Patents by Inventor Kenichi Ohno
Kenichi Ohno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11976002Abstract: Embodiments of the present disclosure generally relate to encapsulated optical devices and methods for fabricating the encapsulated optical devices. In one or more embodiments, a method for encapsulating an optical device includes depositing a metallic silver layer on a substrate, depositing a barrier layer on the metallic silver layer, where the barrier layer contains silicon nitride, a metallic element, a metal nitride, or any combination thereof, and depositing an encapsulation layer containing silicon oxide on the barrier layer.Type: GrantFiled: January 5, 2021Date of Patent: May 7, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Alexia Adilene Portillo Rivera, Andrew Ceballos, Kenichi Ohno, Rami Hourani, Karl J. Armstrong, Brian Alexander Cohen
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Patent number: 11976351Abstract: An optical device is provided. The optical device includes an optical device substrate having a first surface; and an optical device film disposed over the first surface of the optical device substrate. The optical device film is formed of titanium oxide. The titanium oxide is selected from the group of titanium(IV) oxide (TiO2), titanium monoxide (TiO), dititanium trioxide (Ti2O3), Ti3O, Ti2O, ?-TiOx, where x is 0.68 to 0.75, and TinO2n-1, where n is 3 to 9, the optical device film has a refractive index greater than 2.72 at a 520 nanometer (nm) wavelength, and a rutile phase of the titanium oxide comprises greater than 94 percent of the optical device film.Type: GrantFiled: March 11, 2022Date of Patent: May 7, 2024Assignee: Applied Materials, Inc.Inventors: Kenichi Ohno, Andrew Ceballos, Karl J. Armstrong, Takashi Kuratomi, Rami Hourani, Ludovic Godet
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Patent number: 11953308Abstract: A light emitting element array includes: a light emitting element group that includes plural light emitting elements; and plural lenses that are provided, corresponding to the plural light emitting elements, on a light emitting surface side of the plural light emitting elements, and that deflects light emitted from the plural light emitting elements according to a positional relation with the plural light emitting elements. Distances between central axes of light emission of the plural light emitting elements and central axes of the plural lenses corresponding to the plural light emitting elements increase from a center side of the light emitting element group toward an end side of the light emitting element group, and a degree of change in the distances decreases from the center side of the light emitting element group toward the end side of the light emitting element group.Type: GrantFiled: July 27, 2020Date of Patent: April 9, 2024Assignee: FUJIFILM Business Innovation Corp.Inventors: Shigetoshi Nakamura, Kenichi Ohno, Michiaki Murata, Tsutomu Ishii, Jiro Minabe
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Publication number: 20240094630Abstract: Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition is provided and contains a plurality of passivated nanoparticles, one or more solvents, a surface ligand, an additive, and an acrylate. Each passivated nanoparticle contains a core and one or more shells, where the core contains one or more metal oxides and the shell contains one or more passivation materials. The passivation material of the shell contains one or more silicon-containing compounds.Type: ApplicationFiled: November 28, 2023Publication date: March 21, 2024Inventors: Amita JOSHI, Andrew CEBALLOS, Kenichi OHNO, Rami HOURANI, Ludovic GODET
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Patent number: 11892771Abstract: Embodiments of the present disclosure generally relate to densified nanoimprint films and processes for making these densified nanoimprint films, as well as optical devices containing the densified nanoimprint films. In one or more embodiments, a densified nanoimprint film contains a base nanoimprint film and a metal oxide disposed on the base nanoimprint film and in between the nanoparticles. The base nanoimprint film contains nanoparticles, where the nanoparticles contain titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, hafnium oxide, chromium oxide, indium tin oxide, silicon nitride, or any combination thereof. The metal oxide contains aluminum oxide, titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, indium oxide, indium tin oxide, hafnium oxide, chromium oxide, scandium oxide, tin oxide, zinc oxide, yttrium oxide, praseodymium oxide, magnesium oxide, silicon oxide, silicon nitride, silicon oxynitride, or any combination thereof.Type: GrantFiled: December 29, 2020Date of Patent: February 6, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Andrew Ceballos, Rami Hourani, Kenichi Ohno, Yuriy Melnik, Amita Joshi
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Patent number: 11887818Abstract: Apparatus and methods to control the phase of power sources for plasma process regions in a batch process chamber. A master exciter controls the phase of the power sources during the process sequence based on feedback from the match circuits of the respective plasma sources.Type: GrantFiled: October 11, 2021Date of Patent: January 30, 2024Assignee: Applied Materials, Inc.Inventors: Tsutomu Tanaka, John C. Forster, Ran Liu, Kenichi Ohno, Ning Li, Mihaela Balseanu, Keiichi Tanaka, Li-Qun Xia
