Abstract: A vapor deposition device includes a vapor deposition chamber, a heating chamber, a mixing chamber, a first reservoir for storing trichlorosilane gas, and a second reservoir for storing silane gas that reacts with hydrochloric acid gas. The heating chamber communicates with the first reservoir and the mixing chamber, heats the trichlorosilane gas and then supplies the heated gas to the mixing chamber. The mixing chamber communicates with the second reservoir and the vapor deposition chamber, mixes the heated gas supplied from the heating chamber and the silane gas and then supplies the mixed gas to the vapor deposition chamber. A temperature in the heating chamber is higher than a temperature in the mixing chamber.

Abstract: A film forming apparatus and a film forming method for suppressing a drop in the film forming speed caused by-product gas are provided. A film forming apparatus for forming a film on a wafer includes a chamber in which the wafer is located; a gas introducing member configured to introduce raw material gas into the chamber, in which the raw material gas turning into by-product gas and a substance which adheres to the surface of the wafer by reacting at a surface of the wafer; and a reverse reaction member configured to generate the raw material gas by causing the by-product gas to react in the chamber.

Abstract: A process for supplying a mixed material gas that includes a chlorosilane gas and a carrier gas to a surface of a substrate heated at 1200 to 1400° C. from a direction perpendicular to the surface is provided. A supply rate of the chlorosilane gas is equal to or more than 200 ?mol per minute per 1 cm2 of the surface of the substrate. The carrier gas includes a hydrogen gas and at least one or more gases selected from argon, xenon, krypton and neon.

Abstract: A surface treatment apparatus in which a disk-like sample-holding plate is provided inside an enclosure constituting a cylindrical circumferential wall. A cylindrical portion in an upper portion of the enclosure constitutes a material fluid supplying channel, and a channel provided on the lateral side of the sample-holding plate in the enclosure and shaped spreading as it goes farther from the cylindrical portion constitutes a fluid discharge channel. The fluid discharge channel employs a parabola curve or the like in which the position of the upper end of the outmost circumference of the sample-holding plate is defined as a focus position and the position of the upper end of the outlet that is symmetrically opposite to the focus position is defined as a reference position.

Abstract: A film forming apparatus and a film forming method for suppressing a drop in the film forming speed caused by-product gas are provided. A film forming apparatus for forming a film on a wafer includes a chamber in which the wafer is located; a gas introducing member configured to introduce raw material gas into the chamber, in which the raw material gas turning into by-product gas and a substance which adheres to the surface of the wafer by reacting at a surface of the wafer; and a reverse reaction member configured to generate the raw material gas by causing the by-product gas to react in the chamber.

Abstract: An automatic transmission hydraulic control apparatus includes an oil pump driven by an engine, a forward clutch arranged to be engaged by an engagement pressure from the oil pump at a start of the vehicle, a hydraulic pressure sensing section configured to sense a hydraulic pressure in the automatic transmission, a filling start judging section configured to judge a start of filling to the forward clutch in accordance with the sensed hydraulic pressure; and an engagement pressure control section configured to control the engagement pressure to go through a filling phase and an engagement phase. The engagement pressure control section shifts from the filling phase to the engagement phase when a predetermined time elapses from the judgment of the start of the filling to the forward clutch.

Abstract: A drive control system for an automotive vehicle includes an engine, an automatic transmission, a torque converter, a start clutch, an oil pump, a hydraulic pressure control unit, an engine control unit, an automatic engine stop/restart control unit and a torque transmission control unit configured to calculate target start clutch engagement time and torque based on an accelerator opening of the vehicle, calculate a target engine torque based on the target clutch engagement torque and cause the hydraulic control unit and the engine control unit to control the engagement state of the start clutch and the output torque of the engine according to the target clutch engagement time and torque and the target engine torque at a restart of the engine.

Abstract: In a semiconductor laser device (LD1), a semiconductor laser layer is formed on one face of a semiconductor substrate (1), and a p-type electrode (8) and an n-type electrode (11) are provided on the semiconductor laser layer side and the semiconductor substrate (1) side, respectively, so as to sandwich the semiconductor laser layer and the semiconductor substrate (1) therebetween. The p-type electrode (8) includes a first electrode (9) and a second electrode (10) that covers the first electrode (9).

Abstract: There is provided a starting clutch control apparatus which is capable of controlling transmission torque of a starting clutch according to changes in accelerator operated amount without preparing a plurality of data maps of torque coefficients in advance. A clutch controller determines a clutch instruction torque based on torque coefficient, engine speed, and engine speed correction amount, and controls the engagement state of the starting clutch according to the clutch instruction torque. Therefore, it is possible to control the engagement state of the starting clutch in response to sudden operation of an accelerator, and to finely control the degree of engine blow-up according to an accelerator operated amount.

Abstract: There is provided a starting clutch control apparatus which is capable of controlling transmission torque of a starting clutch according to changes in accelerator operated amount without preparing a plurality of data maps of torque coefficients in advance. A clutch controller determines a clutch instruction torque based on torque coefficient, engine speed, and engine speed correction amount, and controls the engagement state of the starting clutch according to the clutch instruction torque. Therefore, it is possible to control the engagement state of the starting clutch in response to sudden operation of an accelerator, and to finely control the degree of engine blow-up according to an accelerator operated amount.

