Patents by Inventor Liang Cheng

Liang Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230232636
    Abstract: A semiconductor structure and method for forming the semiconductor are provided. The semiconductor structure includes a first electrode comprising a first portion, a second portion, and a sheet portion connecting the first portion to the second portion. A ferroelectric material is over the sheet portion. A second electrode is over the ferroelectric material.
    Type: Application
    Filed: March 20, 2023
    Publication date: July 20, 2023
    Inventor: Chung-Liang CHENG
  • Patent number: 11699736
    Abstract: A device includes a substrate, a semiconductor channel over the substrate, and a gate structure over and laterally surrounding the semiconductor channel. The gate structure includes a first dielectric layer over the semiconductor channel, a first work function metal layer over the first dielectric layer, a first protection layer over the first work function metal layer, a second protection layer over the first protection layer, and a metal fill layer over the second protection layer.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: July 11, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chung-Liang Cheng
  • Patent number: 11699735
    Abstract: A device comprises a substrate, a semiconductor channel over the substrate, and a gate structure over and laterally surrounding the semiconductor channel. The gate structure comprises a first dielectric layer comprising a first dielectric material including dopants. A second dielectric layer is on the first dielectric layer, and comprises a second dielectric material substantially free of the dopants. A metal fill layer is over the second dielectric layer.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: July 11, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chung-Liang Cheng
  • Patent number: 11686683
    Abstract: A thin-film deposition system deposits a thin-film on a wafer. A radiation source irradiates the wafer with excitation light. An emissions sensor detects an emission spectrum from the wafer responsive to the excitation light. A machine learning based analysis model analyzes the spectrum and detects contamination of the thin-film based on the spectrum.
    Type: Grant
    Filed: February 5, 2021
    Date of Patent: June 27, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chung-Liang Cheng
  • Publication number: 20230187526
    Abstract: A semiconductor device with different configurations of gate structures and a method of fabricating the same are disclosed. The method includes forming a fin structure on a substrate, forming a gate opening on the fin structure, forming an interfacial oxide layer on the fin structure, forming a first dielectric layer over the interfacial oxide layer, forming a dipole layer between the interfacial oxide layer and the first dielectric layer, forming a second dielectric layer on the first dielectric layer, forming a work function metal (WFM) layer on the second dielectric layer, and forming a gate metal fill layer on the WFM layer. The dipole layer includes ions of first and second metals that are different from each other. The first and second metals have electronegativity values greater than an electronegativity value of a metal or a semiconductor of the first dielectric layer.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 15, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsiang-Pi CHANG, Chung-Liang CHENG, I-Ming CHANG, Yao-Sheng HUANG, Huang-Lin CHAO
  • Patent number: 11670698
    Abstract: A method of fabricating a semiconductor device includes forming a first stack of semiconductor layers on a substrate. The first stack of semiconductor layers includes alternating first and second semiconductor strips. The first and second semiconductor strips includes first and second semiconductor materials, respectively. The method also includes removing the first semiconductor strips to form voids between the second semiconductor strips in the first stack of semiconductor layers. The method further includes depositing a dielectric structure layer and a first conductive fill material in the voids to surround the second semiconductor strips. Further, the method includes removing the second semiconductor strips to form a second set of voids, and depositing a third semiconductor material in the second sets of voids.
