Abstract: Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.

Abstract: A tube spacer S formed by bending a wire, includes a plurality of projections 20 and a base-bending portion 21. Each of the projections 20 is inserted between tubes, and has a pair of extending portions 201 extend in X direction and a front-bending portion 202 for connecting both front ends of the pair of extending portions 201. The base-bending portion 21 connects both rear ends of the projections 20 so that the projections 20 are arranged at interval in Z direction. With this structure, manufacturing cost for the tube spacer S can be low, and the tubes can be stably supported.

Abstract: Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.

Abstract: A filtering integrated circuit comprises: a storing circuit; a filter coefficient calculating unit configured to receive frequency information that identifies a characteristic frequency of an output signal in a filtering process, and to set filter coefficients calculated based on the frequency information in the storing circuit; and a filtering unit configured to output the output signal after applying a filtering process to an inputted signal based on the filter coefficients set in the storing circuit.

Abstract: Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.

Abstract: Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.

Abstract: A heating apparatus 1 includes a shell 2, a primary heat exchanger (sensible heat exchanger) 3, a burner (combustion means) 5, and a fan 6. A secondary heat exchanger (latent heat exchanger) 7 has a plurality of heat receiving tubes 18 arranged in parallel between a pair of headers 16 and 17, the heat receiving tubes 18 being fixed to tube plates 20. The heat receiving tubes 18 are bare tubes without fins and are arranged across flow of combustion gas. The number of the tubes 18 arranged vertically is less than the number of the tubes 18 arranged horizontally.

Abstract: Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.

Abstract: A secondary heat exchanger B for recovering latent heat from combustion gas includes water tubes 5 each of which is so inclined that a first end 50a is positioned lower than a second end 50b. Therefore, in draining water from each of the water tubes 5, water can be caused to flow smoothly into a water-inflow and hot-water-outflow header 6A connected to the first ends 50a. The secondary heat exchanger B includes a casing 7 which includes an upper wall 70a and a bottom wall 70b which are so inclined that the inner surfaces thereof extend generally in parallel with the water tubes 5, and the upper and the lower gaps 79a and 79b have constant widths s2 and s3. Therefore, the amount of heat recovery from the combustion gas passing through the gaps 79a and 79b can be increased.

Abstract: A high temperature bolt material, characterized in that it is a ferrite steel comprising 8 wt % or more of Cr and having a tempered martensite structure and can be used in a high temperature region of higher than 500° C.; and a method for producing the high temperature bolt material which comprises subjecting the above-mentioned steel material to a heat treatment comprising a quenching or normalizing at a temperature of 1000° C. or higher and then to a tempering at a temperature of 730° C. or higher. The above ferrite steel high temperature bolt material is excellent in characteristics of the resistance to stress relaxation.

Abstract: A tube spacer S formed by bending a wire, includes a plurality of projections 20 and a base-bending portion 21. Each of the projections 20 is inserted between tubes, and has a pair of extending portions 201 extend in X direction and a front-bending portion 202 for connecting both front ends of the pair of extending portions 201. The base-bending portion 21 connects both rear ends of the projections 20 so that the projections 20 are arranged at interval in Z direction. With this structure, manufacturing cost for the tube spacer S can be low, and the tubes can be stably supported.

Abstract: A heating apparatus 1 includes a shell 2, a primary heat exchanger (sensible heat exchanger)3, a burner (combustion means) 5, and a fan 6. A secondary heat exchanger (latent heat exchanger) 7 has a plurality of heat receiving tubes 18 arranged in parallel between a pair of headers 16 and 17, the heat receiving tubes 18 being fixed to tube plates 20. The heat receiving tubes 18 are bare tubes without fins and are arranged across flow of combustion gas. The number of the tubes 18 arranged vertically is less than the number of the tubes 18 arranged horizontally.

Abstract: A filtering integrated circuit comprises: a storing circuit; a filter coefficient calculating unit configured to receive frequency information that identifies a characteristic frequency of an output signal in a filtering process, and to set filter coefficients calculated based on the frequency information in the storing circuit; and a filtering unit configured to output the output signal after applying a filtering process to an inputted signal based on the filter coefficients set in the storing circuit.

