Patents by Inventor Kazuya Sawada

Kazuya Sawada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9209386
    Abstract: According to one embodiment, a magneto-resistive element includes a first ferromagnetic layer formed on a substrate, a tunnel barrier layer formed on the first ferromagnetic layer, and a second ferromagnetic layer containing B formed on the tunnel barrier layer, the second magnetic layer containing therein any of He, Ne, Ar, Kr, Xe and N2.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: December 8, 2015
    Inventors: Makoto Nagamine, Youngmin Eeh, Koji Ueda, Daisuke Watanabe, Kazuya Sawada, Toshihiko Nagase
  • Patent number: 9184374
    Abstract: According to one embodiment, a magnetoresistive element includes first, second and third magnetic layers, and first and second nonmagnetic layers. The third magnetic layer has stack layers including a first stack layer close to the second magnetic layer, and a second stack layer far from the second magnetic layer. Each of the first and second stack layers includes a first layer made of a ferromagnetic material and a second layer made of a nonmagnetic material, and a first ratio of a film thickness of the first layer to that of the second layer in the first stack layer is higher than a second ratio of a film thickness of the first layer to that of the second layer in the second stack layer.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: November 10, 2015
    Inventors: Kazuya Sawada, Toshihiko Nagase, Youngmin Eeh, Koji Ueda, Daisuke Watanabe, Masahiko Nakayama, Tadashi Kai, Hiroaki Yoda
  • Patent number: 9142756
    Abstract: A magnetoresistive element includes a first ferromagnetic layer formed on a base substrate, a tunnel barrier layer formed on the first ferromagnetic layer, and a second ferromagnetic layer containing B formed on the tunnel barrier layer. The second ferromagnetic layer includes at least one of H, F, Cl, Br, I, C, O, and N, and a concentration of molecules of the at least one of H, F, Cl, Br, I, C, O, and N included in the second ferromagnetic layer is higher in a central portion in a depth direction of the second ferromagnetic layer than in an upper surface and a lower surface thereof.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: September 22, 2015
    Inventors: Makoto Nagamine, Youngmin Eeh, Koji Ueda, Daisuke Watanabe, Kazuya Sawada, Toshihiko Nagase
  • Publication number: 20150259788
    Abstract: According to one embodiment, a sputtering apparatus includes a first chamber configured to form a magnetic film on a substrate and a second chamber configured to form a non-magnetic film on the substrate, which are disposed to be adjacent to each other so that the substrate is conveyable between the chambers. A magnetic target is provided in the first chamber, and a non-magnetic target and a low dielectric-constant target having a dielectric constant lower than that of the non-magnetic target are provided in the second chamber. Here, before the non-magnetic target is formed on the substrate by sputtering, the low dielectric-constant target is subjected to sputtering in the second chamber, thereby depositing a low dielectric-constant material on the inner surface of the second chamber.
    Type: Application
    Filed: September 5, 2014
    Publication date: September 17, 2015
    Inventors: Makoto NAGAMINE, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Kazuya SAWADA, Toshihiko NAGASE, Tokuhisa OHIWA
  • Publication number: 20150263271
    Abstract: According to one embodiment, there is provided a magnetoresistive element, including a lower electrode having crystallinity on a substrate, a first conductive layer including an amorphous state on the lower electrode, a buffer layer on the first conductive layer, and an MTJ element on the buffer layer.
    Type: Application
    Filed: September 5, 2014
    Publication date: September 17, 2015
    Inventors: Makoto NAGAMINE, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Kazuya SAWADA, Toshihiko NAGASE, Masahiko NAKAYAMA
  • Publication number: 20150255708
    Abstract: An electronic device that includes a first structure including a first magnetic layer, a second magnetic layer, and a tunnel barrier layer which is interposed between the first magnetic layer and the second magnetic layer; and a second structure disposed over the first structure, and including a magnetic correction layer for correcting a magnetic field of the first structure, wherein a width of a bottom surface of the second structure is larger than a width of a top surface of the first structure.
    Type: Application
    Filed: December 3, 2014
    Publication date: September 10, 2015
    Inventors: Cha-Deok DONG, Daisuke WATANABE, Kazuya SAWADA, Young-Min EEH, Koji UEDA, Toshihiko NAGASE
  • Patent number: 9130143
    Abstract: According to one embodiment, a magnetic memory is disclosed. The magnetic memory includes a substrate, and a magnetoresistive element provided on the substrate. The magnetoresistive element includes a first magnetic layer, a tunnel barrier layer on the first magnetic layer, and a second magnetic layer on the tunnel barrier layer. The first magnetic layer or the second magnetic layer includes a first region, second region, and third region whose ratios of crystalline portion are higher in order closer to the tunneling barrier.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: September 8, 2015
    Inventors: Toshihiko Nagase, Daisuke Watanabe, Kazuya Sawada, Koji Ueda, Youngmin Eeh, Hiroaki Yoda
  • Publication number: 20150179926
    Abstract: According to one embodiment, a magnetoresistive element comprises a storage layer having perpendicular magnetic anisotropy with respect to a film plane and having a variable direction of magnetization, a reference layer having perpendicular magnetic anisotropy with respect to the film plane and having an invariable direction of magnetization, a tunnel barrier layer formed between the storage layer and the reference layer and containing O, and an underlayer formed on a side of the storage layer opposite to the tunnel barrier layer. The reference layer comprises a first reference layer formed on the tunnel barrier layer side and a second reference layer formed opposite the tunnel barrier layer. The second reference layer has a higher standard electrode potential than the underlayer.
