Patents by Inventor Kuo-Hui Su

Kuo-Hui Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating semiconductor device having stacked-gate structure
    Publication number: 20050020044
    Abstract: A method for fabricating a semiconductor a semiconductor device having a stacked-gate structure. A polysilicon layer is formed overlying a substrate, which is insulated from the substrate by a dielectric layer. A metal-flash layer is formed overlying the polysilicon layer, and then a tungsten nitride layer is formed overlying the titanium layer. The tungsten nitride layer is annealed using nitrogen and hydrogen gases. A tungsten layer and a cap layer are successively formed overlying the tungsten nitride layer.
    Type: Application
    Filed: October 10, 2003
    Publication date: January 27, 2005
    Inventors: Tzu-En Ho, Chih-Hao Chang, Chang-Rong Wu, Kuo-Hui Su