Abstract: A field effect transistor includes a substrate having a transistor forming region thereon; an insulating layer on the substrate; a first graphene layer on the insulating layer within the transistor forming region; an etch stop layer on the first graphene layer within the transistor forming region; a first inter-layer dielectric layer on the etch stop layer; a gate trench recessed into the first inter-layer dielectric layer and the etch stop layer within the transistor forming region; a second graphene layer on interior surface of the gate trench; a gate dielectric layer on the second graphene layer and on the first inter-layer dielectric layer; and a gate electrode on the gate dielectric layer within the gate trench.

Abstract: A three-dimensional printing apparatus includes a liquid tank capable of accommodating a photosensitive liquid. The liquid tank includes a film, a plurality of side walls, a plate and a motor. The film has a workpiece curing area. The plurality of side walls surrounds the film. The plate is capable of supporting the film and having at least one fluid tunnel extending from a first surface of the plate contacting the film to a second surface of the plate. The motor is connected to the liquid tank to incline the liquid tank. A gap is formed between the plat and one of the plurality of side walls of the liquid tank, and the film is communicated with an outside space via the gap.

Abstract: The present disclosure relates to a system, a method and a computer-readable medium for quality prediction. The method includes obtaining values of a parameter of a first endpoint, obtaining values of a parameter of a second endpoint, and generating a prediction of the parameter of the first endpoint according to the values of the parameter of the first endpoint and the values of the parameter of the second endpoint. The prediction includes probability distribution information of the parameter of the first endpoint at a timing in the future. The present disclosure can result in a more precise quality prediction.

Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a source/drain region adjacent to two sides of the gate structure; forming an interlayer dielectric (ILD) layer on the gate structure; forming a contact hole in the ILD layer to expose the source/drain region; forming a barrier layer in the contact hole; performing an anneal process; and performing a plasma treatment process to inject nitrogen into the contact hole.

Abstract: A method for forming a thin film resistor with improved thermal stability is disclosed. A substrate having thereon a first dielectric layer is provided. A resistive material layer is deposited on the first dielectric layer. A capping layer is deposited on the resistive material layer. The resistive material layer is then subjected to a thermal treatment at a pre-selected temperature higher than 350 degrees Celsius in a hydrogen or deuterium atmosphere. The capping layer and the resistive material layer are patterned to form a thin film resistor on the first dielectric layer.

Abstract: An aquarium with a wireless power supply function is disclosed. In the aquarium, a base frame is disposed under a water tank, a top box is disposed on the water tank, and the base frame includes a coil box and a coil holder. The coil holder is disposed on the coil box, and an outer diameter of the coil holder is smaller than an inner diameter of the coil box, to form a gap between the coil box and the coil holder to dispose a first coil around the coil box. The first coil can generate electromagnetic induction when being energized. The first coil surrounds an outer side of a bottom of the water tank, and a second coil is disposed around an inner periphery of the top box, so that the first coil can generate electric energy through electromagnetic induction and transfer power to multiple devices.

Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a source/drain region adjacent to two sides of the gate structure; forming an interlayer dielectric (ILD) layer on the gate structure; forming a contact hole in the ILD layer to expose the source/drain region; forming a barrier layer in the contact hole; performing an anneal process; and performing a plasma treatment process to inject nitrogen into the contact hole.

Abstract: A manufacturing method of a connection structure includes the following steps. A dielectric layer is formed on conductive structures. Openings are formed in the dielectric layer and expose the conductive structures. A tungsten nucleation layer is conformally formed on the dielectric layer and in the openings. A nitrogen-containing treatment is performed on the tungsten nucleation layer. A deposition process is performed to form a tungsten filling layer on the tungsten nucleation layer. An interfacial layer is formed between the tungsten nucleation layer and the tungsten filling layer by the deposition process. A fluorine concentration of the interfacial layer is higher than that of the tungsten filling layer. A chemical mechanical polishing (CMP) process is performed to remove a part of the tungsten nucleation layer and a part of the tungsten filling layer for forming connection structures. The interfacial layer is removed by the CMP process.

Abstract: A wireless induction lamp includes a transmitter device for emitting wireless electric energy to a lamp receiver device, and the lamp receiver device includes a lamp housing having a transparent part disposed thereon, and a wireless light emitting device is disposed inside the lamp housing and in the transparent part. A first induction coil is disposed around on an outer edge of the wireless light emitting device, and receives the wireless electric energy of the transmitter device, to provide electric energy to the wireless light emitting device to emit light. The wireless induction lamp can wirelessly transmit electrical power to the light emitting element to emit light, so as to reduce disposal of electric wires, and the wireless light emitting device can be turned on/off by just changing a posture angle of the lamp housing to move close to or away from the electromagnetic range of the transmitter device.

