Abstract: Bipolar transistors and methods for fabricating bipolar transistors are disclosed wherein an emitter-base dielectric stack is formed between emitter and base structures, comprising a carbide layer situated between first and second oxide layers. The carbide layer provides an etch stop for etching the overlying oxide layer, and the underlying oxide layer provides an etch stop for etching the carbide layer to form an emitter-base contact opening.

Abstract: Bipolar transistors and methods for fabricating bipolar transistors are disclosed wherein an emitter-base dielectric stack is formed between emitter and base structures, comprising a carbide layer situated between first and second oxide layers. The carbide layer provides an etch stop for etching the overlying oxide layer, and the underlying oxide layer provides an etch stop for etching the carbide layer to form an emitter-base contact opening.

Abstract: An integrated circuit device with a low stress, thin film, protective overcoat having enhanced adhesion both to polymeric materials used in packaging-semiconductor devices, and within the passivating film layers, including the following sequence of materials deposited by PECVD processing: a thin film of silicon dioxide, a layer of silicon nitride, oxy-nitride or silicon carbide, and a very thin topmost layer of silicon oxide.

Abstract: A method for forming an emissive layer for an electroluminescent display is provided that includes positioning a substrate (40) in spaced relation to a port (88) of a microeffusion cell (86). The method then provides for transporting the substrate (40) across the port (88) at a substantially constant rate. The method then provides for effusing an emissive material from the port (88) and adhering at least a portion of the emissive material effused from the port (88) to a defined region of the substrate (40) to form an emissive strip (46) having a substantially constant width on the substrate (40).

Abstract: Bipolar transistors and methods for fabricating bipolar transistors are disclosed wherein an emitter-base dielectric stack is formed between emitter and base structures, comprising a carbide layer situated between first and second oxide layers. The carbide layer provides an etch stop for etching the overlying oxide layer, and the underlying oxide layer provides an etch stop for etching the carbide layer to form an emitter-base contact opening.

Abstract: An integrated circuit device with a low stress, thin film, protective overcoat having enhanced adhesion both to polymeric materials used in packaging semiconductor devices, and within the passivating film layers, including the following sequence of materials deposited by PECVD processing: a thin film of silicon dioxide, a layer of silicon nitride, oxy-nitride or silicon carbide, and a very thin topmost layer of silicon oxide.

Abstract: Silicon carbide is used for a hardmask for the isolation dielectric etch and also serves as an etch stop for chemical-mechanical polishing. Alternatively, silicon carbonitride or silicon carboxide can be used.

Abstract: The present invention relates to a heterojunction bipolar transistor, and comprises a collector region, and a graded profile SiGe base layer overlying the collector region. The transistor further comprises a diffusion blocking layer overlying the graded profile SiGe base layer, and an emitter layer overlying the diffusion blocking layer. The diffusion blocking layer is operable to retard a diffusion of dopants therethrough from the emitter layer to the graded profile SiGe base layer, thereby allowing for a reduction in the thickness of the layer comprising a graded profile SiGe layer and a buffer layer. The thickness reduction allows increased Ge concentration in the base layer and the emitter/base doping profile is improved, each leading to improved transistor performance.

Abstract: A method for forming an emissive layer for an electroluminescent display is provided that includes positioning a substrate (40) in spaced relation to a port (88) of a microeffusion cell (86). The method then provides for transporting the substrate (40) across the port (88) at a substantially constant rate. The method then provides for effusing an emissive material from the port (88) and adhering at least a portion of the emissive material effused from the port (88) to a defined region of the substrate (40) to form an emissive strip (46) having a substantially constant width on the substrate (40).

Abstract: An inlaid interconnect fabrication method using a silicon carbide polish stop layer for protection of mechanically weak dielectric such as porous silicon dioxide (xerogel) during chemical mechanical polishing.

