains Sr and Ti, has electric conductivity by being doped to n-type, and has a conduction band at an energy level higher than that of the perovskite dielectric substrate; a first electrode formed in electrical contact with a bottom surface of the perovskite dielectric substrate; and a second electrode formed in electrical contact with a top surface of the energy filter. The thermoelectric generator produces a voltage between the first and second electrodes by the top surface of the energy filter being exposed to a first temperature and the bottom surface of the perovskite dielectric substrate being exposed to a second temperature.

Abstract: A thermoelectric generator includes a perovskite dielectric substrate containing Sr and Ti and having electric conductivity by being doped to n-type; an energy filter formed on a top surface of the perovskite dielectric substrate, the energy filter including a first perovskite dielectric film, which contains Sr and Ti, has electric conductivity by being doped to n-type, and has a conduction band at an energy level higher than that of the perovskite dielectric substrate; a first electrode formed in electrical contact with a bottom surface of the perovskite dielectric substrate; and a second electrode formed in electrical contact with a top surface of the energy filter. The thermoelectric generator produces a voltage between the first and second electrodes by the top surface of the energy filter being exposed to a first temperature and the bottom surface of the perovskite dielectric substrate being exposed to a second temperature.

Abstract: A thermoelectric conversion element includes a film composed of a conductive oxide, a first electrode disposed on one end of the film composed of the conductive oxide, and a second electrode disposed on another end of the film composed of the conductive oxide, wherein the conductive oxide has a tetragonal crystal structure expressed by ABO3-x, where 0.1<x<1, wherein the conductive oxide has a band structure in which a Fermi level intersects seven bands between a ? point and an R point, and wherein the first electrode and the second electrode are disposed on the film composed of the conductive oxide so that electrical charge moves in a direction of a smallest vector among three primitive translation vectors of the crystal structure.

Abstract: There is provided a sensor system capable of being used semi-permanently in a maintenance-free state without exchanging batteries as well as being installed in an already-existing manhole lid by a simple work on the spot, and having a measurement unit, a power source unit, and a communication unit, and installed in a manhole lid, wherein the power source unit includes a thermoelectric power generation module configured to generate electric power by a difference in temperature between a first heat transfer unit thermally connected to the manhole lid and a second heat transfer unit thermally connected to a heat radiating unit within a manhole, and the measurement unit and the communication unit are driven by electric power generated by the thermoelectric power generation module and measurement data of the measurement unit is transmitted to the outside via the communication unit.

Abstract: A thermoelectric conversion element includes a film composed of a conductive oxide, a first electrode disposed on one end of the film composed of the conductive oxide, and a second electrode disposed on another end of the film composed of the conductive oxide, wherein the conductive oxide has a tetragonal crystal structure expressed by ABO3-x, where 0.1<x<1, wherein the conductive oxide has a band structure in which a Fermi level intersects seven bands between a ? point and an R point, and wherein the first electrode and the second electrode are disposed on the film composed of the conductive oxide so that electrical charge moves in a direction of a smallest vector among three primitive translation vectors of the crystal structure.

Abstract: A centrifugal compressor (1) that includes: an auxiliary bearing (7) which supports a shaft (2), which is supported by a magnetic bearing (6), when the shaft (2) is displaced from a reference position; and a stopper (8) that is provided only for a first auxiliary bearing (7a) among the first auxiliary bearing (7a) and a second auxiliary bearing (7b), that is fixed to the shaft (2), and that restricts a movement of the shaft (2) in both directions in an axial direction by the stopper (8) being brought into contact with the first auxiliary bearing (7a).

Abstract: A power generator includes layered-polymer piezoelectric element that is arranged on an object to be a heat source and a vibration source, and that generates electric power according to vibration transmitted from the object; a first heat conductor containing a flexible material that is arranged on the object, and that conducts heat from the object. The power generator includes a second heat conductor that is arranged on the first heat conductor and the layered-polymer piezoelectric element, and that conducts heat from the first heat conductor. Furthermore, the power generator includes a thermoelectric element that is arranged on the second heat conductor so as to be layered on the second heat conductor on the layered-polymer piezoelectric element, and that generates electric power according to inner temperature difference between temperature on a heat absorbing side obtained by the second heat conductor and temperature on a heat releasing side.

Abstract: There is provided a sensor system capable of being used semi-permanently in a maintenance-free state without exchanging batteries as well as being installed in an already-existing manhole lid by a simple work on the spot, and having a measurement unit, a power source unit, and a communication unit, and installed in a manhole lid, wherein the power source unit includes a thermoelectric power generation module configured to generate electric power by a difference in temperature between a first heat transfer unit thermally connected to the manhole lid and a second heat transfer unit thermally connected to a heat radiating unit within a manhole, and the measurement unit and the communication unit are driven by electric power generated by the thermoelectric power generation module and measurement data of the measurement unit is transmitted to the outside via the communication unit.

Abstract: Provided is a turbocompressor (4) having a drive part (12) generating rotational power, an impeller (22a) to which the rotational power of the drive part (12) is transmitted to rotate, a plurality of gears (31, 32) transmitting the rotational power of the drive part (12) to the impeller (22a), and a drive part casing (13) in which the drive part (12) is installed. This turbocompressor (4) includes an impeller casing (22e) installed around the impeller (22a), and a gear casing (33) configured to be formed independently of the impeller casing (22e) and the drive part casing (13), to couple the impeller casing (22e) and the drive part casing (13), and to form an accommodation space (33a) in which the plurality of gears (31, 32) are accommodated. With this configuration, in manufacturing the turbocompressor, a working process can be simplified and working labor and cost can be reduced.

Abstract: A turbo compressor that has a compression stage provided with an impeller that rotates; a housing provided with a gear unit accommodation space that accommodates lubricating oil and accommodates a large diameter gear that transmits rotating force to the impeller, an IGV accommodation space in which the ambient pressure is lower than the gear unit accommodation space, and a gap that brings the IGV accommodation space and the air intake side of a first compression stage into communication; a pressure equalizing tube that causes a gas to circulate from the gear unit accommodation space toward the IGV accommodation space; and a second oil separating device that separates, in the IGV accommodation space, the lubricating oil contained in the gas.

Abstract: A thermoelectric conversion device includes a perovskite film over a substrate and formed with first and second electrodes on the perovskite film, wherein the perovskite film includes a domain having a crystal orientation different from a crystal orientation of a crystal that constitutes the perovskite film.

Abstract: An impeller fastening structure includes a rotating shaft in which an attachment hole is formed on one end along an axis of the rotating shaft, an impeller in which a through hole is formed along an axis of the impeller, a tension bolt which is inserted into the through hole and in which one end is screwed to attachment hole, and a nut which is screwed to the other end of the tension bolt. The tension bolt includes a protruding portion which protrudes in a radial direction at an intermediate portion in a direction of an axis of the bolt, and the rotating shaft includes a receiving portion which comes into contact with a tapered surface the protruding portion on an opening peripheral edge of the attachment hole.