Patents by Inventor Klaus Becker
Klaus Becker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20260066211Abstract: An ion source includes a coaxial gas conduit is disclosed. The coaxial gas conduit includes two conduits, where the inner conduit defines an inner channel that delivers the gas that is subject to decomposition. The outer conduit and the inner conduit define an outer annular channel that delivers a gas that is less susceptible to decomposition, such as an inert or diluent gas. This coaxial gas conduit is configured such that only the outer conduit physically contacts the walls of the ion source. This serves to lower the temperature of the inner conduit and the gas flowing therethrough. Further, in some embodiments, the inner conduit may be in thermal contact with a heat sink to further lower its temperature.Type: ApplicationFiled: August 29, 2024Publication date: March 5, 2026Inventors: Klaus Becker, Adam M. McLaughlin, Graham Wright
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Patent number: 12454528Abstract: The present invention relates to process for the preparation of a compound of formula (1), wherein R1 and R2 are independently from each other C1-C8alkyl, which comprises reacting a compound of formula (2), with a formaldehyde source in presence of a palladium or platinum catalyst at a hydrogen pressure of 5×108 mPa to 200×108 mPa.Type: GrantFiled: December 14, 2020Date of Patent: October 28, 2025Assignee: BASF SEInventors: Alexander Michael Haydl, Michael Schmitt, Klaus Becker, Dirk Bethke, Elena Capito', Johann-Peter Melder
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Publication number: 20250316448Abstract: An ion source assembly. The ion source assembly may include a hydrogen gas source, and an ion source, comprising a plasma chamber, coupled to receive a first flow of hydrogen gas from the hydrogen gas source, the ion source comprising a set of components to generate a plasma within the plasma chamber. The plasma may include a first portion of negative hydrogen ions. The ion source assembly may include a second gas source, separate from the hydrogen gas source, the second gas source being coupled to deliver to the plasma chamber a second flow of a second gas, different from the hydrogen gas. As such, the set of components of the ions source may be further arranged to generate a second portion of second negative ions, different than the first portion of negative hydrogen ions, by reacting the second gas with the first portion of negative hydrogen ions.Type: ApplicationFiled: April 5, 2024Publication date: October 9, 2025Applicant: Applied Materials, Inc.Inventor: Klaus BECKER
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Publication number: 20250259815Abstract: A vaporizer that may be used to introduce vapor from a dopant material into the arc chamber is disclosed. The vaporizer includes a crucible and a thermoelectric device disposed on a surface of the crucible near the outlet. The thermoelectric device may be controlled to heat the dopant material to create dopant vapor when desired. Additionally, the thermoelectric device may also be used to quickly cool the surface on which it is disposed. Since the outlet is located near this surface, the outlet also quickly cools, allowing condensation of any dopant vapor in the outlet, thus stopping the flow of vapor into the arc chamber. Additional heaters may be used to further heat the dopant material.Type: ApplicationFiled: February 14, 2024Publication date: August 14, 2025Inventors: Klaus Becker, Daniel Alvarado, Adam M. McLaughlin
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Patent number: 12246981Abstract: A method for homogenizing glass includes the method: providing a cylindrical blank composed of the glass having a cylindrical outer surface that extends along a longitudinal axis of the blank between a first end face and a second end face, forming a shear zone in the blank by softening a longitudinal section of the blank and subjecting it to a thermal-mechanical intermixing treatment, and displacing the shear zone along the longitudinal axis of the blank. The displacement of the shear zone along the longitudinal axis of the blank is superimposed by a simultaneous oscillating motion of the shear zone along the longitudinal axis of the blank. The first end of the blank is rotated at a first rotational speed and the second end of the blank is rotated at a second rotational speed. An oscillating motion of the shear zone is generated by periodically varying the first and/or second rotational speed.Type: GrantFiled: October 27, 2022Date of Patent: March 11, 2025Assignee: Heraeus Quarzglas GmbH & Co. KGInventors: Stephan Thomas, Jan Vydra, Martin Trommer, Michael Huenermann, Andreas Langner, Walter Lehmann, Stefan Hengster, Klaus Becker
