Patents by Inventor Kenji Matsumoto
Kenji Matsumoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11302521Abstract: A plasma processing system includes processing modules, a transfer device connected to the processing modules, and a control unit for controlling an oxygen partial pressure and a water vapor partial pressure in the transfer device. The control unit controls the oxygen partial pressure and the water vapor partial pressure in the transfer device to 127 Pa or less and 24.1 Pa or less, respectively. The processing modules include a first processing module for performing etching on the target object, a second processing module for performing surface treatment on the target object, and a third processing module for performing a deposition process on the target object. The second processing module performs the surface treatment using hydrogen radicals generated by a high frequency antenna. The high frequency antenna resonates at one half of a wavelength of a signal supplied from a high frequency power supply used in the processing system.Type: GrantFiled: April 18, 2019Date of Patent: April 12, 2022Assignee: TOKYO ELECTRON LIMITEDInventor: Kenji Matsumoto
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Publication number: 20210231908Abstract: A control device includes a processor and a storage device. The storage device stores a program that, when executed by the processor, causes the processor to perform speed control to perform speed control to cause a speed of a lens of a camera device to reach a target speed, during the speed control, obtain a current value of a current provided to an electric motor of the camera device configured to drive the lens, determine a stop moment of stopping providing the current to the electric motor according to the current value, and control to stop providing the current to the electric motor at the stop moment to cause the lens to stop at a stop position.Type: ApplicationFiled: April 16, 2021Publication date: July 29, 2021Inventors: Takashi KOYAMA, Kenichi HONJO, Kenji MATSUMOTO
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Patent number: 11020977Abstract: A printer includes an ink cartridge holding unit that holds a plurality of ink cartridges each including an ink pack and an IC chip that stores ink information, and an access unit that performs wireless communication with the IC chip of the ink cartridges held by the ink cartridge holding unit, and a printer controller, in which the IC chip stores a chip ID, and the printer controller acquires the chip ID from the IC chip of each of the plurality of ink cartridges, and executes, based on the chip ID that is acquired, processing related to the ink information with the IC chip of each of the plurality of ink cartridges.Type: GrantFiled: January 23, 2020Date of Patent: June 1, 2021Assignee: Seiko Epson CorporationInventor: Kenji Matsumoto
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Patent number: 10923333Abstract: A substrate processing apparatus includes a first mounting unit, a second mounting unit and an adjusting unit. The first mounting unit is configured to mount thereon a target substrate to be processed that is a plasma processing target. The second mounting unit is disposed to surround the first mounting unit to mount thereon a focus ring. The adjusting unit is configured to adjust a height of a peripheral portion of the target substrate with respect to a height of a central portion of the target substrate in response to consumption of the focus ring.Type: GrantFiled: July 26, 2019Date of Patent: February 16, 2021Assignee: TOKYO ELECTRON LIMITEDInventor: Kenji Matsumoto
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Patent number: 10825688Abstract: A method MT in an embodiment is a method for etching an etching target layer EL which is included in a wafer W and contains copper. The wafer W includes the etching target layer EL, and a mask MK provided on the etching target layer EL. In the method MT, the etching target layer EL is etched by repeatedly executing a sequence SQ including a first step of generating a plasma of a first gas in a processing container 12 of a plasma processing apparatus 10 in which the wafer W is accommodated, a second step of generating a plasma of a second gas in the processing container 12, and a third step of generating a plasma of a third gas in the processing container 12. The first gas contains a hydrocarbon gas, the second gas contains either a rare gas or a mixed gas of a rare gas and hydrogen gas, and the third gas contains hydrogen gas.Type: GrantFiled: June 7, 2017Date of Patent: November 3, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Shigeru Tahara, Daisuke Urayama, Kenji Matsumoto, Hidenori Miyoshi
