Patents by Inventor Kazuya Sawada
Kazuya Sawada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10170691Abstract: Provided is a method for fabricating an electronic device including a variable resistance element which includes a free layer formed over a substrate and having a changeable magnetization direction, a pinned layer having a pinned magnetization direction, a tunnel barrier layer interposed between the free layer and the pinned layer, and a magnetic correction layer suitable for reducing the influence of a stray field generated by the pinned layer. The method may include: cooling the substrate; and forming the magnetic correction layer over the cooled substrate.Type: GrantFiled: June 20, 2016Date of Patent: January 1, 2019Assignees: SK Hynix Inc., TOSHIBA MEMORY CORPORATIONInventors: Jong-Koo Lim, Won-Joon Choi, Guk-Cheon Kim, Yang-Kon Kim, Ku-Youl Jung, Toshihiko Nagase, Youngmin Eeh, Daisuke Watanabe, Kazuya Sawada, Makoto Nagamine
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Patent number: 10103318Abstract: According to one embodiment, there is provided a magnetoresistive element, including a first magnetic layer, a nonmagnetic layer on the first magnetic layer, and a second magnetic layer on the nonmagnetic layer, wherein one of the first and second magnetic layers include one of Co and Fe, and a material having a higher standard electrode potential than Co and Fe.Type: GrantFiled: September 12, 2016Date of Patent: October 16, 2018Assignees: TOSHIBA MEMORY CORPORATION, SK HYNIX, INC.Inventors: Daisuke Watanabe, Yang Kon Kim, Makoto Nagamine, Youngmin Eeh, Koji Ueda, Toshihiko Nagase, Kazuya Sawada, Guk Cheon Kim, Bo Mi Lee, Won Joon Choi
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Publication number: 20180284199Abstract: An electronic device may include a semiconductor memory, and the semiconductor memory may include a free layer having a variable magnetization direction; a pinned layer having a pinned magnetization direction; and a tunnel barrier layer between the free layer and the pinned layer, wherein the free layer may include a first magnetic layer; a second magnetic layer having a smaller perpendicular magnetic anisotropy energy density than the first magnetic layer; and a spacer interposed between the first magnetic layer and the second magnetic layer.Type: ApplicationFiled: December 14, 2017Publication date: October 4, 2018Inventors: Ku-Youl JUNG, Guk-Cheon KIM, Toshihiko NAGASE, Daisuke WATANABE, Won-Joon CHOI, Youngmin EEH, Kazuya SAWADA
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Patent number: 10090459Abstract: A magnetoresistive element includes a storage layer as a ferromagnetic layer which has magnetic anisotropy perpendicular to film planes, and in which a magnetization direction is variable, a reference layer as a ferromagnetic layer which has magnetic anisotropy perpendicular to film planes, and in which a magnetization direction is invariable, a tunnel barrier layer as a nonmagnetic layer formed between the storage layer and the reference layer, and a first underlayer formed on a side of the storage layer, which is opposite to a side facing the tunnel barrier layer, and containing amorphous W.Type: GrantFiled: January 3, 2017Date of Patent: October 2, 2018Assignee: TOSHIBA MEMORY CORPORATIONInventors: Daisuke Watanabe, Youngmin Eeh, Kazuya Sawada, Koji Ueda, Toshihiko Nagase
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Publication number: 20180277745Abstract: According to one embodiment, a magnetic memory device includes a magnetoresistive element, the magnetoresistive element including a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction and a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer. The first magnetic layer includes first and second sub-magnetic layers each containing at least iron (Fe) and boron (B), and a concentration of boron (B) contained in the first sub-magnetic layer is different from a concentration of boron (B) contained in the second sub-magnetic layer.Type: ApplicationFiled: September 12, 2017Publication date: September 27, 2018Applicants: TOSHIBA MEMORY CORPORATION, SK HYNIX INC.Inventors: Tadaaki OIKAWA, Toshihiko NAGASE, Youngmin EEH, Daisuke WATANABE, Kazuya SAWADA, Kenichi YOSHINO, Hiroyuki OHTORI, Yang Kon KIM, Ku Youl JUNG, Jong Koo LIM, Jae Hyoung LEE, Soo Man SEO, Sung Woong CHUNG, Tae Young LEE
