Patents by Inventor Li Su
Li Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12363945Abstract: A method includes forming a protruding semiconductor stack including a plurality of sacrificial layers and a plurality of nanostructures, with the plurality of sacrificial layers and the plurality of nanostructures being laid out alternatingly. The method further includes forming a dummy gate structure on the protruding semiconductor stack, etching the protruding semiconductor stack to form a source/drain recess, and forming a source/drain region in the source/drain recess. The formation of the source/drain region includes growing first epitaxial layers. The first epitaxial layers are grown on sidewalls of the plurality of nanostructures, and a cross-section of each of the first epitaxial layers has a quadrilateral shape. The first epitaxial layers have a first dopant concentration. The formation of the source/drain region further includes growing a second epitaxial layer on the first epitaxial layers. The second epitaxial layer has a second dopant concentration higher than the first dopant concentration.Type: GrantFiled: April 4, 2022Date of Patent: July 15, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsz-Mei Kwok, Yung-Chun Yang, Cheng-Yen Wen, Li-Li Su, Yee-Chia Yeo
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Patent number: 12355901Abstract: Provided in embodiments of the present disclosure are a blockchain-based method and system for SDP access control.Type: GrantFiled: December 30, 2021Date of Patent: July 8, 2025Assignees: CHINA MOBILE COMMUNICATION CO., LTD RESEARCH INSTITUTE, CHINA MOBILE COMMUNICATIONS GROUP CO., LTD.Inventors: Junzhi Yan, Bo Yang, Li Su, Shen He
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Patent number: 12336237Abstract: A device includes a first nanostructure over a semiconductor substrate; a second nanostructure over the first nanostructure; a gate structure surrounding the first nanostructure and the second nanostructure; a first epitaxial region in the semiconductor substrate adjacent the gate structure, wherein the first epitaxial region is a first doped semiconductor material; and a second epitaxial region over the first epitaxial region, wherein the second epitaxial region is adjacent the first nanostructure and the second nanostructure, wherein the second epitaxial region is a second doped semiconductor material that is different from the first doped semiconductor material. In an embodiment, the first doped semiconductor material has a smaller doping concentration than the second doped semiconductor material.Type: GrantFiled: December 14, 2021Date of Patent: June 17, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Min Liu, Li-Li Su, Chii-Horng Li, Yee-Chia Yeo
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Patent number: 12302615Abstract: A semiconductor device includes a source/drain feature over a semiconductor substrate, channel layers over the semiconductor substrate and connected to the source/drain feature, a gate portion between vertically adjacent channel layers, and an inner spacer between the source/drain feature and the gate portion and between adjacent channel layers. The semiconductor device further includes an air gap between the inner spacer and the source/drain feature.Type: GrantFiled: February 7, 2024Date of Patent: May 13, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Po-Yu Lin, Wei-Yang Lee, Chia-Pin Lin, Tzu-Hua Chiu, Kuan-Hao Cheng, Wei-Han Fan, Li-Li Su, Wei-Min Liu
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Publication number: 20250149996Abstract: A three-level power factor rectifier includes a diode bridge arm, a bridge arm assembly, an input inductor, a capacitor bank, and a controller. The first bridge arm includes a first switch, a second switch, a third switch, and a fourth switch connected in series and in sequence. When the controller determines that a loading is less than a load threshold, the controller controls the three-level power factor rectifier entering a burst mode. In the burst sleep period, when a voltage value of an AC power source is greater than a first threshold, the first switch and the second switch are turned off; when the voltage value is less than a second threshold, the third switch and the fourth switch are turned on. When entering the burst period from the burst sleep period, the controller turns on the second switch and the third switch for a specific time period.Type: ApplicationFiled: March 21, 2024Publication date: May 8, 2025Inventors: Yi-Li SU, Chien-Hung LIU, Wen-Lung HUANG, Chang-Hung LIAO, Po-Yi YEH
