Patents by Inventor Kenji Yamazoe

Kenji Yamazoe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210247689
    Abstract: Methods of semiconductor device fabrication are provided. In an embodiment, a method of semiconductor device fabrication includes receiving a first mask design comprising a first mask function, determining a transmission cross coefficient (TCC) of an exposure tool, decomposing the TCC into a plurality orders of eigenvalues and a plurality orders of eigenfunctions, calculating a kernel based on the plurality orders of eigenvalues and the plurality orders of eigenfunctions; and determining a first sub-resolution assist feature (SRAF) seed map by convoluting the first mask function and the kernel.
    Type: Application
    Filed: April 26, 2021
    Publication date: August 12, 2021
    Inventors: Kenji Yamazoe, Junjiang Lei, Danping Peng
  • Patent number: 10990002
    Abstract: Methods of semiconductor device fabrication are provided. In an embodiment, a method of semiconductor device fabrication includes receiving a first mask design comprising a first mask function, determining a transmission cross coefficient (TCC) of an exposure tool, decomposing the TCC into a plurality orders of eigenvalues and a plurality orders of eigenfunctions, calculating a kernel based on the plurality orders of eigenvalues and the plurality orders of eigenfunctions; and determining a first sub-resolution assist feature (SRAF) seed map by convoluting the first mask function and the kernel.
    Type: Grant
    Filed: November 5, 2019
    Date of Patent: April 27, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kenji Yamazoe, Junjiang Lei, Danping Peng
  • Patent number: 10966597
    Abstract: Exemplary apparatus and optical systems for forward and side view apparatus are described. These apparatus include a light focusing element, a grating element inclined with respect to the optical axis of the apparatus, and a transparent element. The transparent element has a proximal surface in contact with the grating element and an inclined distal surface. Such apparatus can be used as spectrally encoded endoscopy (SEE) probes.
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: April 6, 2021
    Assignee: Canon U.S.A., Inc.
    Inventors: Kenji Yamazoe, Anderson Mach, Zhuo Wang
  • Publication number: 20210096475
    Abstract: A method of manufacturing a semiconductor device includes dividing a number of dies along an x axis in a die matrix in each exposure field in an exposure field matrix delineated on the semiconductor substrate, wherein the x axis is parallel to one edge of a smallest rectangle enclosing the exposure field matrix. A number of dies is divided along a y axis in the die matrix, wherein the y axis is perpendicular to the x axis. Sequences SNx0, SNx1, SNx, SNxr, SNy0, SNy1, SNy, and SNyr are formed. p*(Nbx+1)?2 stepping operations are performed in a third direction and first sequence exposure/stepping/exposure operations and second sequence exposure/stepping/exposure operations are performed alternately between any two adjacent stepping operations as well as before a first stepping operation and after a last stepping operation. A distance of each stepping operation in order follows the sequence SNx.
    Type: Application
    Filed: December 14, 2020
    Publication date: April 1, 2021
    Inventors: Shinn-Sheng YU, Ru-Gun LIU, Hsu-Ting HUANG, Kenji YAMAZOE, Minfeng CHEN, Shuo-Yen CHOU, Chin-Hsiang LIN
  • Publication number: 20210026237
    Abstract: Methods of semiconductor device fabrication are provided. In an embodiment, a method of semiconductor device fabrication includes receiving a first mask design comprising a first mask function, determining a transmission cross coefficient (TCC) of an exposure tool, decomposing the TCC into a plurality orders of eigenvalues and a plurality orders of eigenfunctions, calculating a kernel based on the plurality orders of eigenvalues and the plurality orders of eigenfunctions; and determining a first sub-resolution assist feature (SRAF) seed map by convoluting the first mask function and the kernel.
    Type: Application
    Filed: November 5, 2019
    Publication date: January 28, 2021
    Inventors: Kenji Yamazoe, Junjiang Lei, Danping Peng
  • Patent number: 10866525
    Abstract: A method of manufacturing a semiconductor device includes dividing a number of dies along an x axis in a die matrix in each exposure field in an exposure field matrix delineated on the semiconductor substrate, wherein the x axis is parallel to one edge of a smallest rectangle enclosing the exposure field matrix. A number of dies is divided along a y axis in the die matrix, wherein the y axis is perpendicular to the x axis. Sequences SNx0, SNx1, SNx, SNxr, SNy0, SNy1, SNy, and SNyr are formed. p*(Nbx+1)?2 stepping operations are performed in a third direction and first sequence exposure/stepping/exposure operations and second sequence exposure/stepping/exposure operations are performed alternately between any two adjacent stepping operations as well as before a first stepping operation and after a last stepping operation. A distance of each stepping operation in order follows the sequence SNx.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shinn-Sheng Yu, Ru-Gun Liu, Hsu-Ting Huang, Kenji Yamazoe, Minfeng Chen, Shuo-Yen Chou, Chin-Hsiang Lin
  • Publication number: 20200041915
    Abstract: A method of manufacturing a semiconductor device includes dividing a number of dies along an x axis in a die matrix in each exposure field in an exposure field matrix delineated on the semiconductor substrate, wherein the x axis is parallel to one edge of a smallest rectangle enclosing the exposure field matrix. A number of dies is divided along a y axis in the die matrix, wherein the y axis is perpendicular to the x axis. Sequences SNx0, SNx1, SNx, SNxr, SNy0, SNy1, SNy, and SNyr are formed. p*(Nbx+1)?2 stepping operations are performed in a third direction and first sequence exposure/stepping/exposure operations and second sequence exposure/stepping/exposure operations are performed alternately between any two adjacent stepping operations as well as before a first stepping operation and after a last stepping operation. A distance of each stepping operation in order follows the sequence SNx.
