Patents by Inventor Keisuke Kondoh

Keisuke Kondoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10403529
    Abstract: A carrier transport device capable of delivering a carrier to and from an external transport device which transports the carrier is provided. The carrier transport device includes a housing on which the carrier is mountable, first ports provided in the housing and configured to deliver the carrier to and from the external transport device, second ports provided in the housing and provided with a lid opening/closing mechanism, and a transfer machine provided in the housing and configured to transfer the carrier. The first ports, the transfer machine and the second ports are disposed under a transport path of the external transport device. The first ports and the second ports are disposed on both sides of the transfer machine. The second ports are configured at multiple stages.
    Type: Grant
    Filed: December 24, 2015
    Date of Patent: September 3, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Shinji Wakabayashi, Keisuke Kondoh
  • Publication number: 20190214289
    Abstract: A substrate gripping mechanism, for gripping a substrate between a fixed clamp portion to be engaged with an edge portion of a substrate and a movable clamp portion configured to reciprocate with respect to the fixed clamp portion by a reciprocating driving unit, includes an interlocking member configured to move together with the movable clamp portion, and a first sensor and a second sensor, each having a detection region and configured to detect whether or not the interlocking member exists in the detection region. The interlocking member has a first to a fourth portion connected in a reciprocating direction of the movable clamp portion. The first to the fourth portion have shapes to make detection results thereof by the first sensor and the second sensor different from each other.
    Type: Application
    Filed: December 18, 2018
    Publication date: July 11, 2019
    Inventors: Masahiro DOGOME, Keisuke KONDOH
  • Patent number: 10347510
    Abstract: A compartment variable device is provided with: a baffle plate which has a plurality of openings and which as a whole has a rectangular shape; a rectangular frame disposed around the baffle plate; a bellows connected to a bottom of the frame; and a bellows support portion to which the lower end of the bellows is fixed. When a transfer arm of an atmosphere-side transfer device is lifted, the frame of the compartment variable device which is engaged with the transfer arm is lifted, thereby extending the bellows. Accordingly, the volume of a gas flow space in an atmospheric pressure transfer chamber is decreased, allowing the atmosphere in the gas flow space in the atmospheric pressure transfer chamber to be replaced in a short time.
    Type: Grant
    Filed: June 7, 2016
    Date of Patent: July 9, 2019
    Assignee: Tokyo Electron Limited
    Inventor: Keisuke Kondoh
  • Publication number: 20190152722
    Abstract: Four groups of a three-tier arrangement of processing units, each of the processing units being provided with two processing modules and a load lock module, are provided in the front and rear sides along a Y-guide extending rearward when viewed from an EFEM and in the left and right sides of the Y-guide. An exchange of a substrate between a delivery mechanism on the EFEM side and a substrate transfer mechanism on the processing unit side is performed by a substrate loading part, which is movable along the Y-guide and can move upward and downward, and on which a plurality of wafers can be placed in a shelf-like manner.
    Type: Application
    Filed: January 21, 2019
    Publication date: May 23, 2019
    Inventors: Shinji WAKABAYASHI, Keisuke KONDOH
  • Patent number: 10229847
    Abstract: A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.
    Type: Grant
    Filed: February 9, 2017
    Date of Patent: March 12, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Shinji Wakabayashi, Keisuke Kondoh, Sensho Kobayashi
  • Patent number: 10134619
    Abstract: A connecting mechanism includes a mounting unit, a substrate transfer port, a door closing or opening the substrate transfer port, a coupling mechanism coupling a cover of the substrate container mounted on the mounting unit with the door, and a gas exhaust/purge unit. First, second and third seal members respectively seal a first space between a peripheral portion of the substrate transfer port and the door, a second space between the door and the cover of the substrate container, and a space between the peripheral portion of the substrate transfer port and the main body. The gas exhaust unit exhausts the first space and a second space. The purge gas, which has been supplied into the substrate container by the gas exhaust/purge unit, is supplied into the first and the second space by allowing the gas exhaust unit to exhaust the first and the second space.
    Type: Grant
    Filed: February 2, 2017
    Date of Patent: November 20, 2018
    Assignee: Tokyo Electron Limited
    Inventors: Keisuke Kondoh, Norihiko Tsuji
  • Patent number: 10128134
    Abstract: Provided is a substrate transfer method for sequentially transferring a substrate between a heat treatment chamber and another chamber different from the heat treatment chamber using a transfer unit having a first pick and a second pick. An unprocessed substrate is held by the first pick, and the substrate is transferred to the heat treatment chamber. A processed substrate, heat-treated in the heat treatment chamber, is held by the second pick, and the unprocessed substrate held by the first pick is loaded into the heat treatment chamber. The processed substrate held by the second pick is transferred to the other chamber. An unprocessed substrate in the other chamber is held by the first pick, the processed substrate held by the second pick is loaded into the other chamber, and then both the first pick and the second pick are put into a state of not holding a substrate.
