Patents by Inventor Kuang-Hsin Chen

Kuang-Hsin Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10205024
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate; a gate structure formed over the substrate; a source region and a drain region formed in the substrate on either side of the gate structure, the source region and the drain region both having a first type of conductivity; and a field plate formed over the substrate between the gate structure and the drain region; wherein the field plate is coupled to the source region or a bulk electrode of the substrate. An associated method for fabricating the semiconductor structure is also disclosed.
    Type: Grant
    Filed: February 5, 2016
    Date of Patent: February 12, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chih-Chang Cheng, Fu-Yu Chu, Ruey-Hsin Liu, Kuang-Hsin Chen, Chih-Hsin Ko, Shih-Fen Huang
  • Patent number: 10199320
    Abstract: A method of fabricating an electronic package is provided, including: providing a carrier body having a first surface formed with a plurality of recessed portions, and a second surface opposing the first surface and interconnecting with the recessed portions; forming on the first surface of the carrier body an electronic structure that has a plurality of conductive elements received in the recessed portions correspondingly; and removing portion of the carrier body, with the conductive elements exposed from the second surface of the carrier body. Therefore, the carrier body is retained, and the fabrication cost is reduced since temporary material is required. The present invention further provides the electronic package thus fabricated.
    Type: Grant
    Filed: October 16, 2017
    Date of Patent: February 5, 2019
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Ching-Wen Chiang, Kuang-Hsin Chen, Sheng-Li Lu, Hsien-Wen Chen
  • Patent number: 10177036
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. An etch sequence is performed to form a first etched region over a planar region of a semiconductor arrangement. The first etched region exposes a planar structure, such as an alignment mark used for alignment during semiconductor fabrication. The etch sequence forms a second etched region over a semiconductor fin region of the semiconductor arrangement. In an embodiment, the etch sequence forms a first trench, a first fin nub and a first pillar in the semiconductor fin region, where the first trench is formed in a semiconductor substrate of the semiconductor fin region. A multi-depth STI structure is formed over at least one of the first trench, the first fin nub, or the first pillar.
    Type: Grant
    Filed: February 9, 2018
    Date of Patent: January 8, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Tsung-Yu Chiang, Kuang-Hsin Chen, Hsin-Lung Chao, Chen Chu-Hsuan
  • Patent number: 10163516
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes a gate stack over the semiconductor substrate. The gate stack includes a first insulating layer, a charge trapping structure, a second insulating layer, and a gate electrode. The first insulating layer separates the semiconductor substrate from the charge trapping structure. The charge trapping structure is between the first insulating layer and the second insulating layer. The gate electrode is over the second insulating layer. The charge trapping structure includes a first layer and a second layer. The first layer includes zinc oxide, tin dioxide, titanium oxide, zinc tin oxide, indium oxide, indium zinc oxide, indium gallium zinc oxide, zinc oxynitride, tin oxynitride, titanium oxynitride, zinc tin oxynitride, indium oxynitride, indium zinc oxynitride, or indium gallium zinc oxynitride.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: I-Chen Huang, Kuang-Hsin Chen, Yung-Hsien Wu, Wen-Chao Shen
  • Publication number: 20180337123
    Abstract: The present disclosure provides one embodiment of a semiconductor structure that includes an interconnection structure formed on a semiconductor substrate; and a capacitor disposed in the interconnection structure. The interconnection structure includes a top electrode; a bottom electrode; a dielectric material layer sandwiched between the top and bottom electrodes; and a nanocrystal layer embedded in the dielectric material layer.
    Type: Application
    Filed: July 27, 2018
    Publication date: November 22, 2018
    Inventors: Cheng-Chieh Lai, Meng-Ting Yu, Yung-Hsien Wu, Kuang-Hsin Chen
  • Publication number: 20180337248
    Abstract: A semiconductor device and method of manufacturing same are described. A first hafnium oxide (HfO2) layer is formed on a substrate. A titanium (Ti) layer is formed over the first hafnium oxide layer. A second hafnium oxide layer is formed over the titanium layer. The composite device structure is thermally annealed to produce a high-k dielectric structure having a hafnium titanium oxide (HfxTi1-xO2) layer interposed between the first hafnium oxide layer and the second hafnium oxide layer.
