Patents by Inventor Kevin Lin
Kevin Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11398545Abstract: An integrated circuit structure comprises a first dielectric layer disposed above a substrate. The integrated circuit structure comprises an interconnect structure comprising a first interconnect on a first metal layer, a second interconnect on a second metal layer, and a via connecting the first interconnect and the second interconnect, the first interconnect being on or within the first dielectric layer. A metal-insulator-metal (MIM) capacitor is formed in or on the first dielectric layer in the first metal layer adjacent to the interconnect structure. The MIM capacitor comprises a bottom electrode plate comprising a first low resistivity material, an insulator stack on the bottom electrode plate, the insulator stack comprising at least one of an etch stop layer and a high-K dielectric layer; and a top electrode plate on the insulator stack, the top electrode plate comprising a second low resistivity material.Type: GrantFiled: June 25, 2018Date of Patent: July 26, 2022Assignee: Intel CorporationInventors: Kevin Lin, Han Wui Then
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Patent number: 11373900Abstract: Damascene plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects is described. In an example, a back end of line (BEOL) metallization layer for a semiconductor structure includes an inter-layer dielectric (ILD) layer disposed above a substrate. A plurality of conductive lines is disposed in the ILD layer along a first direction. A conductive tab is disposed in the ILD layer. The conductive tab couples two of the plurality of conductive lines along a second direction orthogonal to the first direction.Type: GrantFiled: September 18, 2020Date of Patent: June 28, 2022Assignee: Intel CorporationInventors: Kevin Lin, Robert L. Bristol, Richard E. Schenker
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Patent number: 11367682Abstract: This disclosure is directed to systems and methods for maskless gap integration in interconnects having one or more vias above one or more interconnect lines (for example, metal interconnect lines). In various embodiments, the systems and methods described in the disclosure may serve to reduce electrical shorting between adjacent vias in the interconnects. In one embodiment, a spacer layer may be provided to mask portions of an interlayer dielectric (ILD) in the interconnect. These masked portions of the ILD can protect regions between adjacent interconnect lines from electrical shorting during subsequent metal layer depositions in a fabrication sequence of the interconnects. Further, in various embodiments, the vias may enclose a gap (for example, an air gap) without the need for additional masking steps, for example, without the need for additional lithography steps.Type: GrantFiled: September 30, 2016Date of Patent: June 21, 2022Assignee: Intel CorporationInventor: Kevin Lin
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Patent number: 11367684Abstract: Embodiments include an interconnect structure and methods of forming an interconnect structure. In an embodiment, the interconnect structure comprises a semiconductor substrate and an interlayer dielectric (ILD) over the semiconductor substrate. In an embodiment, an interconnect layer is formed over the ILD. In an embodiment, the interconnect layer comprises a first interconnect and a second interconnect. In an embodiment the interconnect structure comprises an electrically insulating plug that separates the first interconnect and the second interconnect. In an embodiment an uppermost surface of the electrically insulating plug is above an uppermost surface of the interconnect layer.Type: GrantFiled: May 21, 2018Date of Patent: June 21, 2022Assignee: Intel CorporationInventors: Ehren Mannebach, Kevin Lin, Richard Vreeland
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Patent number: 11361191Abstract: Disclosed are systems, methods, and non-transitory computer-readable media for using adversarial learning for fine-grained image search. An image search system receives a search query that includes an input image depicting an object. The search system generates, using a generator, a vector representation of the object in a normalized view. The generator was trained based on a set of reference images of known objects in multiple views, and feedback data received from an evaluator that indicates performance of the generator at generating vector representations of the known objects in the normalized view. The evaluator including a discriminator sub-module, a normalizer sub-module, and a semantic embedding sub-module that generate the feedback data. The image search system identifies, based on the vector representation of the object, a set of other images depicting the object, and returns at least one of the other images in response to the search query.Type: GrantFiled: May 22, 2018Date of Patent: June 14, 2022Assignee: eBay Inc.Inventors: Kevin Lin, Fan Yang, Qiaosong Wang, Robinson Piramuthu
