Patents by Inventor Lin Yu

Lin Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210387692
    Abstract: A collapsible electric vehicle includes a front vehicle member, a vehicle frame pivotally coupled to the front vehicle member, a seat disposed at the vehicle frame, a power supply, a set of wheels disposed at the front vehicle member and the vehicle frame respectively, and a drive motor eclectically connected to the power supply. The drive motor is connected to at least one of the wheels to drive the wheel to rotate. The collapsible electric vehicle has an expanded state and a collapsed state. In the expanded state, a first supporting frame is expanded and maintained upright to support the seat to be at a suitable position while the front vehicle member is expanded to be positioned apart from the vehicle frame. In the collapsed state, the first supporting frame is collapsed to a main frame, and the front vehicle member is collapsed to the first supporting frame.
    Type: Application
    Filed: October 9, 2018
    Publication date: December 16, 2021
    Inventor: Lin YU
  • Publication number: 20210384316
    Abstract: Semiconductor devices and methods of forming the same are provided. In one embodiment, a semiconductor device includes a gate structure sandwiched between and in contact with a first spacer feature and a second spacer feature, a top surface of the first spacer feature and a top surface of the second spacer feature extending above a top surface of the gate structure, a gate self-aligned contact (SAC) dielectric feature over the first spacer feature and the second spacer feature, a contact etch stop layer (CESL) over the gate SAC dielectric feature, a dielectric layer over the CESL, a gate contact feature extending through the dielectric layer, the CESL, the gate SAC dielectric feature, and between the first spacer feature and the second spacer feature to be in contact with the gate structure, and a liner disposed between the first spacer feature and the gate contact feature.
    Type: Application
    Filed: June 8, 2020
    Publication date: December 9, 2021
    Inventors: Li-Zhen Yu, Lin-Yu Huang, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20210380764
    Abstract: The present application relates to a polymer composite capable of being quickly dissolved or dispersed in an aqueous solvent, and a preparation method and an application thereof. The polymer composite includes a polymer capable of being thermodynamically dissolved in water or an aqueous solvent and a dispersant containing an ion capable of coordinating with the polymer. The polymer is selected from the group of a water soluble homopolymer and/or copolymer, in particular, thermogelable amphiphilic copolymer.
    Type: Application
    Filed: August 19, 2021
    Publication date: December 9, 2021
    Inventors: Jiandong Ding, Jingyu Tang, Dinglingge Cao, Lin Yu
  • Patent number: 11195934
    Abstract: The present disclosure provides embodiments of a semiconductor structure having bi-layer self-aligned contact. The semiconductor structure includes a gate stack disposed on a semiconductor substrate and having a first height, a spacer disposed on a sidewall of the gate stack and having a second height greater than the first height, and a first etch stop layer disposed on a sidewall of the gate spacer and having a third height greater than the second height. The semiconductor structure further includes a first dielectric layer disposed over the gate stack and contacting the gate spacer and the first etch stop layer and a second dielectric layer disposed on the first dielectric layer and contacting the first etch stop layer.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: December 7, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20210376111
    Abstract: A method includes providing a structure having a gate stack; first gate spacers; a second gate spacer over one of the first gate spacers and having an upper portion over a lower portion; a dummy spacer; an etch stop layer; and a dummy cap. The method further includes removing the dummy cap, resulting in a first void above the gate stack and between the first gate spacers; removing the dummy spacer, resulting in a second void above the lower portion and between the etch stop layer and the upper portion; depositing a layer of a decomposable material into the first and the second voids; depositing a seal layer over the etch stop layer, the first and the second gate spacers, and the layer of the decomposable material; and removing the layer of the decomposable material, thereby reclaiming at least portions of the first and the second voids.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Cheng-Chi Chuang, Lin-Yu Huang, Chia-Hao Chang, Yu-Ming Lin, Ting-Ya Lo, Chi-Lin Teng, Hsin-Yen Huang, Hai-Ching Chen
  • Publication number: 20210375758
    Abstract: Semiconductor devices and methods of forming the same are provided. In one embodiment, a semiconductor device includes an active region including a channel region and a source/drain region and extending along a first direction, and a source/drain contact structure over the source/drain region. The source/drain contact structure includes a base portion extending lengthwise along a second direction perpendicular to the first direction, and a via portion over the base portion. The via portion tapers away from the base portion.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Kuan-Lun Cheng, Chih-Hao Wang, Cheng-Chi Chuang, Chia-Hao Chang
  • Publication number: 20210375664
    Abstract: A method includes providing a structure having a substrate, a first dielectric layer over the substrate, one or more semiconductor channel layers over the first dielectric layer and connecting a first source/drain (S/D) feature and a second S/D feature, and a gate structure engaging the one or more semiconductor channel layers; etching the substrate from the backside of the structure to form a first trench exposing the first S/D feature and a second trench exposing the second S/D feature; forming an S/D contact in the first trench; etching at least a portion of the first dielectric layer resulting in a portion of the S/D contact protruding from the first dielectric layer at the backside of the structure; and depositing a seal layer over the S/D contact, wherein the seal layer caps an air gap between the gate structure and the seal layer.
