Abstract: A conveyance system includes a track, ceiling conveyance vehicles, and a conveyance controller configured or programmed to output a conveyance instruction for a FOUP to the ceiling conveyance vehicles. When a first FOUP on a downstream port is waiting for collection, the conveyance controller waits without outputting a conveyance instruction instructing collection of the first FOUP until any of the conveyance vehicles conveying a second FOUP to an upstream port has been recognized until a waiting time set in advance has elapsed since the first FOUP changed to a state waiting for collection and outputs the conveyance instruction instructing collection of the first FOUP when the waiting time has elapsed since a point in time when the first FOUP changed to the state waiting for collection.

Abstract: A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage plate and the local vehicle that transfer a FOUP between the storage plate and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage plate by the local vehicle, a second mode prohibiting transfer to the storage plate by any of the ceiling conveyance vehicles and transfer from the storage plate to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.

Abstract: A conveyance system includes a track, ceiling conveyance vehicles, and a conveyance controller configured or programmed to output a conveyance instruction for a FOUP to the ceiling conveyance vehicles. When a first FOUP on a downstream port is waiting for collection the conveyance controller waits without outputting a conveyance instruction instructing collection of the first FOUP until any of the conveyance vehicles conveying a second FOUP to an upstream port has been recognized until a waiting time set in advance has elapsed since the first FOUP changed to the state waiting for collection and outputs the conveyance instruction instructing collection of the first FOUP when the waiting time has elapsed since a point in time when the first FOUP changed to the state waiting for collection.

Abstract: A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage plate and the local vehicle that transfer a FOUP between the storage plate and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage plate by the local vehicle, a second mode prohibiting transfer to the storage plate by any of the ceiling conveyance vehicles and transfer from the storage plate to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.

Abstract: A surface texture measuring device includes a rotation driving device configured to rotate a measured substance, a roughness detector including a stylus provided displaceably at a tip of a detector main body and at least one skid provided at the tip of the detector main body and in the proximity of the stylus and outputting displacement of the stylus based on the skid as an electric signal, and a detector driving device configured to drive a detector holder. The detector holder includes a guide member driven by the detector driving device, a slide member configured to hold the roughness detector and provided slidably in a displacement direction of the stylus to the guide member, and an urging member configured to urge the slide member so that the skid always comes in contact with the measurement face of the measured substance.

Abstract: A surface texture measuring device includes a rotation driving device configured to rotate a measured substance, a roughness detector including a stylus provided displaceably at a tip of a detector main body and at least one skid provided at the tip of the detector main body and in the proximity of the stylus and outputting displacement of the stylus based on the skid as an electric signal, and a detector driving device configured to drive a detector holder. The detector holder includes a guide member driven by the detector driving device, a slide member configured to hold the roughness detector and provided slidably in a displacement direction of the stylus to the guide member, and an urging member configured to urge the slide member so that the skid always comes in contact with the measurement face of the measured substance.

Abstract: A silicon lump crushing tool comprising a pneumatic piston drive means for driving a piston installed in a casing from a retreat position to a projection position by air pressure, a guide tube connected to the casing and extending in the movement direction of the piston, and a hammer head. The rear end portion of the hammer head is movably inserted into the front end portion of the guide tube, and when the piston is driven from the retreat position to the projection position, the front end of the piston collides with the rear end of the hammer head.

Abstract: In performing exposure for forming patterns being fine as well as having great density difference, adequate corrections are to be enabled for suppressing the influence from peripheries of these patterns to be a minimum and for suppressing the dimension variation within the plane of semiconductor substrate or among semiconductor substrates to a minimum. So-called lower-layer corrections are executed, in order to suppress the three-dimensional influence, namely the influence of the film-thickness distribution of a lower-layer structure body lying under a subject film to be processed with a resist. A pattern-correcting portion adjusts the amount of exposure such that it cancels the in-plane film-thickness distribution of the lower-layer structure body in respective exposure regions.

Abstract: A holding and sealing material for a catalytic converter for disposition between a cylindrical catalyst carrier and a metal shell covering the outer periphery of the catalyst carrier. The holding and sealing material includes a fiber aggregate mainly formed of alumina-silica based ceramic fibers having a mullite crystal content of 10 wt % or less, and the fiber aggregate is subjected to a needle punch treatment. Owing to the improved holding and sealing material, a catalytic converter having excellent durability and assemblage and having extremely low pollution characteristics is provided.

Abstract: A controller controls a wafer carrier to move from a SMIF-POD to transfer and collect a wafer between a space of a transfer unit through a thermal chamber. The wafer carrier is returned into the SMIF-POD, when the wafer is exposed, to be kept waiting in the SMIF-POD until the wafer completes the exposure. The wafer can be shielded from direct airflow by a protection plate inside the transfer area.

Abstract: In performing exposure for forming patterns being fine as well as having great density difference, adequate corrections are to be enabled for suppressing the influence from peripheries of these patterns to be a minimum and for suppressing the dimension variation within the plane of semiconductor substrate or among semiconductor substrates to a minimum. So-called lower-layer corrections are executed, in order to suppress the three-dimensional influence, namely the influence of the film-thickness distribution of a lower-layer structure body lying under a subject film to be processed with a resist. A pattern-correcting portion adjusts the amount of exposure such that it cancels the in-plane film-thickness distribution of the lower-layer structure body in respective exposure regions.

Abstract: The present invention is directed to a pillar-shaped honeycomb structured body each including a number of through holes that are placed in parallel with one another in the length direction with a wall portion interposed therebetween, wherein information regarding the honeycomb structured body is displayed on a circumferential surface and/or an end face thereof by using a two-dimensional code.

Abstract: A controller controls a wafer carrier to move from a SMIF-POD to transfer and collect a wafer between a space of a transfer unit through a thermal chamber. The wafer carrier is returned into the SMIF-POD, when the wafer is exposed, to be kept waiting in the SMIF-POD until the wafer completes the exposure.

Abstract: An object of the present invention is to provide a honeycomb structural body which is inserted, for use, into a pipe forming an exhaust passage of an internal combustion engine, and makes it possible to clearly distinguish an exhaust gas flow-in side and an exhaust gas flow-out side. The present invention is directed to a columnar honeycomb structural body comprising porous ceramics each including a number of through holes that are placed in parallel with one another in the length direction with a wall portion interposed therebetween, wherein information regarding the honeycomb structural body is displayed on a circumferential surface and/or an end face thereof.

Abstract: A honeycomb filter for purifying exhaust gases. A plurality of rectangular columnar porous ceramic members are combined with one another through a sealing material layer to constitute a ceramic block, each of the rectangular columnar porous ceramic member including a number of through holes that are placed in parallel with one another in the length direction with a partition wall interposed therebetween. A sealing material layer is also formed on a circumference portion of the ceramic block, and the partition wall that separates the through holes functions as a filter for collecting particulates. On a cross section perpendicular to the length direction of the porous ceramic member of the ceramic block, the maximum width L (mm) of the crisscross portion of the sealing material layer is 1.5 to 3 times greater than the minimum width I (mm) of the sealing material layer.

Abstract: An object of the present invention is to provide a honeycomb filter for purifying exhaust gases that is free from a gap formed between a plug and a partition wall and cracks generated in the plug and a portion of the partition wall contacting the plug, and is superior in durability.