Abstract: An automatic transmission hydraulic control apparatus includes an oil pump driven by an engine, a forward clutch arranged to be engaged by an engagement pressure from the oil pump at a start of the vehicle, a hydraulic pressure sensing section configured to sense a hydraulic pressure in the automatic transmission, a filling start judging section configured to judge a start of filling to the forward clutch in accordance with the sensed hydraulic pressure; and an engagement pressure control section configured to control the engagement pressure to go through a filling phase and an engagement phase. The engagement pressure control section shifts from the filling phase to the engagement phase when a predetermined time elapses from the judgment of the start of the filling to the forward clutch.

Abstract: A drive control system for an automotive vehicle includes an engine, an automatic transmission, a torque converter, a start clutch, an oil pump, a hydraulic pressure control unit, an engine control unit, an automatic engine stop/restart control unit and a torque transmission control unit configured to calculate target start clutch engagement time and torque based on an accelerator opening of the vehicle, calculate a target engine torque based on the target clutch engagement torque and cause the hydraulic control unit and the engine control unit to control the engagement state of the start clutch and the output torque of the engine according to the target clutch engagement time and torque and the target engine torque at a restart of the engine.

Abstract: An impurity precipitation region is formed by introducing an impurity, e.g., oxygen, into a silicon substrate or a silicon layer and thermally treating it, and performing high selectivity anisotropic etching with the precipitation region used as a micro mask. Thus, a cone (conic body or truncated conic body having an annular leading end) having a very sharp and slender needle shape with an aspect ratio of about 10 and a diameter of about 10 nm to 30 nm in the vicinity of its leading end is obtained with the micro mask used as the top. By forming an insulation layer and a drive electrode such as a gate electrode around the cone, the cone can be used for a field emission device, a single electron transistor, a memory device, a high frequency switching device, a probe of a scanning type microscope or the like.

Abstract: There is provided a hydraulic transmission control system for a vehicle having an automatic engine stop/restart function. The hydraulic transmission control system includes a transmission having a power transmission element, an oil pump driven in synchronism with the engine to generate an oil pressure, a pressure regulator valve that regulates the oil pressure and supplies the regulated oil pressure to the power transmission element so as to allow power transmission through the power transmission element, and a control unit that operates the pressure regulator valve to control the oil pressure supplied to the power transmission element to a higher value when the vehicle is shifted from an automatic engine stop state to an automatic engine restart state, than that when the vehicle is in a normal driving state.

Abstract: When a group purchasing application according to a group of a predetermined number of persons is received, a group purchasing key that identifies the group is issued. When a product purchasing procedure request having the group purchasing key is received from a user, a payment processing is carried out at a normal price without a discount, and a product shipping processing is carried out. After the purchasing procedure processing for all users in the group is completed, a discount amount according to the group purchasing is calculated, and a discount amount payback processing is carried out.

Abstract: An impurity precipitation region is formed by introducing an impurity, e.g., oxygen, into a silicon substrate or a silicon layer and thermally treating it, and performing high selectivity anisotropic etching with the precipitation region used as a micro mask. Thus, a cone (conic body or truncated conic body having an annular leading end) having a very sharp and slender needle shape with an aspect ratio of about 10 and a diameter of about 10 nm to 30 nm in the vicinity of its leading end is obtained with the micro mask used as the top. By forming an insulation layer and a drive electrode such as a gate electrode around the cone, the cone can be used for a field emission device, a single electron transistor, a memory device, a high frequency switching device, a probe of a scanning type microscope or the like.

Abstract: In a parallel hybrid electric vehicle, when the difference in number of revolutions between an engine and a motor/generator is smaller than a predetermined value at starting of the vehicle, an ECU sets a predetermined torque correction amount in accordance with the relationship between an engine inertia and a motor/generator inertia. The ECU carries out correction of torque of one of the engine and the motor/generator in accordance with the predetermined torque correction amount as set.

Abstract: An electric torque converter mounted on a parallel hybrid vehicle employing a parallel hybrid system, using both an internal combustion engine and an electric motor for propulsion, includes an electric motor generator having a motor generator rotor and a motor generator stator coil, and a composition-and-distribution mechanism located between the engine and a transmission for combining torque produced by the engine and torque produced by the motor generator with each other and for mechanically distributing the torque produced by the engine into the motor generator and a transmission input shaft. A converter case includes a third casing member formed with a boss portion supporting a rotating member of the composition-and-distribution mechanism by a bearing, and partitioning the motor generator from the composition-and-distribution mechanism.

Abstract: An electric torque converter mounted on a parallel hybrid vehicle employing a parallel hybrid system, using both an internal combustion engine and an electric motor for propulsion, includes an electric motor generator, and a composition-and-distribution mechanism located between the engine and a transmission for mechanically combining torque produced by the engine and torque produced by the motor generator with each other and for mechanically distributing the torque produced by the engine into the motor generator and a transmission input shaft. A converter case of the electric torque converter has a first casing member partitioning the transmission from the electric torque converter, a second casing member located between the engine and the transmission for partitioning the electric torque converter from the exterior, and a third casing member partitioning the motor generator from the composition-and-distribution mechanism.

Abstract: In a parallel hybrid electric vehicle, when the difference in number of revolutions between an engine and a motor/generator is smaller than a predetermined value at starting of the vehicle, an ECU sets a predetermined torque correction amount in accordance with the relationship between an engine inertia and a motor/generator inertia. The ECU carries out correction of torque of one of the engine and the motor/generator in accordance with the predetermined torque correction amount as set.