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Publication number: 20250119392Abstract: A resource allocation method includes: receiving a placement group creation request, where the placement group creation request is for providing placement group creation requirement information for a cloud server, and the placement group creation request includes a target application type and a target SLA; generating placement group creation guide information based on the placement group creation request, where the placement group creation guide information includes a partition quantity of a placement group and an instance specification of the placement group; and creating the placement group based on the placement group creation guide information.Type: ApplicationFiled: December 19, 2024Publication date: April 10, 2025Inventors: Tianlin Du, Li Su, Wenli Zhou, Lei Zhu
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Patent number: 12273746Abstract: This disclosure relates to methods and devices for mitigating overheating in a user equipment device (UE). The UE is configured to communicate over each of LTE and 5G NR and may be configured to communicate through 5G NR over each of a Sub-6 GHz and a millimeter Wave (mmW) frequency band. The UE is configured to establish an ENDC connection with an enB and one or more gNBs. The UE implements intelligent transmission modification and cell measurement adjustments to mitigate overheating and reduce battery drain.Type: GrantFiled: July 24, 2023Date of Patent: April 8, 2025Assignee: Apple Inc.Inventors: Alosious Pradeep Prabhakar, Wen Zhao, Lakshmi N. Kavuri, Li Su, Sagar B. Shah, Sriram Subramanian, Vijay Venkataraman, Vishwanth Kamala Govindaraju, Shiva Krishna Narra, Sanjeevi Balasubramanian, Wei Zhang, Madhukar K. Shanbhag, Sandeep K. Sunkesala, Srinivasan Nimmala, Muthukumaran Dhanapal, Tarakkumar G. Dhanani, Sree Ram Kodali, Ioannis Pefkianakis, Dhruv Khati, Franco Travostino, Thanigaivelu Elangovan, Madhusudan Chaudhary, Geoffrey R. Hall
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Patent number: 12255255Abstract: A device includes a first fin and a second fin extending from a substrate, the first fin including a first recess and the second fin including a second recess, an isolation region surrounding the first fin and surrounding the second fin, a gate stack over the first fin and the second fin, and a source/drain region in the first recess and in the second recess, the source/drain region adjacent the gate stack, wherein the source/drain region includes a bottom surface extending from the first fin to the second fin, wherein a first portion of the bottom surface that is below a first height above the isolation region has a first slope, and wherein a second portion of the bottom surface that is above the first height has a second slope that is greater than the first slope.Type: GrantFiled: July 26, 2022Date of Patent: March 18, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Min Liu, Li-Li Su, Yee-Chia Yeo
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Patent number: 12243931Abstract: The present disclosure is directed to methods for forming source/drain (S/D) epitaxial structures with a hexagonal shape. The method includes forming a fin structure that includes a first portion and a second portion proximate to the first portion, forming a gate structure on the first portion of the fin structure, and recessing the second portion of the fin structure. The method further includes growing a S/D epitaxial structure on the recessed second portion of the fin structure, where growing the S/D epitaxial structure includes exposing the recessed second portion of the fin structure to a precursor and one or more reactant gases to form a portion of the S/D epitaxial structure. Growing the S/D epitaxial structure further includes exposing the portion of the S/D structure to an etching chemistry and exposing the portion of the S/D epitaxial structure to a hydrogen treatment to enhance growth of the S/D epitaxial structure.Type: GrantFiled: May 2, 2023Date of Patent: March 4, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Min Liu, Yee-Chia Yeo, Li-Li Su
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Patent number: 12243783Abstract: A method includes etching a first recess adjacent a first dummy gate stack and a first fin; etching a second recess adjacent a second dummy gate stack and a second fin; and epitaxially growing a first epitaxy region in the first recess. The method further includes depositing a first metal-comprising mask over the first dummy gate stack, over the second dummy gate stack, over the first epitaxy region in the first recess, and in the second recess; patterning the first metal-comprising mask to expose the first dummy gate stack and the first epitaxy region; epitaxially growing a second epitaxy region in the first recess over the first epitaxy region; and after epitaxially growing the second epitaxy region, removing remaining portions of the first metal-comprising mask.Type: GrantFiled: April 16, 2021Date of Patent: March 4, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hui-Lin Huang, Li-Li Su, Yee-Chia Yeo, Chii-Horng Li
