Abstract: A semiconductor device includes a substrate having a semiconductor fin. A gate structure is over the semiconductor fin, in which the gate structure has a tapered profile and comprises a gate dielectric. A work function metal layer is over the gate dielectric, and a filling metal is over the work function metal layer. A gate spacer is along a sidewall of the gate structure, in which the work function metal layer is in contact with the gate dielectric and a top portion of the gate spacer. An epitaxy structure is over the semiconductor fin.

Abstract: A rapid detection method for the geometric accuracy of the linear motion axis of an NC machine tool, uses accelerometers to measure the acceleration perpendicular to the direction of motion when the linear motion axis moves at a uniform speed. Firstly, the measuring device is mounted on the linear motion axis, and the upper measurement system automatically performs multi-channel acquisition and storage of the motion point acceleration data. Then, filter the acceleration data at the different speeds. Finally, the displacement data is obtained by quadratic integration of the filtered acceleration data in the time domain. Then calculate the straightness of the linear motion axis using the End Point Fit method, and complete the rapid measurement of the straightness of the linear motion axis of the machine tool. This can realize the rapid measurement of the geometric accuracy of the linear motion axis of the machine tool.

Abstract: An on line prediction method of part surface roughness based on SDAE-DBN algorithm. The tri-axis acceleration sensor is adsorbed on the rear bearing of the machine tool spindle through the magnetic seat to collect the vibration signals of the cutting process, and a microphone is placed in the left front of the processed part to collect the noise signals of the cutting process of the machine tool; the trend term of dynamic signal is eliminated, and the signal is smoothed; a stacked denoising autoencoder is constructed, and the greedy algorithm is used to train the network, and the extracted features are used as the input of deep belief network to train the network; the real-time vibration and noise signals in the machining process are input into the deep network after data processing, and the current surface roughness is set as output by the network.

Abstract: In some embodiments, the present application provides a memory device. The memory device includes a chip that includes a magnetic random access memory (MRAM) cell. A magnetic-field-shielding structure at least partially surrounding the chip including a multilayer stack. The multilayer stack includes a magnetic layer and a dielectric layer. A first magnetic region is located inside an inner surface of the magnetic field shielding structure and a second magnetic region is located immediately outside an outer surface of the magnetic field shielding structure. A magnetic field in the first magnetic region is less than a magnetic field in the second magnetic region.

Abstract: A method includes forming a gate layer over a semiconductor fin; forming a patterned mask over the gate layer; performing a first etching process to pattern the gate layer using the patterned mask as an etch mask, the patterned gate layer comprising a first gate extending across the semiconductor fin; depositing, by using an directional ion beam, a protection layer to wrap around a top surface, a first sidewall and a second sidewall of the first gate, the protection layer extending along the first and second sidewalls of the first gate towards a bottom surface of the first gate without extending to the bottom surface of the first gate on the second sidewall of the first gate; and after depositing the protection layer, performing a second etching process to a portion of the second sidewall of the first gate exposed by the protection layer.

Abstract: The invention provides a data augmentation method based on generative adversarial networks in tool condition monitoring. Firstly, the sensor acquisition system is used to obtain the vibration signal and noise signal during the cutting process of the tool; second, the noise data subject to the prior distribution is input to the generator to generate data, and the generated data and the collected real sample data are input to the discriminator for identification, the confrontation training between the generator and the discriminator until the training is completed; then, use the trained generator to generate sample data, and determine whether the generated sample data and the actual tool state sample data are similar in distribution; finally, combined with the accuracy of the deep learning network model to predict the state of the tool to verify the availability of the generated data.

Abstract: The invention provides a dynamic seal test device for cryogenic fluid medium. The dynamic seal test device includes stator unit, rotor unit, slipway, servo motor unit and sensors. The tested seal is installed inside the stator, and the thermal insulation stator and vacuum rotor together form a dynamic seal test structure. The seals and shaft sleeves can be flexibly replaced, which is beneficial to study the influence of different seal types, structure, and seal land configurations on the sealing performance. The servo motor provides power for the rotor and controls the rotation speed. The device greatly improves the thermal insulation capacity to avoid the gasification for the cryogenic fluid medium induced by the heat transfer from environment so that ensuring the stability of the test device.

