Patents by Inventor Manfred Eller

Manfred Eller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170344690
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Application
    Filed: August 21, 2017
    Publication date: November 30, 2017
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Publication number: 20170338235
    Abstract: Circuit structures, such as inverters and static random access memories, and fabrication methods thereof are presented. The circuit structures include, for instance: a first transistor, the first transistor having a first channel region disposed above an isolation region; and a second transistor, the second transistor having a second channel region, the second channel region being laterally adjacent to the first channel region of the first transistor and vertically spaced apart therefrom by the isolation region thereof. In one embodiment, the first channel region and the isolation region of the first transistor are disposed above a substrate, and the substrate includes the second channel region of the second transistor. In another embodiment, the first transistor includes a fin structure extending from the substrate, and an upper portion of the fin structure includes the first channel region and a lower portion of the fin structure includes the isolation region.
    Type: Application
    Filed: May 20, 2016
    Publication date: November 23, 2017
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Hui ZANG, Manfred ELLER, Min-hwa CHI
  • Publication number: 20170338247
    Abstract: Circuit structures, such as inverters and static random access memories, and fabrication methods thereof are presented. The circuit structures include, for instance: a first transistor, the first transistor having a first channel region disposed above an isolation region; and a second transistor, the second transistor having a second channel region, the second channel region being laterally adjacent to the first channel region of the first transistor and vertically spaced apart therefrom by the isolation region thereof. In one embodiment, the first channel region and the isolation region of the first transistor are disposed above a substrate, and the substrate includes the second channel region of the second transistor.
    Type: Application
    Filed: May 20, 2016
    Publication date: November 23, 2017
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Hui ZANG, Manfred ELLER, Min-hwa CHI
  • Patent number: 9824748
    Abstract: Static random access memory (SRAM) bitcell structures with improved minimum operation voltage (Vmin) and yield are provided. The structures may include a silicon substrate, a deep n-well (DNW) layer, p-well (PW) regions, doped back-plate (BP) regions, a buried oxide (BOX) layer, and/or active regions formed on the BOX layer and over portions of the BP regions. At least one BP region may extend below at least one shallow trench isolation (STI) region, at least one contact to back plate (CBP), at least one active region and at least one PC construct overlapping the at least one active region forming a channel of at least one of a first pull-up (PU1) transistor and a second pull-up (PU2) transistor. The at least one CBP facilitates biasing of at least one the PU1 and PU2 transistors during at least one of a read, write or standby operation of the structures.
    Type: Grant
    Filed: December 30, 2016
    Date of Patent: November 21, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Hui Zang, Manfred Eller, Min-hwa Chi
  • Patent number: 9799661
    Abstract: Static random access memory (SRAM) bitcell structures with improved minimum operation voltage (Vmin) and yield are provided. The structures may include a silicon substrate, a deep n-well (DNW) layer, p-well (PW) regions, doped back-plate (BP) regions, a buried oxide (BOX) layer, and/or active regions formed on the BOX layer and over portions of the BP regions. At least one BP region may extend below at least one shallow trench isolation (STI) region, at least one contact to back plate (CBP), at least one active region and at least one PC construct overlapping the at least one active region forming a channel of at least one of a first pull-down (PD1) transistor and a second pull-down (PD2) transistor. The at least one CBP facilitates biasing at least one of the PD1 and PD2 transistors during at least one of a read, write or standby operation of the structures.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: October 24, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Hui Zang, Manfred Eller, Min-hwa Chi
  • Patent number: 9767244
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Grant
    Filed: April 7, 2016
    Date of Patent: September 19, 2017
    Assignee: Infineon Technologies AG
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Patent number: 9734897
    Abstract: Static random access memory (SRAM) bitcell structures with improved minimum operation voltage (Vmin) and yield are provided. The structures may include a silicon substrate, a deep n-well (DNW) layer, p-well (PW) regions, doped back-plate (BP) regions, a buried oxide (BOX) layer, and/or active regions formed on the BOX layer and over portions of the BP regions. At least one BP region may extend below at least one shallow trench isolation (STI) region, at least one contact to back plate (CBP), at least one active region and at least one PC construct overlapping the at least one active region forming a channel of at least one of a first pass gate (PG1) transistor and a second pass gate (PG2) transistor. The at least one CBP facilitates biasing of at least one the PG1 and PG2 transistors during at least one of a read, write or standby operation of the structures.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: August 15, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Hui Zang, Manfred Eller, Min-hwa Chi
  • Patent number: 9601512
    Abstract: A semiconductor device includes a semiconductor substrate, an insulating layer on a top surface of the substrate, and a first semiconductor transistor on the insulating layer, the transistor including an active region with a source region, a drain region, a channel region between the source and drain regions and a gate structure over the channel region, the gate structure extending beyond the transistor to an adjacent area. An outer well is included in the substrate, an inner well of an opposite type as the outer well situated within the outer well and under the active region and adjacent area, and a contact for the inner well in the adjacent area, the contact surrounding the gate structure. Operating the device includes applying a variable voltage at the contact for the inner well, a threshold voltage for the first transistor being altered by the variable voltage. The inner well and gate may be exposed and contacts created therefor together.