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Patent number: 12106925Abstract: An apparatus may include a cyclotron to receive an ion beam as an incident ion beam at an initial energy, and output the ion beam as an accelerated ion beam at an accelerated ion energy. The apparatus may further include an RF source to output an RF power signal to the cyclotron chamber, the RF power source comprising a variable power amplifier, and a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions.Type: GrantFiled: December 23, 2021Date of Patent: October 1, 2024Assignee: Applied Materials, Inc.Inventors: Frank Sinclair, Klaus Becker, Joseph C. Olson, Tseh-Jen Hsieh, Morgan Patrick Dehnel, Anand Mathai George
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Patent number: 12096548Abstract: An apparatus may include a drift tube assembly having a plurality of drift tubes to conduct an ion beam along a beam propagation direction. The plurality of drift tubes may define a multi-gap configuration corresponding to a plurality of acceleration gaps, wherein at least one powered drift tube of the drift tube assembly is coupled to receive an RF voltage signal. The apparatus may also include a DC electrode assembly that includes a conductor line, arranged within a resonator coil that is coupled to receive a DC voltage signal into the at least one powered drift tube. The DC electrode assembly may also include a DC electrode arrangement, connected to the conductor line and disposed within the at least one powered drift tube.Type: GrantFiled: September 21, 2022Date of Patent: September 17, 2024Assignee: Applied Materials, Inc.Inventors: Wai-Ming Tam, Klaus Becker, William Herron Park, Jr., Frank Sinclair
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Patent number: 12046443Abstract: A Bernas ion source having a shield is disclosed. The shield is disposed between the distal portion of the filament and the first end of the chamber and serves to confine the plasma to the region between the shield and the second end of the chamber. The shield may be electrically connected to the negative leg of the filament so as to be the most negatively biased component in the chamber. In other embodiments, the shield may be electrically floating. In this embodiment, the shield may self-bias. The shield is typically made of a refractory metal. The use of the shield may reduce back heating of the filament by the plasma and reduce the possibility for thermal runaway. This may allow denser plasmas to be generated within the chamber.Type: GrantFiled: November 22, 2021Date of Patent: July 23, 2024Assignee: Applied Materials, Inc.Inventors: Klaus Becker, Luigi G. Amato, Elvis Gomez, David Burgdorf, Victor Theriault, Thomas Stewart
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Publication number: 20240098871Abstract: An apparatus may include a drift tube assembly having a plurality of drift tubes to conduct an ion beam along a beam propagation direction. The plurality of drift tubes may define a multi-gap configuration corresponding to a plurality of acceleration gaps, wherein at least one powered drift tube of the drift tube assembly is coupled to receive an RF voltage signal. The apparatus may also include a DC electrode assembly that includes a conductor line, arranged within a resonator coil that is coupled to receive a DC voltage signal into the at least one powered drift tube. The DC electrode assembly may also include a DC electrode arrangement, connected to the conductor line and disposed within the at least one powered drift tube.Type: ApplicationFiled: September 21, 2022Publication date: March 21, 2024Applicant: Applied Materials, Inc.Inventors: Wai-Ming Tam, Klaus Becker, William Herron Park, JR., Frank Sinclair
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Publication number: 20240061264Abstract: An optical device for controlling a light beam includes a beam shaping unit for increasing the uniformity of the spatial intensity profile of the light beam; —a lens system; and —a focusing unit. The lens system comprises a first lens and a second lens, and each of the first lens and the second lens comprises a stepped optical surface formed by active sections and reset sections alternating with each other. The active sections stepwise form a surface profile, which is aspheric, and the stepped optical surface of the first lens faces the stepped optical surface of the second lens.Type: ApplicationFiled: December 17, 2021Publication date: February 22, 2024Inventors: Saiedeh SAGHAFI, Klaus BECKER, Hans - Ulrich DODT