Abstract: The present invention relates to a slanting-bed feed processing machine tool of a large propeller. The machine tool comprises a slanting column feed bed, a machine tool spindle, a workpiece rotary worktable, a large propeller and a bed feed mechanism. The present invention coordinates the geometrical relationship between the machine tool and the large propeller to ensure that the slanting column feed bed moves between two blades, thereby reducing the overhang length of the spindle. Different forms of workpiece rotary worktables and bed feed mechanisms are selected according to different slanting column feed beds. Four types of slanting column feed beds are designed, which can be selected, optimized and applied for different processing objects. The present invention enhances the processing stiffness of the spindle and solves the problem of poor processing quality of the large propeller caused by machine tool vibration.

Abstract: The invention provides a toolholder matched with the internal jet cooling spindle for cryogenic coolant. The toolholder is mainly composed of a hollow toolholder body, a high-performance thermal insulation structure and a bidirectional sealing structure. They can guide the cryogenic coolant from the spindle to the internal cooling channel of tool and realize the cryogenic thermal insulation and dynamic sealing. The high-performance thermal insulation structure inside the toolholder employs the material with a low thermal conductivity and a low linear expansion coefficient to restrain the low temperature impact of cryogenic coolant on the toolholder and spindle, to ensure the dimensional accuracy and assembly accuracy of the toolholder. The bidirectional sealing structure in the toolholder uses the ultra-low temperature resistant seal rings to prevent the cryogenic coolant from leaking towards the spindle and the tool, to ensure the stability of the coolant transport.

Abstract: A method includes forming a dummy gate over a substrate. A pair of gate spacers are formed on opposite sidewalls of the dummy gate. The dummy gate is removed to form a trench between the gate spacers. A first ion beam is directed to an upper portion of the trench, while leaving a lower portion of the trench substantially free from incidence of the first ion beam. The substrate is moved relative to the first ion beam during directing the first ion beam to the trench. A gate structure is formed in the trench.

Abstract: An application method of the thermal error-temperature loop in the spindle of a CNC machine tool. This uses a bar and two displacement sensors to determine radial thermal errors of the spindle. Meanwhile two temperature sensors are used to determine the temperature of the upper and lower surfaces of the spindle box. Then, the thermal error-temperature loop is drawn with the temperature difference between two temperature sensors as the abscissa and the radial thermal error of the spindle as the ordinate. Finally, the loop is employed to analyze the mechanism of the radial thermal deformation of the spindle and the thermal error level is evaluated. Since the method is based on measured data, the results of the analysis are closer to the reality, compared to those from the numerical simulations.

Abstract: The present disclosure provides an apparatus for fabricating a semiconductor structure, including a chuck, an edge ring surrounding the chuck, wherein the edge ring comprises a cavity, a focus ring adjacent to an edge of the chuck and over the edge ring, and a first actuator in the cavity of the edge ring and engaging with the focus ring.

Abstract: A magnetorheological support method for blisk processing is disclosed. In the method, a fork structure and a soft film are used to wrap magnetorheological fluid. The magnetorheological fluid is used for flow filling under certain pressure. The bulged soft film can conduct shape matching on the surface of a blisk blade. The magnetorheological fluid can be cured through magnetic field excitation, thereby ensuring the flexible support for a weak rigid component. Electric permanent magnets are symmetrically arranged at both ends of the fork structure to construct a uniform magnetic field that can realize a global excitation of magnetorheological fluid, so that the magnetorheological fluid works in a shear mode to achieve damping force controlling by magnetic field. The solid-liquid conversion of the magnetorheological fluid is controlled by an electric permanent magnet field.

