Patents by Inventor Ken Hamada

Ken Hamada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7819972
    Abstract: In a method for growing a silicon single crystal, a silicon single crystal is grown by the Czochralski method to have an oxygen concentration of 12×1017 to 18×1017 atoms/cm3 on ASTM-F121 1979. A mixed gas of an inert gas and a gaseous substance containing hydrogen atoms is used as an atmospheric gas for growing the single crystal. A temperature of the silicon single crystal is controlled during the growth of the crystal such that the ratio Gc/Ge of an axial thermal gradient Gc at the central portion of the crystal between its melting point and its temperature of 1350° C. to an axial thermal gradient Ge at the periphery of the crystal between its melting point and its temperature of 1350° C. is 1.1 to 1.4. The axial thermal gradient Gc at the central portion of the crystal is 3.0 to 3.5° C./mm.
    Type: Grant
    Filed: February 17, 2006
    Date of Patent: October 26, 2010
    Assignee: Sumco Corporation
    Inventors: Shuichi Inami, Nobumitsu Takase, Yasuhiro Kogure, Ken Hamada, Tsuyoshi Nakamura
  • Publication number: 20100263585
    Abstract: When pulling and growing a single crystal from a raw material melt by the Czochralski method, a boundary between the single crystal and the raw material melt is imaged by an optical sensor, and also the weight of the single crystal is measured by a weight sensor, a diameter value of the single crystal is calculated on the basis of first measured values of the diameter of the single crystal derived from image data captured by the optical sensor and second measured values of the diameter of the single crystal derived from weight data captured by the weight sensor, and a pulling rate of the single crystal and the temperature of the raw material melt are adjusted on the basis of the calculated diameter value to thereby control the diameter of the single crystal, and thus it is possible to accurately measure the diameter of a growing single crystal.
    Type: Application
    Filed: July 1, 2010
    Publication date: October 21, 2010
    Inventor: Ken Hamada
  • Publication number: 20100018454
    Abstract: After melting raw materials, a distance between a raw material melt surface and a heat-shielding member disposed so as to face to the melt surface is adjusted based on temporal changes in chamber inside conditions, such as the heater temperature at the time of completion of the seed crystal equilibration operation carried out after completion of the raw material melting procedure and/or lag time required for completion of the seed crystal equilibration operation following completion of the raw material melting procedure. As a result, single crystals can be produced efficiently and in high yield, and further, by controlling the crystal interior temperature gradient by modifying the distance between the melt surface and the heat-shielding member, it becomes possible to control the ratio V/G (V:pulling speed, G:crystal interior temperature gradient) to thereby produce single crystals free of crystal defects such as COPs and/or dislocation clusters.
    Type: Application
    Filed: July 10, 2009
    Publication date: January 28, 2010
    Inventors: Ken Hamada, Hiroaki Taguchi, Kazuyuki Egashira
  • Publication number: 20090249998
    Abstract: A single crystal pulling apparatus comprises: a chamber; a crucible disposed within the chamber for containing a melt; a water-cooling means disposed within the chamber in such a manner as surrounding a single crystal pulled up from the melt in the crucible; water piping for feeding cooling water to and discharging the same from the water-cooling means; and supporting arms connected to the chamber for supporting the water-cooling means, wherein the supporting arms are disposed between the single crystal and the water piping. According to this configuration, the supporting arms can prevent the water piping from being damaged in the event of fall and collapse of the single crystal due to failure of the seed neck portion or in the event of rupture of the single crystal due to thermal stress, for instance.
    Type: Application
    Filed: April 7, 2009
    Publication date: October 8, 2009
    Inventors: Shuichi Inami, Ken Hamada, Hiroaki Taguchi, Takuya Yotsui, Takashi Atami
  • Patent number: 7473314
    Abstract: A silicon single crystal is grown using the Czochralski method. During the crystal growth, a thermal stress is applied to at least a portion of the silicon single crystal. A gaseous substance containing hydrogen atoms is used as an atmospheric gas for growing the crystal.
    Type: Grant
    Filed: March 28, 2006
    Date of Patent: January 6, 2009
    Assignee: Sumco Corporation
    Inventors: Shuichi Inami, Nobumitsu Takase, Yasuhiro Kogure, Ken Hamada, Tsuyoshi Nakamura
  • Patent number: 7442251
    Abstract: This method for producing silicon single crystals includes: growing a silicon single crystal by the Czochralski method while cooling at least part of the silicon single crystal under growth with a cooling member which circumferentially surrounds the silicon single crystal and has an inner contour that is coaxial with a pull axis, wherein an ambient gas in which the silicon single crystal is grown includes a hydrogen-atom-containing substance in gaseous form. This silicon single crystal is produced by the above method.
