Abstract: The present disclosure provides a substrate processing apparatus including: a substrate holding unit that holds a substrate; a pressure regulator that regulates a pressure of a gas supplied into an elastic membrane; and a controller that controls the pressure regulator to make the pressure of the gas supplied into the elastic membrane variable in order to separate the substrate from the elastic membrane.

Abstract: A semiconductor device capable of enlarging a read margin of a memory cell and a method of surrounding a read of a memory are provided. The reference word line RWL is activated in a time division manner with respect to the plurality of word lines WL. The precharge circuit PRE applies the read potential VRD to the bit line BL, and the precharge circuit PRE flows the read current Icel from the selected memory cell MC and the read reference current Iref from the reference cell RC to the bit line BL in a time division manner. A detection currents Ird2a, Irr2a, each of which is a current proportional to the current flowing through the bitline BL, flows through the current detection line CDL.

Abstract: One object is to provide a polishing machine and a polishing method capable of improving a processing accuracy on the surface of an object. A method of polishing an object is provided. Such a method comprises a first step of polishing an object by moving the object and a first polishing pad having a smaller dimension than that of the object relative to each other while the first polishing pad is made to contact the object, a second step of polishing the object, after the first step of polishing, by moving the object and a second polishing pad having a larger dimension than that of the object relative to each other while the second polishing pad is made to contact the object, and a step of detecting the state of the surface of the object before the first step of polishing.

Abstract: According to an embodiment, a word line driver includes: a first inverter that is driven by a first power supply voltage and inverts and outputs a decode signal; a second inverter that is driven by a second power supply voltage and inverts and outputs the decode signal; a first PMOS transistor that is controlled to be turned on or off on the basis of an output signal of the second inverter; a first NMOS transistor that is controlled to be turned on or off on the basis of an output signal of the first inverter; and a second PMOS transistor that is provided between a power supply voltage terminal to which the second power supply voltage is supplied and the gate of the first PMOS transistor and is temporarily turned on in synchronization with falling of the decode signal.

Abstract: A level shift circuit includes a pulse signal generation unit generating first and second pulse signals with respect to an input signal, a first level conversion unit converting the first pulse signal at a first voltage to a third pulse signal at a second voltage, a second level conversion unit converting the second pulse signal at the first voltage to a fourth pulse signal at the second voltage, and a flip flop circuit making an output signal at the second voltage rise according to the third pulse signal, and making the output signal at the second voltage fall according to the fourth pulse signal. The pulse signal generation unit compares the input signal with the output signal of the flip flop circuit, and generates the first pulse signal when the input signal rises and the second pulse signal when the input signal falls, based on a non-matching comparison result.

Abstract: An axial fan comprises an impeller. The impeller comprises a hub and a plurality of blades disposed on an outer circumference of the hub. A pressure surface of each of the blades is at least partially a convex surface bulging from a suction surface side to a pressure surface side. The convex surface is provided within a predetermined region of the pressure surface of the blade on a hub side. The predetermined region is arranged as part of a radial width of the blade.

Abstract: To stably operate a negative-voltage level shifter even when a voltage value of a high level of an input signal is lowered, a negative-voltage level shifter in a semiconductor device includes a first level shifter, a second level shifter, and a first medium-voltage generating circuit. The first level shifter converts a high level of an input signal from a positive first power-supply voltage to a first medium voltage. The second level shifter converts a low level of an output signal of the first level shifter from a third power-supply voltage to a negative fourth power-supply voltage that is lower than the third power-supply voltage. The first medium-voltage generating circuit generates the first medium voltage in such a manner that the first medium voltage is higher than the first power-supply voltage and is lower than a second power-supply voltage, and includes a source-follower NMOS transistor and a clamping PMOS transistor.

