Patents by Inventor Mark Charles Hakey

Mark Charles Hakey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240097065
    Abstract: A method of fabricating a single-crystal silicon photovoltaic cell includes providing a single-crystal silicon wafer and a structural support member. The single-crystal silicon wafer has a first major surface and a second major surface. Each major surface extends along a major surface plane. The single-crystal silicon wafer has a thickness greater than 100 micrometers and a dimension greater than 50 mm. The method further includes mounting the structural support member to the first major surface or to the second major surface. The method further includes reducing thickness of the single-crystal silicon wafer to a thickness less than or equal to 100 micrometers while the single-crystal silicon wafer is mounted to the structural support member. The method further includes providing the first major surface with a diffusion and a metalization grid and providing the second major surface with a back surface contact.
    Type: Application
    Filed: September 20, 2022
    Publication date: March 21, 2024
    Applicant: Semivation, LLC
    Inventors: David Vaclav Horak, Peter H Mitchell, Mark Charles Hakey, William R. Tonti, James Marc Leas
  • Patent number: 10589445
    Abstract: A method of cleaving off a daughter single crystal substrate from a parent single crystal substrate includes providing a stress-mandrel and the parent a single crystal substrate. The parent single crystal substrate has a major surface and an edge surface that intersects the major surface. The major surface extends along a major surface plane. The stress-mandrel has a stress-mandrel coefficient of thermal expansion that is higher than the parent single crystal coefficient of thermal expansion. The method includes bonding the stress-mandrel to the major surface, and cooling the parent single crystal substrate and the stress-mandrel. The cooling of the parent single crystal substrate bonded to the stress-mandrel provides a thermal stress in the parent single crystal substrate sufficient to cleave the parent single crystal substrate. The cleaving extends substantially along a plane parallel to the plane of the major surface. In one embodiment the cleaved daughter substrate was used to make a photovoltaic cell.
    Type: Grant
    Filed: October 29, 2018
    Date of Patent: March 17, 2020
    Assignee: Semivation, LLC
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, David Vaclav Horak, Peter H. Mitchell, William P. Parker, William R. Tonti
  • Patent number: 7994575
    Abstract: A method for fabricating a metal-oxide-semiconductor device structure. The method includes introducing a dopant species concurrently into a semiconductor active layer that overlies an insulating layer and a gate electrode overlying the semiconductor active layer by ion implantation. The thickness of the semiconductor active layer, the thickness of the gate electrode, and the kinetic energy of the dopant species are chosen such that the projected range of the dopant species in the semiconductor active layer and insulating layer lies within the insulating layer and a projected range of the dopant species in the gate electrode lies within the gate electrode. As a result, the semiconductor active layer and the gate electrode may be doped simultaneously during a single ion implantation and without the necessity of an additional implant mask.
    Type: Grant
    Filed: July 6, 2005
    Date of Patent: August 9, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Larry Alan Nesbit
  • Patent number: 7989222
    Abstract: A conductive layer in an integrated circuit is formed as a sandwich having multiple sublayers, including at least two sublayers of oriented carbon nanotubes. A first sublayer is created by growing carbon nanotubes in a first direction parallel to the chip substrate from a catalyst in the presence of a reactant gas flow in the first direction, and a second sublayer is created by growing carbon nanotubes in a second direction parallel to the substrate and different from the first direction from a catalyst in the presence of a reactant gas flow in the second direction. The first and second directions are preferably substantially perpendicular. The conductive layer sandwich preferably contains one or more additional sublayers of a conductive material, such as a metal.
    Type: Grant
    Filed: July 6, 2010
    Date of Patent: August 2, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Peter H. Mitchell
  • Patent number: 7985643
    Abstract: A semiconductor structure. The structure includes (a) a semiconductor layer including a channel region disposed between first and second S/D regions; (b) a gate dielectric region on the channel region; (c) a gate region on the gate dielectric region and electrically insulated from the channel region by the gate dielectric region; (d) a protection umbrella region on the gate region, wherein the protection umbrella region comprises a first dielectric material, and wherein the gate region is completely in a shadow of the protection umbrella region; and (e) a filled contact hole (i) directly above and electrically connected to the second S/D region and (ii) aligned with an edge of the protection umbrella region, wherein the contact hole is physically isolated from the gate region by an inter-level dielectric (ILD) layer which comprises a second dielectric material different from the first dielectric material.
    Type: Grant
    Filed: March 21, 2008
    Date of Patent: July 26, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven J. Holmes, David Vaclav Horak, Charles William Koburger, III, William Robert Tonti
  • Patent number: 7951660
    Abstract: A method for fabricating a metal-oxide-semiconductor device structure. The method includes introducing a dopant species concurrently into a semiconductor active layer that overlies an insulating layer and a gate electrode overlying the semiconductor active layer by ion implantation. The thickness of the semiconductor active layer, the thickness of the gate electrode, and the kinetic energy of the dopant species are chosen such that the projected range of the dopant species in the semiconductor active layer and insulating layer lies within the insulating layer and a projected range of the dopant species in the gate electrode lies within the gate electrode. As a result, the semiconductor active layer and the gate electrode may be doped simultaneously during a single ion implantation and without the necessity of an additional implant mask.
