Abstract: A substrate processing apparatus which can remove foreign matters attached to the entire upper surface of a substrate such as a wafer is disclosed. The substrate processing apparatus includes: a substrate holding apparatus; and a processing head configured to scrub an upper surface of a substrate. The substrate holding apparatus includes: a substrate holder configured to hold the substrate; and a substrate rotating mechanism configured to rotate the substrate held by the substrate holder. The substrate holder is disposed below the upper surface of the substrate so as not to project above the upper surface of the substrate in a state where the substrate is held by the substrate holder.

Abstract: A receiver (20) includes a processing unit (22) that processes a received signal including a plurality of frames, a section identification unit (25) that identifies a first section being a bootstrap in each of the frames based on the received signal, and a control unit (26) that operates the processing unit (22) in the first section of the frame and does not operate the processing unit (22) in a second section of the frame different from the first section during a standby state.

Abstract: A method of producing a positive-electrode active material for a non-aqueous electrolyte secondary battery is provided. The method includes obtaining a precipitate containing nickel and manganese from a solution containing nickel and manganese, heat-treating the resulting precipitate at a temperature of from 850° C. to less than 1100° C. to obtain a first heat-treated product, mixing the first heat-treated product and a lithium compound, and heat-treating the resulting lithium-containing mixture at a temperature of from 550° C. to 1000° C. to obtain a second heat-treated product. The second heat-treated product contains a group of lithium transition metal composite oxide particles having an average particle diameter DSEM of from 0.5 ?m to less than 3 ?m and D50/DSEM of 1 to 2.5. The lithium transition metal composite oxide particles have a spinel structure based on nickel and manganese.

Abstract: A polishing apparatus and a polishing method capable of detecting whether a polishing tool has been brought into contact with a substrate, such as a wafer, and further capable of detecting a position of the polishing tool are disclosed. The polishing apparatus includes a substrate holder configured to hold a substrate, a pressing member configured to press a polishing tool against a surface of the substrate, an actuator configured to apply a pressing force to the pressing member, a motor-drive moving device configured to move the pressing member along the surface of the substrate, and a monitoring device configured to emit an alarm if a motor current supplied to the motor-drive moving device is smaller than a threshold value.

Abstract: A processor obtains a first measurement value representing prediction performance of a model that has been learned by using a first parameter value and training data of first size. The processor calculates a first expected value and a first variance degree of prediction performance of a model that would be learned by using the first parameter value and training data of second size. The processor also obtains a second measurement value representing prediction performance of a model that has been learned by using a second parameter value and training data of the first size. The processor calculates a second expected value and a second variance degree of prediction performance of a model that would be learned by using the second parameter value and training data of the second size.

Abstract: Provided is a jig for assisting the dismounting and mounting of a top ring. One embodiment provides a jig for mounting/dismounting at least a part of the top ring for holding a substrate. The jig comprises a movable plate for supporting at least a part of the top ring, which is in a dismounted state, a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring, and a drive mechanism for moving the movable plate in a direction toward and away from the top ring.

Abstract: A method of producing a positive electrode active material for a nonaqueous electrolyte secondary battery, the method includes preparing nickel-containing composite oxide particles having a ratio 1D90/1D10 of a 90% particle size 1D90 to a 10% particle size 1D10 in volume-based cumulative particle size distribution of 3 or less; obtaining a raw material mixture containing the composite oxide particles and a lithium compound and having a ratio of a total number of moles of lithium to a total number of moles of metal elements contained in the composite oxide in a range of 1 to 1.3; subjecting the raw material mixture to a heat treatment to obtain a heat-treated material; subjecting the heat-treated material to a dry-dispersion treatment to obtain a first dispersion; and bringing the first dispersion into contact with a liquid medium to obtain a second dispersion.

Abstract: A method of producing a positive-electrode active material for a non-aqueous electrolyte secondary battery is provided. The method includes obtaining a precipitate containing nickel and manganese from a solution containing nickel and manganese, heat-treating the resulting precipitate at a temperature of from 850° C. to less than 1100° C. to obtain a first heat-treated product, mixing the first heat-treated product and a lithium compound, and heat-treating the resulting lithium-containing mixture at a temperature of from 550° C. to 1000° C. to obtain a second heat-treated product. The second heat-treated product contains a group of lithium transition metal composite oxide particles having an average particle diameter DSEM of from 0.5 ?m to less than 3 ?m and D50/DSEM of 1 to 2.5. The lithium transition metal composite oxide particles have a spinel structure based on nickel and manganese.

Abstract: A method of producing a positive electrode active material for a nonaqueous electrolyte secondary battery, the method includes preparing nickel-containing composite oxide particles having a ratio 1D90/1D10 of a 90% particle size 1D90 to a 10% particle size 1D10 in volume-based cumulative particle size distribution is 3 or less; mixing the composite oxide particles and a lithium compound to obtain a first mixture; subjecting the first mixture to a first heat treatment at a first temperature and a second heat treatment at a second temperature higher than the first temperature to obtain a first heat-treated product; and subjecting the first heat-treated material to a dispersion treatment.

