Abstract: A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.

Abstract: An actuator includes: a casing; a pressure reducing valve and a piston. The pressure reducing valve is provided in the casing to reduce a pressure of a driving fluid supplied from an outside of the casing to a predetermined level. The piston is provided in the casing to form a pressure chamber together with the casing. The piston is driven by the driving fluid that has been pressure-reduced to the predetermined level.

Abstract: A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.

Abstract: A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.

Abstract: Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.

Abstract: A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.

Abstract: A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.

Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.

Abstract: A valve device is made more compact and has improved yield strength against a bending moment. The problem is solved by a valve device including a valve body having a block shape, a casing having a tubular shape, incorporating a drive mechanism that drives a valve element that opens and closes the flow path, connected to the valve body, and extending upward from an upper surface of the valve body, and a protective member that comes into contact with the casing having a tubular shape and the valve body, and is for suppressing a stress concentration that occurs between a casing member positioned on a base portion of a casing and the valve body when a bending moment acts as an external force on the casing.

Abstract: To provide a manual valve device suitable for a miniaturized and integrated fluid control system, the manual valve device includes a casing having a tubular shape and incorporating a drive mechanism, an operation member for activating the drive mechanism, and a cam part that converts a force acting on the operation member into a driving force of the drive mechanism. The manual valve device further includes a protective cover provided on an upper end side of the casing and covering at least a portion of the operation member. The operation member includes an attaching part that allows removable attaching of an auxiliary tool for causing a force required for activation of the drive mechanism to act on the operation member. The protective cover is formed so as to allow access to the attaching part of the operation member by the auxiliary tool.

Abstract: A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.

Abstract: A pipe joint includes a first member, a second member, a weld experiencing transverse contraction and joining a first outer cylindrical end portion and a second outer cylindrical end portion butted with their end faces meeting over the entire circumference, an annular sealed area produced by the transverse contraction of the weld causing a first pressing portion and a second pressing portion to be displaced toward each other, a heat transmission suppressing member arranged in a space delimited by a weld forming area and a to-be-sealed area, inside the first and second members assembled, to suppress transmission of heat applied in welding from the weld forming area to a to-be-sealed area, and a first stop ring fitted in an outer cylindrical surface of the heat transmission suppressing member to hold the heat transmission suppressing member against an inner surface of the first or the second member.

Abstract: A joint block includes a block body, a closing member mounted in a recessed part formed on the other end side of the block body, a seal mechanism that includes a circular projection formed on an opposing surface of the block body, and seals an area between the block body and the closing member by the circular projection biting into the other opposing surface around an opening of a first flow path, a swaging part that is formed on the block body and presses the closing member toward the opposing surface, and an engaging part formed by an inner peripheral part of the recessed part and an outer peripheral part of the closing member that engages with the inner peripheral part. A pressing force that presses the circular projection of the seal mechanism against the other opposing surface is shared by the swaging part and the engaging part.

Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.

Abstract: An actuator includes: a casing; a pressure reducing valve and a piston. The pressure reducing valve is provided in the casing to reduce a pressure of a driving fluid supplied from an outside of the casing to a predetermined level. The piston is provided in the casing to form a pressure chamber together with the casing. The piston is driven by the driving fluid that has been pressure-reduced to the predetermined level.

Abstract: A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

Abstract: A method of forming a pipe joint includes: preparing a first pipe member, a second pipe member, a casing, and a pressing member to be arranged in the casing to press a second flange portion of the second pipe member against a first flange portion of the first pipe member, the casing having a first opening, a second opening, a third opening, a flange receiving space, and a receiving space in communication with the flange receiving space and adapted to receive the pressing member; inserting the first pipe member from the second opening toward the first opening until the first flange portion comes to rest within the flange receiving space; inserting the second pipe member into the second opening with the second flange portion ahead until the second flange portion comes into contact with the first flange portion.

Abstract: Provided is a flow rate adjustment valve of a motor-operated valve type, which overcomes the problems that flow rate adjustment valves of a manual valve type have, while making full use of compactness the manual valves have. The flow rate adjustment valve includes a rotation device that rotates a rotation member to cause a vertically movable body to move vertically. The rotation device includes: a driven gear disposed at an upper end portion of the rotation member; and a motor that rotates a driving gear engaged with the driven gear. The motor, which is a stepping servo motor, is disposed below the driving gear and has a rotary shaft extending upward. The driving gear is fixed to an upper end portion of the rotary shaft.

Abstract: A pipe joint includes a first member, a second member, a weld experiencing transverse contraction and joining a first outer cylindrical end portion and a second outer cylindrical end portion butted with their end faces meeting over the entire circumference, an annular sealed area produced by the transverse contraction of the weld causing a first pressing portion and a second pressing portion to be displaced toward each other, a heat transmission suppressing member arranged in a space delimited by a weld forming area and a to-be-sealed area, inside the first and second members assembled, to suppress transmission of heat applied in welding from the weld forming area to a to-be-sealed area, and a first stop ring fitted in an outer cylindrical surface of the heat transmission suppressing member to hold the heat transmission suppressing member against an inner surface of the first or the second member.