    Type: Grant
    Filed: July 16, 2015
    Date of Patent: March 21, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hui Zang, Manfred Eller
  • Patent number: 9576952
    Abstract: Integrated circuits and fabrication methods are provided. The integrated circuit includes: a varying gate structure disposed over a substrate structure, the varying gate structure including a first gate stack in a first region of the substrate structure, and a second gate stack in a second region of the substrate structure; a first field-effect transistor in the first region, the first field-effect transistor including the first gate stack and having a first threshold voltage; and a second field-effect transistor in the second region, the second field-effect transistor including the second gate stack and having a second threshold voltage, where the first threshold voltage is different from the second threshold voltage. The methods include providing the varying gate structure, the providing including: sizing layer(s) of the varying gate structure with different thickness(es) in different region(s).
    Type: Grant
    Filed: February 25, 2014
    Date of Patent: February 21, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Manoj Joshi, Manfred Eller, Richard J. Carter, Srikanth Balaji Samavedam
  • Patent number: 9570586
    Abstract: Circuit fabrication methods are provided which include, for example: providing one or more gate structures disposed over a substrate structure, the substrate structure including a first region and a second region; forming a plurality of U-shaped cavities extending into the substrate structure in the first region and the second region thereof, where at least one first cavity of the plurality of U-shaped cavities is disposed adjacent in one gate structure in the first region; and expanding the at least one first cavity further into the substrate structure to at least partially undercut the one gate structure, without expanding at least one second cavity of the plurality of U-shaped cavities, where forming the plurality of U-shaped cavities facilitates fabricating the circuit structure. In one embodiment, the circuit structure includes first and second transistors, having different device architectures, the first transistor having a higher mobility characteristic than the second transistor.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: February 14, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hong Yu, Seong Yeol Mun, Bingwu Liu, Lun Zhao, Richard J. Carter, Manfred Eller
  • Publication number: 20170018573
    Abstract: A semiconductor device includes a semiconductor substrate, an insulating layer on a top surface of the substrate, and a first semiconductor transistor on the insulating layer, the transistor including an active region with a source region, a drain region, a channel region between the source and drain regions and a gate structure over the channel region, the gate structure extending beyond the transistor to an adjacent area. An outer well is included in the substrate, an inner well of an opposite type as the outer well situated within the outer well and under the active region and adjacent area, and a contact for the inner well in the adjacent area, the contact surrounding the gate structure. Operating the device includes applying a variable voltage at the contact for the inner well, a threshold voltage for the first transistor being altered by the variable voltage. The inner well and gate may be exposed and contacts created therefor together.
    Type: Application
    Filed: July 16, 2015
    Publication date: January 19, 2017
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Hui ZANG, Manfred ELLER
  • Patent number: 9543297
    Abstract: A method of forming fins and the resulting fin-shaped field effect transistors (finFET) are provided. Embodiments include forming silicon (Si) fins over a substrate; forming a first metal over each of the Si fins; forming an isolation material over the first metal; removing an upper portion of the isolation material to expose and upper portion of the first metal; removing the upper portion of the first metal to expose an upper portion of each Si fin; removing the isolation material after removing the upper portion of the first metal; and forming a second metal over the first metal and the upper portion of the Si fins.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: January 10, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Xusheng Wu, Konstantin G. Korablev, Shesh Mani Pandey, Manfred Eller
  • Patent number: 9484417
    Abstract: Methods of forming doped transition regions of transistor structures are provided herein. The methods include, for instance: providing a first semiconductor material including a dopant over a source/drain region of the transistor structure; providing a second semiconductor material including the dopant over the first semiconductor material, where the second semiconductor material is different from the first semiconductor material; and, where providing the second semiconductor material is performed at a temperature sufficient to diffuse the dopant from the first semiconductor material through the source/drain region into a portion of a channel region of the transistor structure. The portion of the channel region into which the dopant from the first semiconductor material diffuses forms the doped transition region.