    Type: Grant
    Filed: July 28, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Chung-Liang Cheng
  • Patent number: 11670547
    Abstract: A semiconductor arrangement is provided. The semiconductor arrangement includes a dielectric layer defining an opening, an adhesion layer in the opening, and a conductive layer in the opening over the adhesion layer. A material of the conductive layer is a same material as an adhesion material of the adhesion layer.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: June 6, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Ting Tsai, Chung-Liang Cheng, Ching-Jing Wu, Chyi-Tsong Ni
  • Patent number: 11670694
    Abstract: The structure of a semiconductor device with dual metal capped via contact structures and a method of fabricating the semiconductor device are disclosed. A method of fabricating the semiconductor device includes forming a source/drain (S/D) region and a gate structure on a fin structure, forming S/D and gate contact structures on the S/D region and the gate structure, respectively, forming first and second via contact structures on the S/D and gate contact structures, respectively, and forming first and second interconnect structures on the first and second via contact structures, respectively. The forming of the first and second via contact structures includes forming a first via contact plug interposed between first top and bottom metal capping layers and a second via contact plug interposed between second top and bottom metal capping layers, respectively.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: June 6, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, Ziwei Fang
  • Patent number: 11660637
    Abstract: A driving device is provided. The driving device includes a boost inductor and a resonance circuit. The boost inductor receives a first power via a first terminal of the boost inductor in a first mode and provides a second power via a second terminal of the boost inductor. The resonance circuit stores a stored electric energy from the second power in the first mode, so that the boost inductor does not provide the second power in the second mode and drives a transducer by the stored electric energy in the first mode and the second mode.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: May 30, 2023
    Assignee: I-SHOU UNIVERSITY
    Inventors: Chun-An Cheng, Hung-Liang Cheng, Ya-Jing Chen
  • Patent number: 11662800
    Abstract: The electronic device with power-off partition includes a signal transmitting module, two repeater modules, and a working module. Each of the repeater modules includes a first power domain, a second power domain, and a transceiver circuit. A transmission path between the first power domain and the second power domain is maintained at a logic state when the second power domain is in power off mode. The transceiver circuit of one of the two repeater modules encodes a standby signal obtained from the signal transmitting module and transmits an encoded standby signal. The transceiver circuit of the other of the repeater modules decodes the encoded standby signal and transmits a decoded standby signal. The working module transmits, according to the decoded standby signal, a power-off signal to the transceiver circuits of the two repeater modules, so that the second power domains enter the power-off mode in response to the power-off signal.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: May 30, 2023
    Assignee: AICONNX TECHNOLOGY CORPORATION
    Inventors: Hsu-Jung Tung, Yu-Pin Lin, Lien-Hsiang Sung, Wei-Liang Cheng
  • Patent number: 11664308
    Abstract: A semiconductor device includes: a first conductive structure having sidewalls and a bottom surface, the first conductive structure extending through one or more isolation layers formed on a substrate; and an insulation layer disposed between at least one of the sidewalls of the first conductive structure and respective sidewalls of the one or more isolation layers, wherein the first conductive structure is electrically coupled to a second conductive structure through at least the bottom surface.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: May 30, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, Shih Wei Bih, Yen-Yu Chen
  • Patent number: 11653581
    Abstract: A resistive random access memory cell includes a gate all around transistor and a resistor device. The resistor device includes a first electrode including a plurality of conductive nanosheets. The resistor device includes a high-K resistive element surrounds the conductive nanosheets. The resistor device includes a second electrode separated from the conductive nanosheets by the resistive element.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: May 16, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chung-Liang Cheng
  • Publication number: 20230146134
    Abstract: Embodiments provide an image processing method, program, and apparatus, for using a database of data manifestations of objects to identify those objects in image data representing a domain or space containing objects to be identified. Embodiments leverage 3D vector field representations of both the domain or space, and of the objects, to perform the recognition. Embodiments annotate the image data with information relating to the identified objects, and/or replace portions of the image data with a data manifestation of the recognised object imported from the database.
    Type: Application
    Filed: February 12, 2021
    Publication date: May 11, 2023
    Inventors: David SELVIAH, Liang CHENG, Roger MARAN
  • Publication number: 20230131388
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first channel layer over a first region of a substrate, a first gate dielectric layer over the first channel layer, and a first gate electrode structure over the first gate dielectric layer. The first gate electrode structure includes a barrier layer over the first gate dielectric layer, a barrier oxide over and in contact with the barrier layer, and a metal fill layer over the barrier oxide. The barrier layer is made of a nitride of a metal, and the barrier oxide is made of an oxide of the metal.
