Patents by Inventor Ken Harada

Ken Harada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210233741
    Abstract: An observation apparatus and method that avoids drawbacks of a Lorentz method and observes a weak scatterer or a phase object with in-focus, high resolution, and no azimuth dependency, by a Foucault method observation using a hollow-cone illumination that orbits and illuminates an incident electron beam having a predetermined inclination angle, an electron wave is converged at a position (height) of an aperture plate downstream of a sample and a bright field condition in which a direct transmitted electron wave of the sample passes through the aperture plate, a dark field condition in which the transmitted electron wave is shielded and a Schlieren condition in which approximately half of the transmitted wave is shielded as a boundary condition of both of the above conditions are controlled, and a spatial resolution of the observation image is controlled by selecting multiple diameters and shapes of the opening of the aperture plate.
    Type: Application
    Filed: July 26, 2019
    Publication date: July 29, 2021
    Inventors: Ken Harada, Keiko Shimada, Shigeo Mori, Atsuhiro Kotani
  • Patent number: 11066627
    Abstract: According to the present invention, there is provided a cleaning agent composition for a semiconductor device substrate including at least one of wiring and an electrode in which the wiring and the electrode contain cobalt or a cobalt alloy, the cleaning agent composition including a component (A): at least one compound selected from the group consisting of specific compounds; and a component (B): water.
    Type: Grant
    Filed: September 13, 2019
    Date of Patent: July 20, 2021
    Assignee: Mitsubishi Chemical Corporation
    Inventors: Tomohiro Kusano, Ken Harada, Yasuhiro Kawase
  • Publication number: 20210171878
    Abstract: The present invention relates to a cleaning liquid containing a component (A): a compound represented by the following formula (1), component (B): alkylamine, component (C): polycarboxylic acid, and component (D): ascorbic acid, in which a mass ratio of the component (A) to a total mass of the component (B) and the component (C) is 1 to 15, and in the formula (1), R1, R2, and R3 each have a definition same as the definition described in the description,
    Type: Application
    Filed: February 18, 2021
    Publication date: June 10, 2021
    Applicant: Mitsubishi Chemical Corporation
    Inventors: Toshiaki SHIBATA, Yasuhiro KAWASE, Ken HARADA, Atsushi ITO, Tomohiro KUSANO, Yutaro TAKESHITA
  • Patent number: 11024482
    Abstract: A lensless Fourier transform holography high accuracy reconstruction method using a charged particle beam apparatus which holds a sample on a diffraction surface of a diffraction grating provided on the downstream side of a traveling direction of the charged particle beam and which is formed of a material having permeability. The charged particle beam passed through the diffraction surface is image-formed, and the formed image is detected. An opening region of the diffraction grating is smaller than an irradiation region of the charged particle beam on the diffraction grating. Image data is obtained in a state where the irradiation region of the charged particle beam diffracted with the diffraction grating is within the irradiation region of the charged particle beam transmitted through the diffraction grating. Plural holograms obtained based on the image data are Fourier transformed and an intensity distribution image is displayed and stored.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: June 1, 2021
    Assignee: RIKEN
    Inventors: Ken Harada, Kodai Niitsu, Keiko Shimada
  • Publication number: 20210151827
    Abstract: The present invention relates to: a shape correction device for a frame body; and a method for manufacturing an electrolyte film/electrode structure that is provided with a resin frame for a fuel cell. A shape correction device, which corrects the shape of a frame body that is provided with a rectangular opening, is equipped with a pressing mechanism that applies, to each side of the frame body, a pressing force directed from the inner side to the outer side of the opening. The pressing mechanism may have a first bar and a second bar, which apply the pressing force by being in contact with inner wall surfaces of each side of the frame body.
