Patents by Inventor Kun Lai

Kun Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240153869
    Abstract: Memory devices are implemented within a vertical memory structure, comprising a stack of alternating layers of insulator material and word line material, with a series of alternating conductive pillars and insulating pillars disposed through stack. Data storage structures are disposed on inside surfaces of the layers of word line material at cross-points of the insulating pillars and the layers of word line material. Semiconductor channel material is disposed between the insulating pillars and the data storage structures at cross-points of the insulating pillars with the layers of word line material. The semiconductor channel material extends around an outside surface of the insulating pillars, contacting the adjacent conductive pillars on both sides to provide source/drain terminals.
    Type: Application
    Filed: January 15, 2024
    Publication date: May 9, 2024
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun LAI, Hsiang-Lan LUNG
  • Publication number: 20240145379
    Abstract: Methods and semiconductor devices are provided. A method includes determining a location of a polyimide opening (PIO) corresponding to an under-bump metallization (UBM) feature in a die. The die includes a substrate and an interconnect structure over the substrate. The method also includes determining a location of a stacked via structure in the interconnect structure based on the location of the PIO. The method further includes forming, in the interconnect structure, the stacked via structure comprising at most three stacked contact vias at the location of the PIO.
    Type: Application
    Filed: February 23, 2023
    Publication date: May 2, 2024
    Inventors: Yen-Kun Lai, Wei-Hsiang Tu, Ching-Ho Cheng, Cheng-Nan Lin, Chiang-Jui Chu, Chien Hao Hsu, Kuo-Chin Chang, Mirng-Ji Lii
  • Publication number: 20240090238
    Abstract: A memory device and a method for manufacturing the memory device are provided. The memory device includes a stack and a plurality of memory strings. The stack is disposed on the substrate, and the stack includes a plurality of conductive layers and a plurality of insulating layers alternately stacked. The memory strings pass through the stack along a first direction, wherein a first memory string in the memory strings includes a first conductive pillar and a second conductive pillar, a channel layer, and a memory structure. The first conductive pillar and the second conductive pillar respectively extend along the first direction and are separated from each other. The channel layer is disposed between the first conductive pillar and the second conductive pillar. The memory structure surrounds the second conductive pillar, and the memory structure includes a resistive memory material.
    Type: Application
    Filed: November 27, 2023
    Publication date: March 14, 2024
    Inventors: Feng-Min LEE, Erh-Kun LAI, Dai-Ying LEE, Yu-Hsuan LIN, Po-Hao TSENG, Ming-Hsiu LEE
  • Patent number: 11916011
    Abstract: Memory devices are implemented within a vertical memory structure, comprising a stack of alternating layers of insulator material and word line material, with a series of alternating conductive pillars and insulating pillars disposed through stack. Data storage structures are disposed on inside surfaces of the layers of word line material at cross-points of the insulating pillars and the layers of word line material. Semiconductor channel material is disposed between the insulating pillars and the data storage structures at cross-points of the insulating pillars with the layers of word line material. The semiconductor channel material extends around an outside surface of the insulating pillars, contacting the adjacent conductive pillars on both sides to provide source/drain terminals.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: February 27, 2024
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Patent number: 11871588
    Abstract: A memory device includes a stack and a plurality of memory strings. The stack is disposed on the substrate, and the stack includes a plurality of conductive layers and a plurality of insulating layers alternately stacked. The memory strings pass through the stack along a first direction, wherein a first memory string in the memory strings includes a first conductive pillar and a second conductive pillar, a channel layer, and a memory structure. The first conductive pillar and the second conductive pillar respectively extend along the first direction and are separated from each other. The channel layer is disposed between the first conductive pillar and the second conductive pillar. The memory structure surrounds the second conductive pillar, and the memory structure includes a resistive memory material.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: January 9, 2024
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Feng-Min Lee, Erh-Kun Lai, Dai-Ying Lee, Yu-Hsuan Lin, Po-Hao Tseng, Ming-Hsiu Lee
  • Publication number: 20230361022
    Abstract: An electrical connection structure includes a dielectric layer stack of a plurality of dielectric layers including a first dielectric layer as an uppermost layer, and a second dielectric layer under the first dielectric layer, a plurality of metal layers in the plurality of dielectric layers, a via stack in the plurality of dielectric layers that connects the plurality of metal layers, an upper metal layer on the dielectric layer stack over the via stack, and an upper dielectric layer on the dielectric layer stack and including an upper dielectric layer opening over the upper metal layer and the via stack. A number of first vias in the first dielectric layer, may be less than or equal to a number of second vias in the second dielectric layer, and the number of second vias in the second dielectric layer may be less than or equal to 3.