    Type: Application
    Filed: December 21, 2022
    Publication date: April 27, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Liang CHENG, Ziwei FANG
  • Patent number: 11631640
    Abstract: The present disclosure describes a method for forming a barrier structure between liner-free conductive structures and underlying conductive structures. The method includes forming openings in a dielectric layer disposed on a contact layer, where the openings expose conductive structures in the contact layer. A first metal layer is deposited in the openings and is grown thicker on top surfaces of the conductive structures and thinner on sidewall surfaces of the openings. The method further includes exposing the first metal layer to ammonia to form a bilayer with the first metal layer and a nitride of the first metal layer, and subsequently exposing the nitride to an oxygen plasma to convert a portion of the nitride of the first metal layer to an oxide layer. The method also includes removing the oxide layer and forming a semiconductor-containing layer on the nitride of the first metal layer.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: April 18, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yen-Yu Chen, Chung-Liang Cheng
  • Patent number: 11626493
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The gate stack includes a gate dielectric layer, a first metal-containing layer, a silicon-containing layer, a second metal-containing layer, and a gate electrode layer sequentially stacked over the substrate. The silicon-containing layer is between the first metal-containing layer and the second metal-containing layer, and the silicon-containing layer is thinner than the second metal-containing layer.
    Type: Grant
    Filed: June 11, 2021
    Date of Patent: April 11, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsueh-Wen Tsau, Chun-I Wu, Ziwei Fang, Huang-Lin Chao, I-Ming Chang, Chung-Liang Cheng, Chih-Cheng Lin
  • Patent number: 11610822
    Abstract: A semiconductor device includes a first gate structure that includes a first interfacial layer, a first gate dielectric layer disposed over the first interfacial layer, and a first gate electrode disposed over the first gate dielectric layer. The semiconductor device also includes a second gate structure that includes a second interfacial layer, a second gate dielectric layer disposed over the second interfacial layer, and a second gate electrode disposed over the second gate dielectric layer. The first interfacial layer contains a different amount of a dipole material than the second interfacial layer.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: March 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Yu Chen, Chung-Liang Cheng
  • Patent number: 11610904
    Abstract: A semiconductor structure and method for forming the semiconductor are provided. The semiconductor structure includes a first electrode comprising a first portion, a second portion, and a sheet portion connecting the first portion to the second portion. A ferroelectric material is over the sheet portion. A second electrode is over the ferroelectric material.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: March 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventor: Chung-Liang Cheng
  • Patent number: 11605537
    Abstract: Examples of an integrated circuit with a gate structure and a method for forming the integrated circuit are provided herein. In some examples, a workpiece is received that includes a substrate having a channel region. A gate dielectric is formed on the channel region, and a layer containing a dopant is formed on the gate dielectric. The workpiece is annealed to transfer the dopant to the gate dielectric, and the layer is removed after the annealing. In some such examples, after the layer is removed, a work function layer is formed on the gate dielectric and a fill material is formed on the work function layer to form a gate structure.
    Type: Grant
    Filed: February 22, 2021
    Date of Patent: March 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Liang Cheng, Yen-Yu Chen
  • Patent number: 11605328
    Abstract: A split-type display system includes a processing device, a display device, and a transmission cable connecting the devices. The processing device includes a processing unit and a low-to-high unit. The processing unit generates a first image signal having both a first transmission rate and a first channel number. The low-to-high unit converts the first image signal into a second image signal having both a second transmission rate and a second channel number. The first transmission rate is lower than the second transmission rate. The display device includes a high-to-low unit and a display unit. The high-to-low unit receives and converts the second image signal into a third image signal having both a third transmission rate and a third channel number. The display unit displays the third image signal. a number of channels of the transmission cable is the same as the second channel number.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: March 14, 2023
    Assignee: AICONNX TECHNOLOGY CORPORATION
    Inventors: Hsu-Jung Tung, Lien-Hsiang Sung, Wei-Liang Cheng