    Type: Grant
    Filed: September 7, 2015
    Date of Patent: November 13, 2018
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Keisuke Kondoh
  • Publication number: 20180286729
    Abstract: A system includes a transfer device for transferring workpieces in an atmospheric atmosphere, a transfer unit for transferring the workpieces in a vacuum atmosphere, and a vacuum processing unit including vacuum process chambers connected to the transfer unit and for performing a process on the workpieces in each process chamber. The vacuum processing unit simultaneously performs the process on the workpieces in each process chamber. The process chambers are arranged along a first direction. The transfer unit includes first and second common transfer devices installed along the first direction to transfer the workpieces along the first direction. The first common transfer device is connected to each process chamber at a first side in a second direction perpendicular to the first direction, the second common transfer device is connected to each process chamber at a second side in the second direction.
    Type: Application
    Filed: March 28, 2018
    Publication date: October 4, 2018
    Inventors: Atsushi KAWABE, Keisuke KONDOH
  • Publication number: 20180211850
    Abstract: A compartment variable device is provided with: a baffle plate which has a plurality of openings and which as a whole has a rectangular shape; a rectangular frame disposed around the baffle plate; a bellows connected to a bottom of the frame; and a bellows support portion to which the lower end of the bellows is fixed. When a transfer arm of an atmosphere-side transfer device is lifted, the frame of the compartment variable device which is engaged with the transfer arm is lifted, thereby extending the bellows. Accordingly, the volume of a gas flow space in an atmospheric pressure transfer chamber is decreased, allowing the atmosphere in the gas flow space in the atmospheric pressure transfer chamber to be replaced in a short time.
    Type: Application
    Filed: June 7, 2016
    Publication date: July 26, 2018
    Inventor: Keisuke KONDOH
  • Publication number: 20180033663
    Abstract: A carrier transport device capable of delivering a carrier to and from an external transport device which transports the carrier is provided. The carrier transport device includes a housing on which the carrier is mountable, first ports provided in the housing and configured to deliver the carrier to and from the external transport device, second ports provided in the housing and provided with a lid opening/closing mechanism, and a transfer machine provided in the housing and configured to transfer the carrier. The first ports, the transfer machine and the second ports are disposed under a transport path of the external transport device. The first ports and the second ports are disposed on both sides of the transfer machine. The second ports are configured at multiple stages.
    Type: Application
    Filed: December 24, 2015
    Publication date: February 1, 2018
    Inventors: Shinji WAKABAYASHI, Keisuke KONDOH
  • Publication number: 20170287746
    Abstract: Provided is a substrate transfer method for sequentially transferring a substrate between a heat treatment chamber and another chamber different from the heat treatment chamber using a transfer unit having a first pick and a second pick. An unprocessed substrate is held by the first pick, and the substrate is transferred to the heat treatment chamber. A processed substrate, heat-treated in the heat treatment chamber, is held by the second pick, and the unprocessed substrate held by the first pick is loaded into the heat treatment chamber. The processed substrate held by the second pick is transferred to the other chamber. An unprocessed substrate in the other chamber is held by the first pick, the processed substrate held by the second pick is loaded into the other chamber, and then both the first pick and the second pick are put into a state of not holding a substrate.
    Type: Application
    Filed: September 7, 2015
    Publication date: October 5, 2017
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Keisuke KONDOH
  • Patent number: 9732881
    Abstract: Disclosed is a gate valve that opens/closes a plurality of vertically arranged openings by a plurality of valve bodies when conveying a plurality of vertically arranged substrates to an inside of a vacuum container. The gate valve includes: a housing including the plurality of openings formed therein; a supporting member configured to support the plurality of valve bodies; a driving mechanism configured to move the plurality of valve bodies via the supporting member such that the plurality of openings is opened/closed; and a plurality of guide mechanisms arranged to correspond to the plurality of valve bodies, respectively. Each of the plurality of guide mechanisms includes: a vertically stretchable bellows fixed to the housing; and a guide member contained in the bellows and configured to guide the supporting member inside the bellows.
    Type: Grant
    Filed: September 1, 2015
    Date of Patent: August 15, 2017
    Assignee: Tokyo Electron Limited
    Inventors: Shinji Wakabayashi, Keisuke Kondoh, Norihiko Tsuji
  • Publication number: 20170221743
    Abstract: A connecting mechanism includes a mounting unit, a substrate transfer port, a door closing or opening the substrate transfer port, a coupling mechanism coupling a cover of the substrate container mounted on the mounting unit with the door, and a gas exhaust/purge unit. First, second and third seal members respectively seal a first space between a peripheral portion of the substrate transfer port and the door, a second space between the door and the cover of the substrate container, and a space between the peripheral portion of the substrate transfer port and the main body. The gas exhaust unit exhausts the first space and a second space. The purge gas, which has been supplied into the substrate container by the gas exhaust/purge unit, is supplied into the first and the second space by allowing the gas exhaust unit to exhaust the first and the second space.