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Publication number: 20220157619Abstract: Embodiments of the invention include methods of forming a textile patterned hardmask. In an embodiment, a first hardmask and a second hardmask are formed over a top surface of an interconnect layer in an alternating pattern. A sacrificial cross-grating may then be formed over the first and second hardmasks. In an embodiment, portions of the first hardmask that are not covered by the sacrificial cross-grating are removed to form first openings and a third hardmask is disposed into the first openings. Embodiments may then include etching through portions of the second hardmask that are not covered by the sacrificial cross-grating to form second openings. The second openings may be filled with a fourth hardmask. According to an embodiment, the first, second, third, and fourth hardmasks are etch selective to each other. In an embodiment the sacrificial cross-grating may then be removed.Type: ApplicationFiled: February 3, 2022Publication date: May 19, 2022Inventors: Kevin LIN, Robert Lindsey BRISTOL, Alan M. MYERS
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Patent number: 11335598Abstract: Embodiments include an interconnect structure and methods of forming such an interconnect structure. In an embodiment, the interconnect structure comprises a first interlayer dielectric (ILD) and a first interconnect layer with a plurality of first conductive traces partially embedded in the first ILD. In an embodiment, an etch stop layer is formed over surfaces of the first ILD and sidewall surfaces of the first conductive traces. In an embodiment, the interconnect structure further comprises a second interconnect layer that includes a plurality of second conductive traces. In an embodiment, a via between the first interconnect layer and the second interconnect layer may be self-aligned with the first interconnect layer.Type: GrantFiled: June 29, 2018Date of Patent: May 17, 2022Assignee: Intel CorporationInventors: Kevin Lin, Sudipto Naskar, Manish Chandhok, Miriam Reshotko, Rami Hourani
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Publication number: 20220148917Abstract: An aspect of the disclosure relates to an integrated circuit. The integrated circuit includes a first electrically conductive structure, a thin film crystal layer located on the first electrically conductive structure, and a second electrically conductive structure including metal e.g. copper. The second electrically conductive structure is located on the thin film crystal layer. The first electrically conductive structure is electrically connected to the second electrically conductive structure through the thin film crystal layer. The thin film crystal layer may be provided as a copper diffusion barrier.Type: ApplicationFiled: January 25, 2022Publication date: May 12, 2022Inventors: Carl NAYLOR, Ashish AGRAWAL, Kevin LIN, Abhishek Anil SHARMA, Mauro KOBRINSKY, Christopher JEZEWSKI, Urusa ALAAN
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Publication number: 20220139823Abstract: IC interconnect structures including subtractively patterned features. Feature ends may be defined through multiple patterning of multiple cap materials for reduced misregistration. Subtractively patterned features may be lines integrated with damascene vias or with subtractively patterned vias, or may be vias integrated with damascene lines or with subtractively patterned lines. Subtractively patterned vias may be deposited as part of a planar metal layer and defined currently with interconnect lines. Subtractively patterned features may be integrated with air gap isolation structures. Subtractively patterned features may be include a barrier material on the bottom, top, or sidewall. A bottom barrier of a subtractively patterned features may be deposited with an area selective technique to be absent from an underlying interconnect feature. A barrier of a subtractively patterned feature may comprise graphene or a chalcogenide of a metal in the feature or in a seed layer.Type: ApplicationFiled: November 2, 2020Publication date: May 5, 2022Applicant: Intel CorporationInventors: Kevin Lin, Noriyuki Sato, Tristan Tronic, Michael Christenson, Christopher Jezewski, Jiun-Ruey Chen, James M. Blackwell, Matthew Metz, Miriam Reshotko, Nafees Kabir, Jeffery Bielefeld, Manish Chandhok, Hui Jae Yoo, Elijah Karpov, Carl Naylor, Ramanan Chebiam
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Patent number: 11310110Abstract: Techniques for implementing a provisional mode in a multi-mode network device (i.e., a network device that supports at least first and second modes of operation) are provided. According to one embodiment, the network device can receive, while running in the first mode, a request to enter the second mode. In response to the request, the network device can enter a third mode that is a provisional version of the second mode. Then, while running in the third mode, the network device can accept one or more configuration commands or settings for the second mode while simultaneously processing live network traffic according to the first mode.Type: GrantFiled: July 16, 2020Date of Patent: April 19, 2022Assignee: ARRIS Enterprises LLCInventors: Kwun-Nan Kevin Lin, Tian Lei