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Publication number: 20180269043Abstract: According to one embodiment, a film formation method using a magnetron sputtering apparatus including first and second magnets provided on first and second target holders, includes forming an insulating film on a wafer placed on a main surface of a wafer stage by sputtering first and second insulating targets set on the first and second target holders, wherein the wafer includes an effective area to be used for a product and an ineffective area outside the effective area, and when viewed from a direction perpendicular to the main surface of the wafer stage, at least a part of the first magnet overlaps the effective area of the wafer placed on the main surface of the wafer stage, and the entire second magnet does not overlap the effective area of the wafer placed on the main surface of the wafer stage.Type: ApplicationFiled: September 14, 2017Publication date: September 20, 2018Applicant: TOSHIBA MEMORY CORPORATIONInventors: Koji UEDA, Koji YAMAKAWA, Toshihiko NAGASE, Youngmin EEH, Kazuya SAWADA
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Publication number: 20180205006Abstract: A magnetoresistive memory device includes a first magnetic layer having a variable magnetization direction; a second magnetic layer, a magnetization direction of the second magnetic layer being invariable; a first nonmagnetic layer provided between the first magnetic layer and the second magnetic layer; and a second nonmagnetic layer provided on the first magnetic layer, which is opposite the first nonmagnetic layer. The first magnetic layer having a stacked layer structure in which amorphous magnetic material layer is sandwiched between crystalline magnetic material layers.Type: ApplicationFiled: March 12, 2018Publication date: July 19, 2018Applicant: TOSHIBA MEMORY CORPORATIONInventors: Daisuke WATANABE, Toshihiko NAGASE, Youngmin EEH, Kazuya SAWADA, Makoto NAGAMINE, Tadaaki OIKAWA, Kenichi YOSHINO, Hiroyuki OHTORI
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Patent number: 10026891Abstract: A magnetoresistive element including a first magnetic layer; a first nonmagnetic layer provided on the first magnetic layer, the first nonmagnetic layer formed of SrTiO3, SrFeO3, LaAlO3, NdCoO3, or BN; and a second magnetic layer provided on the first nonmagnetic layer, wherein the first nonmagnetic layer is lattice-matched to the first magnetic layer, and the second magnetic layer is lattice-matched to the first nonmagnetic layer.Type: GrantFiled: June 30, 2016Date of Patent: July 17, 2018Assignee: TOSHIBA MEMORY CORPORATIONInventors: Toshihiko Nagase, Tadashi Kai, Youngmin Eeh, Koji Ueda, Daisuke Watanabe, Kazuya Sawada, Hiroaki Yoda
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Patent number: 9991313Abstract: According to one embodiment, a magnetic memory includes a first magnetic layer, a second magnetic layer, a non-magnetic intermediate layer provided between the first magnetic layer and the second magnetic layer and an underlying layer provided on an opposite side of the first magnetic layer with respect to the intermediate layer, and the underlying layer contains AlN of a hcp structure.Type: GrantFiled: March 12, 2015Date of Patent: June 5, 2018Assignees: TOSHIBA MEMORY CORPORATION, SK HYNIX, INC.Inventors: Daisuke Watanabe, Makoto Nagamine, Youngmin Eeh, Koji Ueda, Toshihiko Nagase, Kazuya Sawada, Yang Kon Kim, Bo Mi Lee, Guk Cheon Kim, Won Joon Choi, Ki Seon Park
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Patent number: 9947859Abstract: An electronic device that includes a first structure including a first magnetic layer, a second magnetic layer, and a tunnel barrier layer which is interposed between the first magnetic layer and the second magnetic layer; and a second structure disposed over the first structure, and including a magnetic correction layer for correcting a magnetic field of the first structure, wherein a width of a bottom surface of the second structure is larger than a width of a top surface of the first structure.Type: GrantFiled: December 3, 2014Date of Patent: April 17, 2018Assignees: SK Hynix Inc., TOSHIBA MEMORY CORPORATIONInventors: Cha-Deok Dong, Daisuke Watanabe, Kazuya Sawada, Young-Min Eeh, Koji Ueda, Toshihiko Nagase