    Type: Application
    Filed: May 3, 2022
    Publication date: November 9, 2023
    Inventors: Chien Hao Hsu, Wei-Hsiang Tu, Yen-Kun Lai, Kuo-Chin Chang, Mirng-Ji Lii
  • Publication number: 20230354602
    Abstract: An integrated circuit structure includes a substrate, an interconnect stack, a first memory array, and a source line. The interconnect stack is over the substrate. The first memory array is over the interconnect stack and includes memory elements stacked in a vertical direction each comprising a conductive layer. The first memory array further includes a memory layer electrically connecting to the conductive layers of the memory elements and extending downwardly from a topmost one of the conductive layers to a lowermost one of the conductive layers; and a channel layer extending along a sidewall of the memory layer. The source line is in contact with a top end of the channel layer and laterally extends across the first memory array.
    Type: Application
    Filed: April 28, 2022
    Publication date: November 2, 2023
    Inventors: Erh-Kun LAI, Feng-Min LEE
  • Publication number: 20230317641
    Abstract: A semiconductor die includes semiconductor devices located on a semiconductor substrate, metal-insulator-metal corner structures overlying the semiconductor devices and located in corner regions of the semiconductor die. Metal-insulator-metal corner structures are located in the corner regions of the semiconductor die. Each of the metal-insulator-metal corner structures has a horizontal cross-sectional shape selected from a triangular shape and a polygonal shape including a pair of laterally-extending strips extending along two horizontal directions that are perpendicular to each other and connected to each other by a connecting shape.
    Type: Application
    Filed: March 31, 2022
    Publication date: October 5, 2023
    Inventors: Yen-Kun LAI, Chien Hao Hsu, Wei-Hsiang Tu, Kuo-Chin Chang, Mirng-Ji Lii
  • Publication number: 20230301117
    Abstract: A memory device includes a substrate, a first conductive stripe disposed on the substrate and extending along a first direction, a second conductive stripe disposed on the first conductive stripe, a first pillar element and a spacer. The second conductive stripe extends along a second direction intersected with the first direction. A thickness of the second conductive stripe is greater than a thickness of the first conductive stripe, and the second conductive stripe is an integral structure. The first pillar element is disposed at an intersection between the first conductive stripe and the second conductive stripe, and extends from a top surface of the first conductive stripe to a bottom surface of the second conductive stripe along a third direction intersected with the first direction and the second direction. The first pillar element includes a switching layer and a memory layer corresponding to a first level.
    Type: Application
    Filed: March 18, 2022
    Publication date: September 21, 2023
    Inventors: Erh-Kun LAI, Hsiang-Lan LUNG, Chih-Hsiang YANG
  • Publication number: 20230284463
    Abstract: A memory structure and a manufacturing method for the same are provided. The memory structure includes a memory element, a spacer structure, and an upper element structure. The memory element includes a lower memory layer and an upper memory layer on the lower memory layer. The spacer structure is on a sidewall surface of the lower memory layer. The upper element structure is electrically connected on the upper memory layer. A recess is defined by a lower surface of the upper element structure, an upper surface of the lower memory layer and a sidewall surface of the upper memory layer.
    Type: Application
    Filed: March 4, 2022
    Publication date: September 7, 2023
    Inventors: Erh-Kun LAI, Hsiang-Lan LUNG, Chiao-Wen YEH
  • Publication number: 20230282511
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a staircase structure including a first stair layer and a second stair layer on the first stair layer. The first stair layer includes a first conductive film. The semiconductor structure includes a first landing pad disposed on the first conductive film. The first landing pad has a first pad sidewall facing toward the second stair layer, and a second pad sidewall opposite to the first pad sidewall. The second pad sidewall includes an inclined sidewall portion.
    Type: Application
    Filed: May 12, 2023
    Publication date: September 7, 2023
    Inventor: Erh-Kun LAI
  • Patent number: 11751407
    Abstract: A plurality of memory cells in a cross-point array in which the memory cell stacks in the cross-points include a switch element, a conductive barrier layer, and a confined cell structure in series, and having sides aligned within the cross-point area of the corresponding cross-point, the confined cell structure including surfactant spacers within the cross-point area having outside surfaces on a pair of opposing sides of the stack, and a body of programmable resistance memory material confined between inside surfaces of the surfactant spacers. The memory cells can be operated as multi-level cells in a 3D array.
    Type: Grant
    Filed: January 21, 2021
    Date of Patent: September 5, 2023
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Patent number: 11688688
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a staircase structure including a first stair layer and a second stair layer on the first stair layer. The first stair layer comprises a first conductive film. The semiconductor structure includes a landing pad disposed on the first conductive film. The landing pad has a first pad sidewall facing toward the second stair layer, a first lateral gap distance between an upper portion of the first pad sidewall and the second stair layer is smaller than a second lateral gap distance between a lower portion of the first pad sidewall and the second stair layer.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: June 27, 2023
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Erh-Kun Lai
  • Publication number: 20230118088
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate and a bottom dielectric layer continuously disposed on the substrate. The semiconductor structure further includes a plurality of stacks disposed on the bottom dielectric layer. Each of the stacks includes gate electrodes and semiconductor layers disposed alternately. The semiconductor structure further includes a plurality of source/drain structures disposed on the bottom dielectric layer and between the stacks. The semiconductor structure further includes a plurality of conductors landed on highest gate electrodes of the stacks.