Abstract: A method of fabricating an integrated circuit having active components, conductors and isolation regions on a substrate is disclosed, including forming a portion of an isolation region to expose a first area of the substrate, depositing a mask layer over the integrated circuit including the first area, forming the mask layer to expose a second area of the substrate within the first area, converting a portion of the substrate to a selectively etchable material in an area subjacent to the second area and extending only partially to the bottom surface of the substrate, selectively etching this etchable material to form a void, removing the mask layer to expose the isolation region, depositing a conductive layer over all exposed surfaces of the substrate comprising the void and the isolation region, depositing a dielectric layer over the conductive layer extending at least to the height of the isolation region, polishing the surface of the dielectric layer until the surface is planar and the top surface of the is

Abstract: A method of fabricating an integrated circuit having active components, conductors and isolation regions on a substrate is disclosed, including patterning and etching a portion of at least one of said isolation regions to expose a first area of said substrate, depositing a mask layer over said integrated circuit including said first area, patterning an a itching said mask layer to expose a second area of said substrate within said first area, converting a portion of said substrate to a selectively etchable material, wherein said selectively etchable material lies in an area subjacent to said second area and extends only partially to the bottom surface of said substrate, selectively etching said selectively etchable material to form a void, removing said mask layer to expose said isolation region, depositing a dielectric layer over said void wherein said dielectric layer extends at least to the height of said isolation region and covers the top surface of said wafer, polishing the surface of said dielectric la

Abstract: The present invention relates to a heterojunction bipolar transistor, and comprises a collector region, and a graded profile SiGe base layer overlying the collector region. The transistor further comprises a diffusion blocking layer overlying the graded profile SiGe base layer, and an emitter layer overlying the diffusion blocking layer. The diffusion blocking layer is operable to retard a diffusion of dopants therethrough from the emitter layer to the graded profile SiGe base layer, thereby allowing for a reduction in the thickness of the layer comprising a graded profile SiGe layer and a buffer layer. The thickness reduction allows increased Ge concentration in the base layer and the emitter/base doping profile is improved, each leading to improved transistor performance.

Abstract: A current-to-current impedance converter re-circulates the driver transistor collector current back into the output current path to generate an error current that has two portions including a DC offset portion and a second order in 1/&bgr; portion. Since the error current has no first order in 1/&bgr; portion, the current-to-current ronverter exhbits very low distortion.

Abstract: An edge emitter (12) includes a diode array (20) with an emissive edge (22). The diode array (20) is formed on a substrate layer (24) that includes integrated driver circuits (23) to power the diode array (20). Dielectric posts (26) are formed on the substrate layer to provide optical isolation for each light emitting diode (28) of the diode array (20). A reflective metal coating (29) is formed on the substrate layer (24) and the dielectric posts (26). A light guide layer (30) is formed on the reflective coating (29) followed by the formation of an anode layer (32), an organic semiconductor layer (34), and a cathode layer (36). Vias (38) are formed from the anode layer (32) and the cathode layer (36) to the integrated driver circuits (23). The emissive edge (22) of each light emitting diode (28) in the diode array (20) has a height and width approximately one-tenth that of its length.

Abstract: Varying the porosity through the thickness of a porous silicon layer allows conflicting needs to be met by the same layer: a low porosity surface layer allows a high-quality epitaxial layer of silicon to be grown, or can provide structural support, while greater porosity in other portions of the layer increases circuit isolation and provides stress relief between layers.

Abstract: An epitaxial layer of silicon is grown on a layer of partially-oxidized porous silicon, then covered by a capping layer which provides structural support and prevents oxidation of the epitaxial layer. A high-temperature anneal allows the partially oxidized silicon layer to separate into distinct layers of silicon and SiO2, producing a buried oxide layer. This method provides a low cost means of producing silicon-on-insulator (SOI) wafers.

Abstract: The present invention relates to a method of forming a bipolar transistor or a heterojunction bipolar transistor. The method comprises forming a collector region associated with a semiconductor substrate, and forming a base region base region over at least a portion of the collector region. The method further comprises forming a diffusion blocking layer over the base region, and forming an emitter polysilicon region over the diffusion blocking layer. The diffusion blocking layer reduces an amount of diffusion from the emitter polysilicon region into the base region, thereby allowing improved process control and emitter/base doping profile, leading to improved transistor performance. In addition, the present invention relates to a heterojunction bipolar transistor, and comprises a collector region, and a graded profile SiGe base layer overlying the collector region.

Abstract: An integrated circuit device with a low stress, thin film, protective overcoat having enhanced adhesion both to polymeric materials used in packaging semiconductor devices, and within the passivating film layers, including the following sequence of materials deposited by PECVD processing: a thin film of silicon dioxide, a layer of silicon nitride, oxy-nitride or silicon carbide, and a very thin topmost layer of silicon oxide.

Abstract: The use of silicon carbide to form sidewall spacers allows the use of a lower temperature deposition step, and provides greater etch selectivity with respect to oxide.