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Publication number: 20200238721Abstract: A printer includes an ink cartridge holding unit that holds a plurality of ink cartridges each including an ink pack and an IC chip that stores ink information, and an access unit that performs wireless communication with the IC chip of the ink cartridges held by the ink cartridge holding unit, and a printer controller, in which the IC chip stores a chip ID, and the printer controller acquires the chip ID from the IC chip of each of the plurality of ink cartridges, and executes, based on the chip ID that is acquired, processing related to the ink information with the IC chip of each of the plurality of ink cartridges.Type: ApplicationFiled: January 23, 2020Publication date: July 30, 2020Inventor: Kenji MATSUMOTO
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Patent number: 10725603Abstract: A method for manufacturing a touch panel having a sensing area that includes a conductive part made up of thin-line mesh includes a step of designing the thin-line mesh, the thin-line mesh including a plurality of intersections, wherein the intersection forms therearound an acute angular area and an obtuse angular area, the acute angular area being defined between a pair of adjacently converging thin lines that forms an acute angle therebetween, the obtuse angular area being defined between a pair of adjacently converging thin lines that forms an obtuse angle therebetween, a step of filling electrically conductive ink into a printing plate by a squeezing process using a doctor blade, the printing plate having a groove pattern that conforms with the thin-line mesh, and a step of forming the conductive part by printing, in which the electrically conductive ink is transferred to a surface of a base member.Type: GrantFiled: October 29, 2018Date of Patent: July 28, 2020Assignee: JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITEDInventors: Akitoshi Sakaue, Kenji Matsumoto, Yutaka Takezawa, Yuta Hasegawa
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Publication number: 20200231705Abstract: The disclosure provides a pharmaceutical composition containing an anti-IgE antibody that suppresses the production of allergen-specific IgE antibodies and methods of use thereofType: ApplicationFiled: April 6, 2020Publication date: July 23, 2020Inventors: Hirohisa Saito, Kenji Matsumoto, Hideaki Morita, Go Ichien, Yasuhiko Koezuka, Kimishige Ishizaka
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Patent number: 10675956Abstract: When it is determined that there is an individual abnormality, in which an individual drive section is in an abnormal state, while the opening/closing body is being moved by the drive sections or the opening/closing body is stopped in an open state, the opening/closing body operation device performs a restriction control on the drive section with the individual abnormality, the restriction control restricting the movement of the opening/closing body in the closing direction. The opening/closing body operation device makes a comparison of the driving state between the drive section subjected to restriction control and another drive section, and when it is determined that the drive sections are normal with respect to each other, the opening/closing body operation device deems the opening/closing body to be in a normal state and disengages the restriction control.Type: GrantFiled: January 31, 2017Date of Patent: June 9, 2020Assignee: HI-LEX CORPORATIONInventors: Mikiya Yagi, Kenji Matsumoto, Yusaku Hirano
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Patent number: 10558312Abstract: In a touch panel having a structure in which a first layer in which a first sensor electrode in the form of a mesh of fine lines is formed and a second layer in which a second sensor electrode in the form a mesh of fine lines is formed are overlaid on one another with a transparent insulator between them, a first dummy wiring that constitutes a first mesh pattern with the first sensor electrode is formed in the first layer and a second dummy wiring that constitutes a second mesh pattern with the second sensor electrode is formed in the second layer. The first mesh pattern and the second mesh pattern are identical to each other in a pair of tiling periodicity directions and translational periods corresponding thereto.Type: GrantFiled: October 1, 2018Date of Patent: February 11, 2020Assignee: JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITEDInventors: Akitoshi Sakaue, Kenji Matsumoto
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Publication number: 20200035466Abstract: A substrate processing apparatus includes a first mounting unit, a second mounting unit and an adjusting unit. The first mounting unit is configured to mount thereon a target substrate to be processed that is a plasma processing target. The second mounting unit is disposed to surround the first mounting unit to mount thereon a focus ring. The adjusting unit is configured to adjust a height of a peripheral portion of the target substrate with respect to a height of a central portion of the target substrate in response to consumption of the focus ring.Type: ApplicationFiled: July 26, 2019Publication date: January 30, 2020Applicant: TOKYO ELECTRON LIMITEDInventor: Kenji MATSUMOTO
