Patents by Inventor Kuo-Chin Chang
Kuo-Chin Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200006183Abstract: Semiconductor devices, integrated circuits and methods of forming the same are provided. In one embodiment, a method for integrated circuit (IC) fabrication includes forming a passivation layer over a first contact feature, forming a second contact feature over and through the passivation layer to electrically connect to the first contact feature, and forming a multi-layer passivation structure over the second contact feature and over the passivation layer. Forming the multi-layer passivation structure includes depositing a first nitride layer, an oxide layer over the first nitride layer, and a second nitride layer over the oxide layer.Type: ApplicationFiled: April 26, 2019Publication date: January 2, 2020Inventors: Chih-Fan Huang, Hui-Chi Chen, Kuo-Chin Chang, Dian-Hau Chen, Yen-Ming Chen
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Publication number: 20190326244Abstract: A semiconductor structure includes a substrate having a surface and a conductive via in the substrate. The surface has an inner region and an outer region surrounding the inner region. The semiconductor structure also includes an under bump metallurgy (UBM) pad on the surface and within the outer region, where the UBM pad has a first zone and a second zone. The first zone faces towards a center of the surface and the second zone faces away from the center of the surface. The conductive via is disposed outside the second zone and at least partially overlaps the first zone from a top view perspective.Type: ApplicationFiled: April 23, 2018Publication date: October 24, 2019Inventors: KUO-CHIN CHANG, YEN-KUN LAI, KUO-CHING HSU, MIRNG-JI LII
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Publication number: 20190164920Abstract: A semiconductor device includes a substrate and at least one bump structure disposed over the substrate. The at least one bump structure includes a pillar formed of a metal having a lower solderability than copper or a copper alloy to a solder alloy disposed over the substrate. A solder alloy is formed directly over and in contact with an upper surface of the metal having the lower solderability than copper or a copper alloy. The pillar has a height of greater than 10 ?m.Type: ApplicationFiled: October 24, 2018Publication date: May 30, 2019Inventors: Pei-Haw TSAO, Chen-Shien CHEN, Cheng-Hung TSAI, Kuo-Chin CHANG, Li-Huan CHU
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Publication number: 20190096832Abstract: A method for fabricating a semiconductor structure is provided. The method includes: providing a semiconductor chip comprising an active surface; forming a conductive bump over the active surface of the semiconductor chip; and coupling the conductive bump to a substrate. The conductive bump includes a plurality of bump segments including a first group of bump segments and a second group of bump segments. Each bump segment has a same segment thickness in a direction orthogonal to the active surface of the semiconductor chip, and each bump segment has a volume defined by a multiplication of the same segment thickness with an average cross-sectional area of the bump segment in a plane parallel to the active surface of the semiconductor chip. A ratio of a total volume of the first group of bump segments to a total volume of the second group of bump segments is between 0.03 and 0.8.Type: ApplicationFiled: November 30, 2018Publication date: March 28, 2019Inventors: PEI-HAW TSAO, AN-TAI XU, HUANG-TING HSIAO, KUO-CHIN CHANG
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Patent number: 10157831Abstract: A semiconductor device includes a substrate and a contact pad over the substrate. The semiconductor device further includes a conductive via electrically connected to the contact pad. The conductive via includes a conductive via layer having a first thickness, and a first conductive layer, wherein the first conductive layer is between the contact pad and the conductive via layer. The semiconductor device further includes a conductive pillar electrically connected to the conductive via. The conductive pillar includes a conductive pillar layer having a second thickness, and a second conductive layer having outer edges substantially aligned with outer edges of the conductive pillar layer, wherein the second conductive layer is between the conductive via layer and the conductive pillar layer. A ratio of the first thickness to the second thickness ranges from about 0.33 to about 0.55.Type: GrantFiled: November 15, 2016Date of Patent: December 18, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Chin Chang, Yuh Chern Shieh
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Publication number: 20170062329Abstract: A semiconductor device includes a substrate and a contact pad over the substrate. The semiconductor device further includes a conductive via electrically connected to the contact pad. The conductive via includes a conductive via layer having a first thickness, and a first conductive layer, wherein the first conductive layer is between the contact pad and the conductive via layer. The semiconductor device further includes a conductive pillar electrically connected to the conductive via. The conductive pillar includes a conductive pillar layer having a second thickness, and a second conductive layer having outer edges substantially aligned with outer edges of the conductive pillar layer, wherein the second conductive layer is between the conductive via layer and the conductive pillar layer. A ratio of the first thickness to the second thickness ranges from about 0.33 to about 0.55.Type: ApplicationFiled: November 15, 2016Publication date: March 2, 2017Inventors: Kuo-Chin CHANG, Yuh Chern SHIEH
