Patents by Inventor Kerem Akarvardar

Kerem Akarvardar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140273423
    Abstract: One method disclosed herein includes forming a layer of silicon/germanium having a germanium concentration of at least 30% on a semiconducting substrate, forming a plurality of spaced-apart trenches that extend through the layer of silicon/germanium and at least partially into the semiconducting substrate, wherein the trenches define a fin structure for the device comprised of a portion of the substrate and a portion of the layer of silicon/germanium, the portion of the layer of silicon/germanium having a first cross-sectional configuration, forming a layer of insulating material in the trenches and above the fin structure, performing an anneal process on the device so as to cause the first cross-sectional configuration of the layer of silicon/germanium to change to a second cross-sectional configuration that is different from the first cross-sectional configuration, and forming a final gate structure around at least a portion of the layer of silicon/germanium having the second cross-sectional configuration.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Jody A. Fronheiser, Jeremy A. Wahl, Kerem Akarvardar, Ajey P. Jacob, Daniel T. Pham
  • Patent number: 8673718
    Abstract: One method involves providing a substrate comprised of first and second semiconductor materials, performing an etching process through a hard mask layer to define a plurality of trenches that define first and second portions of a fin for a FinFET device, wherein the first portion is the first material and the second portion is the second material, forming a layer of insulating material in the trenches, performing a planarization process on the insulating material, performing etching processes to remove the hard mask layer and reduce a thickness of the second portion, thereby defining a cavity, performing a deposition process to form a third portion of the fin on the second portion, wherein the third portion is a third semiconducting material that is different from the second material, and performing a process such that a post-etch upper surface of the insulating material is below an upper surface of the third portion.
    Type: Grant
    Filed: July 9, 2012
    Date of Patent: March 18, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. LiCausi, Jody A. Fronheiser, Kerem Akarvardar
  • Publication number: 20140070322
    Abstract: One illustrative method disclosed herein involves forming a first fin for a first FinFET device in and above a semiconducting substrate, wherein the first fin is comprised of a first semiconductor material that is different from the material of the semiconducting substrate and, after forming the first fin, forming a second fin for a second FinFET device that is formed in and above the semiconducting substrate, wherein the second fin is comprised of a second semiconductor material that is different from the material of the semiconducting substrate and different from the first semiconductor material.
    Type: Application
    Filed: September 13, 2012
    Publication date: March 13, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Ajey P. Jacob, Witold P. Maszara, Kerem Akarvardar
  • Publication number: 20140011341
    Abstract: One method involves providing a substrate comprised of first and second semiconductor materials, performing an etching process through a hard mask layer to define a plurality of trenches that define first and second portions of a fin for a FinFET device, wherein the first portion is the first material and the second portion is the second material, forming a layer of insulating material in the trenches, performing a planarization process on the insulating material, performing etching processes to remove the hard mask layer and reduce a thickness of the second portion, thereby defining a cavity, performing a deposition process to form a third portion of the fin on the second portion, wherein the third portion is a third semiconducting material that is different from the second material, and performing a process such that a post-etch upper surface of the insulating material is below an upper surface of the third portion.
    Type: Application
    Filed: July 9, 2012
    Publication date: January 9, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. Licausi, Jody A. Fronheiser, Kerem Akarvardar
  • Publication number: 20130309847
    Abstract: One illustrative method disclosed herein involves performing a first etching process through a patterned hard mask layer to define a plurality of spaced-apart trenches in a substrate that defines a first portion of a fin for the device, forming a layer of insulating material in the trenches and performing a planarization process on the layer of insulating material to expose the patterned hard, performing a second etching process to remove the hard mask layer and to define a cavity within the layer of insulating material, forming a second portion of the fin within the cavity, wherein the second portion of the fin is comprised of a semiconducting material that is different than the substrate, and performing a third etching process on the layer of insulating material such that an upper surface of the insulating material is below an upper surface of the second portion of the fin.