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Patent number: 11868043Abstract: Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition is provided and contains a plurality of passivated nanoparticles, one or more solvents, a surface ligand, an additive, and an acrylate. Each passivated nanoparticle contains a core and one or more shells, where the core contains one or more metal oxides and the shell contains one or more passivation materials. The passivation material of the shell contains one or more atomic layer deposition (ALD) materials, one or more block copolymers, or one or more silicon-containing compounds.Type: GrantFiled: November 16, 2021Date of Patent: January 9, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Amita Joshi, Andrew Ceballos, Kenichi Ohno, Rami Hourani, Ludovic Godet
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Publication number: 20230313380Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, an aerospace component has a body containing a nickel superalloy, a metal oxide template layer disposed on the body, and an aluminum oxide layer disposed between the body of the aerospace component and the metal oxide template layer. The metal oxide template layer contains chromium oxide, chromium oxide hydroxide, or a combination thereof. The aluminum oxide layer contains ?-Al2O3. The metal oxide template layer and the aluminum oxide layer have a corundum crystal structure and have crystal structures with a lattice mismatch of about 0.1% to about 10%.Type: ApplicationFiled: May 22, 2023Publication date: October 5, 2023Inventors: Sukti CHATTERJEE, Kenichi OHNO, Lance A. SCUDDER, Yuriy MELNIK, David A. BRITZ, Pravin K. NARWANKAR, Thomas KNISLEY, Mark SALY, Jeffrey ANTHIS
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Patent number: 11739429Abstract: Methods for refurbishing aerospace components by removing corrosion and depositing protective coatings are provided herein. In one or more embodiments, a method of refurbishing an aerospace component includes exposing the aerospace component containing corrosion to an aqueous cleaning solution. The aerospace component contains a nickel superalloy, an aluminide layer disposed on the nickel superalloy, and an aluminum oxide layer disposed on the aluminide layer. The method includes removing the corrosion from a portion of the aluminum oxide layer with the aqueous cleaning solution to reveal the aluminum oxide layer, then exposing the aluminum oxide layer to a post-rinse, and forming a protective coating on the aluminum oxide layer.Type: GrantFiled: June 4, 2021Date of Patent: August 29, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Abhishek Mandal, Nitin Deepak, Neha Gupta, Prerna Sonthalia Goradia, Ankur Kadam, Kenichi Ohno, David Alexander Britz, Lance A. Scudder
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Patent number: 11732353Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.Type: GrantFiled: April 16, 2020Date of Patent: August 22, 2023Assignee: Applied Materials, Inc.Inventors: Sukti Chatterjee, Lance A. Scudder, Yuriy Melnik, David A. Britz, Thomas Knisley, Kenichi Ohno, Pravin K. Narwankar
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Publication number: 20230235447Abstract: Embodiments of the present disclosure generally relate to composite PVD target. The target has a diameter, a connection face, a substrate face opposite the connection face, a thickness between the connection face and the substrate face, and a material distribution. The material distribution includes a silicon containing material arranged in a pattern, and a titanium containing material arranged in the pattern. The material distribution is uniform at any point along the thickness.Type: ApplicationFiled: January 20, 2023Publication date: July 27, 2023Inventors: Kenichi OHNO, Takashi KURATOMI, Ludovic GODET
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Patent number: 11697879Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method for producing a protective coating on an aerospace component includes depositing a metal oxide template layer on the aerospace component containing nickel and aluminum (e.g., nickel-aluminum superalloy) and heating the aerospace component containing the metal oxide template layer during a thermal process and/or an oxidation process. The thermal process and/or oxidation process includes diffusing aluminum contained within the aerospace component towards a surface of the aerospace component containing the metal oxide template layer, oxidizing the diffused aluminum to produce an aluminum oxide layer disposed between the aerospace component and the metal oxide template layer, and removing at least a portion of the metal oxide template layer while leaving the aluminum oxide layer.Type: GrantFiled: September 4, 2019Date of Patent: July 11, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Sukti Chatterjee, Kenichi Ohno, Lance A. Scudder, Yuriy Melnik, David A. Britz, Pravin K. Narwankar, Thomas Knisley, Mark Saly, Jeffrey Anthis
