Abstract: A surface emitting laser having a wide wavelength tunable band is provided. A surface emitting laser includes a first reflecting mirror (102); a second reflecting mirror (116); and an active layer (104) arranged between the first reflecting mirror (102) and the second reflecting mirror (116), a gap being formed between the second reflecting mirror (116) and the active layer (104), an oscillation wavelength being tunable. The second reflecting mirror (116) includes a beam (108) comprising a single-crystal semiconductor, and a dielectric multilayer film (110) supported by the beam (108), and the dielectric multilayer film (110) is arranged in an opening (118) formed in the beam (108).

Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.

Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.

Abstract: A surface emission laser includes a first beam, a second reflector disposed in an opening portion formed in the first beam, and a second beam disposed in the opening portion, and extending in a widthwise direction of the first beam to connect the second reflector and the first beam, wherein a length, in a longitudinal direction of the first beam, of the second beam is smaller than a length, in the longitudinal direction of the first beam, of the second reflector.

Abstract: To provide a wavelength tunable light source which can both ensure operation speed and reduce a drive voltage. A wavelength tunable light source according to the present invention includes a pair of reflectors at least one of which is a movable reflector, an active layer provided between the pair of reflectors, and a beam on part of which the movable reflector is formed and which is supported by a support member. The beam includes a blade part projecting between the support member and the movable reflector in a direction intersecting a stretching direction of the beam, and a center of gravity of the beam in the stretching direction is located at a distance less than half a length of the beam in the stretching direction.

Abstract: There is provided a method for manufacturing a capacitive micromachined ultrasonic transducer. In this method, a first insulating layer and a vibrating membrane are bonded by heat treatment and a second insulating layer is formed by thermal oxidation in a single heating step, with a cavity provided in the transducer communicating with the outside of the transducer through a communication portion.

Abstract: There is provided a method for manufacturing a capacitive micromachined ultrasonic transducer. In this method, a first insulating layer and a vibrating membrane are bonded by heat treatment and a second insulating layer is formed by thermal oxidation in a single heating step, with a cavity provided in the transducer communicating with the outside of the transducer through a communication portion.

Abstract: To provide a wavelength tunable light source which can both ensure operation speed and reduce a drive voltage. A wavelength tunable light source according to the present invention includes a pair of reflectors at least one of which is a movable reflector, an active layer provided between the pair of reflectors, and a beam on part of which the movable reflector is formed and which is supported by a support member. The beam includes a blade part projecting between the support member and the movable reflector in a direction intersecting a stretching direction of the beam, and a center of gravity of the beam in the stretching direction is located at a distance less than half a length of the beam in the stretching direction.

Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.

Abstract: In the method of manufacturing a micro structure including a membrane in a first substrate, a movable portion, a movable comb electrode, a suppressing unit, a support portion, and a fixed comb electrode are formed, and the movable portion of the first substrate and a second substrate are bonded. Then, the bonded second substrate is processed to form a membrane such as a reflecting portion. The movable comb electrode is supported by the movable portion and extends in a direction parallel to the membrane surface. The suppressing unit suppresses displacement of the movable comb electrode and the movable portion in a direction other than a direction normal to the membrane surface. The fixed comb electrode is supported by the support portion and extends in the direction parallel to the membrane surface. The fixed comb electrode is alternately arranged with respect to the movable comb electrode with a gap therebetween.

Abstract: An optical reflection member in a probe has a gas barrier layer for compensating for a high gas transparency of a support layer, thereby avoiding effects of deterioration of adhesion between an optical reflection layer and a support layer due to gas inflow, and reducing exfoliation. The probe includes an element having at least one cell in which is supported a vibration film containing one out two electrodes that define a space therebetween, in a manner allowing the acoustic wave to vibrate the film. An optical reflection layer is provided closer to the object than the element is, a support layer 104 supports the optical reflection layer, and a gas barrier layer that has a higher gas barrier property than the support layer is provided on at least one of the surfaces of the support layer.

Abstract: A probe is provided that can suppress the warp of an optical reflection member on a receiving surface and stably receive photoacoustic waves. The probe includes: an element having at least one cell in which a vibration film containing one electrode out of two electrodes that are provided so as to interpose a space therebetween is supported in a manner allowed to vibrate owing to the acoustic wave; an optical reflection layer 108 that is provided closer to the object than the element is; a support layer 104 supporting the optical reflection layer 108; and a warp suppressing layer 106 that is provided on at least one of the both surfaces of the support layer 104.

