Patents by Inventor Kun Lai

Kun Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230061716
    Abstract: Semiconductor devices and methods of manufacturing are provided, wherein a first passivation layer is deposited over a top redistribution structure; a second passivation layer is deposited over the first passivation layer; and a first opening is formed through the second passivation layer. After the forming the first opening, the first opening is reshaped into a second opening; a third opening is formed through the first passivation layer; and filling the second opening and the third opening with a conductive material.
    Type: Application
    Filed: March 29, 2022
    Publication date: March 2, 2023
    Inventors: Yen-Kun Lai, Yi-Wen Wu, Kuo-Chin Chang, Po-Hao Tsai, Mirng-Ji Lii
  • Publication number: 20230045495
    Abstract: A memory device includes a stack and a plurality of memory strings. The stack is disposed on the substrate, and the stack includes a plurality of conductive layers and a plurality of insulating layers alternately stacked. The memory strings pass through the stack along a first direction, wherein a first memory string in the memory strings includes a first conductive pillar and a second conductive pillar, a channel layer, and a memory structure. The first conductive pillar and the second conductive pillar respectively extend along the first direction and are separated from each other. The channel layer is disposed between the first conductive pillar and the second conductive pillar. The memory structure surrounds the second conductive pillar, and the memory structure includes a resistive memory material.
    Type: Application
    Filed: August 3, 2021
    Publication date: February 9, 2023
    Inventors: Feng-Min LEE, Erh-Kun LAI, Dai-Ying LEE, Yu-Hsuan LIN, Po-Hao TSENG, Ming-Hsiu LEE
  • Patent number: 11538829
    Abstract: A memory device and a manufacturing for the same are provided. The memory device comprises a channel line, word lines, a first switch, and a second switch. Memory cells for a memory string are defined at intersections between the channel line and the word lines. The first switch is electrically connected with the channel line. The second switch is electrically connected with the channel line. The first switch is electrically connected between the second switch and the memory cells.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: December 27, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Erh-Kun Lai
  • Patent number: 11532583
    Abstract: A method of forming a semiconductor structure is provided. A layout of a substrate is provided. The layout includes a surface having an inner region and an outer region surrounding the inner region. An under bump metallurgy (UBM) pad region within the outer region is defined. The UBM pad region is partitioned into a first zone and a second zone, wherein the first zone faces towards a center of the substrate, and the second zone faces away from the center of the substrate. The substrate is provided according to the layout, wherein the providing of the substrate includes forming a conductive via in the substrate. The conductive via is disposed outside the second zone and at least partially overlaps the first zone from a top view perspective. A UBM pad is formed over the conductive via and within the UBM pad region.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Kuo-Chin Chang, Yen-Kun Lai, Kuo-Ching Hsu, Mirng-Ji Lii
  • Patent number: 11502105
    Abstract: A semiconductor structure and a method for manufacturing the same are provided. The method includes: forming a silicide layer, forming a vertical Si channel layer, wherein the vertical Si channel layer is on an upper surface of the silicide layer, the vertical Si channel layer has a first silicon phase; performing a first annealing step so as to move the silicide layer upward and change a solid phase of the vertical Si channel layer from the first silicon phase to a second silicon phase at an interface of the silicide layer and the vertical Si channel layer, wherein the second silicon phase has a conductivity higher than a conductivity of the first silicon phase.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: November 15, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Publication number: 20220336347
    Abstract: Memory devices are implemented within a vertical memory structure, comprising a stack of alternating layers of insulator material and word line material, with a series of alternating conductive pillars and insulating pillars disposed through stack. Data storage structures are disposed on inside surfaces of the layers of word line material at cross-points of the insulating pillars and the layers of word line material. Semiconductor channel material is disposed between the insulating pillars and the data storage structures at cross-points of the insulating pillars with the layers of word line material. The semiconductor channel material extends around an outside surface of the insulating pillars, contacting the adjacent conductive pillars on both sides to provide source/drain terminals.
    Type: Application
    Filed: April 14, 2021
    Publication date: October 20, 2022
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Publication number: 20220336145
    Abstract: An inductor structure and a manufacturing method for the same are provided. The inductor structure includes conductive layers and conductive elements. The conductive layers overlap in a vertical direction. Each of the conductive elements is coupled between two conductive layers of the conductive layers.