    Type: Application
    Filed: November 5, 2020
    Publication date: December 2, 2021
    Inventors: Chia-Hao Chang, Lin-Yu Huang, Li-Zhen Yu, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11189531
    Abstract: A method includes forming a first dummy gate and a second dummy gate over a fin that protrudes above a substrate; replacing the first dummy gate and the second dummy gate with a first metal gate and a second metal gate, respectively; forming a dielectric cut pattern between the first and the second metal gates, the dielectric cut pattern extending further from the substrate than the first and the second metal gates; forming a patterned mask layer over the first metal gate, the second metal gate, and the dielectric cut pattern, an opening in the patterned mask layer exposing a portion of the first metal gate, a portion of the second metal gate, and a portion of the dielectric cut pattern underlying the opening; filling the opening with a first electrically conductive material; and recessing the first electrically conductive material below an upper surface of the dielectric cut pattern.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: November 30, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Lin-Yu Huang, Sheng-Tsung Wang, Chia-Hao Chang, Tien-Lu Lin, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20210356682
    Abstract: A hybrid multi-layered optical flexible printed circuit device, comprising: an optical flexible substrate including a first open window and a second open window with a first, a second surfaces opposite to each other; an intrinsic film including a first bonding region aligned with the first open window and a second bonding region aligned with the second open window formed on the first surface; an optical waveguide film including a first notch with a first slant surface aligned with the first bonding region, and a second notch with a second slant surface aligned with the second bonding region formed on the second surface and encompassed the first open window and the second open window; a first flexible printed circuit board formed on the optical waveguide film; and a first optoelectronic device and a second optoelectronic device mounted in the first bonding region and the second bonding region of the intrinsic film.
    Type: Application
    Filed: May 17, 2021
    Publication date: November 18, 2021
    Applicant: AuthenX Inc.
    Inventors: Po-Kuan Shen, Chao-Chieh Hsu, Sheng-Fu Lin, Chun-Chiang Yen, Chiu-Lin Yu, Kai-Lun Han, Jenq-Yang Chang, Mao-Jen Wu
  • Patent number: 11177383
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a base and a fin over the base. The semiconductor device structure includes a gate stack wrapping around a first upper portion of the fin. The semiconductor device structure includes a first stressor and a second stressor respectively over opposite first sides of the fin. The semiconductor device structure includes a spacer structure between the gate stack and the first stressor. The semiconductor device structure includes a first spacer layer covering a sidewall of the gate stack, the spacer structure, and the first stressor. The semiconductor device structure includes a dielectric layer over the first spacer layer. The semiconductor device structure includes an etch stop layer between the first spacer layer and the dielectric layer. The semiconductor device structure includes a seal structure between the second upper portion and the third upper portion.
    Type: Grant
    Filed: February 10, 2020
    Date of Patent: November 16, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Hao Chang, Sheng-Tsung Wang, Lin-Yu Huang, Chia-Lin Chuang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20210351290
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate stack and a contact over a fin structure, a gate spacer layer between the gate stack and the contact, a first mask layer over the gate stack, and a second mask layer over the contact. The first mask layer includes a protruding portion sandwiched between an upper portion of the second mask layer and the gate spacer layer.
    Type: Application
    Filed: July 19, 2021
    Publication date: November 11, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Lin-Yu HUANG, Jia-Chuan YOU, Chia-Hao CHANG, Tien-Lu LIN, Yu-Ming LIN, Chih-Hao WANG
  • Patent number: 11171053
    Abstract: A method of forming a semiconductor device includes providing a device having a gate stack including a metal gate layer. The device further includes a spacer layer disposed on a sidewall of the gate stack and a source/drain feature adjacent to the gate stack. The method further includes performing a first etch-back process to the metal gate layer to form an etched-back metal gate layer. In some embodiments, the method includes depositing a metal layer over the etched-back metal gate layer. In some cases, a semiconductor layer is formed over both the metal layer and the spacer layer to provide a T-shaped helmet layer over the gate stack and the spacer layer.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: November 9, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Cheng Ching, Lin-Yu Huang, Huan-Chieh Su, Sheng-Tsung Wang, Zhi-Chang Lin, Jia-Chuan You, Chia-Hao Chang, Tien-Lu Lin, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20210336012
    Abstract: Structures and methods that include a device such as a gate-all-around transistor formed on a frontside and a contact to one terminal of the device from the frontside of the structure and one terminal of the device from the backside of the structure. The backside contact may include selectively etching from the backside a first trench extending to expose a first source/drain structure and a second trench extending to a second source/drain structure. A conductive layer is deposited in the trenches and patterned to form a conductive via to the first source/drain structure.
