Abstract: An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source configured to generate incident light. The optical bundle includes two or more sets of optical fibers that each include an emitting optical fiber and a receiving optical fiber. The receiving optical fibers are disposed within the optical bundle at a pairing angle relative to a respective emitting optical fiber. The optical bundle is also coupled to a collimator assembly that includes an achromatic lens. The achromatic lens receives a first light beam of incident light from a first emitting optical fiber and directs spectral components of the first light beam to a first and second portion of a surface of a substrate. The first portion of the substrate surface is substantially the same as the second portion. The achromatic lens collects reflected spectral components that are produced by the spectral components directed to the first and second portions of the substrate surface.

Abstract: A machine learning model trained to provide metrology measurements for a substrate is provided. Training data generated for a prior substrate processed according to a prior process is provided to train the model. The training data includes a training input including a subset of historical spectral data extracted from a normalized set of historical spectral data collected for the prior substrate during the prior process. The subset of historical spectral data includes an indication of historical spectral features associated with a particular type of metrology measurement. The training data also includes a training output including a historical metrology measurement obtained for the prior substrate, the historical metrology measurement associated with the particular type of metrology measurement. Spectral data is collected for a current substrate processed according to a current process.

Abstract: The present invention belongs to the technical field of pesticides, and in particular relates to a pyridazinol compound, a derivative thereof, a preparation method therefor, a herbicidal composition and the use thereof. The pyridazinol compound is as represented by general formula I, wherein X represents and the ring is an unsubstituted or substituted aryl or unsubstituted or substituted heterocyclyl containing a carbon atom at the 1-position; Y represents haloalkyl; and Z represents halogen, cyano, hydroxy, etc. The derivative refers to an agriculturally acceptable derivative of the hydroxyl group at the 4-position of the pyridazine ring in the general formula I, including a salt, an ester, an oxime, a hydroxylamine and an ether derivative, etc. The compound, the derivative thereof and the composition thereof have good herbicidal activity and crop safety.

Abstract: The invention belongs to the technical field of agricultural chemicals, and in particular relates to a pyridazinol compound represented by the Formula I, a derivative, preparation method, herbicidal composition and use thereof.

Abstract: The invention belongs to the technical field of agricultural chemicals, and particularly relates to an aryl formamide compound containing chiral sulfur oxide or salt thereof, a preparation method, a herbicidal composition and a use thereof. The aryl formamide compound containing chiral sulfur oxide or salt thereof has the following structural formula: Z1, and Z2 each independently represent nitro, halogen, or cyano, etc.; X represents unsubstituted or substituted unsubstituted or substituted unsubstituted or substituted unsubstituted or substituted unsubstituted or substituted unsubstituted or substituted or unsubstituted or substituted Q represents halogen, cyano, cyanoalkyl, or nitro, etc.; Y represents hydrogen, etc.; wherein the compound has advantages of excellent herbicidal activity, higher crop safety, and especially good selectivity for key crops such as wheat, rice, corn.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of substituted thiadiazinone dioxide, preparation method, herbicidal composition and application thereof. The substituted thiadiazinone dioxide, as shown in general formula I. wherein, R1 and R2 each independently represent hydrogen, cyano or alkyl with or without halogen and so on; X represents hydrogen or halogen; Y represents C—Z or N; Z represents hydrogen or halogen; and when X represents halogen, Z represents hydrogen. The compound has excellent herbicidal activity against gramineous weeds, broadleaf weeds or amaranthaceous weeds, and has high selectivity for crops such as soybean, corn, rice or wheat.

Abstract: A method is disclosed for operating an endpoint detection system of a processing chamber having a ceiling formed therein, a substrate support located internal to the processing chamber, and a substrate resting on the substrate support. A transparent panel is located in the ceiling of the processing chamber, the panel oriented at a first acute angle relative to the substrate and the substrate support. The transparent panel receives an incident light beam from the endpoint detection system at a second acute angle relative to the panel. The transparent panel transmits the incident light beam to the substrate within the processing chamber at an angle perpendicular to the substrate and the substrate support.

Abstract: A substrate processing system comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device connected to each of the plurality of process chambers. The computing device is to receive first measurements generated by sensors of a first process chamber during or after a process is performed within the first process chamber; determine that the first process chamber is due for maintenance based on processing the first measurements using a first trained machine learning model; after maintenance has been performed on the first process chamber, receive second measurements generated by the sensors during or after a seasoning process is performed within the first process chamber; and determine that the first process chamber is ready to be brought back into service based on processing the second measurements using a second trained machine learning model.

Abstract: A substrate processing system comprises an etch chamber configured to perform an etch process on a substrate, the etch chamber comprising an optical sensor to generate one or more optical measurements of a film on the substrate during and/or after the etch process. The system further comprises a computing device operatively connected to the etch chamber, wherein the computing device is to: receive the one or more optical measurements of the film; determine, for each optical measurement of the one or more optical measurements, a film thickness of the film; determine an etch rate of the film based on the one or more optical measurements using the determined film thickness of each optical measurement of the one or more optical measurements; and determine a process parameter value of at least one process parameter for a previously performed process that was performed on the substrate based on the etch rate.

Abstract: A method of forming a multi-layer stack on a substrate comprises: processing a substrate in a first process chamber using a first deposition process to deposit a first layer of a multi-layer stack on the substrate; removing the substrate from the first process chamber; measuring a first thickness of the first layer using an optical sensor; determining, based on the first thickness of the first layer, a target second thickness for a second layer of the multi-layer stack; determining one or more process parameter values for a second deposition process that will achieve the second target thickness for the second layer; and processing the substrate in a second process chamber using the second deposition process with the one or more process parameter values to deposit the second layer of the multi-layer stack approximately having the target second thickness over the first layer.