    Type: Application
    Filed: February 2, 2017
    Publication date: August 3, 2017
    Inventors: Keisuke KONDOH, Norihiko TSUJI
  • Publication number: 20170154799
    Abstract: A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.
    Type: Application
    Filed: February 9, 2017
    Publication date: June 1, 2017
    Inventors: Shinji WAKABAYASHI, Keisuke KONDOH, Sensho KOBAYASHI
  • Patent number: 9455166
    Abstract: A loader module of a substrate processing system includes a transportation arm configured to move towards a wafer accommodated in a carrier and receive the wafer, and a control unit configured to confirm a delivery position of the wafer based on an upward movement amount of an end effector of the transportation arm, and a contact sound generated when the end effector comes in contact with the wafer. The control unit confirms the delivery position of the wafer based on an average height of the end effector when the contact sound of each pad of the end effector comes in contact with the wafer to generate a contact sound a plurality of times.
    Type: Grant
    Filed: February 12, 2014
    Date of Patent: September 27, 2016
    Assignee: Tokyo Electron Limited
    Inventor: Keisuke Kondoh
  • Patent number: 9448063
    Abstract: In a method for detecting a position of a substrate transfer device including a substrate supporting unit, the light-transmitting optical sensor is moved with respect to a detection target provided at a predetermined relative position with respect to a position where a substrate is to be transferred by the substrate transfer device, and a vertical dimension of the detection target that blocks the optical axis is measured by setting the substrate supporting unit in a first orientation and relatively moving up or down the optical sensor with respect to the detection target. A vertical dimension of the detection target that blocks the optical axis is measured by setting the substrate supporting unit in a second orientation and relatively moving the optical sensor with respect to the detection target. Horizontal coordinates of a reference position of the detection target are obtained based on the measured vertical dimensions in the respective orientations.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: September 20, 2016
    Assignee: TOYKO ELECTRON LIMITED
    Inventor: Keisuke Kondoh
  • Publication number: 20160084389
    Abstract: Disclosed is a gate valve that opens/closes a plurality of vertically arranged openings by a plurality of valve bodies when conveying a plurality of vertically arranged substrates to an inside of a vacuum container. The gate valve includes: a housing including the plurality of openings formed therein; a supporting member configured to support the plurality of valve bodies; a driving mechanism configured to move the plurality of valve bodies via the supporting member such that the plurality of openings is opened/closed; and a plurality of guide mechanisms arranged to correspond to the plurality of valve bodies, respectively. Each of the plurality of guide mechanisms includes: a vertically stretchable bellows fixed to the housing; and a guide member contained in the bellows and configured to guide the supporting member inside the bellows.
    Type: Application
    Filed: September 1, 2015
    Publication date: March 24, 2016
    Inventors: Shinji Wakabayashi, Keisuke Kondoh, Norihiko Tsuji
  • Publication number: 20160086835
    Abstract: Disclosed is a cover opening/closing apparatus including a plurality of placement tables provided in a vertical direction. Each placement table is configured to place thereon a substrate accommodation container including a takeout port in one side surface and a cover that covers the takeout port. The apparatus includes a cover opening/closing mechanism provided to face the cover of the substrate accommodation container placed on each of the placement tables. At least the cover opening/closing mechanism at a placement table side of an upper stage includes: a latch key driven at a time of mounting/removing the cover; a suction port configured to suck gas within a space between the cover opening/closing mechanism and the cover; a cover holding unit configured to suck and hold the cover; and a packing provided at a more outer periphery side than the latch key and the suction port.
    Type: Application
    Filed: August 31, 2015
    Publication date: March 24, 2016
    Inventors: Keisuke Kondoh, Makoto Tashiro
  • Publication number: 20150219439
    Abstract: In a method for detecting a position of a substrate transfer device including a substrate supporting unit, the light-transmitting optical sensor is moved with respect to a detection target provided at a predetermined relative position with respect to a position where a substrate is to be transferred by the substrate transfer device, and a vertical dimension of the detection target that blocks the optical axis is measured by setting the substrate supporting unit in a first orientation and relatively moving up or down the optical sensor with respect to the detection target. A vertical dimension of the detection target that blocks the optical axis is measured by setting the substrate supporting unit in a second orientation and relatively moving the optical sensor with respect to the detection target. Horizontal coordinates of a reference position of the detection target are obtained based on the measured vertical dimensions in the respective orientations.
    Type: Application
    Filed: February 3, 2015
    Publication date: August 6, 2015
    Inventor: Keisuke KONDOH
  • Publication number: 20150098788
    Abstract: A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.
    Type: Application
    Filed: October 6, 2014
    Publication date: April 9, 2015
    Inventors: Shinji WAKABAYASHI, Keisuke KONDOH, Sensho KOBAYASHI