    Type: Application
    Filed: September 29, 2020
    Publication date: October 28, 2021
    Inventors: Lin-Yu HUANG, Li-Zhen YU, Chia-Hao CHANG, Cheng-Chi CHUANG, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20210336004
    Abstract: A method includes providing a structure having a substrate, a fin, source/drain (S/D) features, an isolation structure adjacent to sidewalls of the fin, one or more channel layers over a first dielectric layer and connecting the S/D features, and a gate structure engaging the one or more channel layers. The method further includes thinning down the structure from its backside until the fin is exposed and selectively etching the fin to form a trench that exposes surfaces of the S/D features, the first dielectric layer, and the isolation structure. The method further includes forming a silicide feature on the S/D features and depositing an inhibitor on the silicide feature but not on the surface of the first dielectric layer and the isolation structure, depositing a dielectric liner layer on the surfaces of the isolation structure and the first dielectric layer but not on the inhibitor, and selectively removing the inhibitor.
    Type: Application
    Filed: July 31, 2020
    Publication date: October 28, 2021
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20210336020
    Abstract: Methods of forming backside vias connected to source/drain regions of long-channel semiconductor devices and short-channel semiconductor devices and semiconductor devices formed by the same are disclosed.
    Type: Application
    Filed: August 4, 2020
    Publication date: October 28, 2021
    Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20210334505
    Abstract: An image capturing system is disclosed. The image capturing system includes a mainboard, a laser device, an image sensing device, and a data processing device. The laser device is electrically connected to the mainboard, and the laser device includes a laser source. The laser source is configured to emit a laser light. The image sensing device is electrically connected to the mainboard, and the image detecting device includes an aperture and an image sensor. The reflected or scattered light of the laser light passes through the aperture to form an image. The image sensor is configured to generate an image signal according to the image. The data processing device is electrically connected to the mainboard, and the data processing device is configured to generate a liveness detection signal according to the image signal.
    Type: Application
    Filed: July 8, 2021
    Publication date: October 28, 2021
    Inventors: Sheng-Fu LIN, Chiu-Lin YU, Kai-Lun HAN, Po-Kuan SHEN, Chun-Chiang YEN, Yu-Chun WANG, Jenq-Yang CHANG, Mao-Jen WU
  • Patent number: 11154637
    Abstract: A biodegradable sealant includes: a polyethylene glycol derivative; a photoinitiator; and a solvent, wherein the content of the polyethylene glycol derivative is about 10-75 wt % in the biodegradable sealant. The polyethylene glycol derivative is obtained by a substitution reaction, and in the substitution reaction, the polyethylene glycol is modified with methacrylic anhydride.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: October 26, 2021
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Hsin-Hsin Shen, Yu-Chi Wang, Sen-Lu Chen, Yu-Bing Liou, Jian-Wei Lin, Yi-Hsuan Lee, Ming-Chia Yang, Ying-Wen Shen, Wei-Lin Yu
  • Publication number: 20210328032
    Abstract: A semiconductor structure includes a metal gate structure (MG) formed over a substrate, a first gate spacer formed on a first sidewall of the MG, a second gate spacer formed on a second sidewall of the MG opposite to the first sidewall, where the second gate spacer is shorter than the first gate spacer, a source/drain (S/D) contact (MD) adjacent to the MG, where a sidewall of the MD is defined by the second gate spacer, and a contact feature configured to electrically connect the MG to the MD.
    Type: Application
    Filed: April 16, 2020
    Publication date: October 21, 2021
    Inventors: Li-Zhen Yu, Lin-Yu Huang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11152475
    Abstract: A method includes providing a structure having a substrate, a gate, a gate spacer, a dielectric gate cap, a source/drain (S/D) feature, a contact etch stop layer (CESL) covering a sidewall of the gate spacer and a top surface of the S/D feature, and an inter-level dielectric (ILD) layer. The method includes etching a contact hole through the ILD layer and through a portion of the CESL, the contact hole exposing the CESL covering the sidewalls of the gate spacer and exposing a top portion of the S/D feature. The method includes forming a silicide feature on the S/D feature and selectively depositing an inhibitor on the silicide feature. The inhibitor is not deposited on surfaces of the CESL other than at a corner area where the CESL and the silicide feature meet.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: October 19, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11145728
    Abstract: A method includes forming a gate structure over a fin protruding above a substrate, forming a gate spacer layer on sidewalls of the gate structure, forming an etch stop layer on sidewalls of the gate spacer layer, replacing the gate structure with a gate stack, forming a source/drain contact adjacent the etch stop layer, recessing the gate stack to form a first recess, filling the first recess with a first dielectric material, recessing the source/drain contact and the etch stop layer to form a second recess, filling the second recess with a second dielectric material, recessing the second dielectric material and the gate spacer layer to form a third recess, and filling the third recess with a third dielectric material, wherein the composition of the third dielectric material is different from that of the first dielectric material and the second dielectric material.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: October 12, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang