Patents by Inventor Marcel Nicolaas Jacobus Van Kervinck

Marcel Nicolaas Jacobus Van Kervinck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus
    Publication number: 20040189967
    Abstract: During scanned exposure of target portions at the edge of the substrate, the position of an edge of the illumination field is changed so as to prevent or reduce radiation falling onto the substrate table or to expose an L-shaped area. In this way the heat load on the substrate table can be reduced and dummy structures can fill a mouse bite without overlapping an alignment mark.
    Type: Application
    Filed: December 19, 2003
    Publication date: September 30, 2004
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Joost Jeroen Ottens, Marcel Nicolaas Jacobus Van Kervinck