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Patent number: 9947862Abstract: According to one embodiment, a magnetoresistive memory device includes a first magnetic layer in which a magnetization direction is variable, a first nonmagnetic layer provided on the first magnetic layer, a second magnetic layer provided on the first nonmagnetic layer, a magnetization direction of the second magnetic layer being invariable, and a second nonmagnetic layer provided on the first magnetic layer, which is opposite the first nonmagnetic layer. The first magnetic layer includes Mo.Type: GrantFiled: September 16, 2016Date of Patent: April 17, 2018Assignee: TOSHIBA MEMORY CORPORATIONInventors: Daisuke Watanabe, Toshihiko Nagase, Youngmin Eeh, Kazuya Sawada, Makoto Nagamine, Tadaaki Oikawa, Kenichi Yoshino, Hiroyuki Ohtori
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Publication number: 20180076262Abstract: According to one embodiment, a semiconductor device includes a first rare earth oxide layer, a first magnetic layer being adjacent to the first rare earth oxide layer, and a nonmagnetic layer, the first magnetic layer being disposed between the first rare earth oxide layer and the nonmagnetic layer and being oriented in a crystal surface which is the same as a crystal surface of the nonmagnetic layer.Type: ApplicationFiled: February 28, 2017Publication date: March 15, 2018Applicant: TOSHIBA MEMORY CORPORATIONInventors: Youngmin EEH, Toshihiko NAGASE, Daisuke WATANABE, Kazuya SAWADA, Kenichi YOSHINO, Tadaaki OIKAWA, Hiroyuki OHTORI
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Publication number: 20180076383Abstract: According to one embodiment, a magnetic memory device includes a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer between the first and second magnetic layers. The second magnetic layer includes a first main surface on the nonmagnetic layer side and a second main surface opposite to the first main surface, and includes a first region on the first main surface side and a second region on the second main surface side, and an intermediate region between the first and second regions and containing a predetermined nonmagnetic element. A concentration of the predetermined nonmagnetic element in the intermediate region is higher than that in the first and second regions. The second magnetic layer contains a magnetic element from the first to second main surfaces.Type: ApplicationFiled: March 20, 2017Publication date: March 15, 2018Applicant: TOSHIBA MEMORY CORPORATIONInventors: Kazuya SAWADA, Toshihiko NAGASE, Youngmin EEH, Daisuke WATANABE, Kenichi YOSHINO, Tadaaki OIKAWA, Hiroyuki OHTORI
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Publication number: 20180075895Abstract: According to one embodiment, a memory device includes: a magnetoresistive element including first and second magnetic layers and a non-magnetic layer provided between the first and second magnetic layers; and a write circuit which controls a first writing setting magnetization of the first and second magnetic layers in a parallel state and a second writing setting the magnetization of the first and second magnetic layers in an antiparallel state, and applies a current pulse to the magnetoresistive element. A first pulse pattern used in the first writing is different from a second pulse pattern used in the second writing.Type: ApplicationFiled: March 10, 2017Publication date: March 15, 2018Applicant: TOSHIBA MEMORY CORPORATIONInventors: Tatsuya KISHI, Tsuneo INABA, Daisuke WATANABE, Masahiko NAKAYAMA, Nobuyuki OGATA, Masaru TOKO, Hisanori AIKAWA, Jyunichi OZEKI, Toshihiko NAGASE, Young Min EEH, Kazuya SAWADA
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Publication number: 20170263855Abstract: According to one embodiment, a magnetic storage device includes a substrate, a dummy contact disposed on a top surface of the substrate, extending linearly in a direction substantially perpendicular to the top surface of the substrate, and floating electrically, and a magnetoresistive effect element included in a layer and insulated from the dummy contact, wherein the layer is disposed on the top surface of the dummy contact.Type: ApplicationFiled: September 9, 2016Publication date: September 14, 2017Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Makoto NAGAMINE, Young Min EEH, Daisuke WATANABE, Kazuya SAWADA, Toshihiko NAGASE