    Type: Application
    Filed: June 19, 2018
    Publication date: May 20, 2021
    Inventors: Ken Harada, Satoshi Hasegawa, Sachio Suzuki, Kouya Shimada, Nobuyoshi Muromoto, Hiroshi Yoshioka
  • Patent number: 11011344
    Abstract: An interferometric electron microscope with increased irradiating electric current density which causes electron waves to interfere with each other and includes: an electron source; an irradiating lens system a focusing lens system an observational plane an artificial grating disposed between the electron source and the irradiating lens system and diffracting the electron beam emitted from the electron source to produce a first electron wave and a second electron wave; an electron beam biprism deflecting the first electron wave and the second electron wave to pass the first electron wave through the specimen for use as an object wave and to use the second electron wave as a reference wave; and an electron beam biprism in a focusing system deflecting the objective wave and the reference wave to superimpose the objective wave and the reference wave on the observational plane to produce an image.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: May 18, 2021
    Assignees: HITACHI, LTD., RIKEN
    Inventors: Toshiaki Tanigaki, Tetsuya Akashi, Ken Harada
  • Patent number: 10948426
    Abstract: The density difference of particle beam irradiation with two optical statuses is produced utilizing a diffraction effect, within the same field of vision, such that a diffraction grating manufactured with a material which passes through a particle beam is provided on the upper side of a specimen and on the lower side of the irradiation optical system. Further, a region wider than the opening region of the diffraction grating is irradiated with the particle beam to produce the density difference of the particle beam emitted to the specimen, by superposing the particle beam, Bragg-diffracted with the opening region, and the particle beam, transmitted through the outer peripheral part of the opening region without being diffracted, with each other, and emitting the beam to the specimen.
    Type: Grant
    Filed: April 6, 2017
    Date of Patent: March 16, 2021
    Assignee: RIKEN
    Inventors: Ken Harada, Keiko Shimada, Kodai Niitsu
  • Patent number: 10770264
    Abstract: An interference optical system unit includes at least one electromagnetic lens that forms an image of a charged particle beam, at least one charged particle beam biprism, and a support member for the electromagnetic lens and the charged particle beam biprism. The electromagnetic lens, the charged particle beam biprism, the support member, and a space to an image plane of the electromagnetic lens are integrally configured as one unit. The interference optical system unit is disposed to have an optical axis coaxialized with an optical axis of an imaging optical system of an upstream stage that is disposed on an upstream side of the unit in a flow direction of the charged particle beam. A focal length of the electromagnetic lens and a deflection angle of the charged particle beam given by the charged particle beam biprism are controlled to generate an interference fringe of the charged particle beam on the image plane of the electromagnetic lens.
    Type: Grant
    Filed: March 21, 2019
    Date of Patent: September 8, 2020
    Assignee: RIKEN
    Inventors: Yoh Iwasaki, Ken Harada, Keiko Shimada
  • Publication number: 20200273657
    Abstract: An interferometric electron microscope with increased irradiating electric current density which causes electron waves to interfere with each other and includes: an electron source; an irradiating lens system a focusing lens system an observational plane an artificial grating disposed between the electron source and the irradiating lens system and diffracting the electron beam emitted from the electron source to produce a first electron wave and a second electron wave; an electron beam biprism deflecting the first electron wave and the second electron wave to pass the first electron wave through the specimen for use as an object wave and to use the second electron wave as a reference wave; and an electron beam biprism in a focusing system deflecting the objective wave and the reference wave to superimpose the objective wave and the reference wave on the observational plane to produce an image.
    Type: Application
    Filed: February 11, 2020
    Publication date: August 27, 2020
    Inventors: Toshiaki TANIGAKI, Tetsuya AKASHI, Ken HARADA
  • Publication number: 20200231900
    Abstract: A cleaning liquid containing at least one surfactant (A) selected from the group consisting of a polyoxyalkylene alkyl ether phosphoric acid, a polyoxyalkylene alkyl ether acetic acid and a polyoxyalkylene alkyl ether sulfonic acid and a chelating agent (C), which has a pH of 8 or more, and a cleaning liquid containing an oxidizing agent (B) and a chelating agent (C), which has a pH of 8 or more.
    Type: Application
    Filed: March 31, 2020
    Publication date: July 23, 2020
    Applicant: Mitsubishi Chemical Corporation
    Inventors: Ken HARADA, Yutaro TAKESHITA, Toshiaki SHIBATA, Kan TAKESHITA
  • Publication number: 20200105498
    Abstract: A lensless Fourier transform holography high accuracy reconstruction method using a charged particle beam apparatus which holds a sample on a diffraction surface of a diffraction grating provided on the downstream side of a traveling direction of the charged particle beam and which is formed of a material having permeability. The charged particle beam passed through the diffraction surface is image-formed, and the formed image is detected. An opening region of the diffraction grating is smaller than an irradiation region of the charged particle beam on the diffraction grating. Image data is obtained in a state where the irradiation region of the charged particle beam diffracted with the diffraction grating is within the irradiation region of the charged particle beam transmitted through the diffraction grating. Plural holograms obtained based on the image data are Fourier transformed and an intensity distribution image is displayed and stored.