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Patent number: 9514978Abstract: A method for fabricating a semiconductor device includes forming a first photo-sensitive layer over a contact pad, wherein the contact pad is on a substrate. The method further includes patterning the first photo-sensitive layer to form a first opening over a portion of the contact pad. The method further includes plating a conductive via in the first opening; and removing the first photo-sensitive layer. The method further includes forming a passivation layer over the substrate, contact pad, and conductive via, and exposing the conductive via by grinding the passivation layer. The method further includes forming a second photo-sensitive layer over the conductive via and passivation layer. The method further includes patterning the second photo-sensitive layer to form a second opening larger than and completely exposing the conductive via. The method further includes plating a conductive pillar in the second opening; and removing the second photo-sensitive layer.Type: GrantFiled: September 18, 2015Date of Patent: December 6, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Chin Chang, Yuh Chern Shieh
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Publication number: 20160148891Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes: a semiconductor chip; a substrate facing an active surface of the semiconductor chip; and a conductive bump extending from the active surface of the semiconductor chip toward the substrate, wherein the conductive bump comprises: a plurality of bump segments comprising a first group of bump segments and a second group of bump segments, wherein each bump segment comprises the same segment height in a direction orthogonal to the active surface of the semiconductor chip, and each bump segment comprises a volume defined by the multiplication of the segment height with the average cross-sectional area of the bump segment; wherein the ratio of the total volume of the first group of bump segments to the total volume of the second group of bump segments is between about 0.03 and about 0.8.Type: ApplicationFiled: November 26, 2014Publication date: May 26, 2016Inventors: PEI-HAW TSAO, AN-TAI XU, HUANG-TING HSIAO, KUO-CHIN CHANG
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Publication number: 20160005645Abstract: A method for fabricating a semiconductor device includes forming a first photo-sensitive layer over a contact pad, wherein the contact pad is on a substrate. The method further includes patterning the first photo-sensitive layer to form a first opening over a portion of the contact pad. The method further includes plating a conductive via in the first opening; and removing the first photo-sensitive layer. The method further includes forming a passivation layer over the substrate, contact pad, and conductive via, and exposing the conductive via by grinding the passivation layer. The method further includes forming a second photo-sensitive layer over the conductive via and passivation layer. The method further includes patterning the second photo-sensitive layer to form a second opening larger than and completely exposing the conductive via. The method further includes plating a conductive pillar in the second opening; and removing the second photo-sensitive layer.Type: ApplicationFiled: September 18, 2015Publication date: January 7, 2016Inventors: Kuo-Chin CHANG, Yuh Chern SHIEH
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Patent number: 9159638Abstract: The invention relates to a bump structure of a semiconductor device. An exemplary structure for a semiconductor device comprises a substrate; a contact pad over the substrate; a passivation layer extending over the substrate and having an opening with a first width over the contact pad; a conductive via within the opening; and a conductive pillar having a second width completely covering the conductive via, wherein a ratio of the first width to the second width is from about 0.15 to 0.55.Type: GrantFiled: May 26, 2011Date of Patent: October 13, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Chin Chang, Yuh Chern Shieh
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Patent number: 9136211Abstract: Protection of a solder ball joint is disclosed in which the solder ball joint is located below the surface level of the encapsulating buffer layer. The buffering layer is etched to expose one or more electrode posts, each of which may be made up of a single column or multiple columns. A top layer resulting either from a top conductive cap or a plating layer around the electrode posts also lies below the buffer layer. When the solder ball is placed onto the posts, the solder/ball joint is protected in a position below the surface of the buffer layer, while still maintaining an electrical connection between the various solder balls and their associated or capping/plating material, electrode posts, wiring layers, and circuit layers. Therefore, the entire ball joint is protected from direct stress.Type: GrantFiled: July 19, 2013Date of Patent: September 15, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung Yu Wang, Chien-Hsun Lee, Pei-Haw Tsao, Kuo-Chin Chang, Chung-Yi Lin, Bill Kiang
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Patent number: 8976529Abstract: In a package structure, a stiffener ring is over and bonded to a top surface of a first package component. A second package component is over and bonded to the top surface of the first package component, and is encircled by the stiffener ring. A metal lid is over and bonded to the stiffener ring. The metal lid has a through-opening.Type: GrantFiled: January 14, 2011Date of Patent: March 10, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wen-Yi Lin, Po-Yao Lin, Tsung-Shu Lin, Kuo-Chin Chang, Shou-Yi Wang
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Patent number: 8704383Abstract: A silicon-based thin package substrate is used for packaging semiconductor chips. The silicon-based thin package substrate preferably has a thickness of less than about 200 ?m. A plurality of traces is formed in the silicon-based thin package substrate, connecting BGA balls and solder bumps. A semiconductor chip may be mounted on the solder bumps. The silicon-based thin package substrate may be used as a carrier of semiconductor chips.Type: GrantFiled: April 20, 2012Date of Patent: April 22, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Szu-Wei Lu, Clinton Chao, Ann Luh, Tjandra Winata Karta, Jerry Tzou, Kuo-Chin Chang