    Type: Application
    Filed: October 19, 2021
    Publication date: April 20, 2023
    Inventor: Erh-Kun LAI
  • Patent number: 11626517
    Abstract: A semiconductor structure and a manufacturing method for the same are provided. The semiconductor structure comprises a channel element. The channel element comprises a substrate portion and a vertical channel portion. The vertical channel portion is adjoined on the substrate portion. The substrate portion and the vertical channel portion both comprise single crystal silicon.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: April 11, 2023
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Erh-Kun Lai
  • Publication number: 20230107847
    Abstract: A semiconductor die may include metal interconnect structures located within interconnect-level dielectric material layers, bonding pads located on a topmost interconnect-level dielectric material layer, a dielectric passivation layer located on the topmost interconnect-level dielectric material layer, and metal bump structures extending through the dielectric passivation layer and located on the bonding pads. Each of the metal bump structures comprises a contoured bottom surface including a bottommost surface segment in contact with a top surface of a respective one of the bonding pads, a tapered surface segment in contact with a tapered sidewall of a respective opening through the dielectric passivation layer, and an annular surface segment that overlies the dielectric passivation layer and having an inner periphery that is laterally offset inward from an outer periphery by a lateral offset distance that is at least 8% of a width of a respective underlying one of the bonding pads.
    Type: Application
    Filed: May 19, 2022
    Publication date: April 6, 2023
    Inventors: Yen-Kun LAI, Yi-Wen WU, Kuo-Chin CHANG, Po-Hao TSAI, Mirng-Ji LII
  • Publication number: 20230068329
    Abstract: A semiconductor device including a semiconductor die, a first conductive pad, a second conductive pad, a first connector structure and a second connector structure is provided. The first conductive pad is disposed on the semiconductor die, wherein the first conductive pad has a first lateral dimension. The second conductive pad is disposed on the semiconductor die, wherein the second conductive pad has a second lateral dimension. The first connector structure is disposed on the first conductive pad, wherein the first connector structure has a third lateral dimension greater than the first lateral dimension. The second connector structure is disposed on the second conductive pad, wherein the second connector structure has a fourth lateral dimension smaller than the second lateral dimension.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hao Hsu, Yen-Kun Lai, Wei-Hsiang Tu, Hao-Chun Liu, Kuo-Chin Chang, Mirng-Ji Lii
  • Publication number: 20230060249
    Abstract: A semiconductor die includes a semiconductor substrate, an interconnect structure, and a conductive bump. The interconnect structure is disposed on and electrically connected to the semiconductor substrate. The interconnect structure includes stacked interconnect layers. Each of the stacked interconnect layers includes a dielectric layer and an interconnect wiring embedded in the dielectric layer. The interconnect wiring of a first interconnect layer among the stacked interconnect layers further includes a first via and second vias. The first via electrically connected to the interconnect wiring. The second vias connected to the interconnect wiring, and the first via and the second vias are located on a same level height. The conductive bump is disposed on the interconnect structure. The conductive bump includes a base portion and a protruding portion connected to the base portion, and the base portion is between the protruding portion and the first via.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Kun Lai, Chien-Hao Hsu, Wei-Hsiang Tu, Kuo-Chin Chang, Mirng-Ji Lii
  • Publication number: 20230061716
    Abstract: Semiconductor devices and methods of manufacturing are provided, wherein a first passivation layer is deposited over a top redistribution structure; a second passivation layer is deposited over the first passivation layer; and a first opening is formed through the second passivation layer. After the forming the first opening, the first opening is reshaped into a second opening; a third opening is formed through the first passivation layer; and filling the second opening and the third opening with a conductive material.
    Type: Application
    Filed: March 29, 2022
    Publication date: March 2, 2023
    Inventors: Yen-Kun Lai, Yi-Wen Wu, Kuo-Chin Chang, Po-Hao Tsai, Mirng-Ji Lii
  • Publication number: 20230045495
    Abstract: A memory device includes a stack and a plurality of memory strings. The stack is disposed on the substrate, and the stack includes a plurality of conductive layers and a plurality of insulating layers alternately stacked. The memory strings pass through the stack along a first direction, wherein a first memory string in the memory strings includes a first conductive pillar and a second conductive pillar, a channel layer, and a memory structure. The first conductive pillar and the second conductive pillar respectively extend along the first direction and are separated from each other. The channel layer is disposed between the first conductive pillar and the second conductive pillar. The memory structure surrounds the second conductive pillar, and the memory structure includes a resistive memory material.
    Type: Application
    Filed: August 3, 2021
    Publication date: February 9, 2023
    Inventors: Feng-Min LEE, Erh-Kun LAI, Dai-Ying LEE, Yu-Hsuan LIN, Po-Hao TSENG, Ming-Hsiu LEE