    Type: Application
    Filed: April 20, 2021
    Publication date: October 20, 2022
    Inventors: Erh-Kun LAI, Hsiang-Lan LUNG
  • Publication number: 20220328686
    Abstract: A semiconductor structure and a manufacturing method for the same are provided. The semiconductor structure comprises a channel element. The channel element comprises a substrate portion and a vertical channel portion. The vertical channel portion is adjoined on the substrate portion. The substrate portion and the vertical channel portion both comprise single crystal silicon.
    Type: Application
    Filed: April 13, 2021
    Publication date: October 13, 2022
    Inventor: Erh-Kun LAI
  • Publication number: 20220320140
    Abstract: A semiconductor structure and a method for manufacturing the same are provided. The method includes: forming a silicide layer, forming a vertical Si channel layer, wherein the vertical Si channel layer is on an upper surface of the silicide layer, the vertical Si channel layer has a first silicon phase; performing a first annealing step so as to move the silicide layer upward and change a solid phase of the vertical Si channel layer from the first silicon phase to a second silicon phase at an interface of the silicide layer and the vertical Si channel layer, wherein the second silicon phase has a conductivity higher than a conductivity of the first silicon phase.
    Type: Application
    Filed: April 6, 2021
    Publication date: October 6, 2022
    Inventors: Erh-Kun LAI, Hsiang-Lan Lung
  • Publication number: 20220302029
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a staircase structure including a first stair layer and a second stair layer on the first stair layer. The first stair layer comprises a first conductive film. The semiconductor structure includes a landing pad disposed on the first conductive film. The landing pad has a first pad sidewall facing toward the second stair layer, a first lateral gap distance between an upper portion of the first pad sidewall and the second stair layer is smaller than a second lateral gap distance between a lower portion of the first pad sidewall and the second stair layer.
    Type: Application
    Filed: March 16, 2021
    Publication date: September 22, 2022
    Inventor: Erh-Kun LAI
  • Publication number: 20220285385
    Abstract: A memory device and a method for fabricating the memory device are provided. The memory device includes a substrate having an upper surface; a stack disposed on the substrate, wherein the stack includes a first insulating layer, a first conductive layer, a second insulating layer, a second conductive layer, and a third insulating layer sequentially stacked on the upper surface of the substrate along a first direction; a channel layer penetrating the stack along the first direction, wherein the channel layer has a ring shape along a cross section view in a plane perpendicular to the first direction; and a memory layer disposed between the channel layer and the second conductive layer.
    Type: Application
    Filed: March 3, 2021
    Publication date: September 8, 2022
    Inventor: Erh-Kun LAI
  • Patent number: 11424260
    Abstract: A memory device comprises a stack of conductive layers, and an array of pillars through the stack. Each of the pillars comprises a plurality of series-connected memory cells located in a layout pattern of pillar locations at cross-points between the pillars and the conductive layers. The pillars in the array are arranged in a set of rows of pillars extending in a first direction. First and second source lines are disposed vertically through the pillars of first and second particular rows of pillars. The set of rows of pillars includes a subset of rows of pillars including multiple members disposed between the first source line and the second source line. A source line conductor is disposed beneath and electrically connected to the first source line, the second source line, and the subset of rows of pillars disposed between the first and second source lines.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: August 23, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Patent number: 11315945
    Abstract: A memory device includes a stack structure, a memory element, a channel element, and a semiconductor layer. The stack structure includes a source layer, an insulating layer and gate electrode layers. The insulating layer is on the source layer. The gate electrode layers are on the insulating layer. The memory element is on electrode sidewall surfaces of the gate electrode layers. Memory cells are defined in the memory element between the channel element and the gate electrode layers. The semiconductor layer is electrically connected between the source layer and the channel element. The semiconductor layer and the source layer have an interface therebetween. The interface is at a location on an inside of an insulating sidewall surface of the insulating layer with a lateral offset relative to the insulating sidewall surface.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: April 26, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Patent number: 11315826
    Abstract: A three-dimensional memory device includes a substrate, a plurality of horizontal conductive layers, a plurality of vertical memory structures and a vertical conductive post. The conductive layers are located above the substrate, and immediately-adjacent two of the conductive layers are spaced by a first air gap. The memory structures pass through the conductive layers and are connected to the substrate. The conductive post is located between immediately-adjacent two of the memory structures and passes through the conductive layers and is connected to the substrate. The conductive post is spaced from immediately-adjacent edges of the conductive layers by a second air gap.
