Patents by Inventor Kazuhiro Nojima

Kazuhiro Nojima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8552372
    Abstract: A crystal material lattice strain evaluation method includes illuminating a sample having a crystal structure with an electron beam in a zone axis direction, and selectively detecting a certain diffracted wave diffracted in a certain direction among a plurality of diffracted waves diffracted by the sample. The method further includes repeating the illuminating step and the selectively detecting step while scanning the sample, and obtaining a strain distribution image in a direction corresponding to the certain diffracted wave from diffraction intensity at each point of the sample.
    Type: Grant
    Filed: May 18, 2012
    Date of Patent: October 8, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Kazuhiro Nojima
  • Patent number: 8531010
    Abstract: A semiconductor structure may include, but is not limited to: a semiconductor substrate; a first semiconductor structure extending upwardly over the semiconductor substrate; and a second semiconductor structure extending upwardly over the semiconductor substrate, the first and second semiconductor structures being aligned in a first <100> direction.
    Type: Grant
    Filed: November 3, 2010
    Date of Patent: September 10, 2013
    Assignee: Elpida Memory, Inc.
    Inventors: Kiyonori Oyu, Kazuhiro Nojima
  • Patent number: 8486808
    Abstract: A method of manufacturing a semiconductor device includes forming a gate electrode material that covers a gate insulating film formed on each of side surfaces of first and second silicon pillars, wherein a film formation amount of the gate electrode material is controlled so that a first part with which the side surface of the first silicon pillar is covered via the gate insulating film does not contact with a second part with which the side surface of the second silicon pillar is covered via the gate insulating film. The method further includes: forming a mask insulating film that covers the first and second parts and fills a region between the first and second parts; and etching the gate electrode material using the mask insulating film as a mask, thereby forming gate electrodes with which the side surfaces of the first and second silicon pillars are covered via the gate insulating film, respectively and a conductive film electrically connecting the gate electrodes to each other.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: July 16, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Kazuhiro Nojima
  • Patent number: 8421146
    Abstract: A semiconductor device includes: a semiconductor substrate; a silicon pillar provided perpendicularly to a main surface of the semiconductor substrate; a gate dielectric film that covers a portion of a side surface of the silicon pillar; an insulator pillar that covers remaining portions of the side surface of the silicon pillar; a gate electrode that covers the silicon pillar via the gate dielectric film and the insulator pillar; an interlayer dielectric film provided above the silicon pillar, the gate dielectric film, the insulator pillar, and the gate electrode; and a gate contact plug embedded in a contact hole provided in the interlayer dielectric film, and in contact with the gate electrode and the insulator pillar. A film thickness of the insulator pillar in a lateral direction is thicker than a film thickness of the gate dielectric film in a lateral direction.
    Type: Grant
    Filed: April 10, 2012
    Date of Patent: April 16, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Kazuhiro Nojima
  • Patent number: 8415738
    Abstract: To provide a semiconductor memory device comprising a plurality of silicon pillars arranged in a matrix, whose sidewalls are provided with gate electrodes with gate insulating films interposed between the silicon pillars and the gate electrodes and whose top ends are electrically connected to memory elements, and a bit line and a word line provided between the silicon pillars so as to be orthogonal to each other. The bit line is electrically connected to a bottom end of the silicon pillars on both sides of the bit line in alternate rows, and the word line is electrically connected to a gate electrode formed on a sidewall of the silicon pillars on both sides of the word line in alternate columns.
    Type: Grant
    Filed: March 18, 2010
    Date of Patent: April 9, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Kazuhiro Nojima
  • Publication number: 20130023095
    Abstract: A semiconductor pillar which has a first conductive type and protrudes from a semiconductor substrate, is formed. A bottom diffusion layer having a second conductive type is formed in the semiconductor substrate around a bottom of the semiconductor pillar. A gate insulator film which covers a side surface of the semiconductor pillar, is formed. A gate electrode which covers the gate insulator film, is formed. A top diffusion layer having the second conductive type is formed at a top portion of the semiconductor pillar. The top diffusion layer including a semiconductor body is formed by an epitaxial growth which contains an impurity.
    Type: Application
    Filed: July 19, 2012
    Publication date: January 24, 2013
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Kazuhiro NOJIMA
  • Publication number: 20120292504
    Abstract: A crystal material lattice strain evaluation method includes illuminating a sample having a crystal structure with an electron beam in a zone axis direction, and selectively detecting a certain diffracted wave diffracted in a certain direction among a plurality of diffracted waves diffracted by the sample. The method further includes repeating the illuminating step and the selectively detecting step while scanning the sample, and obtaining a strain distribution image in a direction corresponding to the certain diffracted wave from diffraction intensity at each point of the sample.
