Abstract: Integrated circuit package substrates with high-density interconnect architecture for scaling high-density routing, as well as related structures, devices, and methods, are generally presented. More specifically, integrated circuit package substrates with fan out routing based on a high-density interconnect layer that may include pillars and vias, and integrated cavities for die attachment are presented. Additionally, integrated circuit package substrates with self-aligned pillars and vias formed on the high-density interconnect layer as well as related methods are presented.

Abstract: Disclosed herein are via-trace structures with improved alignment, and related package substrates, packages, and computing device. For example, in some embodiments, a package substrate may include a conductive trace, and a conductive via in contact with the conductive trace. The alignment offset between the conductive trace and the conductive via may be less than 10 microns, and conductive trace may have a bell-shaped cross-section or the conductive via may have a flared shape.

Abstract: Integrated circuit (IC) package substrates having high density interconnects with a sputter seed layer containing a copper alloy, as well as related structures, devices, and methods, are disclosed herein. For example, in some embodiments, a package substrate may include a first dielectric layer, a sputter seed layer disposed on the first dielectric layer, wherein the seed layer includes a copper alloy, a patterned conductive layer disposed on the seed layer, and a second dielectric layer over the patterned conductive layer.

Abstract: Disclosed herein are package substrates with integrated components, as well as related apparatuses and methods. For example, in some embodiments, an integrated circuit (IC) package, may include: a substrate having opposing first and second faces, an insulating material disposed between the first and second faces, and a thin film transistor (TFT) disposed between the first and second faces, wherein a conductive portion of the TFT is disposed on a layer of the insulating material, and the conductive portion of the TFT is a gate, source, or drain of the TFT; and a die coupled to the first face of the substrate.

Abstract: Package substrates including conductive interconnects having noncircular cross-sections, and integrated circuit packages incorporating such package substrates, are described. In an example, a conductive pillar having a noncircular pillar cross-section is electrically connected to an escape line routing layer. The escape line routing layer may include several series of conductive pads having noncircular pad cross-sections. Accordingly, conductive traces, e.g., strip line escapes and microstrip escapes, may be routed between the series of conductive pads in a single escape line routing layer.

Abstract: Package substrates including conductive interconnects having noncircular cross-sections, and integrated circuit packages incorporating such package substrates, are described. In an example, a conductive pillar having a noncircular pillar cross-section is electrically connected to an escape line routing layer. The escape line routing layer may include several series of conductive pads having noncircular pad cross-sections. Accordingly, conductive traces, e.g., strip line escapes and microstrip escapes, may be routed between the series of conductive pads in a single escape line routing layer.