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Publication number: 20250067649Abstract: A method for measuring activation energy of a catalyst is disclosed, which includes obtaining a resonant frequency change-time curve using an integrated self-heating resonant cantilever (100), converting the resonant frequency change-time curve into a resonant frequency change-temperature curve, converting the resonant frequency change-temperature curve into a coverage-temperature curve, obtaining a coverage change rate-temperature curve by performing first-order differentiation on the coverage-temperature curve, obtaining relevant parameters corresponding to local minimum values from the coverage change rate-temperature curve, and substituting the relevant parameters into calculation formulas to obtain a desorption rate constant of the catalyst and a desorption activation energy of the catalyst. It can be seen that the present disclosure simply requires programmed heating in terms of operating on the samples, which is fast and convenient.Type: ApplicationFiled: December 28, 2021Publication date: February 27, 2025Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCESInventors: Xinxin LI, Xinyu LI, Pengcheng XU, Fanglan YAO, Li SU
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Patent number: 12237230Abstract: A method of manufacturing a semiconductor device includes forming a fin structure over a substrate, forming a sacrificial gate structure over the fin structure, and etching a source/drain (S/D) region of the fin structure to form an S/D recess. The fin structure includes first semiconductor layers and second semiconductor layers alternately stacked. The method further includes depositing an insulating dielectric layer in the S/D recess, depositing an etch protection layer over a bottom portion of the insulating dielectric layer, and partially removing the insulating dielectric layer. The method further includes growing an epitaxial S/D feature in the S/D recess. The bottom portion of the insulating dielectric layer interposes the epitaxial S/D feature and the substrate.Type: GrantFiled: April 23, 2021Date of Patent: February 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Bo-Yu Lai, Jyun-Chih Lin, Yen-Ting Chen, Wei-Yang Lee, Chia-Pin Lin, Wei Hao Lu, Li-Li Su
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Publication number: 20250006549Abstract: An embodiment is a structure including a first fin over a substrate, a second fin over the substrate, the second fin being adjacent the first fin, an isolation region surrounding the first fin and the second fin, a gate structure along sidewalls and over upper surfaces of the first fin and the second fin, the gate structure defining channel regions in the first fin and the second fin, a source/drain region on the first fin and the second fin adjacent the gate structure, and an air gap separating the source/drain region from a top surface of the substrate.Type: ApplicationFiled: September 16, 2024Publication date: January 2, 2025Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Li-Li Su, Chien-Chang Su, Heng-Wen Ting, Jung-Chi Tai, Che-Hui Lee, Ying-Wei Li
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Patent number: 12171038Abstract: This disclosure relates to performing implicit radio resource control state transitions in a cellular communication system. A wireless device may establish a radio resource control (RRC) connection with a cellular base station. A data inactivity timer length and a target RRC state for implicit RRC transitions may be determined. A data inactivity timer having the determined data inactivity timer length may be initiated. It may be determined that the data inactivity timer has expired. The wireless device may transition to the target RRC state based at least in part on determining that the data inactivity timer has expired.Type: GrantFiled: September 8, 2023Date of Patent: December 17, 2024Assignee: Apple Inc.Inventors: Sethuraman Gurumoorthy, Srirang A Lovlekar, Murtaza A. Shikari, Srinivasan Nimmala, Haijing Hu, Fangli Xu, Yuqin Chen, Longda Xing, Xu Ou, Li Su, Vijay Venkataraman, Dawei Zhang, Muthukumaran Dhanapal, Sree Ram Kodali, Srinivas Burugupalli
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Publication number: 20240405070Abstract: In an embodiment, a device includes: a first nanostructure; a source/drain region adjoining a first channel region of the first nanostructure, the source/drain region including: a main layer; and a first liner layer between the main layer and the first nanostructure, a carbon concentration of the first liner layer being greater than a carbon concentration of the main layer; an inter-layer dielectric on the source/drain region; and a contact extending through the inter-layer dielectric, the contact connected to the main layer, the contact spaced apart from the first liner layer.Type: ApplicationFiled: July 23, 2024Publication date: December 5, 2024Inventors: Wei-Min Liu, Li-Li Su, Yee-Chia Yeo