    Type: Application
    Filed: May 18, 2012
    Publication date: November 22, 2012
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Kazuhiro NOJIMA
  • Publication number: 20120193704
    Abstract: A semiconductor device includes: a semiconductor substrate; a silicon pillar provided perpendicularly to a main surface of the semiconductor substrate; a gate dielectric film that covers a portion of a side surface of the silicon pillar; an insulator pillar that covers remaining portions of the side surface of the silicon pillar; a gate electrode that covers the silicon pillar via the gate dielectric film and the insulator pillar; an interlayer dielectric film provided above the silicon pillar, the gate dielectric film, the insulator pillar, and the gate electrode; and a gate contact plug embedded in a contact hole provided in the interlayer dielectric film, and in contact with the gate electrode and the insulator pillar. A film thickness of the insulator pillar in a lateral direction is thicker than a film thickness of the gate dielectric film in a lateral direction.
    Type: Application
    Filed: April 10, 2012
    Publication date: August 2, 2012
    Applicant: Elpida Memory, Inc.
    Inventor: Kazuhiro NOJIMA
  • Publication number: 20120161219
    Abstract: a semiconductor device is provided, which includes an N well having a peak concentration of 2E+17 atom/cm3 or more in the range of 0.2 to 1 ?m depth from the surface of a P-type semiconductor substrate, and a region provided below the N well, the region containing P-type impurities with higher concentration than concentration of electrons.
    Type: Application
    Filed: December 22, 2011
    Publication date: June 28, 2012
    Applicant: ELPIDA MEMORY, INC.
    Inventors: Kensuke OKONOGI, Kazuhiro NOJIMA, Kiyonori OYU
  • Patent number: 8174068
    Abstract: A semiconductor device includes: a semiconductor substrate; a silicon pillar provided perpendicularly to a main surface of the semiconductor substrate; a gate dielectric film that covers a portion of a side surface of the silicon pillar; an insulator pillar that covers remaining portions of the side surface of the silicon pillar; a gate electrode that covers the silicon pillar via the gate dielectric film and the insulator pillar; an interlayer dielectric film provided above the silicon pillar, the gate dielectric film, the insulator pillar, and the gate electrode; and a gate contact plug embedded in a contact hole provided in the interlayer dielectric film, and in contact with the gate electrode and the insulator pillar. A film thickness of the insulator pillar in a lateral direction is thicker than a film thickness of the gate dielectric film in a lateral direction.
    Type: Grant
    Filed: July 8, 2010
    Date of Patent: May 8, 2012
    Assignee: Elpida Memory, Inc.
    Inventor: Kazuhiro Nojima
  • Patent number: 8158502
    Abstract: A method of manufacturing a semiconductor device includes forming silicon pillar 11 on substrate 10, forming a protective film which covers an upper end portion and a lower end portion of a side surface of silicon pillar 11, forming a constricted portion by anisotropic etching in a portion of the side surface of silicon pillar 11 which is not covered with the protective film after forming the protective film, removing the protective film after forming the constricted portion, forming gate oxide film 12 which covers the side surface of silicon pillar 11 in which the constricted portion is formed, and forming gate electrode 13 which covers gate oxide film 12.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: April 17, 2012
    Assignee: Elpida Memory, Inc.
    Inventor: Kazuhiro Nojima
  • Publication number: 20120032256
    Abstract: A semiconductor device includes a first island and a first electrode. The first island includes a first semiconductor region, a first insulation region, and a first insulating film. The first semiconductor region has first and second side surfaces adjacent to the first insulation region and the first insulating film, respectively. The first electrode is adjacent to the first insulation region and the first insulating film. The first insulating film is between the first electrode and the first semiconductor region.
    Type: Application
    Filed: July 28, 2011
    Publication date: February 9, 2012
    Applicant: ELPIDA MEMORY, INC.
    Inventors: YOSHIHIRO TAKAISHI, KAZUHIRO NOJIMA
  • Publication number: 20120025286
    Abstract: A method of manufacturing a semiconductor device includes forming silicon pillar 11 on substrate 10, forming a protective film which covers an upper end portion and a lower end portion of a side surface of silicon pillar 11, forming a constricted portion by anisotropic etching in a portion of the side surface of silicon pillar 11 which is not covered with the protective film after forming the protective film, removing the protective film after forming the constricted portion, forming gate oxide film 12 which covers the side surface of silicon pillar 11 in which the constricted portion is formed, and forming gate electrode 13 which covers gate oxide film 12.
    Type: Application
    Filed: October 12, 2011
    Publication date: February 2, 2012
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Kazuhiro NOJIMA
  • Publication number: 20120001256
    Abstract: A semiconductor device includes: a first insulator pillar surrounding an active region; a second insulator pillar with a second side surface opposed in a y direction to a first side surface of the first insulator pillar on the active region side; an insulating film covering top surfaces of first and second insulator pillars; a second gate electrode electrically connected to the first gate electrode, covering at least the first and second side surfaces; and a gate contact plug in a contact hole and electrically connected to a top surface of the second gate electrode, the insulating film and the second gate electrode being exposed in a bottom of the contact hole. A distance between first and second side surfaces<a length of the gate contact plug in the y direction. The gate contact plug is electrically connected to the second gate electrodes between the first and second side surfaces.