    Type: Grant
    Filed: April 19, 2006
    Date of Patent: October 28, 2008
    Assignee: Sumco Corporation
    Inventors: Shuichi Inami, Hiroki Murakami, Nobumitsu Takase, Ken Hamada, Tsuyoshi Nakamura
  • Patent number: 7264674
    Abstract: An apparatus is used to pull a single crystal, wherein a flow of an inert gas to the single crystal to be grown, a pressure in an apparatus body, and a temperature environment are always kept constant by keeping a melt level at a prescribed position in spite of changes in volume of a quartz crucible between batches and thermal deformation of the quartz crucible, so that high quality single crystals can be pulled.
    Type: Grant
    Filed: August 24, 2004
    Date of Patent: September 4, 2007
    Assignee: Sumitomo Mitsubishi Silicon Corporation
    Inventors: Keiichi Takanashi, Tokuji Maeda, Ken Hamada
  • Patent number: 7207187
    Abstract: A bus-bar integrated plate and outer frame section, arranged into a double-deck structure and having numerous bus bars molded with a resin molding plate portion, is provided as a wiring for connecting power switching elements and a smoothing capacitor, fixed on an outer surface of a cylindrical wall of a motor housing, to a printed circuit board serving as a control circuit.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: April 24, 2007
    Assignee: Denso Corporation
    Inventors: Kenji Funahashi, Ken Hamada, Hiroyuki Kawata, Yasuyuki Ohkouchi
  • Publication number: 20060283379
    Abstract: In a method for growing a silicon single crystal, a silicon single crystal is grown by the Czochralski method to have an oxygen concentration of 12×1017 to 18×1017 atoms/cm3 on ASTM-F121 1979. A mixed gas of an inert gas and a gaseous substance containing hydrogen atoms is used as an atmospheric gas for growing the single crystal. A temperature of the silicon single crystal is controlled during the growth of the crystal such that the ratio Gc/Ge of an axial thermal gradient Gc at the central portion of the crystal between its melting point and its temperature of 1350° C. to an axial thermal gradient Ge at the periphery of the crystal between its melting point and its temperature of 1350° C. is 1.1 to 1.4. The axial thermal gradient Gc at the central portion of the crystal is 3.0 to 3.5° C./mm.
    Type: Application
    Filed: February 17, 2006
    Publication date: December 21, 2006
    Applicant: SUMCO CORPORATION
    Inventors: Shuichi Inami, Nobumitsu Takase, Yasuhiro Kogure, Ken Hamada, Tsuyoshi Nakamura
  • Publication number: 20060283377
    Abstract: This method for producing silicon single crystals includes: growing a silicon single crystal by the Czochralski method while cooling at least part of the silicon single crystal under growth with a cooling member which circumferentially surrounds the silicon single crystal and has an inner contour that is coaxial with a pull axis, wherein an ambient gas in which the silicon single crystal is grown includes a hydrogen-atom-containing substance in gaseous form. This silicon single crystal is produced by the above method.
    Type: Application
    Filed: April 19, 2006
    Publication date: December 21, 2006
    Applicant: SUMCO CORPORATION
    Inventors: Shuichi Inami, Hiroki Murakami, Nobumitsu Takase, Ken Hamada, Tsuyoshi Nakamura
  • Publication number: 20060283373
    Abstract: A silicon single crystal is grown using the Czochralski method. During the crystal growth, a thermal stress is applied to at least a portion of the silicon single crystal. A gaseous substance containing hydrogen atoms is used as an atmospheric gas for growing the crystal.
    Type: Application
    Filed: March 28, 2006
    Publication date: December 21, 2006
    Applicant: SUMCO CORPORATION
    Inventors: Shuichi Inami, Nobumitsu Takase, Yasuhiro Kogure, Ken Hamada, Tsuyoshi Nakamura
  • Publication number: 20060064998
    Abstract: A bus-bar integrated plate and outer frame section, arranged into a double-deck structure and having numerous bus bars molded with a resin molding plate portion, is provided as a wiring for connecting power switching elements and a smoothing capacitor, fixed on an outer surface of a cylindrical wall of a motor housing, to a printed circuit board serving as a control circuit.
    Type: Application
    Filed: November 18, 2005
    Publication date: March 30, 2006
    Applicant: Denso Corporation
    Inventors: Kenji Funahashi, Ken Hamada, Hiroyuki Kawata
  • Publication number: 20050223727
    Abstract: A bus-bar integrated plate and outer frame section, arranged into a double-deck structure and having numerous bus bars molded with a resin molding plate portion, is provided as a wiring for connecting power switching elements and a smoothing capacitor, fixed on an outer surface of a cylindrical wall of a motor housing, to a printed circuit board serving as a control circuit.
    Type: Application
    Filed: June 8, 2005
    Publication date: October 13, 2005
    Applicant: Denso Corporation
    Inventors: Kenji Funahashi, Ken Hamada, Hiroyuki Kawata, Yasuyuki Ohkouchi
  • Publication number: 20050022722
    Abstract: An apparatus is used to pull a single crystal, wherein a flow of an inert gas to the single crystal to be grown, a pressure in an apparatus body, and a temperature environment are always kept constant by keeping a melt level at a prescribed position in spite of changes in volume of a quartz crucible between batches and thermal deformation of the quartz crucible, so that high quality single crystals can be pulled.
