Patents by Inventor Lakshmanan Karuppiah

Lakshmanan Karuppiah has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for vertical transfer of semiconductor substrates between cleaning modules
    Publication number: 20040197179
    Abstract: A substrate handler is provided comprising a carriage positionable along a first axis of motion, a first substrate gripper coupled to the carriage and positionable relative to the carriage along a second axis of motion oriented substantially perpendicular to the first axis of motion, and a second substrate gripper coupled to the carriage and positionable relative to the carriage along a third axis of motion oriented substantially parallel to the second axis of motion, wherein the second gripper is independently movable relative to the first gripper.
    Type: Application
    Filed: April 3, 2003
    Publication date: October 7, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Younes Achkire, Dan Marohl, Lakshmanan Karuppiah
  • Methods and systems for exchanging messages in a controller for a substrate processing system
    Publication number: 20040142563
    Abstract: In a substrate processing system, a mailbox associated with at least one of a first process and a first thread is locked to prevent access to the mailbox by messages other than a first message from at least one of a second process and a second thread. The first message from the at least one of the second process and the second thread is placed in the mailbox, a message counter in incremented, and the mailbox is unlocked to allow access to the mailbox by messages other than the first message.
    Type: Application
    Filed: January 16, 2003
    Publication date: July 22, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Pierre Fontarensky, Lakshmanan Karuppiah