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Patent number: 11276581Abstract: Embodiments of the invention include methods of forming a textile patterned hardmask. In an embodiment, a first hardmask and a second hardmask are formed over a top surface of an interconnect layer in an alternating pattern. A sacrificial cross-grating may then be formed over the first and second hardmasks. In an embodiment, portions of the first hardmask that are not covered by the sacrificial cross-grating are removed to form first openings and a third hardmask is disposed into the first openings. Embodiments may then include etching through portions of the second hardmask that are not covered by the sacrificial cross-grating to form second openings. The second openings may be filled with a fourth hardmask. According to an embodiment, the first, second, third, and fourth hardmasks are etch selective to each other. In an embodiment the sacrificial cross-grating may then be removed.Type: GrantFiled: June 7, 2019Date of Patent: March 15, 2022Assignee: Intel CorporationInventors: Kevin Lin, Robert Lindsey Bristol, Alan M. Myers
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Patent number: 11276644Abstract: An aspect of the disclosure relates to an integrated circuit. The integrated circuit includes a first electrically conductive structure, a thin film crystal layer located on the first electrically conductive structure, and a second electrically conductive structure including metal e.g. copper. The second electrically conductive structure is located on the thin film crystal layer. The first electrically conductive structure is electrically connected to the second electrically conductive structure through the thin film crystal layer. The thin film crystal layer may be provided as a copper diffusion barrier.Type: GrantFiled: December 17, 2018Date of Patent: March 15, 2022Assignee: Intel CorporationInventors: Carl Naylor, Ashish Agrawal, Kevin Lin, Abhishek Sharma, Mauro Kobrinsky, Christopher Jezewski, Urusa Alaan
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Publication number: 20220076995Abstract: Integrated circuit (IC) interconnect lines having line breaks and line bridges within one interconnect level that are based on a single lithographic mask pattern. Multi-patterning may be employed to define a grating structure of a desired pitch in a first mask layer. Breaks and bridges between the grating structures may be derived from a second mask layer through a process-based selective occlusion of openings defined in the second mask layer that are below a threshold minimum lateral width. Portions of the grating structure underlying openings defined in the second mask layer that exceed the threshold minimum lateral width are removed. Trenches in an underlayer may then be etched based on a union of the remainder of the grating structure and the occluded openings in the second mask layer. The trenches may then be backfilled to form the interconnect lines.Type: ApplicationFiled: November 19, 2021Publication date: March 10, 2022Applicant: Intel CorporationInventors: Kevin Lin, Christopher J. Jezewski
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Publication number: 20220057940Abstract: A media management system including an application layer, a system layer, and a solid state drive (SSD) storage layer. The application layer includes a media data analytics application configured to assign a classification code to a data file. The system layer is in communication with the application layer. The system layer includes a file system configured to issue a write command to a SSD controller. The write command includes the classification code of the data file. The SSD storage layer includes the SSD controller and erasable blocks. The SSD controller is configured to write the data file to one of the erasable blocks based on the classification code of the data file in the write command. In an embodiment, the SSD controller is configured to write the data file to one of the erasable blocks storing other data files also having the classification code.Type: ApplicationFiled: November 8, 2021Publication date: February 24, 2022Inventors: Yiren Huang, Yong Wang, Kui (Kevin) Lin
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Publication number: 20220051896Abstract: Techniques for selectively removing a metal or conductive material during processing of a semiconductor die for high-voltage applications are provided. In some embodiments, the techniques treat a metallized semiconductor die to transfer a feature from a patterned photoresist layer deposited on the metallized semiconductor die. In addition, the patterned metallized semiconductor die can be subjected to an etch process to remove an amount of metal according to the feature in the pattern, resulting in a treated metallized semiconductor die that defines an opening adjacent to at least a pair of neighboring metal interconnects in the die. The treated metallized semiconductor die can be further treated to backfill the opening with a dielectric material, resulting in a metallized semiconductor die having a backfilled dielectric member.Type: ApplicationFiled: October 25, 2021Publication date: February 17, 2022Applicant: Intel CorporationInventors: Kevin Lin, Rahim Kasim, Manish Chandhok, Florian Gstrein