Abstract: A control device for a stepping motor gradually increases an absolute value of the excitation current in phase A from when the start until the end of the hold period such that the amount of change in the excitation current per unit time is smaller than or equal to a first predetermined value. From the start of the hold period until a predetermined time elapses, an absolute value of the excitation current in phase B gradually increases such that the amount of change in the excitation current per unit time is smaller than or equal to the first predetermined value. By the end of the hold period after the predetermined time has elapsed, the excitation current in phase B reaches zero. When the hold period ends, one-phase excitation operation starts and the excitation current flows in phase A first with the same polarity as at the end of the hold period.

Abstract: According to one embodiment of the present disclosure, provided is a method of calibrating a relationship among a pressure command value, a pressure in an air-bag, and a pressure read value of the air-bag in a substrate polishing apparatus, the substrate polishing apparatus including: a polishing table; the air-bag configured to press a substrate against the polishing table, the pressure for pressing the substrate being variable; and a pressure control unit configured to control the pressure in the air-bag in accordance with the pressure command value inputted to the pressure control unit, and read the pressure in the air-bag.

Abstract: A level shift circuit includes a pulse signal generation unit generating first and second pulse signals with respect to an input signal, a first level conversion unit converting the first pulse signal at a first voltage to a third pulse signal at a second voltage, a second level conversion unit converting the second pulse signal at the first voltage to a fourth pulse signal at the second voltage, and a flip flop circuit making an output signal at the second voltage rise according to the third pulse signal, and making the output signal at the second voltage fall according to the fourth pulse signal. The pulse signal generation unit compares the input signal with the output signal of the flip flop circuit, and generates the first pulse signal when the input signal rises and the second pulse signal when the input signal falls, based on a non-matching comparison result.

Abstract: To stably operate a negative-voltage level shifter even when a voltage value of a high level of an input signal is lowered, a negative-voltage level shifter in a semiconductor device includes a first level shifter, a second level shifter, and a first medium-voltage generating circuit. The first level shifter converts a high level of an input signal from a positive first power-supply voltage to a first medium voltage. The second level shifter converts a low level of an output signal of the first level shifter from a third power-supply voltage to a negative fourth power-supply voltage that is lower than the third power-supply voltage. The first medium-voltage generating circuit generates the first medium voltage in such a manner that the first medium voltage is higher than the first power-supply voltage and is lower than a second power-supply voltage, and includes a source-follower NMOS transistor and a clamping PMOS transistor.

Abstract: A local polishing system comprises: a particle estimation unit (30) for estimating the film thickness distribution of a wafer; a local polishing region setting unit (11) for setting a local polishing region on the wafer based on the film thickness distribution; a polishing head selection unit (12) for selecting a polishing head based on the size of the local polishing region; a model storage (20) holding a recipe generating model that defines the relation between an input node and an output node, the input node being an attribute of the local polishing region, the output node comprising a recipe for a polishing process; a polishing recipe generator (13) that puts an attribute of the local polishing region set by the local polishing region setting unit (11) into the input node of the recipe generating model and determines a polishing recipe for polishing the local polishing region; and a polishing recipe transmitter (15) for transmitting data of the polishing recipe to a local polishing module (200) that perfo

Abstract: To provide a receiver, a communication device, and a communication method capable of restoring a signal transmitted via a non-contact transmission channel with high accuracy. A communication device has a transmission circuit that converts an input signal into a pulse, a non-contact transmission channel that has a primary side coil and a secondary side coil and transmits the pulse from the transmission circuit in a non-contact manner, a restoration circuit that restores the input signal on the basis of a reception signal corresponding to the pulse transmitted via the non-contact transmission channel, an initialization unit that initializes an output of the non-contact transmission channel, and an initialization control unit that outputs a control signal of controlling the initialization unit on the basis of the reception signal corresponding to the pulse received via the non-contact transmission channel.

Abstract: According to an embodiment, a word line driver includes: a first inverter that is driven by a first power supply voltage and inverts and outputs a decode signal; a second inverter that is driven by a second power supply voltage and inverts and outputs the decode signal; a first PMOS transistor that is controlled to be turned on or off on the basis of an output signal of the second inverter; a first NMOS transistor that is controlled to be turned on or off on the basis of an output signal of the first inverter; and a second PMOS transistor that is provided between a power supply voltage terminal to which the second power supply voltage is supplied and the gate of the first PMOS transistor and is temporarily turned on in synchronization with falling of the decode signal.