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Publication number: 20240025794Abstract: A method for producing a substrate precursor having a mass of more than 100 kg, comprising a TiO2-SiO2 mixed glass, comprising the steps including: introducing a silicon dioxide raw material and a titanium dioxide raw material into a flame, producing a glass body having a titanium dioxide content of 3 wt. % up to 10 wt. %, the glass body comprising: a macroscopic, production-related titanium profile, and a microscopic, production-related layer structure, dividing the glass body into a plurality of rod-like glass body portions, spatially measuring the titanium profile in each of the glass body portions, connecting the glass body portions to form an elongate first glass component, first homogenization treatment of the first glass component, pushing together the first glass component to create a spherical glass system, turning the glass system more than 70 degrees, and stretching the glass system.Type: ApplicationFiled: July 14, 2023Publication date: January 25, 2024Inventor: Klaus BECKER
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Publication number: 20230207247Abstract: An apparatus may include a cyclotron to receive an ion beam as an incident ion beam at an initial energy, and output the ion beam as an accelerated ion beam at an accelerated ion energy. The apparatus may further include an RF source to output an RF power signal to the cyclotron chamber, the RF power source comprising a variable power amplifier, and a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions.Type: ApplicationFiled: December 23, 2021Publication date: June 29, 2023Applicant: Applied Materials, Inc.Inventors: Frank Sinclair, Klaus Becker, Joseph C. Olson, Tseh-Jen Hsieh, Morgan Patrick Dehnel, Anand Mathai George
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Publication number: 20230063663Abstract: A method for homogenizing glass includes the method: providing a cylindrical blank composed of the glass having a cylindrical outer surface that extends along a longitudinal axis of the blank between a first end face and a second end face, forming a shear zone in the blank by softening a longitudinal section of the blank and subjecting it to a thermal-mechanical intermixing treatment, and displacing the shear zone along the longitudinal axis of the blank. The displacement of the shear zone along the longitudinal axis of the blank is superimposed by a simultaneous oscillating motion of the shear zone along the longitudinal axis of the blank. The first end of the blank is rotated at a first rotational speed and the second end of the blank is rotated at a second rotational speed. An oscillating motion of the shear zone is generated by periodically varying the first and/or second rotational speed.Type: ApplicationFiled: October 27, 2022Publication date: March 2, 2023Applicant: Heraeus Quarzglas GmbH & Co. KGInventors: Stephan Thomas, Jan Vydra, Martin Trommer, Michael Huenermann, Andreas Langner, Walter Lehmann, Stefan Hengster, Klaus Becker
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Publication number: 20230034961Abstract: The present invention relates to process for the preparation of a compound of formula (1), wherein R1 and R2 are independently from each other C1-C8alkyl, which comprises reacting a compound of formula (2), with a formaldehyde source in presence of a palladium or platinum catalyst at a hydrogen pressure of 5×108 mPa to 200×108 mPa.Type: ApplicationFiled: December 14, 2020Publication date: February 2, 2023Inventors: Alexander Michael HAYDL, Michael SCHMITT, Klaus BECKER, Dirk BETHKE, Elena CAPITO', Johann-Peter MELDER
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Patent number: 11542594Abstract: An advanced sputter target is disclosed. The advanced sputter target comprises two components, a porous carrier, and a metal material disposed within that porous carrier. The porous carrier is designed to be a high porosity, open cell structure such that molten material may flow through the carrier. The porous carrier also provides structural support for the metal material. The cell sizes of the porous carrier are dimensioned such that the capillary action and surface tension prohibits the metal material from spilling, dripping, or otherwise exiting the porous carrier. In some embodiments, the porous carrier is an open cell foam, a weave of strands or stacked meshes.Type: GrantFiled: April 20, 2021Date of Patent: January 3, 2023Assignee: Applied Materials, Inc.Inventors: Graham Wright, Klaus Becker
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Patent number: 11485671Abstract: A method for homogenizing glass includes the method: providing a cylindrical blank composed of the glass having a cylindrical outer surface that extends along a longitudinal axis of the blank between a first end face and a second end face, forming a shear zone in the blank by softening a longitudinal section of the blank and subjecting it to a thermal-mechanical intermixing treatment, and displacing the shear zone along the longitudinal axis of the blank. To enable a radial mixing within the shear zone in addition to the tangential mixing with the lowest possible time and energy input, starting from this method, cylindrical sections of the blank are adjacent to the shear zone on both sides, the first cylindrical section having a first central axis and the second cylindrical section having a second central axis, the first central axis and the second central axis being temporarily non-coaxial with each other.Type: GrantFiled: October 24, 2019Date of Patent: November 1, 2022Assignee: Heraeus Quarzglas GmbH & Co. KGInventors: Stephan Thomas, Jan Vydra, Martin Trommer, Michael Huenermann, Andreas Langner, Walter Lehmann, Stefan Hengster, Klaus Becker
