Patents by Inventor Lifang Xu

Lifang Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12374619
    Abstract: Microelectronic devices include a stack structure having a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A series of stadiums, within the stack structure, includes stadiums of differing numbers of staircase sets, such as a stadium having multiple parallel sets of staircases and an additional stadium having a single set of staircases. Each of the staircases includes steps, at ends of the conductive structures, with a same multi-tier riser height. In methods of fabrication, a same initial stadium opening may be concurrently formed for each of the stadiums—regardless of whether the stadium is to include the single set or the multiple parallel sets of staircases—with the steps of the same multi-tier riser height. Electronic systems are also disclosed.
    Type: Grant
    Filed: March 30, 2022
    Date of Patent: July 29, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Harsh Narendrakumar Jain, Indra V. Chary, Umberto Maria Meotto, Paolo Tessariol
  • Publication number: 20250183196
    Abstract: Microelectronic devices include a stack structure of insulative structures vertically alternating with conductive structures and arranged in tiers forming opposing staircase structures. A polysilicon fill material substantially fills an opening (e.g., a high-aspect-ratio opening) between the opposing staircase structures. The polysilicon fill material may have non-compressive stress such that the stack structure may be partitioned into blocks without the blocks bending and without contacts—formed in at least one of the polysilicon fill material and the stack structure—deforming, misaligning, or forming electrical shorts with neighboring contacts.
    Type: Application
    Filed: February 3, 2025
    Publication date: June 5, 2025
    Inventors: Jivaan Kishore Jhothiraman, John M. Meldrim, Lifang Xu
  • Patent number: 12315801
    Abstract: A microelectronic device comprises a stack structure, contact structures, and additional contact structures. The stack structure comprises a vertically alternating sequence of conductive material and insulative material arranged in tiers. The stack structure is divided into blocks each comprising a stadium structure including steps comprising horizontal ends of the tiers. The contact structures are within a horizontal area of the stadium structure and vertically extend through the stack structure. The additional contact structures are on at least some of the steps of the stadium structure and are coupled to the contact structures. Memory devices and electronic devices are also disclosed.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: May 27, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Indra V. Chary, Shuangqiang Luo, Lifang Xu
  • Publication number: 20250151281
    Abstract: A memory can have a stacked memory array that can have a plurality of levels of memory cells. Each respective level of memory cells can be commonly coupled to a respective access line. A plurality of drivers can be above the stacked memory array. Each respective driver can have a monocrystalline semiconductor with a conductive region coupled to a respective access line.
    Type: Application
    Filed: January 8, 2025
    Publication date: May 8, 2025
    Inventors: Haitao Liu, Kamal M. Karda, Gurtej S. Sandhu, Sanh D. Tang, Akira Goda, Lifang Xu
  • Patent number: 12283644
    Abstract: Textured optoelectronic devices and associated methods of manufacture are disclosed herein. In several embodiments, a method of manufacturing a solid state optoelectronic device can include forming a conductive transparent texturing material on a substrate. The method can further include forming a transparent conductive material on the texturing material. Upon heating the device, the texturing material causes the conductive material to grow a plurality of protuberances. The protuberances can improve current spreading and light extraction from the device.
    Type: Grant
    Filed: July 26, 2023
    Date of Patent: April 22, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Scott D. Schellhammer, Shan Ming Mou, Michael J. Bernhardt
  • Patent number: 12267997
    Abstract: A method of forming a microelectronic device including a first stack structure comprising alternating levels of insulative structures and other insulative structures, forming strings of memory cells through the first stack structure, forming a second stack structure over the first stack structure, based at least partially on observed amount of pillar bending within the first stack structure, forming a first tailored reticle specific to the observed amount of pillar bending, utilizing the first tailored reticle to form openings extending through the second stack structure and over some of the strings of memory cells, wherein centers of the openings over the strings of memory cells are at least substantially aligned with the centers of uppermost surfaces of the strings of memory cells in a direction of the observed pillar bending, and forming upper pillars extending through the second stack structure and over some of the strings of memory cells.
    Type: Grant
    Filed: December 22, 2023
    Date of Patent: April 1, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Sidhartha Gupta, Kar Wui Thong, Harsh Narendrakumar Jain
  • Publication number: 20250107204
    Abstract: Microelectronic devices include a tiered stack having vertically alternating insulative and conductive structures. A first series of stadiums is defined in the tiered stack within a first block of a dual-block structure. A second series of stadiums is defined in the tiered stack within a second block of the dual-block structure. The first and second series of stadiums are substantially symmetrically structured about a trench at a center of the dual-block structure. The trench extends a width of the first and second series of stadiums. The stadiums of the first and second series of stadiums have opposing staircase structures comprising steps at ends of the conductive structures of the tiered stack. Conductive source/drain contact structures are in the stack and extend substantially vertically from a source/drain region at a floor of the trench. Additional microelectronic devices are also disclosed, as are methods of fabrication and electronic systems.