Abstract: Disclosed herein is an endpoint detection having an optical bundle configured to emit light through a ceiling of a processing chamber. The optical bundle has a plurality of fibers configured to transmit the light from a light source towards a substrate and is configured to receive light reflected from the substrate. The plurality of fibers include a first emitting fiber and a first receiving fiber. The first receiving fiber is radially disposed at a pairing angle from the first emitting fiber, and is configured to receive light emitted from the first emitting fiber. The plurality of fibers further include a second emitting fiber and a second receiving fiber. The second receiving fiber is radially disposed at the pairing angle from the second emitting fiber. The second receiving fiber is configured to receive light originating from the second emitting fiber. The pairing angle is between about 175 degrees and 185 degrees.

Abstract: The invention relates to the field of pesticide technology, and in particular to a type of R-pyridyloxycarboxylic acid and salt, ester derivative, preparation method, herbicidal composition and application thereof. The R-pyridyloxycarboxylic acid is represented by formula I, wherein, A, B each independently represent halogen, alkyl or cycloalkyl with or without halogen; C represents hydrogen, halogen, alkyl, haloalkyl; Q represents halogen, cyano, cyanoalkyl and the like; Y represents nitro or NR1R2; the salt is metal salt, amine salt, sulfonium salt, phosphonium salt; the ester is wherein, X represents O or S; M represents alkyl, alkenyl, alkynyl and the like with or without halogen. The compound has excellent herbicidal activity and higher crop safety, especially good selectivity for key crops such as rice.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of pyridyloxy carboxylate derivative, preparation method, herbicidal composition and application thereof. The pyridyloxy carboxylate derivative is represented by formula I, wherein, A, B each independently represent halogen, or alkyl or cycloalkyl with or without halogen; C represents hydrogen, halogen, alkyl or haloalkyl; Q represents halogen, cyano, cyanoalkyl, hydroxyalkyl, amino, nitro, formyl, alkyl with or without halogen or the like; M represents -alkyl-R, R represents unsubstituted or substituted heterocyclyl, aryl or heteroaryl; Y represents O or S; X represents nitro or NR1R2. The compound has excellent herbicidal activity and higher crop safety, especially good selectivity for key crops such as rice and soybean.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of pyridyloxy thioester derivative, preparation method, herbicidal composition and application thereof. The pyridyloxy thioester derivative is represented by formula I, wherein, A, B each independently represent halogen, or alkyl or cycloalkyl with or without halogen; C represents hydrogen, halogen, alkyl or haloalkyl; Q represents halogen, cyano, cyanoalkyl, hydroxyalkyl, amino, nitro, formyl, alkyl with or without halogen or the like; M represents alkyl or alkenyl with or without halogen or the like; X represents nitro or NR1R2. The compound has excellent herbicidal activity and higher crop safety, especially good selectivity for key crops such as rice.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of pyridyloxy carboxylic oxime derivative, preparation method, herbicidal composition and application thereof. The pyridyloxy carboxylic oxime derivative is represented by formula I, wherein, A, B each independently represent halogen, or alkyl or cycloalkyl with or without halogen; C represents hydrogen, halogen, alkyl or haloalkyl; Q represents halogen, cyano, cyanoalkyl, hydroxyalkyl, amino, nitro, formyl, alkyl with or without halogen and the like; R1 and R2 independently represent hydrogen, halogen, cyano, nitro, alkyl, haloalkyl, alkenyl, cycloalkyl, alkoxy, acyloxy, alkylthio, or unsubstituted or substituted aryl, etc.; M represents nitro or NR3R4. The compound has excellent herbicidal activity and higher crop safety, especially good selectivity for key crops such as rice.

Abstract: The invention relates to the field of pesticide technology, and in particular a type of pyridyloxy carboxylate derivative, preparation method, herbicidal composition and application thereof. The pyridyloxy carboxylate derivative is represented by formula I, wherein, A, B each independently represent halogen, or alkyl or cycloalkyl with or without halogen; C represents hydrogen, halogen, alkyl or haloalkyl; Q represents halogen, cyano, cyanoalkyl, hydroxyalkyl, amino, nitro, formyl, alkyl or alkenyl with or without halogen or the like; M represents -alkyl-R, -haloalkyl-R or X represents nitro or NR1R2. The compound has excellent herbicidal activity and higher crop safety, especially good selectivity for key crops such as rice and soybean.

Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.

Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

Abstract: The present invention belongs to the field of pesticides, particularly relates to a pyrazolone compound or a salt thereof, a preparation method therefor, a herbicidal composition and use thereof. The pyrazolone compound is as described in formula I: In the formula, R1R2N represents substituted or unsubstituted 3-8 membered nitrogen-containing heterocyclic group containing 1-3 heteroatoms; or R1 and R2 each represent hydrogen or C1-8 alkyl; R3 represents hydrogen, C1-4 alkyl, alkenyl, alkynyl, unsubstituted C3-6 cycloalkyl or C3-6 cycloalkyl substituted by C1-4 alkyl; R4 represents methyl, ethyl, n-propyl, isopropyl or cyclopropyl; X represents hydrogen, —S(O)nR6, —R7 or substituted or unsubstituted 3-8 membered heterocyclic group containing 1-4 heteroatoms, wherein, n represents 1, 2 or 3, R6 represents substituted or unsubstituted alkyl or aryl, and R7 represents substituted or unsubstituted alkyl, aryl, alkyl acyl or aroyl.