Abstract: A large-panel ultrasonic on-machine scanning thickness measurement equipment and method is disclosed. A GNCMT is adopted as the measuring machine main body on which a measured large panel is clamped and conducts scanning measurement motion; a non-contact ultrasonic measurement device is installed on the spindle of the machine tool for realizing transmission and acquisition of ultrasonic signals; a coupling liquid circulation system with the functions of multi-layer filtering, flow monitoring and regulation is set up; a jet flow immersion coupling mode is adopted on the surface of the measured large panel, and micro-emulsion cutting fluid is used as compatible coupling liquid of ultrasonic on-machine thickness measurement; and the coupling liquid is recycled, purified and stably supplied circularly. The thickness measurement equipment has high multi-function integration and reliable performance.

Abstract: A method for calculating the reliability of the thermal error model of a machine tool based on deep neural network (DNN) and the Monte Carlo method, which belongs to the field of the thermal error compensation of computer numerical control (CNC) machine tools. Firstly, according to the probability distribution of the thermal parameters and thermal error model, a set of data for training the DNN is generated. Next, the DNN is constructed based on the deep belief networks (DBNs) and trained with the training data. Then, a group of random sampling data is obtained according to the probability distribution of the thermal characteristic parameters of the machine tool, and the group of random sampling is taken as the input and the output is obtained by the trained depth neural network. Finally, the reliability of the thermal error model is calculated based on the Monte Carlo method.

Abstract: A spindle thermal error compensation method which is insensitive to the disturbance of the cooling system is provided, belonging to the technical field of error compensation in numerical control machine tools. First, the spindle model coefficient identification test, based on multi-state speed variable, is performed; after which, based on the correlation analysis between temperature and thermal error, the temperature measurement point, significantly correlated with the axial thermal error of the spindle, is determined. Next, a spindle thermal error model is established, which is insensitive to the cooling system disturbance. In addition, the coefficients in the model are identified under constraint condition, according to the nonlinear quadratic programming algorithm. Finally, based on the OPC UA communication protocol, the compensation value, as calculated by the model, is input to the numerical control system, in order to realize the compensation of the spindle thermal error.

Abstract: A self-adaptive compensation method for feed axis thermal error, which belongs to the field of error compensation in NC machine tools. First, based on laser interferometer and temperature sensor, the feed axis thermal error test is carried out; following, the thermal error prediction model, based on the feed axis thermal error mechanism, is established and the thermal characteristic parameters in the model are identified, based on the thermal error test data; next, the parameter identification test is carried out, under the preload state of the nut; next, the adaptive prediction model is established, based on the thermal error prediction model, while the parameters in the measurement model are identified; finally, adaptive compensation of thermal errors is performed, based on the adaptive error prediction model, according to the generated feed axis heat.

Abstract: An online geometric/thermal error measurement and compensation system for computer numerically controlled (CNC) machine tools belonging to the technical field of error testing and compensation of CNC machine tools. The online CNC machine tool geometric/thermal error measurement and compensation system includes two parts: the hardware platform and the measurement and compensation software. The hardware platform includes a unidirectional acceleration sensor, a precision integrated circuit (IC) temperature sensor, a multi-channel temperature data collector, and a geometric/thermal error measurement and compensation host. The error measurement and compensation software runs in the geometric/thermal error measurement and compensation host and realizes testing and compensation of geometric and thermal errors in machine tools, which are communicated to the FANUC CNC system.

Abstract: A method for the rapid detection of the linear axis angular error of an NC machine tool, belongs to the technical field of NC machine tool testing. Firstly, the measuring device is mounted on the linear axis. Then, the linear axis moves at three different speeds at a constant speed, and the upper measurement system automatically performs multi-channel acquisition and storage of the motion measurement's point measurement data. Then, based on the same geometric error signal, it is decomposed into the different frequency components, and the measurement angle error is filtered at the different speeds. Finally, the measurement angle errors at the three speeds after filtering are superimposed to complete the rapid measurement of the linear axis angular error of the machine tool. The measurement efficiency is high and data processing capability is strong.

Abstract: An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a trajectory correcting device attached to or embedded in the EUV collector mirror body and a trajectory correcting device to adjust the trajectory of metal from the reflective surface of the EUV collector mirror body to an opposite side of the EUV collector mirror body.