Abstract: A microelectromechanical accelerometer having submicron features is fabricated from a single crystal silicon substrate. The accelerometer includes a movable portion incorporating an axial beam carrying laterally-extending high aspect ratio released fingers cantilevered above the floor of a cavity formed in the substrate during the fabrication process. The movable portion is supported by restoring springs having controllable flexibility to vary the resonant frequency of the structure. A multiple-beam structure provides stiffness in the movable portion for accuracy.

Abstract: A dispensing apparatus comprises a robot device (14) having gripping means (20a, 20b) presentable to a plurality of stations, each station being adapted to provide an operation in a sequence of operations such as to produce a measured quantity or dose from a supply of a hazardous substance, and one of the stations (32) comprising a multi-syringe receiving and filling station comprising syringe receiving means (106) capable of receiving and holding syringes of different sizes each adapted to contain a said substance, the said station having means (95) for operating each syringe when located at that station whereby syringes of different sizes may be operated automatically as selected. The said station may comprise a hazardous liquid filling station for filling items one of which comprises a syringe.

Abstract: A method of fabricating released microelectromechanical and microoptomechanical structures having electrically isolating segments from single crystal silicon includes thermal oxidation steps. The structures are defined using a single mask patterning process, and the structure is partially thermally oxidized. This is followed by a second masking step which is used to define segments to be completely thermally oxidized, and a second oxidation step completes the fabrication of the isolating segment. Thereafter the structure is released from the underlying substrate.

Abstract: A dispensing apparatus comprises a base, and a robot device on the base having opposing jaw members. A number of stations locate on the base, and cooperate with the robot device in a sequence of operations such as to produce a measured pharmaceutical dose from a supply of a pharmaceutically acceptable substance. One of the stations locates several hypodermic syringes in parallel and a container, and produces relative movement of the appropriate syringe and the container towards and away from each other to arrange that the syringe penetrates and withdraws from the container.