    Type: Application
    Filed: July 29, 2019
    Publication date: February 6, 2020
    Inventors: Shinn-Sheng YU, Ru-Gun LIU, Hsu-Ting HUANG, Kenji YAMAZOE, Minfeng CHEN, Shuo-Yen CHOU, Chin-Hsiang LIN
  • Patent number: 10530976
    Abstract: The present disclosure provides apparatuses and methods for color imaging and an increased field of view using spectrally encoded endoscopy techniques. At least one of the apparatuses includes an illumination unit having two or more spectrally dispersive gratings positioned, for example, on different planes or on the same plane but having grating vectors at an angle to each other such that bands of spectrally dispersed light propagating from the gratings propagate on different planes.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: January 7, 2020
    Assignee: Canon U.S.A., Inc.
    Inventors: Seiji Takeuchi, Jacob Schieffelin Brauer, Anderson Mach, Badr Elmaanaoui, Sarika Verma, Kenji Yamazoe, Toshiyuki Sudo, Michio Ishikawa
  • Patent number: 10444146
    Abstract: The present invention relates generally to apparatus and methods for endoscopy which includes a probe, a first and a second optical fiber to guide light, a third optical fiber to capture light; and a switch configured to operate the first optical fiber and second optical fiber. Light dispersed by the first optical fiber at least partially overlaps light dispersed by the second optical.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: October 15, 2019
    Assignee: CANON U.S.A., INC.
    Inventors: Kenji Yamazoe, Seiji Takeuchi
  • Publication number: 20190174038
    Abstract: The present disclosure provides apparatuses and methods for color imaging and an increased field of view using spectrally encoded endoscopy techniques. At least one of the apparatuses includes an illumination unit having two or more spectrally dispersive gratings positioned, for example, on different planes or on the same plane but having grating vectors at an angle to each other such that bands of spectrally dispersed light propagating from the gratings propagate on different planes.
    Type: Application
    Filed: December 11, 2018
    Publication date: June 6, 2019
    Inventors: Seiji TAKEUCHI, Jacob Schieffelin BRAUER, Anderson MACH, Badr ELMAANAOUI, Sarika VERMA, Kenji YAMAZOE, Toshiyuki SUDO, Michio ISHIKAWA
  • Patent number: 10288868
    Abstract: Exemplary apparatus, systems, methods of making, and methods of using a configuration in an optical arrangement for forward viewing spectrally encoded endoscopy (SEE) probe can be provided. For example, the probe can comprise a light focusing component, a light guiding component, a light reflecting component, and a grating component.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: May 14, 2019
    Assignees: CANON U.S.A., INC., THE GENERAL HOSPITAL CORPORATION
    Inventors: Guillermo J. Tearney, Dongkyun Kang, Mitsuhiro Ikuta, Kenji Yamazoe, Anderson Thi Mach, Jacob Schieffelin Brauer
  • Patent number: 10194065
    Abstract: The present disclosure provides apparatuses and methods for color imaging and an increased field of view using spectrally encoded endoscopy techniques. At least one of the apparatuses includes an illumination unit having two or more spectrally dispersive gratings positioned, for example, on different planes or on the same plane but having grating vectors at an angle to each other such that bands of spectrally dispersed light propagating from the gratings propagate on different planes.
    Type: Grant
    Filed: August 5, 2016
    Date of Patent: January 29, 2019
    Assignee: Canon U.S.A., Inc.
    Inventors: Seiji Takeuchi, Jacob Schieffelin Brauer, Anderson T. Mach, Badr Elmaanaoui, Sarika Verma, Kenji Yamazoe, Toshiyuki Sudo, Michio Ishikawa
  • Publication number: 20180372633
    Abstract: The present invention relates generally to apparatus and methods for endoscopy which includes a probe, a first and a second optical fiber to guide light, a third optical fiber to capture light; and a switch configured to operate the first optical fiber and second optical fiber. Light dispersed by the first optical fiber at least partially overlaps light dispersed by the second optical.
    Type: Application
    Filed: December 28, 2016
    Publication date: December 27, 2018
    Inventors: Kenji YAMAZOE, Seiji TAKEUCHI
  • Patent number: 10073936
    Abstract: A generation method of generating, by a computer, data of a pattern of a mask used for an exposure apparatus including a projection optical system. The method includes dividing an effective light source formed on a pupil plane of the projection optical system into a plurality of point sources; generating a plurality of shifted pupil functions by shifting a pupil function corresponding to each of the plurality of point sources by a shift amount in accordance with a position of each point source; defining a matrix by arranging each of the plurality of shifted pupil functions in each row or each column of the matrix; calculating an eigenvalue and an eigenfunction by performing singular value decomposition of the matrix; calculating a map representing, when elements of a target pattern are inserted on an object plane of the projection optical system, an influence the elements inflict on each other.