Abstract: A secondary heat exchanger B for recovering latent heat from combustion gas includes water tubes 5 each of which is so inclined that a first end 50a is positioned lower than a second end 50b. Therefore, in draining water from each of the water tubes 5, water can be caused to flow smoothly into a water-inflow and hot-water-outflow header 6A connected to the first ends 50a. The secondary heat exchanger B includes a casing 7 which includes an upper wall 70a and a bottom wall 70b which are so inclined that the inner surfaces thereof extend generally in parallel with the water tubes 5, and the upper and the lower gaps 79a and 79b have constant widths s2 and s3. Therefore, the amount of heat recovery from the combustion gas passing through the gaps 79a and 79b can be increased.

Abstract: A DA converter comprises a high-pass filter that outputs a multibit digital signal with a predetermined frequency or lower thereof attenuated if a signal level of the input multibit digital signal is less than a predetermined threshold, the high-pass filter outputting the multibit digital signal without attenuation if the signal level is at the threshold or higher; a ?? modulator that performs ?? modulation of the signal output from the filter unit; a dynamic element matching circuit that divides the signal output from the ?? modulator to a plurality of signals; and a plurality of internal DA converters that convert the plurality of signals output from the dynamic element matching circuit to an analog signal.

Abstract: A machine translation apparatus includes a identification information detection unit that detects information identifiable to a designated object; a receiving unit that receives a source language sentence; a word dividing unit that divides the source language sentence into a plurality of first word by morphological analysis; a deixis detection unit that detects, from the divided word, a deixis indicating the object directly; a correspondence setting unit that sets the identification information of the designated object and the deixis in correspondence with each other; a semantic class determining unit that determines the semantic class indicating a semantic attribute of the designated objectbased on the identification information of the designated object corresponding to the deixis; and a translation unit that translates the source language sentence where the deixis is attached the attribute having the semantic class of the designated object.

Abstract: A DA converter comprises a high-pass filter that outputs a multibit digital signal with a predetermined frequency or lower thereof attenuated if a signal level of the input multibit digital signal is less than a predetermined threshold, the high-pass filter outputting the multibit digital signal without attenuation if the signal level is at the threshold or higher; a ?? modulator that performs ?? modulation of the signal output from the filter unit; a dynamic element matching circuit that divides the signal output from the ?? modulator to a plurality of signals; and a plurality of internal DA converters that convert the plurality of signals output from the dynamic element matching circuit to an analog signal.

Abstract: A printing device of the present invention includes a printing head for carrying out a printing operation on one side of a surface of a disk, such as a CD-R medium, and arranged such that the printing operation is performed on the disk as the disk and the printing head are relatively shifted by the rotation of the disk.

Abstract: The invention provides a ferritic heat-resistant steel having excellent high-temperature oxidation resistance, especially excellent steam oxidation-resistant characteristics. In high-Cr ferritic heat-resistant steel, ultra-fine oxide particles having a size of not larger than 1 ?m are formed just below the oxide films and formed on the steel base, whereby the adhesiveness between the films and the base is enhanced. The ferritic heat-resistant steel contains Cr in an amount of from 8.0 to 13.0% by weight, and at least one of Rh and Ir in a total amount of from 0.3 to 5.0% by weight.

Abstract: The present invention provides a process for producing an intermediate for thienopyrimidine derivatives having the GnRH antagonistic activity at an industrial large scale. The process for production of the present invention relates to a process for producing a compound represented by the formula (III): wherein respective symbols have the same meanings as those described below, or a salt thereof, which comprises subjecting a compound represented by the formula (I): wherein R1 denotes hydrogen, nitro, halogen, phthalimido, mono- or di-(alkylcarbonyl)amino or alkoxy, or a salt thereof, to an acid halogenating reaction, which is successively reacted with malonic acid ester and magnesium alkoxide, treated with an acid, and reacted with sulfur and a compound represented by the formula: NCCH2COOR2 [wherein R2 denotes alkyl or aryl], or a salt thereof, in the presence of primary amine.