    Type: Application
    Filed: June 27, 2011
    Publication date: January 5, 2012
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Kazuhiro NOJIMA
  • Publication number: 20110266615
    Abstract: A semiconductor structure may include, but is not limited to: a semiconductor substrate; a first semiconductor structure extending upwardly over the semiconductor substrate; and a second semiconductor structure extending upwardly over the semiconductor substrate, the first and second semiconductor structures being aligned in a first <100> direction.
    Type: Application
    Filed: November 3, 2010
    Publication date: November 3, 2011
    Applicant: ELPIDA MEMORY, INC
    Inventors: Kiyonori OYU, Kazuhiro NOJIMA
  • Publication number: 20110263099
    Abstract: A method of manufacturing a semiconductor device includes forming a gate electrode material that covers a gate insulating film formed on each of side surfaces of first and second silicon pillars, wherein a film formation amount of the gate electrode material is controlled so that a first part with which the side surface of the first silicon pillar is covered via the gate insulating film does not contact with a second part with which the side surface of the second silicon pillar is covered via the gate insulating film. The method further includes: forming a mask insulating film that covers the first and second parts and fills a region between the first and second parts; and etching the gate electrode material using the mask insulating film as a mask, thereby forming gate electrodes with which the side surfaces of the first and second silicon pillars are covered via the gate insulating film, respectively and a conductive film electrically connecting the gate electrodes to each other.
    Type: Application
    Filed: April 20, 2011
    Publication date: October 27, 2011
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Kazuhiro Nojima
  • Patent number: 8022872
    Abstract: A positioning receiver in which the circuit configuration of the receiving system corresponding to a plurality of positioning systems can be simplified and the current consumption and circuit size of which can be reduced. A positioning receiver (100) comprises first low-pass filters (111, 121) which limit outputs of a first signal mixer (103) and a second signal mixer (104) to a first bandwidth, and second low-pass filters (112, 122) which are provided on the output side of the first low-pass filters (111, 121) and limit the outputs of the first low-pass filters (111, 121) to a second bandwidth narrower than the first bandwidth and sets the filter bandwidth of the first low-pass filters (111, 121) greater than that of the second low-pass filters (112, 122).
    Type: Grant
    Filed: March 7, 2007
    Date of Patent: September 20, 2011
    Assignee: Panasonic Corporation
    Inventors: Hiroshi Katayama, Akifumi Miyano, Hirofumi Yoshida, Kei Murayama, Kazuhiro Nojima
  • Publication number: 20110012193
    Abstract: A semiconductor device includes: a semiconductor substrate; a silicon pillar provided perpendicularly to a main surface of the semiconductor substrate; a gate dielectric film that covers a portion of a side surface of the silicon pillar; an insulator pillar that covers remaining portions of the side surface of the silicon pillar; a gate electrode that covers the silicon pillar via the gate dielectric film and the insulator pillar; an interlayer dielectric film provided above the silicon pillar, the gate dielectric film, the insulator pillar, and the gate electrode; and a gate contact plug embedded in a contact hole provided in the interlayer dielectric film, and in contact with the gate electrode and the insulator pillar. A film thickness of the insulator pillar in a lateral direction is thicker than a film thickness of the gate dielectric film in a lateral direction.
    Type: Application
    Filed: July 8, 2010
    Publication date: January 20, 2011
    Inventor: Kazuhiro Nojima
  • Publication number: 20100314671
    Abstract: A semiconductor device includes a semiconductor substrate, and an extending semiconductor portion that extends vertically from the semiconductor substrate. The extending semiconductor portion has a side surface which comprises four main surfaces of {100} face and four sub-surfaces of {110} face. The four sub-surfaces are smaller in area than the four main surfaces.
    Type: Application
    Filed: June 9, 2010
    Publication date: December 16, 2010
    Applicant: ELPIDA MEMORY, INC.
    Inventors: Kiyonori Oyu, Kazuhiro Nojima
  • Publication number: 20100248668
    Abstract: A positioning receiver and a positioning method for user equipment in which errors in the position when the position of the user equipment is calculated can be reduced even in an environment in which the user equipment moves at high speed to improve the accuracy of the position. User equipment (UE) (100) calculates the Doppler shift amount of the pseudo distance data and carrier wave between base stations (BS-1, BS-2, BS-3,& mldr;) on the basis of the communication between the base stations (BS-1, BS-2, BS-3, & mldr;) and calculates a position coordinate from the pseudo distance data between the base stations (BS-1, BS-2, BS-3, & mldr;), provided that the pseudo distance data obtained between the base stations in which the calculated Doppler shift amount is larger than a reference value is not used for the calculation of the position coordinate.
    Type: Application
    Filed: October 26, 2007
    Publication date: September 30, 2010
    Applicant: PANASONIC CORPORATION
    Inventors: Hiroshi Katayama, Akifumi Miyano, Hirofumi Yoshida, Kei Murayama, Kazuhiro Nojima