    Type: Application
    Filed: March 22, 2018
    Publication date: April 2, 2020
    Inventors: Ken HARADA, Kodai NIITSU, Keiko SHIMADA
  • Patent number: 10535497
    Abstract: An electron microscope for observation by illuminating an electron beam on a specimen, includes: an edge element disposed in a diffraction plane where a direct beam not diffracted by but transmitted through the specimen converges or a plane equivalent to the diffraction plane; and a control unit for controlling the electron beam or the edge element. The edge element includes a blocking portion for blocking the electron beam, and an aperture for allowing the passage of the electron beam. The aperture is defined by an edge of the blocking portion in a manner that the edge surrounds a convergence point of the direct beam in the diffraction plane. The control unit varies contrast of an observation image by shifting, relative to the edge, the convergence point of the direct beam along the edge while maintaining a predetermined distance between the convergence point of the direct beam and the edge.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: January 14, 2020
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Hirokazu Tamaki, Ken Harada, Keiji Tamura, Yoshifumi Taniguchi, Hiroto Kasai, Toshie Yaguchi, Takafumi Yotsuji
  • Publication number: 20200002652
    Abstract: According to the present invention, there is provided a cleaning agent composition for a semiconductor device substrate including at least one of wiring and an electrode in which the wiring and the electrode contain cobalt or a cobalt alloy, the cleaning agent composition including a component (A): at least one compound selected from the group consisting of specific compounds; and a component (B): water.
    Type: Application
    Filed: September 13, 2019
    Publication date: January 2, 2020
    Applicant: Mitsubishi Chemical Corporation
    Inventors: Tomohiro KUSANO, Ken HARADA, Yasuhiro KAWASE
  • Publication number: 20190295816
    Abstract: An interference optical system unit includes at least one electromagnetic lens that forms an image of a charged particle beam, at least one charged particle beam biprism, and a support member for the electromagnetic lens and the charged particle beam biprism. The electromagnetic lens, the charged particle beam biprism, the support member, and a space to an image plane of the electromagnetic lens are integrally configured as one unit. The interference optical system unit is disposed to have an optical axis coaxialized with an optical axis of an imaging optical system of an upstream stage that is disposed on an upstream side of the unit in a flow direction of the charged particle beam. A focal length of the electromagnetic lens and a deflection angle of the charged particle beam given by the charged particle beam biprism are controlled to generate an interference fringe of the charged particle beam on the image plane of the electromagnetic lens.
    Type: Application
    Filed: March 21, 2019
    Publication date: September 26, 2019
    Inventors: Yoh IWASAKI, Ken HARADA, Keiko SHIMADA
  • Publication number: 20190196070
    Abstract: The density difference of particle beam irradiation with two optical statuses is produced utilizing a diffraction effect, within the same field of vision, such that a diffraction grating manufactured with a material which passes through a particle beam is provided on the upper side of a specimen and on the lower side of the irradiation optical system. Further, a region wider than the opening region of the diffraction grating is irradiated with the particle beam to produce the density difference of the particle beam emitted to the specimen , by superposing the particle beam, Bragg-diffracted with the opening region , and the particle beam, transmitted through the outer peripheral part of the opening region without being diffracted, with each other, and emitting the beam to the specimen .
    Type: Application
    Filed: April 6, 2017
    Publication date: June 27, 2019
    Inventors: Ken HARADA, Keiko SHIMADA, Kodai NIITSU
  • Publication number: 20190131107
    Abstract: An electron microscope for observation by illuminating an electron beam on a specimen, includes: an edge element disposed in a diffraction plane where a direct beam not diffracted by but transmitted through the specimen converges or a plane equivalent to the diffraction plane; and a control unit for controlling the electron beam or the edge element. The edge element includes a blocking portion for blocking the electron beam, and an aperture for allowing the passage of the electron beam. The aperture is defined by an edge of the blocking portion in a manner that the edge surrounds a convergence point of the direct beam in the diffraction plane. The control unit varies contrast of an observation image by shifting, relative to the edge, the convergence point of the direct beam along the edge while maintaining a predetermined distance between the convergence point of the direct beam and the edge.