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Publication number: 20200035465Abstract: A substrate processing apparatus includes a substrate mounting unit, a support unit, a thickness variable layer, and a control unit. The substrate mounting unit has an upper surface that serves as a mounting surface on which a target substrate to be processed is mounted. The support unit has therein a flow path for a heat transfer medium and is configured to support the substrate mounting unit. The thickness variable layer is disposed between the substrate mounting unit and the support unit, and a thickness of the thickness variable layer changes due to expansion or shrinkage caused by a predetermined process. The control unit is configured to control the thickness of the thickness variable layer by performing the predetermined process.Type: ApplicationFiled: July 26, 2019Publication date: January 30, 2020Applicant: TOKYO ELECTRON LIMITEDInventor: Kenji Matsumoto
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Patent number: 10532065Abstract: The novel bisphosphonic acid ester derivatives represented by the following formula (1): Y—Cy—(NH)m—(CH2)n—C(X)(PO(OR1)(OR2))2??(1) wherein each symbol is as defined in the DESCRIPTION, which has an amino group substituted by a heterocyclic group or a heterocyclic group containing a nitrogen atom, and the acid moiety is esterified with a POM group, an n-butanoyloxymethyl (BuOM) group and the like, exhibit a superior direct or indirect cytotoxicity effect on tumor cells and virus infected cells.Type: GrantFiled: December 18, 2015Date of Patent: January 14, 2020Assignee: NAGASAKI UNIVERSITYInventors: Yoshimasa Tanaka, Kenji Matsumoto, Kosuke Hayashi, Yuki Sakai, Nagahiro Minato
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Patent number: 10513351Abstract: A passenger boarding bridge comprises: a walkway section which is provided at an outer tunnel of adjacent tunnels, and is movable between a walkway position and a non-walkway position located under the walkway position; and a plurality of rotary members arranged along the lengthwise direction of the outer tunnel, each of the plurality of rotary members being rotatable around a vertical rotation axis between a first rotation position at which the rotary member supports an end portion of the walkway section while at the walkway position and a second rotation position at which the rotary member does not support the end portion. In a case where at least one of adjacent rotary members of the plurality of rotary members is at the second rotation position, the adjacent rotary members partially overlap with each other when viewed in the width direction of the walkway section or in the vertical direction.Type: GrantFiled: May 17, 2017Date of Patent: December 24, 2019Assignee: SHINMAYWA INDUSTRIES, LTD.Inventors: Kenji Matsumoto, So Hirohata, Shoichi Kawabata, Takahiro Yoshimoto
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Publication number: 20190326105Abstract: A plasma processing system includes processing modules, a transfer device connected to the processing modules, and a control unit for controlling an oxygen partial pressure and a water vapor partial pressure in the transfer device. The control unit controls the oxygen partial pressure and the water vapor partial pressure in the transfer device to 127 Pa or less and 24.1 Pa or less, respectively. The processing modules include a first processing module for performing etching on the target object, a second processing module for performing surface treatment on the target object, and a third processing module for performing a deposition process on the target object. The second processing module performs the surface treatment using hydrogen radicals generated by a high frequency antenna. The high frequency antenna resonates at one half of a wavelength of a signal supplied from a high frequency power supply used in the processing system.Type: ApplicationFiled: April 18, 2019Publication date: October 24, 2019Applicant: TOKYO ELECTRON LIMITEDInventor: Kenji MATSUMOTO
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Publication number: 20190272997Abstract: A method MT in an embodiment is a method for etching an etching target layer EL which is included in a wafer W and contains copper. The wafer W includes the etching target layer EL, and a mask MK provided on the etching target layer EL. In the method MT, the etching target layer EL is etched by repeatedly executing a sequence SQ including a first step of generating a plasma of a first gas in a processing container 12 of a plasma processing apparatus 10 in which the wafer W is accommodated, a second step of generating a plasma of a second gas in the processing container 12, and a third step of generating a plasma of a third gas in the processing container 12. The first gas contains a hydrocarbon gas, the second gas contains either a rare gas or a mixed gas of a rare gas and hydrogen gas, and the third gas contains hydrogen gas.Type: ApplicationFiled: June 7, 2017Publication date: September 5, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Shigeru TAHARA, Daisuke URAYAMA, Kenji MATSUMOTO, Hidenori MIYOSHI