    Type: Grant
    Filed: November 14, 2014
    Date of Patent: September 11, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kenji Yamazoe
  • Publication number: 20180214008
    Abstract: Exemplary apparatus and optical systems for forward and side view apparatus are described. These apparatus include a light focusing element, a grating element inclined with respect to the optical axis of the apparatus, and a transparent element. The transparent element has a proximal surface in contact with the grating element and an inclined distal surface. Such apparatus can be sued as spectrally encoded endoscopy (SEE) probes.
    Type: Application
    Filed: August 4, 2016
    Publication date: August 2, 2018
    Applicant: Canon U.S.A., Inc.
    Inventors: Kenji Yamazoe, Anderson Mach, Zhuo Wang
  • Patent number: 9869820
    Abstract: Gradient index lenses, or GRIN lenses, are useful for collimating light from a waveguide and reducing loss when coupling two fibers or coupling the fiber to other optical components. There is provided herein a method to align a GRIN lens to the distal end of an optical fiber with precise lateral alignment. The alignment occurs by: (1) rotating the fiber with respect to the lens so that the fiber is parallel with the lens, such that a light is transmitted through the fiber and then through the lens, and (2) translating the fiber laterally with respect to the lens based on the position of a circle pattern that appears on the screen after the distal end of the lens. The transmitted light is centered in the circle pattern for centered alignment or positioned at calculate distance from the center of the circle pattern for off-axis alignment.
    Type: Grant
    Filed: December 9, 2015
    Date of Patent: January 16, 2018
    Assignee: Canon U.S.A, Inc.
    Inventors: Jeffrey Chen, Kenji Yamazoe
  • Publication number: 20170167861
    Abstract: Gradient index lenses, or GRIN lenses, are useful for collimating light from a waveguide and reducing loss when coupling two fibers or coupling the fiber to other optical components. There is provided herein a method to align a GRIN lens to the distal end of an optical fiber with precise lateral alignment. The alignment occurs by: (1) rotating the fiber with respect to the lens so that the fiber is parallel with the lens, such that a light is transmitted through the fiber and then through the lens, and (2) translating the fiber laterally with respect to the lens based on the position of a circle pattern that appears on the screen after the distal end of the lens. The transmitted light is centered in the circle pattern for centered alignment or positioned at calculate distance from the center of the circle pattern for off-axis alignment.
    Type: Application
    Filed: December 9, 2015
    Publication date: June 15, 2017
    Inventors: Jeffrey Chen, Kenji Yamazoe
  • Patent number: 9678441
    Abstract: In a method for generating, with a computer, a pattern of a mask, a pattern on an object plane of a projection optical system is set, shifted plural pupil functions are generated, a matrix containing the generated plural pupil functions is defined, an image of the pattern on the object plane is calculated by generating a vector obtained by transposing and complex-conjugating a vector containing, as components, values of the pupil functions at origin coordinates on a pupil plane from among components of the matrix, and performing convolution integral between the pattern on the object plane and a Fourier transform of a product of the vector and the matrix, an assist pattern for the pattern on the object plane is generated using the calculated image, and a pattern of the mask including the pattern on the object plane and the assist pattern is generated.
    Type: Grant
    Filed: November 10, 2014
    Date of Patent: June 13, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Kenji Yamazoe, Ryo Nakayama, Hiroyuki Ishii
  • Publication number: 20170035281
    Abstract: The present disclosure provides apparatuses and methods for color imaging and an increased field of view using spectrally encoded endoscopy techniques. At least one of the apparatuses includes an illumination unit having two or more spectrally dispersive gratings positioned, for example, on different planes or on the same plane but having grating vectors at an angle to each other such that bands of spectrally dispersed light propagating from the gratings propagate on different planes.
    Type: Application
    Filed: August 5, 2016
    Publication date: February 9, 2017
    Inventors: Seiji TAKEUCHI, Jacob Schieffelin BRAUER, Anderson T. MACH, Badr ELMAANAOUI, Sarika VERMA, Kenji YAMAZOE, Toshiyuki SUDO, Michio ISHIKAWA
  • Patent number: 9507253
    Abstract: A method for generating a pattern of a mask used for an exposure apparatus through a calculation by a processor includes applying, to a target main pattern, a reference map of a characteristic value of an image of a representative main pattern with respect to a position of a representative auxiliary pattern calculated for each of a plurality of positions while the position of the representative auxiliary pattern with respect to the representative main pattern is changed and calculating a map of the characteristic value of the image of the target main pattern with respect to a position of an auxiliary pattern, and determining the position of the auxiliary pattern by using data of the map of the characteristic value of the image of the target main pattern and generating a pattern of a mask including the target main pattern and the determined auxiliary pattern.
    Type: Grant
    Filed: June 5, 2014
    Date of Patent: November 29, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Hiroyuki Ishii, Kenji Yamazoe