Patents by Inventor Kenji Matsumoto

Kenji Matsumoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140190409
    Abstract: The present disclosure relates to a film forming apparatus for forming a thin film on a surface of an object to be processed by using an organic metal raw material gas within a processing chamber configured to exhaust air, wherein a hydrophobic layer is installed on a surface of a member exposed to the atmosphere within the processing chamber.
    Type: Application
    Filed: March 11, 2014
    Publication date: July 10, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kenji MATSUMOTO, Hidenori MIYOSHI
  • Publication number: 20140183742
    Abstract: A manganese-containing film forming method for forming a manganese-containing film on an underlying layer containing silicon and oxygen includes: degassing the underlying layer formed on a processing target by thermally treating the processing target, the underlying layer containing silicon and oxygen; and forming a manganese metal film on the degassed underlying layer by chemical deposition using a gas containing a manganese compound. Forming a manganese metal film includes: setting a film formation temperature to be higher than a degassing temperature; introducing a reducing reaction gas; and forming a manganese-containing film including an interfacial layer formed in an interface with the underlying layer and a manganese metal film formed on the interfacial layer, the interfacial layer being made up of a film of at least one of a manganese silicate and a manganese oxide.
    Type: Application
    Filed: December 23, 2013
    Publication date: July 3, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Kenji MATSUMOTO
  • Publication number: 20140183743
    Abstract: A manganese metal film forming method includes: degassing an underlying layer formed on a processing target by thermally treating the processing target, the underlying layer containing silicon and oxygen; and forming a manganese metal film on the degassed underlying layer by chemical deposition using a gas containing a manganese compound. Forming a manganese metal film includes introducing a gas containing an oxidizing agent to form a partially-oxidized manganese metal film.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 3, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kenji MATSUMOTO, Peng CHANG
  • Patent number: 8714563
    Abstract: An annular elastic gasket adapted to be disposed between an insertion hole formed in a housing and a cylindrical body which is inserted into the housing via the insertion hole in such a manner that the annular elastic gasket elastically contacts an inner surface of the insertion hole and an outer circumferential surface of the cylindrical body. The annular elastic gasket comprises a hollow cylindrical gasket base body comprised of a molded body made of an elastic material, to be compressedly fitted and retained in the insertion hole, an annular seal lip portion extending in the centripetal direction from the gasket base body and an elastic extending portion which constitutes an extending base portion at an end of a tip side portion of the annular seal lip portion, being bent in such a manner that the end directs in the centripetal direction.
    Type: Grant
    Filed: June 10, 2011
    Date of Patent: May 6, 2014
    Assignee: Uchiyama Manufacturing Corp.
    Inventors: Keita Yamamoto, Kazuhiro Takahashi, Kenji Matsumoto
  • Patent number: 8709541
    Abstract: A method for forming a thin film on a surface of an object to be processed by using an organic metal raw material gas within a processing chamber configured to exhaust air includes: hydrophobizing a surface of the processing chamber by introducing a hydrophobic gas into the processing chamber without the object to be processed accommodated in the processing chamber; and forming the thin film by introducing the organic metal raw material gas into the processing chamber with the object to be processed accommodated in the processing chamber.
    Type: Grant
    Filed: July 21, 2010
    Date of Patent: April 29, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Kenji Matsumoto, Hidenori Miyoshi
  • Publication number: 20140103529
    Abstract: In order to obtain a semiconductor device having an embedded electrode with low cost and high reliability, a semiconductor device manufacturing method includes forming a first film made of a metal oxide within an opening which is formed in an insulating film formed on a surface of a substrate; performing a hydrogen radical treatment by irradiating atomic hydrogen to the first film; forming a second film made of a metal within the opening after the performing of the hydrogen radical treatment; and forming an electrode made of a metal within the opening after the forming of the second film.
    Type: Application
    Filed: December 13, 2013
    Publication date: April 17, 2014
    Applicant: Tokyo Electron Limited
    Inventors: Kenji Matsumoto, Atsushi Gomi, Tatsuo Hatano, Tatsufumi Hamada
  • Publication number: 20140084466
    Abstract: According to an embodiment of present disclosure a manganese silicate film forming method for forming a manganese silicate film by transforming metal manganese to silicate. The method includes forming a metal manganese film on a silicon-containing base by using a manganese compound gas; annealing the metal manganese film in an oxidizing atmosphere after the formation of the metal manganese film; and forming a manganese silicate film by annealing the metal manganese film in a reducing atmosphere after the annealing of the metal manganese film in the oxidizing atmosphere.
    Type: Application
    Filed: September 24, 2013
    Publication date: March 27, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kenji MATSUMOTO, Tatsufumi HAMADA
  • Publication number: 20140071444
    Abstract: A borescope includes a plurality of bending parts, a plurality of lens barrels, a plurality of joint parts, an objective lens device, a plurality of reflectors, a plurality of relay lenses, and a camera mount. The plurality of lens barrels are connected via the plurality of bending parts with predetermined bend angles, respectively. Rotation angles of the plurality of bending parts are changeable via the plurality of joint parts relative to the plurality of lens barrels. The objective lens device has an objective lens and is detachably provided at a front end side of the plurality of lens barrels. The plurality of reflectors are respectively disposed in the plurality of bending parts. The plurality of relay lenses are respectively disposed in the plurality of lens barrels. The camera mount is provided at a rear end side of the plurality of lens barrels.