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Publication number: 20240395810Abstract: An embodiment includes a device including a first fin extending from a substrate. The device also includes a first gate stack over and along sidewalls of the first fin. The device also includes a first gate spacer disposed along a sidewall of the first gate stack. The device also includes a first source/drain region in the first fin and adjacent the first gate spacer, the first source/drain region including a first carbon-containing buffer layer on the first fin. The device also includes and a first epitaxial structure on the first carbon-containing buffer layer.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Inventors: Wei-Min Liu, Li-Li Su, Yee-Chia Yeo
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Patent number: 12154974Abstract: A method includes forming a first semiconductor fin and a second semiconductor fin in an n-type Fin Field-Effect (FinFET) region and a p-type FinFET region, respectively, forming a first dielectric fin and a second dielectric fin in the n-type FinFET region and the p-type FinFET region, respectively, forming a first epitaxy mask to cover the second semiconductor fin and the second dielectric fin, performing a first epitaxy process to form an n-type epitaxy region based on the first semiconductor fin, removing the first epitaxy mask, forming a second epitaxy mask to cover the n-type epitaxy region and the first dielectric fin, performing a second epitaxy process to form a p-type epitaxy region based on the second semiconductor fin, and removing the second epitaxy mask. After the second epitaxy mask is removed, a portion of the second epitaxy mask is left on the first dielectric fin.Type: GrantFiled: November 28, 2023Date of Patent: November 26, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Chiang Chang, Ming-Hua Yu, Li-Li Su
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Publication number: 20240387629Abstract: A device includes a first nanostructure over a semiconductor substrate; a second nanostructure over the first nanostructure; a gate structure surrounding the first nanostructure and the second nanostructure; a first epitaxial region in the semiconductor substrate adjacent the gate structure, wherein the first epitaxial region is a first doped semiconductor material; and a second epitaxial region over the first epitaxial region, wherein the second epitaxial region is adjacent the first nanostructure and the second nanostructure, wherein the second epitaxial region is a second doped semiconductor material that is different from the first doped semiconductor material. In an embodiment, the first doped semiconductor material has a smaller doping concentration than the second doped semiconductor material.Type: ApplicationFiled: July 29, 2024Publication date: November 21, 2024Inventors: Wei-Min Liu, Li-Li Su, Chii-Horng Li, Yee-Chia Yeo
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Publication number: 20240387742Abstract: Semiconductor devices and methods of fabricating the semiconductor devices are described herein. The method includes steps for patterning fins in a multilayer stack and forming an opening in a fin as an initial step in forming a source/drain region. The opening is formed into a parasitic channel region of the fin. Once the opening has been formed, a first semiconductor material is epitaxially grown at the bottom of the opening to a level over the top of the parasitic channel region. A second semiconductor material is epitaxially grown from the top of the first semiconductor material to fill and/or overfill the opening. The second semiconductor material is differently doped from the first semiconductor material. A stack of nanostructures is formed by removing sacrificial layers of the multilayer stack, the second semiconductor material being electrically coupled to the nanostructures.Type: ApplicationFiled: July 28, 2024Publication date: November 21, 2024Inventors: Wei-Min Liu, Li-Li Su, Yee-Chia Yeo
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Publication number: 20240387702Abstract: A method includes forming a first semiconductor fin and a second semiconductor fin in an n-type Fin Field-Effect (FinFET) region and a p-type FinFET region, respectively, forming a first dielectric fin and a second dielectric fin in the n-type FinFET region and the p-type FinFET region, respectively, forming a first epitaxy mask to cover the second semiconductor fin and the second dielectric fin, performing a first epitaxy process to form an n-type epitaxy region based on the first semiconductor fin, removing the first epitaxy mask, forming a second epitaxy mask to cover the n-type epitaxy region and the first dielectric fin, performing a second epitaxy process to form a p-type epitaxy region based on the second semiconductor fin, and removing the second epitaxy mask. After the second epitaxy mask is removed, a portion of the second epitaxy mask is left on the first dielectric fin.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Inventors: Chih-Chiang Chang, Ming-Hua Yu, Li-Li Su