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Publication number: 20130299984Abstract: Protection of a solder ball joint is disclosed in which the solder ball joint is located below the surface level of the encapsulating buffer layer. The buffering layer is etched to expose one or more electrode posts, each of which may be made up of a single column or multiple columns. A top layer resulting either from a top conductive cap or a plating layer around the electrode posts also lies below the buffer layer. When the solder ball is placed onto the posts, the solder/ball joint is protected in a position below the surface of the buffer layer, while still maintaining an electrical connection between the various solder balls and their associated or capping/plating material, electrode posts, wiring layers, and circuit layers. Therefore, the entire ball joint is protected from direct stress.Type: ApplicationFiled: July 19, 2013Publication date: November 14, 2013Inventors: Chung Yu Wang, Chien-Hsun Lee, Pei-Haw Tsao, Kuo-Chin Chang, Chung-Yi Lin, Bill Kiang
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Patent number: 8519535Abstract: A method comprises determining a warpage of an integrated circuit (IC) package design. The IC package design includes a substrate having a top solder mask on a first major surface and a bottom solder mask on a second major surface opposite the first major surface. The first major surface has an IC die mounted over the top solder mask. The design is modified, including modifying an average thickness of one of the group consisting of the top solder mask and the bottom solder mask, so as to reduce the warpage. An IC package is fabricated according to the modified design.Type: GrantFiled: May 11, 2011Date of Patent: August 27, 2013Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsung-Shu Lin, Yuh Chern Shieh, Kuo-Chin Chang
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Patent number: 8492263Abstract: Protection of a solder ball joint is disclosed in which the solder ball joint is located below the surface level of the encapsulating buffer layer. The buffering layer is etched to expose one or more electrode posts, each of which may be made up of a single column or multiple columns. A top layer resulting either from a top conductive cap or a plating layer around the electrode posts also lies below the buffer layer. When the solder ball is placed onto the posts, the solder/ball joint is protected in a position below the surface of the buffer layer, while still maintaining an electrical connection between the various solder balls and their associated or capping/plating material, electrode posts, wiring layers, and circuit layers. Therefore, the entire ball joint is protected from direct stress.Type: GrantFiled: November 16, 2007Date of Patent: July 23, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung Yu Wang, Chien-Hsiun Lee, Pei-Haw Tsao, Kuo-Chin Chang, Chung-Yi Lin, Bill Kiang
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Publication number: 20120306067Abstract: According to an embodiment, an integrated circuit package comprises a chip, a thermal component, and a molding compound. The chip comprises an active surface and a backside surface opposite the active surface. The thermal component is physically coupled to the backside surface of the chip. The molding compound encapsulates the chip, and an exposed surface of the thermal component is exposed through the molding compound. Another embodiment is a method to form an integrated circuit package.Type: ApplicationFiled: June 2, 2011Publication date: December 6, 2012Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Pei-Haw Tsao, Kuo-Chin Chang, Han-Ping Pu
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Publication number: 20120299161Abstract: The invention relates to a bump structure of a semiconductor device. An exemplary structure for a semiconductor device comprises a substrate; a contact pad over the substrate; a passivation layer extending over the substrate and having an opening with a first width over the contact pad; a conductive via within the opening; and a conductive pillar having a second width completely covering the conductive via, wherein a ratio of the first width to the second width is from about 0.15 to 0.55.Type: ApplicationFiled: May 26, 2011Publication date: November 29, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Chin CHANG, Yuh Chern SHIEH
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Publication number: 20120286417Abstract: A method comprises determining a warpage of an integrated circuit (IC) package design. The IC package design includes a substrate having a top solder mask on a first major surface and a bottom solder mask on a second major surface opposite the first major surface. The first major surface has an IC die mounted over the top solder mask. The design is modified, including modifying an average thickness of one of the group consisting of the top solder mask and the bottom solder mask, so as to reduce the warpage. An IC package is fabricated according to the modified design.Type: ApplicationFiled: May 11, 2011Publication date: November 15, 2012Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsung-Shu Lin, Yuh Chern Shieh, Kuo-Chin Chang
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Publication number: 20120199974Abstract: A silicon-based thin package substrate is used for packaging semiconductor chips. The silicon-based thin package substrate preferably has a thickness of less than about 200 ?m. A plurality of traces is formed in the silicon-based thin package substrate, connecting BGA balls and solder bumps. A semiconductor chip may be mounted on the solder bumps. The silicon-based thin package substrate may be used as a carrier of semiconductor chips.Type: ApplicationFiled: April 20, 2012Publication date: August 9, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Szu Wei Lu, Clinton Chao, Ann Luh, Tjandra Winata Karta, Jerry Tzou, Kuo-Chin Chang