Abstract: Pigment-based resists tend to give off a certain amount of organic vapor during exposure. This brings about contamination of the projection lens surface as well as other parts of the system. A method to monitor this accumulation of solvent vapor on the lens surface is disclosed, based on a test matrix (in which exposure time and focal distance are systematically varied) through which a series of images are formed in the resist and then evaluated for quality. A key feature is the test patterns that are used for forming the images. Said patterns are designed so as to maximize the total amount of diffraction that occurs during image formation, thereby maximizing sensitivity to changes in lens quality. Several examples of the test patterns are provided.

Abstract: An electrosurgical hand piece comprises a handle having therein a handle passageway. A grip sleeve is provided on handle. A nozzle is disposed at one end of the handle. The outer side of the nozzle has a contacting portion. The nozzle has a nozzle passageway in communication with the handle passageway of the handle. The rear end of the nozzle has a first support portion. A support member is disposed in the nozzle passageway of the nozzle to form the second support portion of the nozzle. An electrode is fixed at the rear side by the first support portion of the nozzle to enable the electrode to extend into the nozzle passageway and supported at the front side thereof by the support member. So that, the electrode is supported by both the first support portion and the support member. Whereby the electrode is kept along the central line of the nozzle passageway of the nozzle to provide the surgeon can operate the hand piece precisely in the surgical operation.