    Type: Application
    Filed: August 28, 2013
    Publication date: March 13, 2014
    Applicant: HONDA MOTOR CO., LTD.
    Inventor: Kenji MATSUMOTO
  • Publication number: 20140026672
    Abstract: A sample for electron microscopy includes a base member and a sensor. The sensor is configured to measure data on the sample. The sensor includes an insulating member and a measuring element. The insulating member is deposited in or near an area of observation that is defined on a surface of the base member. The measuring element is deposited on a surface of the insulating member or over the surface of the base member and the surface of the insulating member.
    Type: Application
    Filed: July 3, 2013
    Publication date: January 30, 2014
    Inventors: Kenji MATSUMOTO, Hideo WATANABE
  • Publication number: 20130342768
    Abstract: A light modulator element includes a liquid crystal element which has a liquid crystal layer containing liquid crystal molecules aligned along a first direction, and two transparent electrodes disposed in opposition to each other with the liquid crystal layer sandwiched therebetween, and which controls the phase of linear polarization light and passing through said liquid crystal layer by applying an electric voltage between said two transparent electrodes; a polarizer plate which is disposed between a light source and said liquid crystal element and which has the transmission axis along the first direction or along a direction orthogonal to said first direction; and a rotation mechanism which supports the liquid crystal element and the polarizer plate and which rotates the liquid crystal element and the polarizer plate integrally in one unit with the optical axis of the liquid crystal element as the rotation axis.
    Type: Application
    Filed: March 9, 2012
    Publication date: December 26, 2013
    Applicant: CITIZEN HOLDINGS CO., LTD.
    Inventors: Masafumi Yokoyama, Nobuyuki Hashimoto, Makoto Kurihara, Kenji Matsumoto, Ayano Tanabe, Yuka Saito
  • Patent number: 8610061
    Abstract: A seal member to be contacted with an observation object is provided at an open end of a lens barrel so that the observation object can be attracted to the lens barrel via the seal member and fixed in direct and close contact with the lens barrel when a vacuum is created in the lens barrel by a vacuum pump. In other words, instead of providing a sample chamber, the observation object is fixed in close contact with the lens barrel to prevent relative movement therebetween by a suction force even without a sample chamber. In this configuration, the interior of the lens barrel can be maintained in a vacuum state despite the absence of a sample chamber and no adverse effect occurs during observation because the lens barrel and the observation object are not moved relative to each other by vibration.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: December 17, 2013
    Assignee: Honda Motor Co., Ltd.
    Inventor: Kenji Matsumoto
  • Publication number: 20130136859
    Abstract: A film forming method performs a film forming process on a target object having on a surface thereof an insulating layer. The film forming method includes a first thin film forming step of forming a first thin film containing a first metal, an oxidation step of forming an oxide film by oxidizing the first thin film, and a second thin film forming step of forming a second thin film containing a second metal on the oxide film.
    Type: Application
    Filed: June 24, 2011
    Publication date: May 30, 2013
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kenji Matsumoto, Shigetoshi Hosaka, Hitoshi Itoh
  • Publication number: 20130133265
    Abstract: A window regulator is provided with a driving unit, a drum, a carrier plate, a wire, and wire-ends provided at both ends of the wire. The drum has a shape of a cylinder having an upper surface, a lower surface, and a side surface. The drum has a slot portion having a length substantially the same as the length of the wire-end, and a wire-end housing portion disposed to deviate from the slot in the axial direction of the drum. The wire-end housing portion has a height substantially the same as the thickness of the wire-end, with a top surface provided on the side of the upper surface of the drum and a bottom surface provided on the side of the lower surface of the drum. The drum has a guide surface for guiding the wire-end, and a wire-end engagement portion, and a wire guide.
    Type: Application
    Filed: May 30, 2012
    Publication date: May 30, 2013
    Applicant: HI-LEX CORPORATION
    Inventors: Kenichirou SEO, Kenji MATSUMOTO
  • Patent number: 8440563
    Abstract: Provided is a film-forming method for performing a film-forming process on a surface of a target substrate to be processed in an evacuable processing chamber, a recessed portion being formed on the surface of the target substrate. The method includes a transition metal-containing film processing process in which a transition metal-containing film is formed by a heat treatment by using a source gas containing a transition metal; and a metal film forming process in which a metal film containing an element of the group VIII of the periodic table is formed.
