Abstract: With a probe-test method and a prober for examining certain electric characteristics of an object of examination, a main chuck is adapted to be driven to move in the X-, Y-, Z- and 0-directions in order to bring the object into contact with the probes of the prober and then the shaft of the support of the main chuck is warped under the contact pressure applied by the probes to tilt the main chuck. The position where each of the probes contacts the corresponding one of the electrodes on the object is displaced (moved) in the X-, Y- and Z-directions by the tilt. The displacement is predicted by an operation unit and the main chuck is moved in the X-, Y- and Z-directions to correct the displacement.

Abstract: Disclosed is a probe arrangement assembly comprising a conductive foil, a plurality of supporting body-corresponding sections formed in the conductive foil, and contact terminal-corresponding members each fixed to one end of each of the supporting body-corresponding sections. Also disclosed are a method of manufacturing the probe arrangement assembly, as well as a method and an apparatus for mounting a probe to a contactor substrate by using the probe arrangement assembly.

Abstract: A probe apparatus according to the present invention comprises a stage carrying an object of inspection thereon and rotatable and movable in the horizontal and vertical directions, a probe located over the stage and adapted to be brought into contact with the object of inspection on the stage in order to subject the object to electrical inspection, a polisher carrying section attached to the stage and capable of carrying thereon a polisher for polishing the probe, a storage mechanism for storing the polisher, and a transportation mechanism for transporting the polisher between the storage mechanism and the polisher carrying section.

Abstract: An LCD assembly testing apparatus having a table for supporting the LCD assembly and for applying light to the back of the LCD assembly, and a transport mechanism for removing the LCD assembly from a cassette and transporting the LCD assembly onto the table. The transport mechanism has an arm for holding the LCD assembly, a first lift mechanism for vertical moving the arm, and a pre-alignment mechanism for receiving the LCD assembly and preliminary aligning the LCD assembly with the table.

Abstract: A probe apparatus incorporated into a lighting inspection system for LCD panels, includes a store section, a process section, and a transfer section interposed between them. An examination mechanism having a probe card is arranged in an examination area of the process section. Right and left alignment areas are formed so as to interpose the examination area, and right and left work tables on which the LCD panels are to be loaded, are arranged on the right and left alignment areas, respectively. The movement of the right and left work tables is controlled by a controller, and the LCD panels on the right and left work tables are alternately examined in the examination area by the examination mechanism.

Abstract: A transfer apparatus for carrying a semiconductor wafer into a wafer cassette comprising an arm to load a semiconductor wafer thereon, a moving mechanism to move the arm to a wafer cassette, a chucking device to have a wafer attracted to the arm, and an auxiliary mechanism to push a wafer and adjust the position of the wafer to the inlet of a wafer cassette when the wafer comes into contact with the side wall of the wafer cassette.

Abstract: A moving table apparatus includes a base, two guide rails laid on the base and extending in a direction Y, a first table capable of moving on rails, in direction Y, two guide rails laid on the first table and extending a direction X, and a second table capable of moving on the guide rails laid on the first table, in direction X. The first table has a main table located on the side of the base, a support table supporting the second table, and a pin supporting the support table what is rotatable relative to the main table. Before the main and support tables are fastened together by means of screws, the support table is rotated around the pin, thereby adjusting the angle between two straight lines extending in directions X and Y, respectively.