    Type: Application
    Filed: December 9, 2024
    Publication date: March 27, 2025
    Inventors: Lifang Xu, Richard J. Hill, Indra V. Chary, Lars P. Heineck
  • Patent number: 12245426
    Abstract: Methods, systems, and devices for staircase formation in a memory array are described. A first liner material may be deposited on a tread above a first contact surface and a portion of the first liner material may be doped. A second liner material may be deposited over the first liner and a portion of the second liner material may be doped. After doping the portions of the liner materials, the undoped portions of the liner materials may be removed so that the materials above a second contact surface can be at least partially removed via a first removal process. The doped portion of the first liner material may then be cut back so that a second removal process can expose the second contact surface and a third contact (while the first contact surface is protected from the removal process by the liner materials).
    Type: Grant
    Filed: August 26, 2022
    Date of Patent: March 4, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Alyssa N. Scarbrough, Lifang Xu, Jordan D. Greenlee
  • Patent number: 12218081
    Abstract: Microelectronic devices include a stack structure of insulative structures vertically alternating with conductive structures and arranged in tiers forming opposing staircase structures. A polysilicon fill material substantially fills an opening (e.g., a high-aspect-ratio opening) between the opposing staircase structures. The polysilicon fill material may have non-compressive stress such that the stack structure may be partitioned into blocks without the blocks bending and without contacts—formed in at least one of the polysilicon fill material and the stack structure—deforming, misaligning, or forming electrical shorts with neighboring contacts.
    Type: Grant
    Filed: July 21, 2023
    Date of Patent: February 4, 2025
    Assignee: Lodestar Licensing Group LLC
    Inventors: Jivaan Kishore Jhothiraman, John M. Meldrim, Lifang Xu
  • Patent number: 12213317
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. The operative channel-material strings in the laterally-spaced memory blocks comprise part of a memory plane. An elevationally-extending wall is in the memory plane laterally-between immediately-laterally-adjacent of the memory blocks and that completely encircles an island that is laterally-between immediately-laterally-adjacent of the memory blocks in the memory plane. Other embodiments, including method are disclosed.
    Type: Grant
    Filed: November 14, 2023
    Date of Patent: January 28, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Indra V. Chary, Justin B. Dorhout, Jian Li, Haitao Liu, Paolo Tessariol
  • Patent number: 12200938
    Abstract: A memory can have a stacked memory array that can have a plurality of levels of memory cells. Each respective level of memory cells can be commonly coupled to a respective access line. A plurality of drivers can be above the stacked memory array. Each respective driver can have a monocrystalline semiconductor with a conductive region coupled to a respective access line.
    Type: Grant
    Filed: October 30, 2023
    Date of Patent: January 14, 2025
    Inventors: Haitao Liu, Kamal M. Karda, Gurtej S. Sandhu, Sanh D. Tang, Akira Goda, Lifang Xu
  • Patent number: 12166094
    Abstract: Microelectronic devices include a tiered stack having vertically alternating insulative and conductive structures. A first series of stadiums is defined in the tiered stack within a first block of a dual-block structure. A second series of stadiums is defined in the tiered stack within a second block of the dual-block structure. The first and second series of stadiums are substantially symmetrically structured about a trench at a center of the dual-block structure. The trench extends a width of the first and second series of stadiums. The stadiums of the first and second series of stadiums have opposing staircase structures comprising steps at ends of the conductive structures of the tiered stack. Conductive source/drain contact structures are in the stack and extend substantially vertically from a source/drain region at a floor of the trench. Additional microelectronic devices are also disclosed, as are methods of fabrication and electronic systems.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: December 10, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Richard J. Hill, Indra V. Chary, Lars P. Heineck
  • Patent number: 12127401
    Abstract: A microelectronic device comprises a stack structure comprising blocks separated from one another by dielectric slot structures. At least one of the blocks comprises two crest regions, a stadium structure interposed between the two crest regions in a first horizontal direction, and two bridge regions neighboring opposing sides of the stadium structure in a second horizontal direction. A filled trench vertically overlies and is within horizontal boundaries of the stadium structure of the at least one of the blocks. The filled trench comprises a dielectric liner material on the opposing staircase structures of the stadium structure and on inner sidewalls of the two bridge regions, and dielectric structures on and having a different material composition than the dielectric liner material. The dielectric structures are substantially confined within horizontal areas of the steps of the stadium structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Grant
    Filed: May 22, 2023
    Date of Patent: October 22, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Christopher J. Larsen, Lifang Xu
  • Publication number: 20240347464
    Abstract: A microelectronic device comprises a stack structure comprising insulative structures vertically interleaved with conductive structures, first support pillar structures vertically extending through the stack structure in a first staircase region including steps defined at edges of tiers of the insulative structures and conductive structures, and second support pillar structures vertically extending through the stack structure in a second staircase region including additional steps defined at edges of additional tiers of the insulative structures and conductive structures, the second support pillar structures having a smaller cross-sectional area than the first support pillar structures. Related memory devices, electronic systems, and methods are also described.
