Abstract: A toolholder matched with the internal jet cooling spindle for cryogenic coolant is mainly composed of a hollow toolholder body, a high-performance thermal insulation structure and a bidirectional sealing structure. They can guide the cryogenic coolant from the spindle to the internal cooling channel of cutting tool and realize the cryogenic thermal insulation and dynamic sealing. The high-performance thermal insulation structure inside the toolholder employs the material with a low thermal conductivity and a low linear expansion coefficient to restrain the low temperature impact of cryogenic coolant on the toolholder and spindle, to ensure the dimensional accuracy and assembly accuracy of the toolholder. The bidirectional sealing structure in the toolholder uses the ultra-low temperature resistant seal rings to prevent the cryogenic coolant from leaking towards the spindle and the cutting tool, to ensure the stability of the coolant transport.

Abstract: A water quality monitoring device and a monitoring method thereof are provided. The water quality monitoring device includes a water tank, a first and a second optical detection devices and a control circuit. The water tank has an accommodating space to carry a liquid. The first optical detection device provides a first light to detect and obtain a first reference light intensity, a first scattered light intensity, and a first penetrating light intensity. The second optical detection device provides a second light to detect and obtain a second reference light intensity, a second scattered light intensity, and a second penetrating light intensity. The control circuit calculates a water quality detection value of the liquid based on the first reference light intensity, the first scattered light intensity, the first penetrating light intensity, the second reference light intensity, the second scattered light intensity, and the second penetrating light intensity.

Abstract: The present invention relates to a process method for conformal processing of a cylindrical shell inner weld seam by a special mobile robot, a laser scanner is used to scan a cylindrical shell inner weld seam to obtain point cloud data of a contour of a weld seam area first. Weld seam feature identification is carried out to each generatrix, and misidentified generatrices are filtered out to obtain weld seam left and right boundaries. An ideal weld seam processing contour is generated conformally according to the appearance of the weld seam area, weld seam coarse grinding is carried out after correction and compensation, and weld seam contour information after coarse grinding is obtained by scanning after the coarse grinding is completed. Process parameters of the grinding are controlled according to an actual weld seam contour, and weld seam fine grinding is carried out to obtain a smooth weld seam contour.

Abstract: Methods and semiconductor structures are provided. A semiconductor structure according to the present disclosure includes a plurality of transistors, an interconnect structure electrically coupled to the plurality of transistors, a metal feature disposed over the interconnect structure and electrically isolated from the plurality of transistors, an insulation layer disposed over the metal feature, and a first redistribution feature and a second redistribution feature disposed over the insulation layer. A space between the first redistribution feature and the second redistribution feature is disposed directly over at least a portion of the metal feature.

Abstract: A method for controlling the IoT devices and an IoT system using the same are provided. The IoT devices includes a trigger device and a functional device. A managing software is executable on a client device. First, a credential is sent to the client from the functional device. Second, a script is received at the trigger device. The script includes the credential, at least one supported command, and at least one supported event. The script is generated at the managing software. The supported command is recognizable to the functional device. When the supported event is triggered at the trigger device, the supported command from the trigger device is received at the functional device. Then, a function of the functional device is performed based on the command, which increases the convenience of operating the system. The trigger device need not recognize the command, which increases the flexibility of the system.

Abstract: The present disclosure provides a method for fabricating a semiconductor structure, including placing a wafer on a chuck, wherein the wafer is surrounded by a focus ring, the focus ring is supported by a first actuator, wherein the first actuator is in a cavity defined by the chuck and the edge ring, wherein the first actuator includes an outer ring disposed in the cavity, a piezoelectric layer apart from a top surface of the cavity, wherein an edge of the piezoelectric layer is fixed by the outer ring, and an inner ring disposed in the chamber at a center portion of the piezoelectric layer, performing plasma etch on a surface of the wafer, and controlling a distance between a gas distribution plate and a top surface of the focus ring to be less than a threshold value by the first actuator.

Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. The photolithography system senses contamination of a collector mirror by the tin droplets and adjusts the flow of a buffer fluid to reduce the contamination.

Abstract: An online geometric/thermal error measurement and compensation system for computer numerically controlled (CNC) machine tools belonging to the technical field of error testing and compensation of CNC machine tools. The online CNC machine tool geometric/thermal error measurement and compensation system includes two parts: the hardware platform and the measurement and compensation software. The hardware platform includes a unidirectional acceleration sensor, a precision integrated circuit (IC) temperature sensor, a multi-channel temperature data collector, and a geometric/thermal error measurement and compensation host. The error measurement and compensation software runs in the geometric/thermal error measurement and compensation host and realizes testing and compensation of geometric and thermal errors in machine tools, which are communicated to the FANUC CNC system.

Abstract: A method for determining the preload value of the screw based on thermal error and temperature rise weighting. Firstly, thermal behavior test of the feed shaft under typical working conditions is carried out to obtain the maximum thermal error and the temperature rise at the key measuring points in each preloaded state. Then, a mathematical model of the preload value of the screw and the maximum thermal error is established; meanwhile, another mathematical model of the preload value of the screw and the temperature rise at the key measuring points is also established. Finally, the optimal preload value of the screw is obtained. The thermal error of the feed shaft and the temperature rise of the moving components are comprehensively considered, improving the processing accuracy and accuracy stability of the machine tool, and ensuring the service life of the moving components such as bearings.

Abstract: The present disclosure provides an apparatus for fabricating a semiconductor structure, including a chuck, an edge ring surrounding the chuck, wherein the edge ring comprises a cavity, a focus ring adjacent to an edge of the chuck and over the edge ring, and a first actuator in the cavity of the edge ring and engaging with the focus ring.