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Publication number: 20220028497Abstract: Processes and systems for non-destructively storing, accessing, and editing information using nucleic acids are disclosed. Representative processes include a process for extracting a data file from a database, wherein the data file comprises information encoded into one or more polynucleotide strands and wherein the database comprises a plurality of polynucleotide strands; a process for expanding a number of unique data files in a database that can be addressed with a predetermined number of oligonucleotide primers, wherein the unique data files each comprise information encoded into one or more polynucleotide strands and wherein the database comprises a plurality of polynucleotide strands; a process for differentially reading information encoded into one or more polynucleotide strands; a process for manipulating files while in storage; and a process for extracting a data file from a database, wherein the data file comprises information encoded into a polynucleotide strand.Type: ApplicationFiled: August 30, 2019Publication date: January 27, 2022Applicant: North Carolina State UniversityInventors: Albert Jun Qi Keung, James M. Tuck, III, Kevin Volkel, Kyle Tomek, Kevin Lin
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Publication number: 20210408299Abstract: Described is an apparatus which comprises: a gate comprising a metal; a first layer adjacent to the gate, the first layer comprising a dielectric material; a second layer adjacent to the first layer, the second layer comprising a second material; a third layer adjacent to the second layer, the third layer comprising a third material including an amorphous metal oxide; a fourth layer adjacent to the third layer, the fourth layer comprising a fourth material, wherein the fourth and second materials are different than the third material; a source partially adjacent to the fourth layer; and a drain partially adjacent to the fourth layer.Type: ApplicationFiled: September 13, 2021Publication date: December 30, 2021Applicant: Intel CorporationInventors: Van H. Le, Abhishek A. Sharma, Gilbert Dewey, Kent Millard, Jack Kavalieros, Shriram Shivaraman, Tristan A. Tronic, Sanaz Gardner, Justin R. Weber, Tahir Ghani, Li Huey Tan, Kevin Lin
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Patent number: 11205586Abstract: Integrated circuit (IC) interconnect lines having line breaks and line bridges within one interconnect level that are based on a single lithographic mask pattern. Multi-patterning may be employed to define a grating structure of a desired pitch in a first mask layer. Breaks and bridges between the grating structures may be derived from a second mask layer through a process-based selective occlusion of openings defined in the second mask layer that are below a threshold minimum lateral width. Portions of the grating structure underlying openings defined in the second mask layer that exceed the threshold minimum lateral width are removed. Trenches in an underlayer may then be etched based on a union of the remainder of the grating structure and the occluded openings in the second mask layer. The trenches may then be backfilled to form the interconnect lines.Type: GrantFiled: December 27, 2017Date of Patent: December 21, 2021Assignee: Intel CorporationInventors: Kevin Lin, Christopher J. Jezewski
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Patent number: 11201114Abstract: Methods/structures of forming thin film resistors using interconnect liner materials are described. Those methods/structures may include forming a first liner in a first trench, wherein the first trench is disposed in a dielectric layer that is disposed on a substrate. Forming a second liner in a second trench, wherein the second trench is adjacent the first trench, forming an interconnect material on the first liner in the first trench, adjusting a resistance value of the second liner, forming a first contact structure on a top surface of the interconnect material, and forming a second contact structure on the second liner.Type: GrantFiled: December 29, 2016Date of Patent: December 14, 2021Assignee: Intel CorporationInventors: Kevin Lin, Christopher J. Jezewski, Richard F. Vreeland, Tristan A. Tronic
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Patent number: 11182081Abstract: Provided are techniques for performing a recovery copy command to restore a safeguarded copy backup to a production volume. In response to receiving a recovery copy command, a production target data structure is created. A read operation is received for data for a storage location. In response to determining that the data for the storage location is in a cache of a host and a generation number is greater than a recovery generation number, the data is read from the cache. In response to determining at least one of that the data for the storage location is not in the cache and that the generation number is not greater than the recovery generation number, the data is read from one of the production volume and a backup volume based on a value of an indicator for the storage location in the production target data structure.Type: GrantFiled: September 6, 2018Date of Patent: November 23, 2021Assignee: International Business Machines CorporationInventors: Theresa M. Brown, Nedlaya Y. Francisco, Nicolas M. Clayton, Mark L. Lipets, Carol S. Mellgren, Gregory E. McBride, David Fei, Kevin Lin