Abstract: An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source configured to generate incident light. The optical bundle includes two or more sets of optical fibers that each include an emitting optical fiber and a receiving optical fiber. The receiving optical fibers are disposed within the optical bundle at a pairing angle relative to a respective emitting optical fiber. The optical bundle is also coupled to a collimator assembly that includes an achromatic lens. The achromatic lens receives a first light beam of incident light from a first emitting optical fiber and directs spectral components of the first light beam to a first and second portion of a surface of a substrate. The first portion of the substrate surface is substantially the same as the second portion. The achromatic lens collects reflected spectral components that are produced by the spectral components directed to the first and second portions of the substrate surface.

Abstract: The present invention relates to a preparation and purification method for cationic quaternary ammonium salt of sodium hyaluronate in homogeneous medium. By adding a homogeneous solvent and a sodium hyaluronate solid to a vessel, heating the vessel until the contents are dissolved to form a homogeneous system, adding an aqueous solution of 2,3-epoxypropyltrimethylammonium chloride (GTA) to the homogeneous system, then adding a base catalyst, and stirring at a preset temperature to carry out a graft reaction, a graft product is obtained wherein 2,3-epoxypropyltrimethylammonium chloride is grafted to the oxygen atom of the hydroxymethyl group of sodium hyaluronate. By using the method, a graft product wherein 2,3-epoxypropyltrimethylammonium chloride is grafted to the oxygen atom of the hydroxymethyl group of sodium hyaluronate is obtained. Addition of salts is avoided during the reaction, a grafting yield up to 0.69 is obtained, and coagulation occurred to the product is effectively solved.

Abstract: Methods and systems for detection of an endpoint of a substrate process are provided. A set of machine learning models are trained to provide a metrology measurement value associated with a particular type of metrology measurement for a substrate based on spectral data collected for the substrate. A respective machine learning model is selected to be applied to future spectral data collected during a future substrate process for a future substrate in view of a performance rating associated with the particular type of metrology measurement. Current spectral data is collected during a current process for a current substrate and provided as input to the respective machine learning model. An indication of a respective metrology measurement value corresponding to the current substrate is extracted from one or more outputs of the trained machine learning model.

Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.

Abstract: A cool cluster comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device of the tool cluster. The computing device is to receive first measurements generated by sensors of a first process chamber during or after a process is performed within the first process chamber; determine that the first process chamber is due for maintenance based on processing the first measurements using a first trained machine learning model; after maintenance has been performed on the first process chamber, receive second measurements generated by the sensors during or after a seasoning process is performed within the first process chamber; and determine that the first process chamber is ready to be brought back into service based on processing the second measurements using a second trained machine learning model.

Abstract: Disclosed herein is a method for determining the endpoint of an etch operation used for forming high aspect ratio features and/or over low open area (<1%) on a substrate in a processing chamber. The method begins by obtaining a reference emission curve. An etch operation is performed on a patterned substrate. A plasma optical emission intensity is measured for each of the etch cycles. A differential curve between the reference emission and the plasma optical emissions is calculated. And endpoint is determined for the etch operation on the first substrate based on an inflection point detection or other unique features through pattern recognition in the differential curve for stopping the etch of the first substrate.

Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.

Abstract: A substrate processing system comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device connected to each of the plurality of process chambers. The computing device is to receive first measurements generated by sensors of a first process chamber during or after a process is performed within the first process chamber; determine that the first process chamber is due for maintenance based on processing the first measurements using a first trained machine learning model; after maintenance has been performed on the first process chamber, receive second measurements generated by the sensors during or after a seasoning process is performed within the first process chamber; and determine that the first process chamber is ready to be brought back into service based on processing the second measurements using a second trained machine learning model.

Abstract: Disclosed are a pyrazole compound or a salt thereof, a preparation method therefor, a herbicidal composition and use thereof. The pyrazole compound or a salt thereof has a structure as shown in formula (I): wherein, R represents wherein, R?, R?, and R?? represent hydrogen, C1-C4 alkyl, C1-C4 halogenated alkyl, C1-C4 alkoxy or halogen, R?, R?, and R?? may be the same or different; R1 represents C1-C3 alkyl; R2 represents hydrogen or C1-C4 alkyl; R3 represents hydrogen or C1-C6 alkyl, optionally substituted phenyl, optionally substituted pyridyl, optionally substituted alkenyl, optionally substituted alkynyl, C1-C6 alkyl carbonyl, C1-C6 alkoxyl carbonyl, C1-C6 alkyl carbonyl methyl, etc. A compound having a pyrazole structure not only has excellent herbicidal effect on barnyard grass, but also is safe to rice in post-emergence application. More surprisingly, it also has good control efficacy on barnyard grass resistant to major herbicides, such as penoxsulam, quinclorac, cyhalofop-butyl, propanil, etc.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of carboxylic acid derivative-substituted iminoaryl compound, preparation method, herbicidal composition and use thereof. The compound, as shown in general formula I: wherein, Q represents Y represents halogen, haloalkyl or cyano; Z represents halogen; M represents CH or N; W represents OX5, SX5 or N(X5)2; X represents —CX1X2-(alkyl)n-, -alkyl-CX1X2-(alkyl)n- or —(CH2)r—; X3 and X4 each independently represent O, S, NH or N-alkyl, etc. The compound has excellent herbicidal activity against gramineous weeds, broadleaf weeds, cyperaceae weeds and so on even at low application rates, and has high selectivity for crops.