    Type: Application
    Filed: February 23, 2015
    Publication date: June 25, 2015
    Inventors: Daisuke WATANABE, Youngmin EEH, Kazuya SAWADA, Koji UEDA, Toshihiko NAGASE
  • Patent number: 8995181
    Abstract: According to one embodiment, a magnetoresistive element comprises a storage layer having perpendicular magnetic anisotropy with respect to a film plane and having a variable direction of magnetization, a reference layer having perpendicular magnetic anisotropy with respect to the film plane and having an invariable direction of magnetization, a tunnel barrier layer formed between the storage layer and the reference layer and containing O, and an underlayer formed on a side of the storage layer opposite to the tunnel barrier layer. The reference layer comprises a first reference layer formed on the tunnel barrier layer side and a second reference layer formed opposite the tunnel barrier layer. The second reference layer has a higher standard electrode potential than the underlayer.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: March 31, 2015
    Inventors: Daisuke Watanabe, Youngmin Eeh, Kazuya Sawada, Koji Ueda, Toshihiko Nagase
  • Publication number: 20150069553
    Abstract: According to one embodiment, a magnetic memory is disclosed. The magnetic memory includes a substrate, and a magnetoresistive element provided on the substrate. The magnetoresistive element includes a first magnetic layer, a tunnel barrier layer on the first magnetic layer, and a second magnetic layer on the tunnel barrier layer. The first magnetic layer or the second magnetic layer includes a first region, second region, and third region whose ratios of crystalline portion are higher in order closer to the tunneling barrier.
    Type: Application
    Filed: March 7, 2014
    Publication date: March 12, 2015
    Inventors: Toshihiko NAGASE, Daisuke WATANABE, Kazuya SAWADA, Koji UEDA, Youngmin EEH, Hiroaki YODA
  • Publication number: 20150068887
    Abstract: According to one embodiment, a method of manufacturing a magnetoresistive element includes intermittently exposing a surface of a base substrate to sputter particles from a sputter target, and thereby forming a thin film on the base substrate.
    Type: Application
    Filed: January 16, 2014
    Publication date: March 12, 2015
    Inventors: Makoto NAGAMINE, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Kazuya SAWADA, Toshihiko NAGASE
  • Publication number: 20150069542
    Abstract: According to one embodiment, a method of manufacturing a magneto-resistive element, includes forming a first ferromagnetic layer on a substrate, forming a tunnel barrier layer on the first ferromagnetic layer, forming a second ferromagnetic layer containing B on the tunnel barrier layer, exposing a laminate of the first ferromagnetic layer, the tunnel barrier layer, and the second ferromagnetic layer under a pressurized atmosphere, and annealing the laminate while being exposed to the pressurized atmosphere, thereby promoting the orientation of the second magnetic layer.
    Type: Application
    Filed: January 16, 2014
    Publication date: March 12, 2015
    Inventors: Makoto NAGAMINE, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Kazuya SAWADA, Toshihiko NAGASE
  • Publication number: 20150069554
    Abstract: According to one embodiment, a magnetic memory is disclosed. The memory includes a conductive layer containing a first metallic material, a stacked body formed above the conductive layer and including a first magnetic layer containing a second metallic material, a second magnetic layer, and a tunnel barrier layer formed between the first magnetic layer and the second magnetic layer, and an insulating layer formed on a side face of the stacked body and containing an oxide of the first metallic material. A standard electrode potential of the first metallic material is lower than the standard electrode potential of the second metallic material.
    Type: Application
    Filed: March 7, 2014
    Publication date: March 12, 2015
    Inventors: Masahiko NAKAYAMA, Yasuyuki SONODA, Hiroaki YODA, Makoto NAGAMINE, Masatoshi YOSHIKAWA, Masaru TOKO, Tadashi KAI, Daisuke WATANABE, Youngmin EEH, Koji UEDA, Kazuya SAWADA, Toshihiko NAGASE
  • Publication number: 20150069543
    Abstract: According to one embodiment, a method of manufacturing a magnetoresistive element includes forming a first ferromagnetic layer on a base substrate, forming a tunnel barrier layer on the first ferromagnetic layer, forming a second ferromagnetic layer containing B on the tunnel barrier layer, and performing annealing in a gas-phase atmosphere including a gas, after formation of the second ferromagnetic layer, the gas producing a reaction product with B, the reaction product having a melting point lower than a treatment temperature.