    Type: Grant
    Filed: February 5, 2020
    Date of Patent: April 26, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Publication number: 20210249435
    Abstract: A memory device and a manufacturing for the same are provided. The memory device comprises a channel line, word lines, a first switch, and a second switch. Memory cells for a memory string are defined at intersections between the channel line and the word lines. The first switch is electrically connected with the channel line. The second switch is electrically connected with the channel line. The first switch is electrically connected between the second switch and the memory cells.
    Type: Application
    Filed: August 27, 2020
    Publication date: August 12, 2021
    Inventor: Erh-Kun LAI
  • Publication number: 20210242072
    Abstract: A three-dimensional memory device includes a substrate, a plurality of horizontal conductive layers, a plurality of vertical memory structures and a vertical conductive post. The conductive layers are located above the substrate, and immediately-adjacent two of the conductive layers are spaced by a first air gap. The memory structures pass through the conductive layers and are connected to the substrate. The conductive post is located between immediately-adjacent two of the memory structures and passes through the conductive layers and is connected to the substrate. The conductive post is spaced from immediately-adjacent edges of the conductive layers by a second air gap.
    Type: Application
    Filed: February 5, 2020
    Publication date: August 5, 2021
    Inventors: Erh-Kun LAI, Hsiang-Lan LUNG
  • Publication number: 20210233883
    Abstract: A method of forming a semiconductor structure is provided. A layout of a substrate is provided. The layout includes a surface having an inner region and an outer region surrounding the inner region. An under bump metallurgy (UBM) pad region within the outer region is defined. The UBM pad region is partitioned into a first zone and a second zone, wherein the first zone faces towards a center of the substrate, and the second zone faces away from the center of the substrate. The substrate is provided according to the layout, wherein the providing of the substrate includes forming a conductive via in the substrate. The conductive via is disposed outside the second zone and at least partially overlaps the first zone from a top view perspective. A UBM pad is formed over the conductive via and within the UBM pad region.
    Type: Application
    Filed: April 13, 2021
    Publication date: July 29, 2021
    Inventors: KUO-CHIN CHANG, YEN-KUN LAI, KUO-CHING HSU, MIRNG-JI LII
  • Patent number: 11069704
    Abstract: A memory device comprises a plurality of stacks of bit lines alternating with insulating strips over an insulating layer on a substrate, and a plurality of vertical gate structures disposed between the stacks. Vertical channel structures and memory elements are disposed between outside surfaces of the vertical gate structures and sidewalls of insulating strips in the stacks of bit lines. The vertical channel structures provide channels between adjacent bit lines in the stacks. A plurality of word line transistors is disposed over and connected to respective vertical gate structures. A plurality of word lines is disposed over and connected to the word line transistors. The memory device comprises circuitry connected to the bit lines to apply bit line and source line voltages to the bit lines.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: July 20, 2021
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Publication number: 20210217767
    Abstract: A memory device includes a stack structure, a memory element, a channel element, and a semiconductor layer. The stack structure includes a source layer, an insulating layer and gate electrode layers. The insulating layer is on the source layer. The gate electrode layers are on the insulating layer. The memory element is on electrode sidewall surfaces of the gate electrode layers. Memory cells are defined in the memory element between the channel element and the gate electrode layers. The semiconductor layer is electrically connected between the source layer and the channel element. The semiconductor layer and the source layer have an interface therebetween. The interface is at a location on an inside of an insulating sidewall surface of the insulating layer with a lateral offset relative to the insulating sidewall surface.
    Type: Application
    Filed: January 14, 2020
    Publication date: July 15, 2021
    Inventors: Erh-Kun LAI, Hsiang-Lan LUNG
  • Patent number: 11056512
    Abstract: A device substrate includes a first substrate, an active device array, a data line pad, a gate drive circuit test line, and a first barrier structure. The active device array is located on the first substrate. The data line pad is electrically connected to the active device array. The gate drive circuit test line is located on the first substrate. The first barrier structure is located on the first substrate. The first barrier structure is located between the gate drive circuit test line and the data line pad. The barrier structure includes a first blocking wall.
    Type: Grant
    Filed: June 21, 2019
    Date of Patent: July 6, 2021
    Assignee: Au Optronics Corporation
    Inventors: Shin-Wei Huang, Ching-Kun Lai, Chen-Shun Tsai