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Publication number: 20190185183Abstract: A passenger boarding bridge comprises: a walkway section which is provided at an outer tunnel of adjacent tunnels, and is movable between a walkway position and a non-walkway position located under the walkway position; and a plurality of rotary members arranged along the lengthwise direction of the outer tunnel, each of the plurality of rotary members being rotatable around a vertical rotation axis between a first rotation position at which the rotary member supports an end portion of the walkway section while at the walkway position and a second rotation position at which the rotary member does not support the end portion In a case where at least one of adjacent rotary members of the plurality of rotary members is at the second rotation position, the adjacent rotary members partially overlap with each other when viewed in the width direction of the walkway section or in the vertical direction.Type: ApplicationFiled: May 17, 2017Publication date: June 20, 2019Inventors: Kenji Matsumoto, So Hirohata, Shoichi Kawabata, Takahiro Yoshimoto
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Publication number: 20190138137Abstract: A method for manufacturing a touch panel having a sensing area that includes a conductive part made up of thin-line mesh includes a step of designing the thin-line mesh, the thin-line mesh including a plurality of intersections, wherein the intersection forms therearound an acute angular area and an obtuse angular area, the acute angular area being defined between a pair of adjacently converging thin lines that forms an acute angle therebetween, the obtuse angular area being defined between a pair of adjacently converging thin lines that forms an obtuse angle therebetween, a step of filling electrically conductive ink into a printing plate by a squeezing process using a doctor blade, the printing plate having a groove pattern that conforms with the thin-line mesh, and a step of forming the conductive part by printing, in which the electrically conductive ink is transferred to a surface of a base member.Type: ApplicationFiled: October 29, 2018Publication date: May 9, 2019Applicant: JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITEDInventors: Akitoshi SAKAUE, Kenji MATSUMOTO, Yutaka TAKEZAWA, Yuta HASEGAWA
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Publication number: 20190114006Abstract: In a touch panel having a structure in which a first layer in which a first sensor electrode in the form of a mesh of fine lines is formed and a second layer in which a second sensor electrode in the form a mesh of fine lines is formed are overlaid on one another with a transparent insulator between them, a first dummy wiring that constitutes a first mesh pattern with the first sensor electrode is formed in the first layer and a second dummy wiring that constitutes a second mesh pattern with the second sensor electrode is formed in the second layer. The first mesh pattern and the second mesh pattern are identical to each other in a pair of tiling periodicity directions and translational periods corresponding thereto.Type: ApplicationFiled: October 1, 2018Publication date: April 18, 2019Applicant: JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITEDInventors: Akitoshi SAKAUE, Kenji MATSUMOTO
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Publication number: 20190077234Abstract: When it is determined that there is an individual abnormality, in which an individual drive section is in an abnormal state, while the opening/closing body is being moved by the drive sections or the opening/closing body is stopped in an open state, the opening/closing body operation device performs a restriction control on the drive section with the individual abnormality, the restriction control restricting the movement of the opening/closing body in the closing direction. The opening/closing body operation device makes a comparison of the driving state between the drive section subjected to restriction control and another drive section, and when it is determined that the drive sections are normal with respect to each other, the opening/closing body operation device deems the opening/closing body to be in a normal state and disengages the restriction control.Type: ApplicationFiled: January 31, 2017Publication date: March 14, 2019Inventors: Mikiya YAGI, Kenji MATSUMOTO, Yusaku HIRANO