Abstract: The present invention provides a needle unit configured to be mounted to medical syringe, the needle unit including a needle member having a longitudinally extending inner space and having a needle hole formed in a side surface of a front end and an opening formed in a base end, the inner space being in communication with the outside through the needle hole and the opening, a base portion for supporting the base end of the needle member and communicating between the syringe and the inner space of the needle member by being attached to the syringe, a slide member movable along an outer peripheral surface of the needle member and capable of taking a first position to close the needle hole and a second position to uncover the needle hole in the base end portion side of the first position, a biasing member that biases the slide member from the second position side to the first position side; and a cap removably mounted to the base portion and is configured to cover the needle member.

Abstract: A non-transitory computer-readable storage medium storing a program of stretching operation of an elastic membrane which can enhance elasticity of an elastic membrane in a short time without using a dummy wafer is disclosed. The non-transitory computer-readable storage medium storing a program of stretching operation of an elastic membrane in a substrate holding apparatus, the program causes a computer to perfoini stretching operation of supplying a pressurized fluid to a pressure chamber formed by the elastic membrane and allowing the pressure chamber to be open to the atmosphere a predetermined number of times by a pressure regulating device in a state where the substrate holding apparatus is positioned above a polishing table during standby operation of a polishing apparatus.

Abstract: The transmitter circuit according to one embodiment includes a pulse generating circuit generating a pulse signal based on edges of input data, a first output driver outputting, based on the pulse signal, a first output pulse signal according to one of the edges to a first end of an external insulating coupling element, a second output driver outputting, based on the pulse signal, a second output pulse signal according to other one of the edges to a second end of the insulating coupling element, and an output stop circuit stopping the first and second output pulse signals from being output for a prescribed period from when a power supply voltage is turned on.

Abstract: The present invention provides a lid cover (1) of a medicine container (2) for preventing a medicine, which is air-tightly stored in a medicine container (2) that has a lid portion (22) that can be pierced with a needle (33), from leaking to an outside space when the medicine is suctioned using a syringe (3) having the needle (33), the lid cover (1) including a peripheral wall portion (10) that can be mounted to the lid portion (22) so as to surround a piercing face of the lid portion (22) that is pierced with the needle (33) and a ceiling face portion (50) that is continuous with an upper portion of the peripheral wall portion (10), and can be pierced with the needle (33), wherein the peripheral wall portion (10) and the ceiling face portion (50) are made of an elastic material, and are configured to air-tightly store the piercing face such that the piercing face is not exposed to the outside space in a state where the peripheral wall portion (10) is mounted to the lid portion (22), while also forming a clos

Abstract: A substrate processing apparatus includes transport mechanisms 121a to 127a, a sensor 40 for detecting whether a wafer W is held by the transport mechanisms 121a to 127a, a sensor controller 82 for controlling the sensor 40, a position information acquiring part 81 for acquiring position information of the substrate W in the transport passage, a detection result acquiring part 83 for acquiring a detection result from the sensor 40, and a determination processor 84 for determining whether the detection result of the sensor and the position information are consistent with each other. When it is determined that the detection result of the sensor 40 is inconsistent with the position information, the sensor controller 82 makes the sensor 40 retry to detect whether the substrate W is held.

Abstract: To provide a receiver, a communication device, and a communication method capable of restoring a signal transmitted via a non-contact transmission channel with high accuracy. A communication device has a transmission circuit that converts an input signal into a pulse, a non-contact transmission channel that has a primary side coil and a secondary side coil and transmits the pulse from the transmission circuit in a non-contact manner, a restoration circuit that restores the input signal on the basis of a reception signal corresponding to the pulse transmitted via the non-contact transmission channel, an initialization unit that initializes an output of the non-contact transmission channel, and an initialization control unit that outputs a control signal of controlling the initialization unit on the basis of the reception signal corresponding to the pulse received via the non-contact transmission channel.