    Type: Application
    Filed: June 24, 2024
    Publication date: October 17, 2024
    Inventors: Lingyu Kong, Lifang Xu, Indra V. Chary, Shuangqiang Luo, Sok Han Wong
  • Publication number: 20240297269
    Abstract: Light emitting diodes and associated methods of manufacturing are disclosed herein. In one embodiment, a light emitting diode (LED) includes a substrate, a semiconductor material carried by the substrate, and an active region proximate to the semiconductor material. The semiconductor material has a first surface proximate to the substrate and a second surface opposite the first surface. The second surface of the semiconductor material is generally non-planar, and the active region generally conforms to the non-planar second surface of the semiconductor material.
    Type: Application
    Filed: May 14, 2024
    Publication date: September 5, 2024
    Inventors: Scott D. Schellhammer, Scott E. Sills, Lifang Xu, Thomas Gehrke, Zaiyuan Ren, Anton J. De Villiers
  • Publication number: 20240290722
    Abstract: An apparatus comprising at least one contact structure. The at least one contact structure comprises a contact, an insulating material overlying the contact, and at least one contact via in the insulating material. The at least one contact structure also comprises a dielectric liner material adjacent the insulating material within the contact via, a conductive material adjacent the dielectric liner material, and a stress compensation material adjacent the conductive material and in a central portion of the at least one contact via. The stress compensation material is at least partially surrounded by the conductive material. Memory devices, electronic systems, and methods of forming the apparatus are also disclosed.
    Type: Application
    Filed: May 1, 2024
    Publication date: August 29, 2024
    Inventors: Jordan D. Greenlee, Lifang Xu, Rita J. Klein, Xiao Li, Everett A. McTeer
  • Publication number: 20240284672
    Abstract: Methods, systems, and devices for merged cavities for conductor formation in a memory die are described. An array of cavities may be formed through a stack of material layers of a memory die, and conductors may be formed at least in part by merging some of the cavities of the array. Such cavities may be sized in accordance with a relatively smallest feature that implements a subset of such cavities, and a smallest associated feature may be formed using a first subset of the array of cavities. Conductors may be formed at least in part by merging two or more cavities of a second subset of the array of cavities using a material removal operation to remove portions of the stack of material layers. Such merging may support conductors being formed with a cross-section that is greater than a cross-section of other features formed using such cavities that are not merged.
    Type: Application
    Filed: February 15, 2024
    Publication date: August 22, 2024
    Inventors: David H. Wells, Matthew J. King, Indra V. Chary, Yoshiaki Fukuzumi, Lifang Xu, Paolo Tessariol, Shuangqiang Luo
  • Publication number: 20240250033
    Abstract: A microelectronic device comprises a stack structure comprising an alternating sequence of conductive material and insulative material arranged in tiers, and having blocks separated by dielectric slot structures. Each of the blocks comprises a stadium structure, a filled trench overlying the stadium structure, support structures extending through the filled trench and tiers of the stack structure, and dielectric liner structures covering sidewalls of the support structures. The stadium structure comprises staircase structures each having steps comprising edges of the tiers of the stack structure. The filled trench comprises a dielectric material interposed between at least two additional dielectric materials. The dielectric liner structures comprise first protrusions at vertical positions of the dielectric material, and second protrusions at vertical positions of the conductive material of the tiers of the stack structure. The second protrusions have greater horizontal dimensions than the first protrusions.
    Type: Application
    Filed: April 1, 2024
    Publication date: July 25, 2024
    Inventors: Shuangqiang Luo, Lifang Xu, Xiao Li, Jivaan Kishore Jhothiraman, Mohad Baboli
  • Publication number: 20240250024
    Abstract: A stairless electrical interconnect structure with contact pillars embedded within and collectively accessing each tier in a periodic material stack, e.g., to provide electrical connections to access lines associated with a three-dimensional memory array, is described. The contact pillars can be formed in a corresponding array of vertical contact pillar trenches etched into the material stack in two stages to create depths of the trenches that vary between columns by a fixed number of tiers and then offset the depths between rows.
    Type: Application
    Filed: January 23, 2024
    Publication date: July 25, 2024
    Inventors: Surendranath C. Eruvuru, Lifang Xu
  • Patent number: 12040274
    Abstract: A microelectronic device comprises a stack structure comprising insulative structures vertically interleaved with conductive structures, first support pillar structures vertically extending through the stack structure in a first staircase region including steps defined at edges of tiers of the insulative structures and conductive structures, and second support pillar structures vertically extending through the stack structure in a second staircase region including additional steps defined at edges of additional tiers of the insulative structures and conductive structures, the second support pillar structures having a smaller cross-sectional area than the first support pillar structures. Related memory devices, electronic systems, and methods are also described.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: July 16, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Lingyu Kong, Lifang Xu, Indra V. Chary, Shuangqiang Luo, Sok Han Wong