    Type: Grant
    Filed: January 10, 2011
    Date of Patent: May 14, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Kenji Matsumoto, Yasushi Mizusawa
  • Publication number: 20130107186
    Abstract: An object of the present invention is to provide a pre-edging lens and a method for manufacturing an edged lens, wherein provisions are made to be able to maintain the cell gap of a liquid crystal lens structure constant while, in effect, eliminating the need to incorporate any spacers in the edged lens. More specifically, the invention provides a pre-edging lens and a method for manufacturing an edged lens, wherein the pre-edging lens includes a first transparent substrate, a second transparent substrate, a first sealing material which does not contain any spacer, a liquid crystal layer provided between the first transparent substrate and the second transparent substrate and sealed by the first seal, and a second seal which contains a spacer and which is disposed in a region provided between the first transparent substrate and the second transparent substrate and located outwardly of the first seal, the region being removed during edging.
    Type: Application
    Filed: April 18, 2011
    Publication date: May 2, 2013
    Inventors: Tomohiro Ando, Kenji Matsumoto, Ayano Tanabe
  • Publication number: 20130075980
    Abstract: An annular elastic gasket adapted to be disposed between an insertion hole formed in a housing and a cylindrical body which is inserted into the housing via the insertion hole in such a manner that the annular elastic gasket elastically contacts an inner surface of the insertion hole and an outer circumferential surface of the cylindrical body. The annular elastic gasket comprises a hollow cylindrical gasket base body comprised of a molded body made of an elastic material, to be compressedly fitted and retained in the insertion hole, an annular seal lip portion extending in the centripetal direction from the gasket base body and an elastic extending portion which constitutes an extending base portion at an end of a tip side portion of the annular seal lip portion, being bent in such a manner that the end directs in the centripetal direction.
    Type: Application
    Filed: June 10, 2011
    Publication date: March 28, 2013
    Inventors: Keita Yamamoto, Kazuhiro Takahashi, Kenji Matsumoto
  • Publication number: 20130037202
    Abstract: An object of the present invention is to provide electronic eyeglass and liquid crystal lens production methods that eliminate the need for forming a liquid crystal injection path in the liquid crystal lens, while making provisions so as to be able to sufficiently maintain a prescribed gap between substrates. The electronic eyeglass and liquid crystal lens production methods includes the steps of placing a sealing agent so as to form a closed planar region on at least one of first and second transparent substrates, dropping a liquid crystal material into an inside space enclosed by the sealing agent, bonding the other of the transparent substrates onto the one transparent substrate on which the liquid crystal material has been dripped, and filling a resin into a space created outside the sealing agent.
    Type: Application
    Filed: January 31, 2011
    Publication date: February 14, 2013
    Applicant: CITIZEN HOLDINGS CO., LTD.
    Inventors: Tomohiro Ando, Kenji Matsumoto, Ayano Tanabe
  • Patent number: 8354337
    Abstract: [Problems]There is provided a metal oxide film forming method capable of controlling a film thickness of a metal oxide even if the metal oxide is subject to a self-limited thickness. [Means for Solving the Problems] A metal oxide film forming method includes a process (1) of supplying a metal source gas to a surface of a base before a temperature of the base reaches a film formation temperature of a metal oxide film; and a process (2) of setting the temperature of the base to be equal to or higher than the film formation temperature and forming the metal oxide film on the base by making a reaction between the metal source gas supplied to the surface of the base and residual moisture on the surface of the base.
    Type: Grant
    Filed: May 18, 2010
    Date of Patent: January 15, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Kenji Matsumoto, Hidenori Miyoshi, Hitoshi Itoh, Hiroshi Sato
  • Patent number: 8350925
    Abstract: A display apparatus includes an image recording section which records a plurality of image data items obtained on different dates and including image data items including a person, and a control section which displays one of the image data items selected from the image data items on a display section, retrieves another one of the image data items obtained on a date different from a date of the selected image data item and including the person, and displays the another one of the image data items on the display section.
    Type: Grant
    Filed: April 1, 2010
    Date of Patent: January 8, 2013
    Assignee: Olympus Imaging Corp.
    Inventors: Kenji Matsumoto, Kuniko Morisaki, Yuka Ichikawa
  • Patent number: 8349725
    Abstract: The present invention is a method of manufacturing a semiconductor device comprising: forming a recess in an interlayer insulating film formed on a substrate surface, the recess being configured to be embedded with an upper conductive channel mainly made of copper to be electrically connected to a lower conductive channel; supplying a gas containing an organic compound of manganese, and forming a barrier layer made of a compound of manganese for preventing diffusion of copper to the interlayer insulating film, such that the barrier layer covers an exposed surface of the interlayer insulating film; after the formation of the barrier layer, supplying organic acid to the barrier layer in order to increase a ratio of manganese in the compound of manganese forming the barrier layer; after the supply of the organic acid, forming a seed layer mainly made of copper on a surface of the barrier layer; after the formation of the seed-layer, heating the substrate in order to separate out manganese from on the surface of
    Type: Grant
    Filed: February 20, 2009
    Date of Patent: January 8, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Hiroshi Sato, Hitoshi Itoh, Kenji Matsumoto