Abstract: A lidar system includes a laser source, a photodetector, an emission lens, a receiving lens, and a processor. The laser source is configured to be translated through a plurality of emission locations, and to emit a plurality of laser pulses therefrom. The emission lens is configured to collimate and direct the plurality of laser pulses towards an object. The receiving lens is configured to focus the portion of each of the plurality of laser pulses reflected off of the object to a plurality of detection locations. The photodetector is configured to be translated through the plurality of detection locations, and to detect the portion of each of the plurality of laser pulses. The processor is configured to determine a time of flight for each of the plurality of laser pulses from emission to detection, and construct a three-dimensional image of the object based on the determined time of flight.

Abstract: A headlamp module of a vehicle includes a housing including a window, an illumination submodule disposed inside the housing and configured to provide illumination light to be transmitted through the window toward a scene in front of the vehicle, and a first LiDAR sensor disposed inside the housing and laterally displaced from the illumination submodule. The first LiDAR sensor includes one or more laser sources configured to emit laser beams to be transmitted through the window toward the scene, the laser beams being reflected off of one or more objects in the scene, thereby generating return laser beams to be transmitted through the window toward the first LiDAR sensor and one or more detectors configured to receive and detect the return laser beams.

Abstract: A scanning electron microscopy system is disclosed. The system includes a multi-beam scanning electron microscopy (SEM) sub-system. The SEM sub-system includes a multi-beam electron beam source configured to generate a plurality of electron beams, a sample stage configured to secure a sample, an electron-optical assembly, and a detector assembly configured to detect a plurality of electron signal beams emanating from the surface of the sample to form a plurality of images, each image associated with an electron beam of the plurality of electron beams. The system includes a controller configured to receive the images from the detector assembly, compare two or more of the images to identify common noise components present in the two or more images, and remove the identified common noise components from one or more images of the plurality of images.

Abstract: A scanning electron microscopy system is disclosed. The system includes a multi-beam scanning electron microscopy (SEM) sub-system. The SEM sub-system includes a multi-beam electron source configured to form a plurality of electron beams, a sample stage configured to secure a sample, an electron-optical assembly to direct the electron beams onto a portion of the sample, and a detector assembly configured to simultaneously acquire multiple images of the surface of the sample. The system includes a controller configured to receive the images from the detector assembly, identify a best focus image of images by analyzing one or more image quality parameters of the images, and direct the multi-lens array to adjust a focus of one or more electron beams based on a focus of an electron beam corresponding with the identified best focus image.

Abstract: A scanning electron microscopy system is disclosed. The system includes a multi-beam scanning electron microscopy (SEM) sub-system. The SEM sub-system includes a multi-beam electron source configured to form a plurality of electron beams, a sample stage configured to secure a sample, an electron-optical assembly to direct the electron beams onto a portion of the sample, and a detector assembly configured to simultaneously acquire multiple images of the surface of the sample. The system includes a controller configured to receive the images from the detector assembly, identify a best focus image of images by analyzing one or more image quality parameters of the images, and direct the multi-lens array to adjust a focus of one or more electron beams based on a focus of an electron beam corresponding with the identified best focus image.

Abstract: An optical system includes a laser source having an emission area that has a first width in a first direction and a first height in a second direction orthogonal to the first direction, the first width being greater than the first height. The optical system further includes a cylindrical lens having a negative power and positioned in front of the laser source. The cylindrical lens is oriented such that a power axis of the cylindrical lens is along the first direction. The cylindrical lens is configured to transform the emission area of a laser beam emitted by the laser source into a virtual emission area having a virtual width and a virtual height, where the virtual width is less than the first width. The optical system further includes an rotationally symmetric lens positioned downstream from the cylindrical lens and configured to collimate and direct the laser beam towards a far-field.

Abstract: A lidar system includes a laser source, an emission lens configured to collimate and direct a laser beam emitted by the laser source, a receiving lens configured to receive and focus a return laser beam reflected off of one or more objects to a return beam spot at a focal plane of the receiving lens, and a detector including a plurality of photo sensors arranged as an array at the focal plane of the receiving lens. Each photo sensor has a respective sensing area and is configured to receive and detect a respective portion of the return laser beam. The lidar system further includes a processor configured to determine a respective time of flight for each respective portion of the return laser beam, and construct a three-dimensional image of the one or more objects based on the respective time of flight for each respective portion of the return laser beam.

Abstract: A scanning lidar system includes a fixed frame, a first platform, and a first electro-optic assembly. The first electro-optic assembly includes a first laser source and a first photodetector mounted on the first platform. The scanning lidar system further includes a first flexure assembly flexibly coupling the first platform to the fixed frame, and a drive mechanism configured to scan the first platform with respect to the fixed frame in two dimensions in a plane substantially perpendicular to an optical axis of the lidar system. The scanning lidar system further includes a controller coupled to the drive mechanism. The controller is configured to cause the drive mechanism to scan the first platform in a first direction with a first frequency and in a second direction with a second frequency. The second frequency is similar but not identical to the first frequency.

Abstract: Multi-beam scanning electron microscope (SEM) inspection systems with dark field imaging capabilities are disclosed. An SEM inspection system may include an electron source and at least one optical device. The at least one optical device may be configured to produce a plurality of primary beamlets utilizing electrons provided by the electron source and deliver the plurality of primary beamlets toward a target. The apparatus may also include an array of detectors configured to receive a plurality of image beamlets emitted by the target in response to the plurality of primary beamlets and produce at least one dark field image of the target.