    Type: Application
    Filed: July 31, 2018
    Publication date: November 22, 2018
    Inventors: I-Chen Huang, Yi-Ju Hsu, Chi-Wen Liu, Kuang-Hsin Chen, Yung-Hsien Wu, Chin-Yu Chen
  • Patent number: 10134626
    Abstract: A semiconductor device is provided. The semiconductor device includes a doped isolation structure formed above a substrate, and the doped isolation structure includes a first doped portion and a second doped portion, and a doped concentration of the second doped portion is different from a doped concentration of the first doped portion. The semiconductor device also includes a first fin partially embedded in the doped isolation structure, and a sidewall surface of the first fin is in direct contact with the first doped portion. The semiconductor device includes a second fin partially embedded in the doped isolation structure, and the doped isolation structure is between the first fin and the second fin, and a sidewall surface of the second fin is in direct contact with the second doped portion.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: November 20, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu Chiang, Chung-Wei Lin, Kuang-Hsin Chen, Bor-Zen Tien
  • Patent number: 10068984
    Abstract: A semiconductor device and method of manufacturing same are described. A first hafnium oxide (HfO2) layer is formed on a substrate. A titanium (Ti) layer is formed over the first hafnium oxide layer. A second hafnium oxide layer is formed over the titanium layer. The composite device structure is thermally annealed to produce a high-k dielectric structure having a hafnium titanium oxide (HfxTi1-xO2) layer interposed between the first hafnium oxide layer and the second hafnium oxide layer.
    Type: Grant
    Filed: September 1, 2016
    Date of Patent: September 4, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: I-Chen Huang, Yi-Ju Hsu, Chi-Wen Liu, Kuang-Hsin Chen, Yung-Hsien Wu, Chin-Yu Chen
  • Patent number: 10062614
    Abstract: The present disclosure provides many different embodiments of a FinFET device that provide one or more improvements over the prior art. In one embodiment, a FinFET includes a semiconductor substrate and a plurality of fins having a first height and a plurality of fin having a second height on the semiconductor substrate. The second height may be less than the first height.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: August 28, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Joanna Chaw Yane Yin, Chi-Hsi Wu, Kuo-Chiang Ting, Kuang-Hsin Chen
  • Patent number: 10056299
    Abstract: A method of manufacturing a semiconductor structure includes receiving a substrate; patterning a first active region, a second active region and an isolation between the first active region and the second active region over the substrate; disposing an inter-level dielectric (ILD) over the substrate; forming a first gate extended over the first active region, the isolation and the second active region; and forming a second gate over the first active region and the second active region, wherein the second gate includes a first section disposed over the first active region and a second section disposed over the second active region, a portion of the ILD is disposed between the first section and the second section.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: August 21, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wei-Shuo Ho, Tsung-Yu Chiang, Kuang-Hsin Chen
  • Patent number: 10049973
    Abstract: A substrate structure is provided, which includes: a substrate body having opposite first and second surfaces; a plurality of conductive posts formed on the first surface of the substrate body and electrically connected to the substrate body; and a dielectric layer formed on the first surface of the substrate body for encapsulating the conductive posts, wherein one end surfaces of the conductive posts are exposed from the dielectric layer. Therefore, the present invention replaces the conventional silicon substrate with the dielectric layer so as to eliminate the need to fabricate the conventional TSVs (Through Silicon Vias) and thereby greatly reduce the fabrication cost. The present invention further provides an electronic package having the substrate structure and a fabrication method thereof.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: August 14, 2018
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Ching-Wen Chiang, Kuang-Hsin Chen, Hsien-Wen Chen
  • Patent number: 10008494
    Abstract: A semiconductor component, which includes a substrate, an interfacial layer disposed on the substrate, a first metal gate structure and a second metal gate structure disposed on the substrate. The first metal gate structure includes a first high-k dielectric layer disposed on the interfacial layer, and a first metal gate layer disposed on the first high-k dielectric layer. The second metal gate structure includes a second high-k dielectric layer disposed on the interfacial layer, a third high-k dielectric layer disposed on the second high-k dielectric layer, and a second metal gate layer disposed on the third high-k dielectric layer.
    Type: Grant
    Filed: January 11, 2017
    Date of Patent: June 26, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Chieh Lai, Kuang-Hsin Chen, Shih-Kai Fan, Yung-Hsien Wu, Yu-Hsun Chen
  • Publication number: 20180174914
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. An etch sequence is performed to form a first etched region over a planar region of a semiconductor arrangement. The first etched region exposes a planar structure, such as an alignment mark used for alignment during semiconductor fabrication. The etch sequence forms a second etched region over a semiconductor fin region of the semiconductor arrangement. In an embodiment, the etch sequence forms a first trench, a first fin nub and a first pillar in the semiconductor fin region, where the first trench is formed in a semiconductor substrate of the semiconductor fin region. A multi-depth STI structure is formed over at least one of the first trench, the first fin nub, or the first pillar.