    Type: Application
    Filed: May 21, 2012
    Publication date: November 21, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. LiCausi, Jody A. Fronheiser, Kerem Akarvardar
  • Patent number: 8580642
    Abstract: One illustrative method disclosed herein involves performing a first etching process through a patterned hard mask layer to define a plurality of spaced-apart trenches in a substrate that defines a first portion of a fin for the device, forming a layer of insulating material in the trenches and performing a planarization process on the layer of insulating material to expose the patterned hard, performing a second etching process to remove the hard mask layer and to define a cavity within the layer of insulating material, forming a second portion of the fin within the cavity, wherein the second portion of the fin is comprised of a semiconducting material that is different than the substrate, and performing a third etching process on the layer of insulating material such that an upper surface of the insulating material is below an upper surface of the second portion of the fin.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: November 12, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. LiCausi, Jody A. Fronheiser, Kerem Akarvardar
  • Patent number: 8183104
    Abstract: An apparatus, system, and method for dual-channel FET devices is presented. In some embodiments, the nanowire FET device may include a first transistor on a substrate, where the first transistor includes a first group of nanowires made of silicon. The nanowire FET device may also include a second transistor on the same substrate, where the second transistor includes a second group of nanowires made of silicon-germanium.
    Type: Grant
    Filed: July 7, 2010
    Date of Patent: May 22, 2012
    Inventors: Christopher C. Hobbs, Kerem Akarvardar, Injo Ok
  • Publication number: 20120007052
    Abstract: An apparatus, system, and method for dual-channel FET devices is presented. In some embodiments, the nanowire FET device may include a first transistor on a substrate, where the first transistor includes a first group of nanowires made of silicon. The nanowire FET device may also include a second transistor on the same substrate, where the second transistor includes a second group of nanowires made of silicon-germanium.
    Type: Application
    Filed: July 7, 2010
    Publication date: January 12, 2012
    Inventors: Christopher C. Hobbs, Kerem Akarvardar, Injo OK
  • Patent number: 8010591
    Abstract: A differential output analog multiplier circuit utilizing four G4-FETs, each source connected to a current source. The four G4-FETs may be grouped into two pairs of two G4-FETs each, where one pair has its drains connected to a load, and the other par has its drains connected to another load. The differential output voltage is taken at the two loads. In one embodiment, for each G4-FET, the first and second junction gates are each connected together, where a first input voltage is applied to the front gates of each pair, and a second input voltage is applied to the first junction gates of each pair. Other embodiments are described and claimed.
    Type: Grant
    Filed: May 21, 2007
    Date of Patent: August 30, 2011
    Assignee: California Institute of Technology
    Inventors: Mohammad M. Mojarradi, Benjamin Blalock, Sorin Cristoloveanu, Suheng Chen, Kerem Akarvardar
  • Patent number: 7514964
    Abstract: An universal and programmable logic gate based on G4-FET technology is disclosed, leading to the design of more efficient logic circuits. A new full adder design based on the G4-FET is also presented. The G4-FET can also function as a unique router device offering coplanar crossing of signal paths that are isolated and perpendicular to one another. This has the potential of overcoming major limitations in VLSI design where complex interconnection schemes have become increasingly problematic.
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: April 7, 2009
    Assignee: California Institute of Technology
    Inventors: Amir Fijany, Farrokh Vatan, Kerem Akarvardar, Benjamin Blalock, Suheng Chen, Sorin Cristoloveanu, Elzbieta Kolawa, Mohammad M. Mojarradi, Nikzad Toomarian
  • Publication number: 20080001658
    Abstract: A differential output analog multiplier circuit utilizing four G4-FETs, each source connected to a current source. The four G4-FETs may be grouped into two pairs of two G4-FETs each, where one pair has its drains connected to a load, and the other par has its drains connected to another load. The differential output voltage is taken at the two loads. In one embodiment, for each G4-FET, the first and second junction gates are each connected together, where a first input voltage is applied to the front gates of each pair, and a second input voltage is applied to the first junction gates of each pair. Other embodiments are described and claimed.
    Type: Application
    Filed: May 21, 2007
    Publication date: January 3, 2008
    Inventors: Mohammad Mojarradi, Benjamin Blalock, Sorin Cristoloveanu, Suheng Chen, Kerem Akarvardar
  • Publication number: 20070008013
    Abstract: An universal and programmable logic gate based on G4-FET technology is disclosed, leading to the design of more efficient logic circuits. A new full adder design based on the G4-FET is also presented. The G4-FET can also function as a unique router device offering coplanar crossing of signal paths that are isolated and perpendicular to one another. This has the potential of overcoming major limitations in VLSI design where complex interconnection schemes have become increasingly problematic.
    Type: Application
    Filed: March 15, 2006
    Publication date: January 11, 2007
    Inventors: Amir Fijany, Farrokh Vatan, Kerem Akarvardar, Benjamin Blalock, Suheng Chen, Sorin Cristoloveanu, Elzbieta Kolawa, Mohammad Mojarradi, Nikzad Toomarian