Abstract: An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Abstract: In a receiver that receives signals of the ATSC 3.0 standard, a terrestrial digital broadcasting signal is extracted from the received signals. A reception unit performs reception processing of sequentially receiving a predetermined number of reception target frames, each of which is a transmission unit of the terrestrial digital broadcasting signal. A reception interval acquisition unit obtains, as a reception interval, an interval between respective reception start timings of the predetermined number of reception target frames. A frame length acquisition unit acquires a frame length of each of the reception target frames on the basis of the reception target frames. A reception control unit stops the reception processing for a period of a length of a difference between the reception interval and the frame length.

Abstract: Provided is an ejection apparatus including: an ejection head having an ejection opening for ejecting an ejection material in a liquid state; a storage container storing therein the ejection material and communicating with the ejection head; and a pressure control unit that maintains the pressure inside the storage container at a negative pressure. The pressure control unit generates a first pressure in the storage container in a normal operation, the first pressure being capable of forming a meniscus of the ejection material in the ejection opening. The pressure control unit drops the pressure inside the storage container to at least the first pressure in a case where the pressure inside the storage container reaches a predetermined pressure above the first pressure.

Abstract: A semiconductor manufacturing system includes: a local operation terminal that displays an apparatus screen of a semiconductor manufacturing apparatus; at least one remote operation terminals that are connected to the semiconductor manufacturing apparatus via a network, and display the apparatus screen; and a controller that controls the semiconductor manufacturing apparatus based on an operation received from a user by the local operation terminal and the remote operation terminal that display the apparatus screen. The control device includes: a login state managing unit; an apparatus screen display state managing unit; and a screen data creating unit that creates screen data of the apparatus screen based on the simultaneous login state and the apparatus screen display state.

Abstract: A method of producing a positive electrode active material for a nonaqueous electrolyte secondary battery, the method includes preparing nickel-containing composite oxide particles having a ratio 1D90/1D10 of a 90% particle size 1D90 to a 10% particle size 1D10 in volume-based cumulative particle size distribution of 3 or less; obtaining a raw material mixture containing the composite oxide particles and a lithium compound and having a ratio of a total number of moles of lithium to a total number of moles of metal elements contained in the composite oxide in a range of 1 to 1.3; subjecting the raw material mixture to a heat treatment to obtain a heat-treated material; subjecting the heat-treated material to a dry-dispersion treatment to obtain a first dispersion; and bringing the first dispersion into contact with a liquid medium to obtain a second dispersion.

Abstract: An electrode for nonaqueous electrolyte secondary batteries, provided with a collector and a positive electrode active material layer arranged on the collector and contains a positive electrode active material. The positive electrode active material contains compound particles which have a layered structure composed of two or more transition metals, and which have an average particle diameter DSEM of from 1 ?m to 7 ?m (inclusive) based on the observation with an electron microscope, a ratio of the 50% particle diameter D50 in a volume-based cumulative particle size distribution to the average particle diameter DSEM, namely D50/DSEM of from 1 to 4 (inclusive), and a ratio of the 90% particle diameter D90 in the volume-based cumulative particle size distribution to the 10% particle diameter D10 in the volume-based cumulative particle size distribution, namely D90/D10 of 4 or less. The positive electrode active material layer has a void fraction of 10-45%.

Abstract: A method of producing a positive electrode active material for a nonaqueous electrolyte secondary battery, the method includes preparing nickel-containing composite oxide particles having a ratio 1D90/1D10 of a 90% particle size 1D90 to a 10% particle size 1D10 in volume-based cumulative particle size distribution is 3 or less; mixing the composite oxide particles and a lithium compound to obtain a first mixture; subjecting the first mixture to a first heat treatment at a first temperature and a second heat treatment at a second temperature higher than the first temperature to obtain a first heat-treated product; and subjecting the first heat-treated material to a dispersion treatment.

Abstract: An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Abstract: To provide an automated apparatus for conveying a rectangular substrate. According to one embodiment, there is provided a substrate conveying apparatus for conveying the rectangular substrate. The substrate conveying apparatus includes a plurality of conveyance rollers, a plurality of roller shafts, a motor, and a pusher. The plurality of conveyance rollers are configured to support a lower surface of the substrate. To the plurality of roller shafts, the plurality of conveyance rollers are mounted. The motor is configured to rotate the plurality of roller shafts. The pusher is for lifting the substrate on the plurality of conveyance rollers such that the substrate is separated away from the plurality of conveyance rollers. The pusher includes a stage configured to pass through a clearance between the plurality of roller shafts.

Abstract: A positive-electrode active material for a non-aqueous electrolyte secondary battery is provided. The positive-electrode active material contains a lithium transition metal composite oxide having a spinel structure and containing nickel and manganese. The lithium transition metal composite oxide has a surface region containing niobium as a solid solution. A mole ratio of an amount of niobium to a total amount of nickel and manganese in the surface region decreases according to a distance from a surface in a depth direction in a region from the surface to a distance of 0.3 nm in the depth direction.

Abstract: An imprint method of molding an imprint material on a shot region of a substrate using a mold, includes aligning the shot region and the mold in a state where the imprint material and a pattern region of the mold are in contact with each other; and curing the imprint material by irradiating the imprint material with curing light after the aligning. The aligning is controlled so as to include an overlap period during which a period during which deformation light used to deform the shot region is applied to the substrate through the imprint material and a period during which polymerization light used to increase a viscosity of the imprint material is applied to the imprint material overlap each other. The polymerization light to be applied to the imprint material is controlled in accordance with the deformation light to be applied to the imprint material during the overlap period.