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Publication number: 20230167546Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.Type: ApplicationFiled: January 25, 2023Publication date: June 1, 2023Inventors: Sukti CHATTERJEE, Lance A. SCUDDER, Yuriy MELNIK, David Alexander BRITZ, Thomas KNISLEY, Kenichi OHNO, Pravin K. NARWANKAR
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Publication number: 20230112967Abstract: Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to an optical device layer stack, an optical device formed from the optical device layer stack, and a method of forming an optical device layer stack.Type: ApplicationFiled: September 30, 2022Publication date: April 13, 2023Inventors: Kenichi OHNO, Takashi KURATOMI
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Publication number: 20230112873Abstract: Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to a system and method of forming an optical device film. In an embodiment, a method is provided for positioning a substrate in a pre-cleaning chamber disposed in a cluster processing system and pre-cleaning the substrate to remove a native oxide layer from one or more surfaces of the substrate. The substrate is then transferred in an air free state to a deposition chamber disposed in the cluster processing system for forming an optical device film layer on the substrate.Type: ApplicationFiled: September 30, 2022Publication date: April 13, 2023Inventors: Kenichi OHNO, Visweswaren SIVARAMAKRISHNAN, Ludovic GODET
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Patent number: 11611402Abstract: A communication device according to an embodiment is capable of communicating with another communication device via a first network and a second network each transmitting radio signal data by different communication methods. The communication device includes: a first communicator capable of communicating with another communication device via the first network; a second communicator capable of communicating with another communication device via the second network; a delay parameter acquirer to acquire a delay parameter of the first network; and a delay parameter reflector to reflect the delay parameter of the first network acquired by the delay parameter acquirer on a delay parameter of the second network.Type: GrantFiled: July 23, 2020Date of Patent: March 21, 2023Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA INFRASTRUCTURE SYSTEMS & SOLUTIONS CORPORATIONInventors: Kenichi Ohno, Toshihiro Tango, Takahiro Yamaura
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Publication number: 20230002897Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.Type: ApplicationFiled: September 7, 2022Publication date: January 5, 2023Inventors: Kenichi OHNO, Eric H. LIU, Sukti CHATTERJEE, Yuriy MELNIK, Thomas KNISLEY, David Alexander BRITZ, Lance A. SCUDDER, Pravin K. NARWANKAR
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Patent number: 11509874Abstract: To provide a video projector which improves visibility in response to changes in projection environment, a video projector has an initial level setter, a level adjuster, a projection display, an image capture, and a projection histogram calculator. The initial level setter performs a prescribed initial level setting on an input video signal and outputs an initial display signal. The level adjuster adjusts the level of the initial display signal on the basis of a projection image and outputs a display signal. The image capture captures the projection image projected on a projection surface by the projection display based on the display signal. The projection histogram calculator prepares a projection histogram for each color. The level adjuster adjusts the level of the initial display signal for each color on the basis of the projection histogram.Type: GrantFiled: February 12, 2019Date of Patent: November 22, 2022Assignee: NEC Platforms, Ltd.Inventor: Kenichi Ohno
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Patent number: 11466364Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.Type: GrantFiled: October 31, 2019Date of Patent: October 11, 2022Assignee: APPLIED MATERIALS, INC.Inventors: Kenichi Ohno, Eric H. Liu, Sukti Chatterjee, Yuriy Melnik, Thomas Knisley, David Alexander Britz, Lance A. Scudder, Pravin K. Narwankar
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Publication number: 20220316044Abstract: A method of forming an optical device is provided. The method includes disposing an optical device substrate on a substrate support in a process volume of a process chamber, the optical device substrate having a first surface; and forming a first optical layer on the first surface of the optical device substrate during a first time period when the optical device substrate is on the substrate support, wherein the first optical layer comprises one or more metals in a metal-containing oxide, a metal-containing nitride, or a metal-containing oxynitride, and the first optical layer is formed without an RF-generated plasma over the optical device substrate; and forming a second optical layer with an RF-generated plasma over the first optical layer during a second time period when the optical device substrate is on the substrate support.Type: ApplicationFiled: March 18, 2022Publication date: October 6, 2022Inventors: Kenichi OHNO, Takashi KURATOMI, Fariah HAYEE, Andrew CEBALLOS, Rami HOURANI, Ludovic GODET