Abstract: A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.

Abstract: An interface apparatus is disposed between a processing unit for performing varied treatments on substrates before and after exposure of the substrates, and an exposure unit for performing the exposure. The interface apparatus includes first and second substrate transfer robots, and a substrate storage having a plurality of storage racks for storing a plurality of substrates. The first substrate transfer robot transfer substrates between the processing unit and substrate storage while the second substrate transfer robot transfers substrates between the substrate storage and exposure unit. Each of the robots is operable independently of and parallel to the other robot. The first transfer robot may be omitted, and when it is so omitted, a substrate transport robot in the processing unit performs the functions of the first transfer robot.

Abstract: The present invention relates to a phase-change type optical disk comprising a transparent substrate; a recording layer arranged on the transparent substrate wherein a phase-change occurs between crystalline state and amorphous state according to laser power irradiation; and protective layers arranged on and directly under the recording layer; the composition of the recording layer being represented by the general formula (Sb.sub.a Te.sub.b Ge.sub.c).sub.100-d .cndot.S.sub.d, wherein 5.ltoreq.a.ltoreq.60, 35.ltoreq.b.ltoreq.65, 5.ltoreq.c.ltoreq.65, a+b+c=100 and 0<d.ltoreq.40, and/or one or both of the protective layers comprising a mixture of Zn.sub.(1-x) S.sub.x wherein 0.50<x and one or more oxides, nitrides, fluorides, carbides and sulfides of metals or semimetals (proviso provided that sulfides are excluded when the metal is Zinc). The optical disk of the present invention is improved in a cyclability, i.e.

Abstract: An IC measuring method including positioning a plurality of ICS, each having a plurality of circuit blocks performing different functions, selecting different circuit blocks in each of the plurality of ICs, measuring the test results from each of the selected circuit blocks, and selecting a different circuit block in each of the plurality of ICs for the next measurement. The circuit block selection is controlled by a matrix circuit or by physically shifting the positions of the ICs.

Abstract: A semiconductor integrated circuit device includes individual circuit blocks which are tested according to the method of the invention. Circuit blocks of a semiconductor integrated circuit device may be tested independently of one another until all circuit blocks have been tested, or alternatively may be simultaneously tested. The multi-test method of the invention simultaneously tests plural semiconductor integrated circuit devices by successively testing corresponding circuit blocks on each semiconductor integrated circuit device. The test apparatus of the present invention is of minimal size and complexity, and greatly enhances testability of a semiconductor integrated circuit device.

Abstract: A method for casting pneumatic tires by pouring a fluidized tire-forming material into a molding cavity defined between the outer peripheral surface of a separable hard core of a mold assembly and the inner peripheral surface of an outer separable hard mold member of the mold assembly. The separable hard core is composed of at least three segments and toroidal in shape. At least one segment of the separable core is retracted in a radial direction and then moved in a direction which does not hinder retractive movement of the remaining segments and subsequently these remaining segments are retracted in the radial direction, whereby the cast tire can easily be removed from the mold assembly.

Abstract: A method of and apparatus for casting pneumatic tires by pouring a fluidized tire-forming material into a molding cavity defined between the outer peripheral surface of a separable hard core of a mold assembly and the inner peripheral surface of an outer separable hard mold member of the mold assembly. The separable hard core is composed of at least three segments and toroidal in shape. At least one segment of the separable core guidingly is retracted in a radial direction and then moved in a direction which does not hinder retractive movement of the remaining segments and subsequently these remaining segments are retracted in the radial direction, whereby the cast tire can easily be removed from the mold assembly.