    Type: Application
    Filed: January 16, 2014
    Publication date: March 12, 2015
    Inventors: Makoto NAGAMINE, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Kazuya SAWADA, Toshihiko NAGASE
  • Publication number: 20150070128
    Abstract: According to one embodiment, a magnetoresistive element comprises a first magnetic layer, a second magnetic layer, a first nonmagnetic layer, a second nonmagnetic layer, and a third magnetic layer. The first magnetic layer has a variable magnetization direction. The second magnetic layer has an invariable magnetization direction and includes a nonmagnetic material film and a magnetic material film. The first nonmagnetic layer is arranged between the first magnetic layer and the second magnetic layer. The second nonmagnetic layer is arranged on a surface of the second magnetic layer. The third magnetic layer is arranged on a surface of the second nonmagnetic layer. The second nonmagnetic layer is in contact with the nonmagnetic material film included in the second magnetic layer.
    Type: Application
    Filed: January 21, 2014
    Publication date: March 12, 2015
    Inventors: Koji UEDA, Toshihiko NAGASE, Kazuya SAWADA, Youngmin EEH, Daisuke WATANABE, Hiroaki YODA
  • Publication number: 20150069544
    Abstract: According to one embodiment, magneto-resistive element, includes a first ferromagnetic layer formed on an underlying substrate, a tunnel barrier layer formed on the first ferromagnetic layer, a second ferromagnetic formed on the tunnel barrier layer and a cap layer formed on the second ferromagnetic layer, and a surface tension of the cap layer is equal to or less than that of the second ferromagnetic layer.
    Type: Application
    Filed: January 17, 2014
    Publication date: March 12, 2015
    Inventors: Makoto NAGAMINE, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Kazuya SAWADA, Toshihiko NAGASE
  • Publication number: 20140284735
    Abstract: According to one embodiment, a magnetoresistance effect element includes a reference layer, a shift canceling layer, a storage layer provided between the reference layer and the shift canceling layer, a tunnel barrier layer provided between the reference layer and the storage layer, and a spacer layer provided between the shift canceling layer and the storage layer, wherein a pattern of the storage layer is provided inside a pattern of the shift canceling layer when the patterns of the storage layer and the shift canceling layer are viewed from a direction perpendicular to the patterns of the storage layer and the shift canceling layer.
    Type: Application
    Filed: August 29, 2013
    Publication date: September 25, 2014
    Inventors: Masahiko NAKAYAMA, Toshihiko NAGASE, Tadashi KAI, Youngmin EEH, Koji UEDA, Yutaka HASHIMOTO, Daisuke WATANABE, Kazuya SAWADA
  • Publication number: 20140284534
    Abstract: According to one embodiment, a magnetoresistive element is disclosed. The magnetoresistive element includes a first magnetic layer having a variable magnetization direction. A first nonmagnetic layer is provided on the first magnetic layer. A second magnetic layer having a fixed magnetization direction is provided on the first nonmagnetic layer. The first magnetic layer, the first nonmagnetic layer and the second magnetic layer are preferredly oriented in a cubical crystal (111) plane.
    Type: Application
    Filed: September 11, 2013
    Publication date: September 25, 2014
    Inventors: Toshihiko NAGASE, Tadashi KAI, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Kazuya SAWADA, Hiroaki YODA
  • Publication number: 20140284742
    Abstract: According to one embodiment, a magnetoresistive element includes first, second and third magnetic layers, and first and second nonmagnetic layers. The third magnetic layer has stack layers including a first stack layer close to the second magnetic layer, and a second stack layer far from the second magnetic layer. Each of the first and second stack layers includes a first layer made of a ferromagnetic material and a second layer made of a nonmagnetic material, and a first ratio of a film thickness of the first layer to that of the second layer in the first stack layer is higher than a second ratio of a film thickness of the first layer to that of the second layer in the second stack layer.
    Type: Application
    Filed: August 9, 2013
    Publication date: September 25, 2014
    Inventors: Kazuya SAWADA, Toshihiko NAGASE, Youngmin EEH, Koji UEDA, Daisuke WATANABE, Masahiko NAKAYAMA, Tadashi KAI, Hiroaki YODA
  • Publication number: 20140286084
    Abstract: According to one embodiment, a magnetoresistive element comprises a storage layer having perpendicular magnetic anisotropy with respect to a film plane and having a variable direction of magnetization, a reference layer having perpendicular magnetic anisotropy with respect to the film plane and having an invariable direction of magnetization, a tunnel barrier layer formed between the storage layer and the reference layer and containing O, and an underlayer formed on a side of the storage layer opposite to the tunnel barrier layer. The reference layer comprises a first reference layer formed on the tunnel barrier layer side and a second reference layer formed opposite the tunnel barrier layer. The second reference layer has a higher standard electrode potential than the underlayer.
    Type: Application
    Filed: August 9, 2013
    Publication date: September 25, 2014
    Inventors: Daisuke WATANABE, Youngmin EEH, Kazuya SAWADA, Koji UEDA, Toshihiko NAGASE