Abstract: An apparatus includes a casing configured to be detachably mounted on a workpiece. The casing includes a first opening configured to expose a portion of the workpiece; a first support member coupled to the casing and constructed to move along a first axis through the casing and rotate around the first axis; a second support member coupled to the first support member and constructed to move along a second axis perpendicular to the first axis; an arm pivotally coupled to the second support member and constructed to rotate around a third axis perpendicular to the first axis and the second axis; and a cleaning head attached to the arm and constructed to rotate around a longitudinal axis of the arm. The casing includes a first plate and a second plate opposite to the first plate, wherein the cleaning head is configured to extend outside the casing through the first opening.

Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. The photolithography system senses contamination of a collector mirror by the tin droplets and adjusts the flow of a buffer fluid to reduce the contamination.

Abstract: The present invention relates to a slanting-bed feed processing machine tool of a large propeller. The machine tool comprises a slanting column feed bed, a machine tool spindle, a workpiece rotary worktable, a large propeller and a bed feed mechanism. The present invention coordinates the geometrical relationship between the machine tool and the large propeller to ensure that the slanting column feed bed moves between two blades, thereby reducing the overhang length of the spindle. Different forms of workpiece rotary worktables and bed feed mechanisms are selected according to different slanting column feed beds. Four types of slanting column feed beds are designed, which can be selected, optimized and applied for different processing objects. The present invention enhances the processing stiffness of the spindle and solves the problem of poor processing quality of the large propeller caused by machine tool vibration.

Abstract: A magnetic-induced stiffness changed soft robot drive module includes magnetic-induced stiffness changed layer, two-degree-of-freedom pneumatic driver, magnetic core and sealing fixing device. The magnetic-induced stiffness changed layer and two-degree-of-freedom pneumatic driver are printed and formed. The magnetic core can be deformed together with the driver, and a magnetic field can be generated when it is energized. After the magnetic core is installed into the two-degree-of-freedom pneumatic driver, then assembled with the sealing fixing device, a soft robot drive module with one end fixed is finished. The magnetic-induced stiffness changed layer has the fast, reversible and controllable stiffness adjustment ability under the action of electromagnetic field.

Abstract: A projector and a projection method that effectively protect a to-be-protected object existing in a sensing area are provided. The projector includes a first sensor, a second sensor, an optical engine and a processor. The optical engine includes a light source. The first sensor receives a first sensed signal, generates a first signal corresponding to the first sensed signal and transmits the first signal to the processor. The second sensor receives a second sensed signal different from the first sensed signal, generates a second signal corresponding to the second sensed signal and transmits the second signal to the processor. The processor determines whether the first signal and the second signal fall into their respective pre-determined ranges. The processor transmits a light adjusting signal to control a light source.

Abstract: The invention provides a dynamic seal test device for cryogenic fluid medium. The dynamic seal test device includes stator unit, rotor unit, slipway, servo motor unit and sensors. The tested seal is installed inside the stator, and the thermal insulation stator and vacuum rotor together form a dynamic seal test structure. The seals and shaft sleeves can be flexibly replaced, which is beneficial to study the influence of different seal types, structure, and seal land configurations on the sealing performance. The servo motor provides power for the rotor and controls the rotation speed. The device greatly improves the thermal insulation capacity to avoid the gasification for the cryogenic fluid medium induced by the heat transfer from environment so that ensuring the stability of the test device.

Abstract: An apparatus includes a first support member coupled to a casing and constructed to move along a first axis through the casing and rotate around the first axis, a second support member coupled to the first support member and constructed to move along a second axis perpendicular to the first axis, and an arm pivotally coupled to the second support member and constructed to rotate around a third axis perpendicular to the first axis and the second axis. The apparatus also includes a cleaning head attached to the arm and constructed to rotate around a longitudinal axis of the arm.

Abstract: A spindle thermal error compensation method which is insensitive to the disturbance of the cooling system is provided, belonging to the technical field of error compensation in numerical control machine tools. First, the spindle model coefficient identification test, based on multi-state speed variable, is performed; after which, based on the correlation analysis between temperature and thermal error, the temperature measurement point, significantly correlated with the axial thermal error of the spindle, is determined. Next, a spindle thermal error model is established, which is insensitive to the cooling system disturbance. In addition, the coefficients in the model are identified under constraint condition, according to the nonlinear quadratic programming algorithm. Finally, based on the OPC UA communication protocol, the compensation value, as calculated by the model, is input to the numerical control system, in order to realize the compensation of the spindle thermal error.

Abstract: A large-panel ultrasonic on-machine scanning thickness measurement equipment and method is disclosed. A GNCMT is adopted as the measuring machine main body on which a measured large panel is clamped and conducts scanning measurement motion; a non-contact ultrasonic measurement device is installed on the spindle of the machine tool for realizing transmission and acquisition of ultrasonic signals; a coupling liquid circulation system with the functions of multi-layer filtering, flow monitoring and regulation is set up; a jet flow immersion coupling mode is adopted on the surface of the measured large panel, and micro-emulsion cutting fluid is used as compatible coupling liquid of ultrasonic on-machine thickness measurement; and the coupling liquid is recycled, purified and stably supplied circularly. The thickness measurement equipment has high multi-function integration and reliable performance.

Abstract: A self-adaptive compensation method for feed axis thermal error, which belongs to the field of error compensation in NC machine tools. First, based on laser interferometer and temperature sensor, the feed axis thermal error test is carried out; following, the thermal error prediction model, based on the feed axis thermal error mechanism, is established and the thermal characteristic parameters in the model are identified, based on the thermal error test data; next, the parameter identification test is carried out, under the preload state of the nut; next, the adaptive prediction model is established, based on the thermal error prediction model, while the parameters in the measurement model are identified; finally, adaptive compensation of thermal errors is performed, based on the adaptive error prediction model, according to the generated feed axis heat.