    Type: Application
    Filed: February 9, 2018
    Publication date: June 21, 2018
    Inventors: Tsung-Yu Chiang, Kuang-Hsin Chen, Hsin-Lung Chao, Chen Chu-Hsuan
  • Patent number: 9947766
    Abstract: A semiconductor device includes a substrate, a source/drain region, an etch stop layer, an oxide layer, an interlayer dielectric layer, and a contact plug. The source/drain region is in the substrate. The etch stop layer is over the source/drain region. The oxide layer is over the etch stop layer. The interlayer dielectric layer is over the oxide layer. The contact plug is electrically connected to the source/drain region through the interlayer dielectric layer, the oxide layer, and the etch stop layer.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu Chiang, Kuang-Hsin Chen
  • Publication number: 20180102278
    Abstract: A semiconductor device is provided. The semiconductor device includes a doped isolation structure formed above a substrate, and the doped isolation structure includes a first doped portion and a second doped portion, and a doped concentration of the second doped portion is different from a doped concentration of the first doped portion. The semiconductor device also includes a first fin partially embedded in the doped isolation structure, and a sidewall surface of the first fin is in direct contact with the first doped portion. The semiconductor device includes a second fin partially embedded in the doped isolation structure, and the doped isolation structure is between the first fin and the second fin, and a sidewall surface of the second fin is in direct contact with the second doped portion.
    Type: Application
    Filed: December 11, 2017
    Publication date: April 12, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu CHIANG, Chung-Wei LIN, Kuang-Hsin CHEN, Bor-Zen TIEN
  • Patent number: 9911658
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. An etch sequence is performed to form a first etched region over a planar region of a semiconductor arrangement. The first etched region exposes a planar structure, such as an alignment mark used for alignment during semiconductor fabrication. The etch sequence forms a second etched region over a semiconductor fin region of the semiconductor arrangement. In an embodiment, the etch sequence forms a first trench, a first fin nub and a first pillar in the semiconductor fin region, where the first trench is formed in a semiconductor substrate of the semiconductor fin region. A multi-depth STI structure is formed over at least one of the first trench, the first fin nub, or the first pillar.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: March 6, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tsung-Yu Chiang, Kuang-Hsin Chen, Hsin-Lung Chao, Chen Chu-Hsuan
  • Publication number: 20180040550
    Abstract: A method of fabricating an electronic package is provided, including: providing a carrier body having a first surface formed with a plurality of recessed portions, and a second surface opposing the first surface and interconnecting with the recessed portions; forming on the first surface of the carrier body an electronic structure that has a plurality of conductive elements received in the recessed portions correspondingly; and removing portion of the carrier body, with the conductive elements exposed from the second surface of the carrier body. Therefore, the carrier body is retained, and the fabrication cost is reduced since temporary material is required. The present invention further provides the electronic package thus fabricated.
    Type: Application
    Filed: October 16, 2017
    Publication date: February 8, 2018
    Applicant: Siliconware Precision Industries Co., Ltd.
    Inventors: Ching-Wen Chiang, Kuang-Hsin Chen, Sheng-Li Lu, Hsien-Wen Chen
  • Publication number: 20180012809
    Abstract: The present disclosure provides many different embodiments of a FinFET device that provide one or more improvements over the prior art. In one embodiment, a FinFET includes a semiconductor substrate and a plurality of fins having a first height and a plurality of fin having a second height on the semiconductor substrate. The second height may be less than the first height.
    Type: Application
    Filed: June 30, 2017
    Publication date: January 11, 2018
    Inventors: Joanna Chaw Yane Yin, Chi-Hsi Wu, Kuo-Chiang Ting, Kuang-Hsin Chen
  • Patent number: 9842761
    Abstract: A semiconductor device is provided. The semiconductor device includes a first fin partially surrounded by a first isolation structure and a second fin partially surrounded by a second isolation structure. The second isolation structure has a dopant concentration higher than that of the first isolation structure, and a height difference is between a top surface of the first isolation structure and a top surface of the second isolation structure.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: December 12, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Yu Chiang, Chung-Wei Lin, Kuang-Hsin Chen, Bor-Zen Tien
  • Publication number: 20170330976
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes a gate stack over the semiconductor substrate. The gate stack includes a first insulating layer, a charge trapping structure, a second insulating layer, and a gate electrode. The first insulating layer separates the semiconductor substrate from the charge trapping structure. The charge trapping structure is between the first insulating layer and the second insulating layer. The gate electrode is over the second insulating layer. The charge trapping structure includes a first layer and a second layer. The first layer includes zinc oxide, tin dioxide, titanium oxide, zinc tin oxide, indium oxide, indium zinc oxide, indium gallium zinc oxide, zinc oxynitride, tin oxynitride, titanium oxynitride, zinc tin oxynitride, indium oxynitride, indium zinc oxynitride, or indium gallium zinc oxynitride.
    Type: Application
    Filed: June 5, 2017
    Publication date: November 16, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Chen HUANG, Kuang-Hsin CHEN, Yung-Hsien WU, Wen-Chao SHEN