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Publication number: 20170263857Abstract: According to one embodiment, a magnetoresistive memory device includes a first magnetic layer in which a magnetization direction is variable, a first nonmagnetic layer provided on the first magnetic layer, a second magnetic layer provided on the first nonmagnetic layer, a magnetization direction of the second magnetic layer being invariable, and a second nonmagnetic layer provided on the first magnetic layer, which is opposite the first nonmagnetic layer. The first magnetic layer includes Mo.Type: ApplicationFiled: September 16, 2016Publication date: September 14, 2017Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Daisuke WATANABE, Toshihiko NAGASE, Youngmin EEH, Kazuya SAWADA, Makoto NAGAMINE, Tadaaki OIKAWA, Kenichi YOSHINO, Hiroyuki OHTORI
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Publication number: 20170263858Abstract: According to one embodiment, a magnetic memory device includes a stacked structure including a first magnetic layer, a second magnetic layer and a nonmagnetic layer between the first magnetic layer and the second magnetic layer, and a sidewall insulating layer provided on a side surface of the stacked structure and containing boron (B).Type: ApplicationFiled: September 16, 2016Publication date: September 14, 2017Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yasuyuki SONODA, Daisuke WATANABE, Masatoshi YOSHIKAWA, Youngmin EEH, Shuichi TSUBATA, Toshihiko NAGASE, Yutaka HASHIMOTO, Kazuya SAWADA, Kazuhiro TOMIOKA, Kenichi YOSHINO, Tadaaki OIKAWA
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Publication number: 20170263676Abstract: According to one embodiment, a magnetoresistive element includes a first metal layer having a body-centered cubic structure, a second metal layer having a hexagonal close-packed structure on the first metal layer, a metal nitride layer on the second metal layer, a first magnetic layer on the metal nitride layer, an insulating layer on the first magnetic layer, and a second magnetic layer on the insulating layer.Type: ApplicationFiled: September 9, 2016Publication date: September 14, 2017Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Youngmin EEH, Toshihiko NAGASE, Daisuke WATANABE, Koji UEDA, Makoto NAGAMINE, Kazuya SAWADA
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Publication number: 20170263680Abstract: According to one embodiment, a magnetoresistive memory device includes an electrode, a first layer which is provided on the electrode and includes an amorphous portion in at least a part of an electrode side, and a magnetoresisive element provided on the first layer.Type: ApplicationFiled: September 16, 2016Publication date: September 14, 2017Applicants: KABUSHIKI KAISHA TOSHIBA, SK HYNIX INC.Inventors: Kenichi YOSHINO, Toshihiko NAGASE, Youngmin EEH, Daisuke WATANABE, Kazuya SAWADA, Makoto NAGAMINE, Won Joon CHOI, Guk Cheon KIM, Yang Kon KIM, Jong Koo LIM
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Patent number: 9741928Abstract: According to one embodiment, a magnetoresistive element comprises a first magnetic layer, a second magnetic layer, a first nonmagnetic layer, a second nonmagnetic layer, and a third magnetic layer. The first magnetic layer has a variable magnetization direction. The second magnetic layer has an invariable magnetization direction and includes a nonmagnetic material film and a magnetic material film. The first nonmagnetic layer is arranged between the first magnetic layer and the second magnetic layer. The second nonmagnetic layer is arranged on a surface of the second magnetic layer. The third magnetic layer is arranged on a surface of the second nonmagnetic layer. The second nonmagnetic layer is in contact with the nonmagnetic material film included in the second magnetic layer.Type: GrantFiled: February 11, 2016Date of Patent: August 22, 2017Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Koji Ueda, Toshihiko Nagase, Kazuya Sawada, Youngmin Eeh, Daisuke Watanabe, Hiroaki Yoda