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Patent number: 11459262Abstract: A known method for homogenizing glass includes the following steps: providing a cylindrical blank composed of the glass, having a cylindrical outer surface which extends between a first end face and a second end face, forming a shear zone in the blank by softening a longitudinal section of the blank and subjecting it to a thermal-mechanical intermixing treatment, and moving the shear zone along the longitudinal axis of the blank. To reduce the risk of cracks and fractures during homogenizing, it is proposed that a thermal radiation dissipator is used that at least partially surrounds the shear zone, the lateral dimension of which in the direction of the longitudinal axis of the blank is greater than the shear zone and smaller than the length of the blank, the thermal radiation dissipator being moved synchronously with the shear zone along the longitudinal axis of the blank.Type: GrantFiled: October 24, 2019Date of Patent: October 4, 2022Assignee: Heraeus Quarzglas GmbH & Co. KGInventors: Stephan Thomas, Jan Vydra, Martin Trommer, Michael Huenermann, Andreas Langner, Walter Lehmann, Stefan Hengster, Klaus Becker
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Patent number: 11404254Abstract: An ion source with an insertable target holder for holding a solid dopant material is disclosed. The insertable target holder includes a pocket or cavity into which the solid dopant material is disposed. When the solid dopant material melts, it remains contained within the pocket, thus not damaging or degrading the arc chamber. Additionally, the target holder can be moved from one or more positions where the pocket is at least partially in the arc chamber to one or more positions where the pocket is entirely outside the arc chamber. In certain embodiments, a sleeve may be used to cover at least a portion of the open top of the pocket.Type: GrantFiled: February 6, 2019Date of Patent: August 2, 2022Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Shreyansh Patel, Graham Wright, Daniel Alvarado, Klaus Becker, Daniel R. Tieger, Stephen Krause
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Patent number: 11298847Abstract: A method cuts an extruded pipe to length using a separating device. The separating device includes a separator rotating about an extrusion axis of the extruded pipe, the separator being rotatably mounted in the separating device, and cutting tools being arranged on the separator. The cutting tools are configured to carry out the separation. The method includes transferring energy to move the cutting tools. The energy is transferred from a stationary outer region of the separating device to a movable inner region of the separating device. The energy is transferred continuously or cyclically and the transferred energy is buffered in an energy storage device. The energy is transferred inductively or capacitively. A discharge time of the energy storage device is between 2% and 25% of a total separation cycle.Type: GrantFiled: June 10, 2019Date of Patent: April 12, 2022Assignee: BATTENFELD-CINCINNATI GERMANY GMBHInventors: Heinrich Dohmann, Klaus Becker, Joerg Droege
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Publication number: 20210245412Abstract: A method cuts an extruded pipe to length using a separating device. The separating device includes a separator rotating about an extrusion axis of the extruded pipe, the separator being rotatably mounted in the separating device, and cutting tools being arranged on the separator. The cutting tools are configured to carry out the separation. The method includes transferring energy to move the cutting tools. The energy is transferred from a stationary outer region of the separating device to a movable inner region of the separating device. The energy is transferred continuously or cyclically and the transferred energy is buffered in an energy storage device. The energy is transferred inductively or capacitively. A discharge time of the energy storage device is between 2% and 25% of a total separation cycle.Type: ApplicationFiled: June 10, 2019Publication date: August 12, 2021Inventors: Heinrich Dohmann, Klaus Becker, Joerg Droege