Patents by Inventor Lifang Xu

Lifang Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11894305
    Abstract: A microelectronic device includes a stack structure, a staircase structure, conductive pad structures, and conductive contact structures. The stack structure includes vertically alternating conductive structures and insulating structures arranged in tiers. Each of the tiers individually includes one of the conductive structures and one of the insulating structures. The staircase structure has steps made up of edges of at least some of the tiers of the stack structure. The conductive pad structures are on the steps of the staircase structure and include beta phase tungsten. The conductive contact structures are on the conductive pad structures. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Grant
    Filed: April 12, 2022
    Date of Patent: February 6, 2024
    Inventors: Jordan D. Greenlee, John D. Hopkins, Rita J. Klein, Everett A. McTeer, Lifang Xu, Daniel Billingsley, Collin Howder
  • Publication number: 20240029795
    Abstract: Memory circuitry comprising strings of memory cells comprises channel-material strings of memory cells extending through insulative tiers and conductive tiers in a memory-array region. The insulative and conductive tiers extend from the memory-array region into a stair-step region. A plurality of stair-step structures is in the stair-step region. The stair-step structures individually comprise two opposing flights of stairs. The stair-step structures comprise an SGD stair-step structure and non-SGD stair-step structures. At least one of the non-SGD stair-step structures has less total stairs than are in individual of multiple others of the non-SGD stair-step structures. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: July 19, 2022
    Publication date: January 25, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Anna Maria Conti, Lifang Xu, Harsh Narendrakumar Jain
  • Publication number: 20240029794
    Abstract: A method used in forming memory circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack extends from a memory-array region into a stair-step region. The first tiers are conductive and the second tiers are insulative at least in a finished-circuitry construction. A first layer of imageable resist is exposed to actinic radiation and developed to form a first opening there-through in the stair-step region. The developed first layer is used in a plurality of alternating etching and lateral-trimming steps that widens the first opening and forms two opposing flights of stairs in the stack in the stair-step region. A second layer of imageable resist is formed directly above the two opposing flights of stairs. The second layer is exposed to actinic radiation and developed to form a second opening there-through. The second opening exposes all of the stairs of one of the two opposing flights.
    Type: Application
    Filed: July 19, 2022
    Publication date: January 25, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Lifang Xu, Anna Maria Conti, Harsh Narendrakumar Jain, H. Montgomery Manning
  • Patent number: 11864387
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. The operative channel-material strings in the laterally-spaced memory blocks comprise part of a memory plane. An elevationally-extending wall is in the memory plane laterally-between immediately-laterally-adjacent of the memory blocks and that completely encircles an island that is laterally-between immediately-laterally-adjacent of the memory blocks in the memory plane. Other embodiments, including method are disclosed.
    Type: Grant
    Filed: December 16, 2022
    Date of Patent: January 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Indra V. Chary, Justin B. Dorhout, Jian Li, Haitao Liu, Paolo Tessariol
  • Patent number: 11856763
    Abstract: A method of forming a microelectronic device including a first stack structure comprising alternating levels of insulative structures and other insulative structures, forming strings of memory cells through the first stack structure, forming a second stack structure over the first stack structure, based at least partially on observed amount of pillar bending within the first stack structure, forming a first tailored reticle specific to the observed amount of pillar bending, utilizing the first tailored reticle to form openings extending through the second stack structure and over some of the strings of memory cells, wherein centers of the openings over the strings of memory cells are at least substantially aligned with the centers of uppermost surfaces of the strings of memory cells in a direction of the observed pillar bending, and forming upper pillars extending through the second stack structure and over some of the strings of memory cells.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: December 26, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Sidhartha Gupta, Kar Wui Thong, Harsh Narendrakumar Jain
  • Publication number: 20230397421
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another, the tiers including conductive materials that form part of respective control gates for memory cells of the apparatus; a staircase structure formed in the tiers, the conductive materials including respective portions that collectively form a part of the staircase structure, the staircase structure including a sidewall on a side of the staircase structure; a dielectric liner formed on the sidewall; recesses formed in respective tiers and adjacent the sidewall such that respective portions of the dielectric liner are located in the recesses; and a contact structure extending through a portion of the dielectric liner, wherein the portions of the dielectric liner are between the contract structure and the conductive materials.
    Type: Application
    Filed: July 28, 2022
    Publication date: December 7, 2023
    Inventors: Mallesh Rajashekharaiah, Lifang Xu, Nancy M. Lomeli
  • Publication number: 20230387353
    Abstract: Textured optoelectronic devices and associated methods of manufacture are disclosed herein. In several embodiments, a method of manufacturing a solid state optoelectronic device can include forming a conductive transparent texturing material on a substrate. The method can further include forming a transparent conductive material on the texturing material. Upon heating the device, the texturing material causes the conductive material to grow a plurality of protuberances. The protuberances can improve current spreading and light extraction from the device.