Abstract: A scanning electron microscopy system is disclosed. The system includes a multi-beam scanning electron microscopy (SEM) sub-system. The SEM sub-system includes a multi-beam electron source configured to form a plurality of electron beams, a sample stage configured to secure a sample, an electron-optical assembly to direct the electron beams onto a portion of the sample, and a detector assembly configured to simultaneously acquire multiple images of the surface of the sample. The system includes a controller configured to receive the images from the detector assembly, identify a best focus image of images by analyzing one or more image quality parameters of the images, and direct the multi-lens array to adjust a focus of one or more electron beams based on a focus of an electron beam corresponding with the identified best focus image.

Abstract: A scanning lidar system includes a fixed frame, a first platform flexibly attached to the fixed frame, a lens assembly including a first lens and a second lens mounted on the first platform, a second platform flexible attached to the fixed frame, an electro-optic assembly including a first laser source and a first photodetector mounted on the second platform, a drive mechanism mechanically coupled to the first platform and the second platform and configured to translate the first platform and the second platform with respect to the fixed frame, and a controller coupled to the drive mechanism and configured to translate the first platform to a plurality of first positions through the drive mechanism and translate the second platform to a plurality of second positions through the drive mechanism such that a motion of the second platform is substantially opposite to a motion of the first platform.

Abstract: A scanning lidar system includes an external frame, an internal frame attached to the external frame by vibration-isolation mounts, and an electro-optic assembly movably attached to the internal frame and configured to be translated with respect to the internal frame during scanning operation of the scanning lidar system.

Abstract: A scanning lidar system includes a first lens having a first lens center and characterized by a first optical axis and a first surface of best focus, a second lens having a second lens center and characterized by a second optical axis, a platform separated from the first lens and the second lens along the first optical axis, and an array of laser sources mounted on the platform. Each laser source of the array of laser sources has an emission surface lying substantially at the first surface of best focus of the first lens and positioned at a respective laser position. The scanning lidar system further includes an array of photodetectors mounted on the platform. Each photodetector of the array of photodetectors is positioned at a respective photodetector position that is optically conjugate with a respective laser position of a corresponding laser source.

Abstract: Light-emitting devices, such as LEDs, are tested using a photometric unit. The photometric unit, which may be an integrating sphere, can measure flux, color, or other properties of the devices. The photometric unit may have a single port or both an inlet and outlet. Light loss through the port, inlet, or outlet can be reduced or calibrated for. These testing systems can provide increased reliability, improved throughput, and/or improved measurement accuracy.

Abstract: A three-dimensional imaging system includes a lidar sensor having a first optical axis oriented at a first angle toward a scene and configured to determine a three-dimensional image of one or more first objects in the scene, and an optical three-dimensional sensor having a second optical axis oriented at a second angle toward the scene and configured to construct a three-dimensional image of one or more second objects in the scene. The first three-dimensional sensor is characterized by a first angular field of view. The second three-dimensional sensor is characterized by a second angular field of view different from the first angular field of view.

Abstract: A three-dimensional imaging system includes a first illumination source configured to project a first fan of light toward an object in a field of view, and a second illumination source configured to project a second fan of light substantially parallel to and spaced apart from the first fan of light. The first illumination source and the second illumination source are further configured to scan the first fan of light and the second fan of light synchronously laterally across the field of view. The three-dimensional imaging system further includes a camera configured to capture a plurality of image frames of the field of view as the first fan of light and the second fan of light are scanned over a plurality of regions the object, and a processor coupled to the camera and configured to construct a three-dimensional image of the object based on the plurality of image frames.

Abstract: A lidar system includes a laser source, a photodetector, an emission lens, a receiving lens, and a processor. The laser source is configured to be translated through a plurality of emission locations, and to emit a plurality of laser pulses therefrom. The emission lens is configured to collimate and direct the plurality of laser pulses towards an object. The receiving lens is configured to focus the portion of each of the plurality of laser pulses reflected off of the object to a plurality of detection locations. The photodetector is configured to be translated through the plurality of detection locations, and to detect the portion of each of the plurality of laser pulses. The processor is configured to determine a time of flight for each of the plurality of laser pulses from emission to detection, and construct a three-dimensional image of the object based on the determined time of flight.

Abstract: One embodiment relates to an apparatus for virtual grounding of a target substrate in a charged-particle beam apparatus. A primary gun generates charged particles for a process beam that is focused on a frontside surface of the target substrate, and the target substrate is held by a stage. An electrostatic voltmeter measures a voltage potential of the target substrate, and a charge-control gun impinges a beam of charged particles to the target substrate. A feedback control loop is used to control the flood gun depending on the voltage potential measured by the electrostatic voltmeter. Other embodiments, aspects and features are also disclosed.

Abstract: A scanning electron microscopy system is disclosed. The system includes a multi-beam scanning electron microscopy (SEM) sub-system. The SEM sub-system includes a multi-beam electron beam source configured to generate a plurality of electron beams, a sample stage configured to secure a sample, an electron-optical assembly, and a detector assembly configured to detect a plurality of electron signal beams emanating from the surface of the sample to form a plurality of images, each image associated with an electron beam of the plurality of electron beams. The system includes a controller configured to receive the images from the detector assembly, compare two or more of the images to identify common noise components present in the two or more images, and remove the identified common noise components from one or more images of the plurality of images.

Abstract: A scanning electron microscopy system is disclosed. The system includes a multi-beam scanning electron microscopy (SEM) sub-system. The SEM sub-system includes a multi-beam electron source configured to form a plurality of electron beams, a sample stage configured to secure a sample, an electron-optical assembly to direct the electron beams onto a portion of the sample, and a detector assembly configured to simultaneously acquire multiple images of the surface of the sample. The system includes a controller configured to receive the images from the detector assembly, identify a best focus image of images by analyzing one or more image quality parameters of the images, and direct the multi-lens array to adjust a focus of one or more electron beams based on a focus of an electron beam corresponding with the identified best focus image.