Abstract: A method and apparatus for determining the temperature of a substrate within a processing chamber are described herein. The methods and apparatus described herein utilize an etalon assembly and a heterodyning effect to determine a first temperature of a substrate. The first temperature of the substrate is determined without physically contacting the substrate. A separate temperature sensor also measures a second temperature of the substrate and/or the substrate support at a similar location. The first temperature and the second temperature are utilized to calibrate one of the temperature sensors disposed within the substrate support, a model of the processes performed within the processing chamber, or to adjust a process parameter of the process performed within the processing chamber.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of fused-ring substituted aromatic compound, preparation method, herbicidal composition and use thereof. The fused-ring substituted aromatic compound, represented by general formula I: wherein, Q represents etc.; Y represents halogen, haloalkyl, cyano, nitro or amino; Z represents H, halogen or hydroxy; M represents CH or N; Het represents a cyclic structure that shares two carbon atoms at 4- and 5-positions with isoxazoline ring to form a fused ring; X1, X2 each independently represent H, halogen or nitro etc. The compound has excellent herbicidal activity against gramineous weeds, broadleaf weeds, etc. even at low application rates, and has high selectivity for crops.

Abstract: The invention belongs to the technical field of pesticides, and specifically relates to a 4-pyridinyl formamide compound or a derivative thereof, a preparation method therefor, a herbicidal composition and the use thereof. The 4-pyridinyl formamide compound is as represented by formula (I), wherein, X and Y each independently represent nitro, halogen, cyano, formyl, thiocyano, mercapto, etc.; and M represents an unsubstituted or substituted structure (II). The compound, and the derivative and the composition thereof have excellent herbicidal activity and a higher crop safety, and establish good selectivity, especially for key crops such as wheat and rice.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of substituted 1,2,4-triazolo[4,3-a]pyridine derivatives, preparation method, herbicidal composition and use thereof. A substituted 1,2,4-triazolo[4,3-a]pyridine derivative, as shown in Formula I: wherein, Q represents X and Z each independently represent hydrogen, halogen, cyano or nitro, etc.; Y represents hydrogen, halogen, formyl, cyanoalkyl; or an alkyl, alkenyl or alkynyl, each of which contains or does not contain a halogen, etc. The compound and its composition have excellent herbicidal activity and higher crop safety, especially good selectivity for key crops such as rice.

Abstract: The present invention belongs to the technical field of pesticides, and specifically relates to an isoxazoline oxime formate compound, a preparation method therefor, and a herbicidal composition and a use thereof. The isoxazoline oxime formate compound is shown in general formula I. Wherein, Y represents halogen, haloalkyl, cyano, nitro or amino; Z represents hydrogen, halogen or hydroxyl; Q represents M represents CH or N; X1, X2 and X3 each independently represent hydrogen, etc.; X4 and X5 each independently represent hydrogen, halogen, cyano or nitro, etc. The compound also has an excellent herbicidal activity against grassy weeds, broadleaf weeds, etc. at a low application rate, and has a high selectivity to crops.

Abstract: The invention belongs to the technical field of pesticides, and specifically relates to a type of substituted-isoxazoline-containing aromatic compound, preparation method therefor, herbicidal composition and use thereof. The compound is as shown in general formula I: Wherein, Q represents Y represents halogen, halogenated alkyl or cyano; Z represents halogen; X1, X2 each independently represent hydrogen, halogen, alkyl, etc.; X3 represents halogen, cyano, etc.; X4 each independently represents —COOR5 or -alkyl-COOR5; R5 each independently represents hydrogen, alkyl, etc.. The compound has excellent herbicidal activity against gramineous weeds, broadleaf weeds, and so on even at low application rates, and has high selectivity for crops.

Abstract: The invention belongs to the technical field of agricultural chemicals, and particularly relates to an N-(1,3,4-oxadiazol-2-yl)arylcarboxamide compound or a salt thereof, a preparation method, a herbicidal composition and a use thereof. The compound is as shown in the following Formula I: wherein X represents O, S, SO, SO2 or NR1; Y represents halogen, cyano, cyanoalkyl, carboxyl, nitro, etc.; or —X—Y represents unsubstituted or substituted five- or six-membered heterocyclyl or heteroaryl; Z represents hydrogen, halogen, cyano, OR4, -alkyl-OR4, —O-alkyl-N(R5)2, etc., M represents hydrogen, OR6, SR6, COR6, COOR6, CON(R7)2, etc. The compound has advantages of a low dosage for use, excellent herbicidal activity, and higher crop safety, especially good selectivity for key crops such as rice.

Abstract: A substituted thiazole aromatic ring compound and a preparation method therefor, a herbicidal composition and use thereof. The substituted thiazole aromatic ring compound is as shown in general formula I: Wherein, Y represents halogen, halogenated alkyl, cyano, nitro or amino; Q represents M represents CH or N; X represents X1 represents O or S; X2 represents OX3, SX3 or N(X3)2. The compound has excellent herbicidal activity against gramineous weeds, broadleaf weeds, and so on even at low application rates, and has high selectivity for crops.

Abstract: Methods and systems for detection of an endpoint of a substrate process are provided. A set of machine learning models are trained to provide a metrology measurement value associated with a particular type of metrology measurement for a substrate based on spectral data collected for the substrate. A respective machine learning model is selected to be applied to future spectral data collected during a future substrate process for a future substrate in view of a performance rating associated with the particular type of metrology measurement. Current spectral data is collected during a current process for a current substrate and provided as input to the respective machine learning model. An indication of a respective metrology measurement value corresponding to the current substrate is extracted from one or more outputs of the trained machine learning model.