    Type: Application
    Filed: July 26, 2023
    Publication date: November 30, 2023
    Inventors: Lifang Xu, Scott D. Schellhammer, Shan Ming Mou, Michael J. Bernhardt
  • Publication number: 20230361053
    Abstract: Microelectronic devices include a stack structure of insulative structures vertically alternating with conductive structures and arranged in tiers forming opposing staircase structures. A polysilicon fill material substantially fills an opening (e.g., a high-aspect-ratio opening) between the opposing staircase structures. The polysilicon fill material may have non-compressive stress such that the stack structure may be partitioned into blocks without the blocks bending and without contacts—formed in at least one of the polysilicon fill material and the stack structure—deforming, misaligning, or forming electrical shorts with neighboring contacts.
    Type: Application
    Filed: July 21, 2023
    Publication date: November 9, 2023
    Inventors: Jivaan Kishore Jhothiraman, John M. Meldrim, Lifang Xu
  • Patent number: 11805653
    Abstract: A memory can have a stacked memory array that can have a plurality of levels of memory cells. Each respective level of memory cells can be commonly coupled to a respective access line. A plurality of drivers can be above the stacked memory array. Each respective driver can have a monocrystalline semiconductor with a conductive region coupled to a respective access line.
    Type: Grant
    Filed: January 8, 2021
    Date of Patent: October 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Haitao Liu, Kamal M. Karda, Gurtej S. Sandhu, Sanh D. Tang, Akira Goda, Lifang Xu
  • Publication number: 20230328975
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region, and an intermediate region between the memory regions. A stack extends across the memory regions and the intermediate region. The stack includes alternating conductive levels and insulative levels. Channel-material-pillars are arranged within the memory regions. Memory-block-regions extend longitudinally across the memory regions and the intermediate region. Staircase regions are within the intermediate region. Each of the staircase regions laterally overlaps two of the memory-block-regions. First panel regions extend longitudinally across at least portions of the staircase regions. Second panel regions extend longitudinally and provide lateral separation between adjacent memory-block-regions. The second panel regions are of laterally different dimensions than the first panel regions and/or are compositionally different than the first panel regions.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 12, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Lifang Xu, Indra V. Chary
  • Patent number: 11785775
    Abstract: A method of forming a microelectronic device includes forming a microelectronic device structure. The microelectronic device structure includes a stack structure having an alternating sequence of conductive structures and insulative structures, an upper stadium structure, a lower stadium structure, and a crest region defined between a first stair step structure of the upper stadium structure and a second stair step structure of the lower stadium structure. The stack structure further includes pillar structures extending through the stack structure and dielectric structures interposed between neighboring pillar structures within the upper stadium structure. The method further includes forming a trench in the crest region of the stack structure between two dielectric structures of the dielectric structures on opposing sides of another dielectric structure and filling the trench with a dielectric material. The trench partially overlaps with the dielectric structures.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: October 10, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Shuangqiang Luo, Harsh Narendrakumar Jain, Nancy M. Lomeli, Christopher J. Larsen
  • Publication number: 20230317604
    Abstract: Microelectronic devices include a stack structure having a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A series of stadiums, within the stack structure, includes stadiums of differing numbers of staircase sets, such as a stadium having multiple parallel sets of staircases and an additional stadium having a single set of staircases. Each of the staircases comprises steps, at ends of the conductive structures, with a same multi-tier riser height. In methods of fabrication, a same initial stadium opening may be concurrently formed for each of the stadiums—regardless of whether the stadium is to include the single set or the multiple parallel sets of staircases—with the steps of the same multi-tier riser height. Electronic systems are also disclosed.