Abstract: An airtight container manufacturing method includes the steps of (a) exhausting an inside of a container through the through-hole; (b) arranging a spacer along a periphery of the through-hole on an outer surface of the container the inside of which has been exhausted; (c) arranging a plate so that the spacer and the through-hole are covered by the plate and a gap is formed along a side surface of the spacer between the plate and the container outer surface; and (d) arranging the cover to cover the plate and bonding the cover and the container outer surface via sealant positioned between the cover and the container outer surface. The sealing includes hardening the sealant after deforming the sealant by pressing the plate with the cover so that the gap is infilled with the sealant.

Abstract: An airtight container manufacturing method includes the steps of exhausting an inside of a container through a through-hole provided in the container, arranging a plate member having, at its periphery, grooves penetrating the plate member in its plate thickness direction, on an outer surface of the exhausted container, so as to close up the through-hole, and providing a sealant on the plate member. In addition, a cover member covers the plate member via the sealant, and the container is sealed by closing the cover member on the plate member. In the sealing step the sealant is deformed and flows from the adjacent grooves to form a continuous shape and fill a space between the cover member and the outer surface of the container and along the periphery of the plate member.

Abstract: An airtight container manufacturing method includes the steps of exhausting an inside of a container through a through-hole provided in the container, and arranging a spacer member along a periphery of the through-hole on an outer surface of the container. Additional steps include arranging a plate member having, at its periphery, grooves penetrating the plate member in its plate thickness direction so that a sealant will flow from the grooves to a side surface of the spacer member, with the spacer member and the through-hole covered by the plate member, and a gap is formed along the side surface of the spacer member between the plate member and the outer surface of the container, and sealing the container by arranging a cover member to cover the plate member via a sealant.

Abstract: A liquid discharge head according to the present invention comprises plural pressure chambers for applying pressure to liquid, which respectively communicate with liquid discharge openings for discharging liquid; and plural piezoelectric elements, arranged respectively corresponding to the plural pressure chambers, which respectively include lower electrodes, piezoelectric layers and upper electrodes layered in order from the pressure chambers, the lower electrodes being extended to areas corresponding to areas between the plural pressure chambers, and wherein an insulating layer is provided so as to cover at least all the lower electrodes located in the areas corresponding to areas between the plural pressure chambers.

Abstract: In airtight container manufacturing method including sealing a through-hole by a cover, it secures sealing performance and restrains sealant from flowing into the through-hole. The method comprises: (a) exhausting inside of a container through the through-hole; (b) arranging a spacer along periphery of the through-hole on an outer surface of the container the inside of which has been exhausted; (c) arranging a plate so that the spacer and the through-hole are covered by the plate and gap is formed along a side surface of the spacer between the plate and the container outer surface; and (d) arranging the cover to cover the plate and bonding the cover and the container outer surface via sealant positioned between the cover and the container outer surface, wherein the sealing includes hardening the sealant after deforming the sealant as pressing the plate by the cover so that the gap is infilled with the sealant.

Abstract: In an airtight container manufacturing method including sealing a through-hole by a cover, it secures sealing performance and restrains a sealant from flowing into the through-hole. The method comprises: (a) exhausting the inside of a container through the through-hole provided on the container; (b) arranging a plate member having, at its periphery, grooves penetrating the plate member in its plate thickness direction on the outer surface of the container the inside of which has been exhausted, so as to close up the through-hole; and (c) arranging the cover so as to cover the plate member via the sealant and bonding the cover and the outer surface of the container via the sealant, wherein the sealing includes hardening the sealant after deforming the sealant as pressing the plate member by the cover so that the sealant is positioned between the cover and the outer surface of the container via the grooves.

Abstract: In an airtight container manufacturing method including sealing a through-hole by a cover, it secures sealing performance and restrains a sealant from flowing into the through-hole. The method comprises: (a) exhausting the inside of a container through the through-hole provided on the container; (b) arranging a plate member having, at its periphery, grooves penetrating the plate member in its plate thickness direction on the outer surface of the container the inside of which has been exhausted, so as to close up the through-hole; and (c) arranging the cover so as to cover the plate member via the sealant and bonding the cover and the outer surface of the container via the sealant, wherein the sealing includes hardening the sealant after deforming the sealant as pressing the plate member by the cover so that the sealant is positioned between the cover and the outer surface of the container via the grooves.

Abstract: A liquid discharge head includes, on a same substrate, pressure generating chambers, nozzle apertures communicating with the pressure generating chambers through nozzle communicating pans, and a reservoir, wherein a cross-section area of the nozzle communicating part is larger, along a direction parallel to a nozzle aperture face of the substrate, than a cross-section area of the nozzle aperture, and the cross-section area of the nozzle aperture in such direction remains constant over the entire length of the nozzle aperture.