    Type: Grant
    Filed: July 22, 2015
    Date of Patent: November 1, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Xusheng Wu, Manfred Eller
  • Publication number: 20160283635
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Application
    Filed: April 7, 2016
    Publication date: September 29, 2016
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Patent number: 9455201
    Abstract: In one aspect there is set forth herein a semiconductor device having a first field effect transistor formed in a substrate structure, and a second field effect transistor formed in the substrate structure. The first field effect transistor can include a first substrate structure doping, a first gate stack, and a first threshold voltage. The second field effect transistor can include the first substrate structure doping, a second gate stack different from the first gate stack, and a second threshold voltage different from the first threshold voltage.
    Type: Grant
    Filed: February 25, 2014
    Date of Patent: September 27, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Manoj Joshi, Manfred Eller, Rohit Pal, Richard J. Carter, Srikanth Balaji Samavedam, Bongki Lee, Jin Ping Liu
  • Patent number: 9362180
    Abstract: In one aspect there is set forth herein an integrated circuit having a first plurality of field effect transistors and a second plurality of field effect transistor, wherein field effect transistors of the first plurality of field effect transistors each have a first gate stack and wherein field effect transistors of the second plurality of field effect transistors each have a second gate stack, the second gate stack being different from the first gate stack by having a metal layer common to the first gate stack and the second gate stack that includes a first thickness at the first gate stack and a second thickness at the second gate stack.
    Type: Grant
    Filed: February 25, 2014
    Date of Patent: June 7, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Bongki Lee, Jin Ping Liu, Manoj Joshi, Manfred Eller, Rohit Pal, Richard J. Carter, Srikanth Balaji Samavedam
  • Patent number: 9324707
    Abstract: Integrated circuits and methods of manufacture and design thereof are disclosed. For example, a method of manufacturing includes using a first mask to pattern a gate material forming a plurality of first and second features. The first features form gate electrodes of the semiconductor devices, whereas the second features are dummy electrodes. Based on the location of these dummy electrodes, selected dummy electrodes are removed using a second mask. The use of the method provides greater flexibility in tailoring individual devices for different objectives.
    Type: Grant
    Filed: July 3, 2014
    Date of Patent: April 26, 2016
    Assignee: Infineon Technologies AG
    Inventors: Henning Haffner, Manfred Eller, Richard Lindsay
  • Publication number: 20160064564
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming a gate dielectric over the semiconductor wafer, and forming a gate over the gate dielectric. At least one recess is formed in the semiconductor wafer proximate the gate and the gate dielectric, at least a portion of the at least one recess extending beneath the gate. The at least one recess in the semiconductor wafer is filled with a semiconductive material.
    Type: Application
    Filed: November 6, 2015
    Publication date: March 3, 2016
    Inventors: Manfred Eller, Jin-Ping Han
  • Publication number: 20160035630
    Abstract: One illustrative method disclosed herein includes performing a first plurality of epitaxial deposition processes to form a first plurality of semiconductor materials selectively above the N-active region while masking the P-active region, performing a second plurality of epitaxial deposition processes to form a second plurality of semiconductor materials selectively above the P-active region while masking the N-active region, forming an N-type transistor in and above the N-active region and forming a P-type transistor in and above the P-active region.
    Type: Application
    Filed: October 14, 2015
    Publication date: February 4, 2016
    Inventors: Vara G. Reddy Vakada, Laegu Kang, Michael Ganz, Yi Qi, Puneet Khanna, Srikanth Balaji Samavedam, Sri Charan Vemula, Manfred Eller
  • Publication number: 20150364426
    Abstract: Embodiments of the present invention provide an improved decoupling capacitor structure. A contact region is disposed over a source/drain region of the decoupling capacitor structure. Each contact region is formed as a plurality of segments, wherein an inter-segment gap separates a segment of the plurality of segments from an adjacent segment of the plurality of segments. Embodiments may include multiple contact regions between two gate regions. Arrays of decoupling capacitors may arranged as an alternating “checkerboard” pattern of P-well and N-well structures, and may be oriented at a diagonal angle to a metallization layer to facilitate connections of multiple decoupling capacitors within the array.
    Type: Application
    Filed: June 13, 2014
    Publication date: December 17, 2015
    Inventors: Jagar Singh, Jerome Ciavatti, Anurag Mittal, Manfred Eller