    Type: Application
    Filed: March 30, 2022
    Publication date: October 5, 2023
    Inventors: Lifang Xu, Harsh Narendrakumar Jain, Indra V. Chary, Umberto Maria Meotto, Paolo Tessariol
  • Publication number: 20230307350
    Abstract: A microelectronic device includes a stack structure having blocks separated by dielectric slot structures and each including a vertically alternating sequence of conductive structures and insulative structures arranged in tiers. At least one of the blocks includes an upper stadium structure, two crest regions, a lower stadium structure, and two bridge regions. The upper stadium structure extends from and between two of the dielectric slot structures, and includes staircase structures having steps including edges of some of the tiers. The two crest regions are horizontally offset from the upper stadium structure. The lower stadium structure is below the upper stadium structure, is interposed between the two crest regions, and includes additional staircase structures. The two bridge regions are interposed between the lower stadium structure and the two of the dielectric slot structures, and extend between the two crest regions. Related memory devices, electronic systems, and methods are also described.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 28, 2023
    Inventors: Lifang Xu, Indra V. Chary, Richard J. Hill
  • Publication number: 20230301081
    Abstract: A microelectronic device comprises a stack structure comprising blocks separated from one another by dielectric slot structures. At least one of the blocks comprises two crest regions, a stadium structure interposed between the two crest regions in a first horizontal direction, and two bridge regions neighboring opposing sides of the stadium structure in a second horizontal direction. A filled trench vertically overlies and is within horizontal boundaries of the stadium structure of the at least one of the blocks. The filled trench comprises a dielectric liner material on the opposing staircase structures of the stadium structure and on inner sidewalls of the two bridge regions, and dielectric structures on and having a different material composition than the dielectric liner material. The dielectric structures are substantially confined within horizontal areas of the steps of the stadium structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Application
    Filed: May 22, 2023
    Publication date: September 21, 2023
    Inventors: Christopher J. Larsen, Lifang Xu
  • Patent number: 11765902
    Abstract: A memory array comprising strings of memory cells comprises a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells are in the stack. The channel-material strings project upwardly from material of an uppermost of the tiers. A first insulator material is above the material of the uppermost tier directly against sides of channel material of the upwardly-projecting channel-material strings. The first insulator material comprises at least one of (a) and (b), where (a): silicon, nitrogen, and one or more of carbon, oxygen, boron, and phosphorus, and (b): silicon carbide. Second insulator material is above the first insulator material. The first and second insulator materials comprise different compositions relative one another. Conductive vias in the second insulator material are individually directly electrically coupled to individual of the channel-material strings. Other embodiments, including methods, are disclosed.
    Type: Grant
    Filed: October 1, 2021
    Date of Patent: September 19, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Lifang Xu
  • Patent number: 11756596
    Abstract: Methods, systems, and devices for transition structures for three-dimensional memory arrays are described. A memory device may include a staircase region which includes a set of vias. The set of vias may include a first subset of vias which couple respective word line plates of the memory region with associated word line decoders, and a second subset of vias which are electrically isolated from the word line plates. The second subset of vias may be arranged in one or more rows positioned between the first subset of vias and the memory region. In some cases, the second subset of vias may be positioned above respective conductive contacts. Additionally or alternatively, the second subset of vias may be positioned above a common conductor shared with pillars of the memory region.
    Type: Grant
    Filed: May 24, 2022
    Date of Patent: September 12, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Indra V. Chary, Lifang Xu
  • Publication number: 20230275190
    Abstract: Solid-state radiation transducer (SSRT) devices having buried contacts that are at least partially transparent and associated systems and methods are disclosed herein. An SSRT device configured in accordance with a particular embodiment can include a radiation transducer including a first semiconductor material, a second semiconductor material, and an active region between the first semiconductor material and the second semiconductor material. The SSRT device can further include first and second contacts electrically coupled to the first and second semiconductor materials, respectively. The second contact can include a plurality of buried-contact elements electrically coupled to the second semiconductor material. Individual buried-contact elements can have a transparent portion directly adjacent to the second semiconductor material. The second contact can further include a base portion extending between the buried-contact elements, such as a base portion that is least partially planar and reflective.
    Type: Application
    Filed: May 1, 2023
    Publication date: August 31, 2023
    Inventors: Martin F. Schubert, Vladimir Odnoblyudov, Lifang Xu
  • Patent number: 11742458
    Abstract: Textured optoelectronic devices and associated methods of manufacture are disclosed herein. In several embodiments, a method of manufacturing a solid state optoelectronic device can include forming a conductive transparent texturing material on a substrate. The method can further include forming a transparent conductive material on the texturing material. Upon heating the device, the texturing material causes the conductive material to grow a plurality of protuberances. The protuberances can improve current spreading and light extraction from the device.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: August 29, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Scott D. Schellhammer, Shan Ming Mou, Michael J. Bernhardt
  • Patent number: 11744076
    Abstract: Some embodiments include an integrated assembly having a memory array region, a staircase region, and an intervening region between the staircase region and the memory array region. The intervening region includes first and second slabs of insulative material extending through a stack of alternating insulative and conductive levels. Bridging regions are adjacent to the slabs. First slits are along the bridging regions, and second slits extend through the slabs. First panels are within the first slits, and second panels are within the second slits. The second panels are compositionally different from the first panels. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: May 25, 2022
    Date of Patent: August 29, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Vinayak Shamanna, Lifang Xu, Aaron R. Wilson
  • Publication number: 20230255023
    Abstract: Memory circuitry comprising strings of memory cells comprising memory blocks individually comprises a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers in a memory-array region. The insulative tiers and the conductive tiers of the memory blocks extend from the memory-array region into a stair-step region. Individual of the memory blocks in the stair-step region comprise a flight of operative stairs. Individual of the operative stairs comprise one of the conductive tiers. At least some immediately-laterally-adjacent of the individual memory blocks in the stair-step region have their flights of operative stairs laterally-separated by a stack comprising two vertically-alternating different-composition insulative materials. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: February 4, 2022
    Publication date: August 10, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Lifang Xu, Richard J. Hill, Yoshiaki Fukuzumi, Paolo Tessariol