Abstract: A conductive structure includes a substrate including a first dielectric layer formed thereon, at least a first opening formed in the first dielectric layer, a low resistive layer formed in the opening, and a first metal bulk formed on the lower resistive layer in the opening. The first metal bulk directly contacts a surface of the first low resistive layer. The low resistive layer includes a carbonitride of a first metal material, and the first metal bulk includes the first metal material.

Abstract: A manufacturing method of an interconnect structure including the following steps is provided. A dielectric layer is formed on a silicon layer, wherein an opening exposing the silicon layer is in the dielectric layer. A metal layer is formed on the surface of the opening. A stress adjustment layer is formed on the metal layer. A thermal process is performed to react the metal layer with the silicon layer to form a metal silicide layer on the silicon layer. The stress adjustment layer is removed after the thermal process is performed. A barrier layer is formed on the surface of the opening.

Abstract: A setting method for a server adapted for setting the server to run a virtual machine is provided. The setting method includes: obtaining a first memory address when a first service function of the virtual machine is called in a startup procedure of the virtual machine; correcting a memory block corresponding to the first memory address, to have an operation of the virtual being interrupted when the memory block is called by the virtual machine; determining, by a management module of the virtual machine, whether a script called by the first service function is executable or not, when the operation of the virtual machine is interrupted; if the script is not executable, interrupting, by the management module, the script called by the first service function; and if the script is executable, allowing, by the management module, the first service function to execute the script.

Abstract: A conductive structure includes a substrate including a first dielectric layer formed thereon, at least a first opening formed in the first dielectric layer, a low resistive layer formed in the opening, and a first metal bulk formed on the lower resistive layer in the opening. The first metal bulk directly contacts a surface of the first low resistive layer. The low resistive layer includes a carbonitride of a first metal material, and the first metal bulk includes the first metal material.

Abstract: A manufacturing method of an interconnect structure including the following steps is provided. A dielectric layer is formed on a silicon layer, wherein an opening exposing the silicon layer is in the dielectric layer. A metal layer is formed on the surface of the opening. A stress adjustment layer is formed on the metal layer. A thermal process is performed to react the metal layer with the silicon layer to form a metal silicide layer on the silicon layer. The stress adjustment layer is removed after the thermal process is performed. A barrier layer is formed on the surface of the opening.

Abstract: A conductive structure includes a substrate including a first dielectric layer formed thereon, at least a first opening formed in the first dielectric layer, a low resistive layer formed in the opening, and a first metal bulk formed on the lower resistive layer in the opening. The first metal bulk directly contacts a surface of the first low resistive layer. The low resistive layer includes a carbonitride of a first metal material, and the first metal bulk includes the first metal material.

Abstract: The present invention provides a method for forming a contact structure, the method includes proving a substrate. An oxygen-containing dielectric layer is formed on the substrate. Next, a non-oxygen layer is formed on the oxygen-containing dielectric layer and a contact hole is then formed in the oxygen-containing dielectric layer. A metal layer is then formed in the contact hole and on the non-oxygen layer, with the non-oxygen layer disposed between the oxygen-containing dielectric layer and the metal layer. An anneal process is then performed to the metal layer, and a conductive layer is filled in the contact hole.

Abstract: A semiconductor process for forming a plug includes the following steps. A dielectric layer having a recess is formed on a substrate. A titanium layer is formed to conformally cover the recess. A first titanium nitride layer is formed to conformally cover the titanium layer, thereby the first titanium nitride layer having first sidewall parts. The first sidewall parts of the first titanium nitride layer are pulled back, thereby second sidewall parts being formed. A second titanium nitride layer is formed to cover the recess. Moreover, a semiconductor structure formed by said semiconductor process is also provided.

Abstract: A conductive structure includes a substrate including a first dielectric layer formed thereon, at least a first opening formed in the first dielectric layer, a low resistive layer formed in the opening, and a first metal bulk formed on the lower resistive layer in the opening. The first metal bulk directly contacts a surface of the first low resistive layer. The low resistive layer includes a carbonitride of a first metal material, and the first metal bulk includes the first metal material.

Abstract: A semiconductor process is described. A silicon-phosphorus (SiP) epitaxial layer is formed serving as a source/drain (S/D) region. A crystalline metal silicide layer is formed directly on the SiP epitaxial layer and thus prevents oxidation of the SiP epitaxial layer. A contact plug is formed over the crystalline metal silicide layer.

Abstract: A semiconductor process is described. A silicon-phosphorus (SiP) epitaxial layer is formed serving as a source/drain (S/D) region. A crystalline metal silicide layer is formed directly on the SiP epitaxial layer and thus prevents oxidation of the SiP epitaxial layer. A contact plug is formed over the crystalline metal silicide layer.