    Type: Application
    Filed: August 22, 2016
    Publication date: May 2, 2019
    Inventors: Hirokazu TAMAKI, Ken HARADA, Keiji TAMURA, Yoshifumi TANIGUCHI, Hiroto KASAI, Toshie YAGUCHI, Takafumi YOTSUJI
  • Patent number: 10210962
    Abstract: The outer shape and size of a diffraction grating including an edge dislocation is made smaller than the irradiation areas of light waves and electromagnetic waves, by using an opener different from in the diffraction grating, the shape and size of the opening is superposed on the shape of a spiral wave that is generated by an edge dislocation diffraction grating, and the shape and size of the opening are reflected in the shape and size of the spiral wave on the diffractive surface. In addition, not only a diffraction grating system including a pair of a single opener and a single diffraction grating, but also a diffraction grating system in which plural openers and plural edge dislocation diffraction gratings are combined are used, and plural spiral waves can be generated on the diffractive surface with a higher degree of freedom.
    Type: Grant
    Filed: February 5, 2014
    Date of Patent: February 19, 2019
    Assignee: HITACHI , LTD.
    Inventors: Ken Harada, Teruo Kohashi, Tomohiro Iwane
  • Patent number: 10113141
    Abstract: An object of the present invention is to provide a good cleaning liquid for semiconductor device which is used after a CMP step, and the present invention relates to a cleaning liquid for semiconductor device containing the following components (1) to (5) or (1)? to (4)?: (1) an inorganic alkali; (2) a chelating agent; (3) an anionic surfactant selected from sulfonic acid type and sulfuric acid type anionic surfactants; (4) an amine oxide type surfactant; and (5) water, or (1)? an inorganic alkali; (2)? a carboxyl group-containing chelating agent; (3)? an anionic surfactant selected from a benzenesulfonic acid substituted with an alkyl group having from 8 to 20 carbon atoms and a salt thereof; and (4)? water.
    Type: Grant
    Filed: August 18, 2014
    Date of Patent: October 30, 2018
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Ken Harada, Atsushi Ito, Toshiyuki Suzuki
  • Patent number: 9864114
    Abstract: Although, conventionally, there were two methods, (1) a wave was transmitted through a spiral phase plate and (2) a diffraction grating containing an edge dislocation was used, they incurred complication of a configuration and securement of a larger amount of space and were not efficient because each of the spiral wave generation methods needed an incident wave to be a plane wave and at least one time of imaging is necessary at the time of wave irradiation on an observation object. In order to efficiently generate the spiral wave having a sufficient intensity, a structure of edge dislocation is taken in into a pattern of the zone plate and a spiral pattern containing a discontinuous zone is formed. Moreover, a thickness and a quality of material that change the phase of the wave by an odd multiple of ? are selected for a material of the wave-blocking section in the pattern.
    Type: Grant
    Filed: September 28, 2011
    Date of Patent: January 9, 2018
    Assignee: HITACHI, LTD.
    Inventors: Ken Harada, Teruo Kohashi
  • Publication number: 20170194065
    Abstract: The outer shape and size of a diffraction grating including an edge dislocation is made smaller than the irradiation areas of light waves and electromagnetic waves, by using an opener different from in the diffraction grating, the shape and size of the opening is superposed on the shape of a spiral wave that is generated by an edge dislocation diffraction grating, and the shape and size of the opening are reflected in the shape and size of the spiral wave on the diffractive surface. In addition, not only a diffraction grating system including a pair of a single opener and a single diffraction grating, but also a diffraction grating system in which plural openers and plural edge dislocation diffraction gratings are combined are used, and plural spiral waves can be generated on the diffractive surface with a higher degree of freedom.
    Type: Application
    Filed: February 5, 2014
    Publication date: July 6, 2017
    Applicant: HITACHI, LTD.
    Inventors: Ken HARADA, Teruo KOHASHI, Tomohiro IWANE