    Type: Application
    Filed: August 24, 2004
    Publication date: February 3, 2005
    Inventors: Keiichi Takanashi, Tokuji Maeda, Ken Hamada
  • Publication number: 20030200761
    Abstract: A bus-bar integrated plate and outer frame section, arranged into a double-deck structure and having numerous bus bars molded with a resin molding plate portion, is provided as a wiring for connecting power switching elements and a smoothing capacitor, fixed on an outer surface of a cylindrical wall of a motor housing, to a printed circuit board serving as a control circuit.
    Type: Application
    Filed: April 25, 2003
    Publication date: October 30, 2003
    Applicant: Denso Corporation
    Inventors: Kenji Funahashi, Ken Hamada, Hiroyuki Kawata, Yasuyuki Ohkouchi
  • Publication number: 20020029738
    Abstract: The present invention was achieved in order to provide an apparatus for pulling a single crystal, wherein a flow of an inert gas to a single crystal to be grown, pressure in an apparatus body, and a temperature environment are always kept constant by keeping the melt level at a prescribed position in spite of changes in volume of a quartz crucible between batches and thermal deformation of the quartz crucible, so that high quality single crystals can be pulled, comprising a reference reflector arranged inside an apparatus body, a level position measuring means to measure an actual level position by detecting a mirror image position of the reference reflector reflected in the melt surface using a one-dimensional CCD camera arranged outside the apparatus body, a crucible ascent speed adjustment value calculating means to calculate an adjustment value of the crucible ascent speed based on an output from the level position measuring means, an adjustment value adding means to add the adjustment value to the crucib
    Type: Application
    Filed: May 31, 2001
    Publication date: March 14, 2002
    Inventors: Keiichi Takanashi, Tokuji Maeda, Ken Hamada
  • Patent number: 6284041
    Abstract: A process for growing a single crystal in which variation in a dopant concentration in a melt contained in a crucible can be reduced and a single crystal having small variation in specific resistance can be produced. The process is the Czhohralski growth of a silicon single crystal including the steps: melting a crystal raw material in a crucible; bringing into contact a seed crystal to a melt contained in the crucible to thereby stabilize the surface temperature of the melt that is called “the seed crystal contact technique;” and adding a dopant into the crucible after carrying out the seed crystal contact technique. Furthermore, in the process, a dopant may be added while the seed crystal contact technique is stopped, and the seed crystal contact technique may be carried out again. Alternatively, a dopant may be added while the seed crystal contact technique is carried out.
    Type: Grant
    Filed: August 18, 1999
    Date of Patent: September 4, 2001
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Ken Hamada, Hiroyuki Tanabe
  • Patent number: 5739671
    Abstract: A charge state detecting device has a battery device including a plurality of batteries connected in series, a current sensor which detects a current flowing from the battery device, and a voltage sensor which detects the voltage of each of the batteries. A main controller calculates a correlation between discharge current and battery voltage, and provides an estimated voltage of each battery of the batteries under a constant energy discharge, based on the correlation. The estimated voltages for the batteries are used for deriving the capacity of each battery with reference to a voltage-capacity characteristic, which is stored in advance. The main controller supplies to a display indicator the minimum one of the derived capacities to warn of an impending need to charge the batteries.
    Type: Grant
    Filed: May 15, 1996
    Date of Patent: April 14, 1998
    Assignee: Nippondenso Co., Ltd.
    Inventor: Ken Hamada
  • Patent number: 5475670
    Abstract: A deflection plate for deflecting laser beams includes a transparent plate on which two grating areas are formed on the same surface. The first grating area has a plurality of parallel grooves. The second grating area has a plurality of grooves in a predetermined pattern. The depth and/or the duty ratio of the grooves in the first grating area differs from that in the second grating area.
    Type: Grant
    Filed: September 29, 1993
    Date of Patent: December 12, 1995
    Assignee: Matsushita Electronics Corporation
    Inventors: Ken Hamada, Hideyuki Nakanishi, Hirokazu Shimizu
  • Patent number: 4745611
    Abstract: A BTRS (buried Twin-Ridge Substrate) structure laser, wherein an oblong protrusion (10) is provided on a substrate (1) of a first conductivity type and two ridges (9, 9) divided by a groove (31) therebetween are provided on a second layer (2) of a second conductivity type, and thereon plural layers (3, 4, 5, 6) including an active layer (4) are provided is improved to have longer service life such that: the protrusion (10) is shortened so as to have its both ends apart inside cavity facet of the substrate (1), or further by width of each ridge (9, 9) is narrowed at both ends thereof thereby forming narrowed end parts (9', 9'), so that excessive current injection to the active layer near the cavity facet is eliminated.
    Type: Grant
    Filed: October 24, 1986
    Date of Patent: May 17, 1988
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Ken Hamada, Kunio Itoh, Masahiro Kume, Takao Shibutani, Hirokazu Shimizu