    Type: Grant
    Filed: November 7, 2003
    Date of Patent: May 31, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Larry Alan Nesbit
  • Patent number: 7932167
    Abstract: A memory cell in an integrated circuit is fabricated in part by forming a lower electrode feature, an island, a sacrificial feature, a gate feature, and a phase change feature. The island is formed on the lower electrode feature and has one or more sidewalls. It comprises a lower doped feature, a middle doped feature formed above the lower doped feature, and an upper doped feature formed above the middle doped feature. The sacrificial feature is formed above the island, while the gate feature is formed along each sidewall of the island. The gate feature overlies at least a portion of the middle doped feature of the island and is operative to control an electrical resistance therein. Finally, the phase feature is formed above the island at least in part by replacing at least a portion of the sacrificial feature with a phase change material. The phase change material is operative to switch between lower and higher electrical resistance states in response to an application of an electrical signal.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: April 26, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, John G. Gaudiello, Mark Charles Hakey, Steven J. Holmes, David V. Horak, Charles William Koburger, III, Chung Hon Lam
  • Patent number: 7923202
    Abstract: A structure and a method for forming the same. The method includes providing a structure which includes (a) a to-be-patterned layer, (b) a photoresist layer on top of the to-be-patterned layer wherein the photoresist layer includes a first opening, and (c) a cap region on side walls of the first opening. A first top surface of the to-be-patterned layer is exposed to a surrounding ambient through the first opening. The method further includes performing a first lithography process resulting in a second opening in the photoresist layer. The second opening is different from the first opening. A second top surface of the to-be-patterned layer is exposed to a surrounding ambient through the second opening.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: April 12, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III
  • Patent number: 7898045
    Abstract: Acceleration and voltage measurement devices and methods of fabricating acceleration and voltage measurement devices. The acceleration and voltage measurement devices including an electrically conductive plate on a top surface of a first insulating layer; a second insulating layer on a top surface of the conductive plate, the top surface of the plate exposed in an opening in the second insulating layer; conductive nanotubes suspended across the opening, and electrically conductive contacts to the nanotubes.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: March 1, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Leah Marie Pfeifer Pastel
  • Patent number: 7851064
    Abstract: Methods for synthesizing carbon nanotubes and structures formed thereby, includes forming carbon nanotubes on a plurality of synthesis sites supported by a first substrate, interrupting nanotube synthesis, mounting a free end of each carbon nanotube to a second substrate, and removing the first substrate. Each carbon nanotube is capped by one of the synthesis sites, to which growth reactants have ready access.
    Type: Grant
    Filed: February 14, 2008
    Date of Patent: December 14, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Peter H. Mitchell, Larry Alan Nesbit
  • Patent number: 7829883
    Abstract: Carbon nanotube field effect transistors, arrays of carbon nanotube field effect transistors, device structures, and arrays of device structures. A stacked device structure includes a gate electrode layer and catalyst pads each coupled electrically with a source/drain contact. The gate electrode layer is divided into multiple gate electrodes and at least one semiconducting carbon nanotube is synthesized by a chemical vapor deposition process on each of the catalyst pads. The gate electrode has a sidewall covered by a gate dielectric and at least one semiconducting carbon nanotube adjacent to the sidewall of the gate electrode. Source/drain contacts are electrically coupled with opposite ends of the semiconducting carbon nanotube to complete the device structure. Multiple device structures may be configured either as a memory circuit or as a logic circuit.
    Type: Grant
    Filed: February 12, 2004
    Date of Patent: November 9, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Peter H. Mitchell, Larry Alan Nesbit
  • Patent number: 7825525
    Abstract: An integrated circuit and method for fabrication includes first and second structures, each including a set of sub-lithographic lines, and contact landing segments connected to at least one of the sub-lithographic lines at an end portion. The first and second structures are nested such that the sub-lithographic lines are disposed in a parallel manner within a width, and the contact landing segments of the first structure are disposed on an opposite side of a length of the sub-lithographic lines relative to the contact landing segments of the second structure. The contact landing segments for the first and second structures are included within the width dimension, wherein the width includes a dimension four times a minimum feature size achievable by lithography.
    Type: Grant
    Filed: February 21, 2008
    Date of Patent: November 2, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven J. Holmes, David V. Horak, Charles William Koburger, III, Chung Hon Lam
  • Publication number: 20100273298
    Abstract: A conductive layer in an integrated circuit is formed as a sandwich having multiple sublayers, including at least one sublayer of oriented carbon nanotubes. The conductive layer sandwich preferably contains two sublayers of carbon nanotubes, in which the carbon nanotube orientation in one sublayer is substantially perpendicular to that of the other layer. The conductive layer sandwich preferably contains one or more additional sublayers of a conductive material, such as a metal. In one embodiment, oriented carbon nanotubes are created by forming a series of elongated parallel catalyst strips on a horizontal surface, and growing carbon nanotubes from the catalyst in the presence of a directional flow of reactant gases.
    Type: Application
    Filed: July 6, 2010
    Publication date: October 28, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Peter H. Mitchell
  • Patent number: 7820502
    Abstract: A method for forming carbon nanotube field effect transistors, arrays of carbon nanotube field effect transistors, and device structures and arrays of device structures formed by the methods. The methods include forming a stacked structure including a gate electrode layer and catalyst pads each coupled electrically with a source/drain contact. The gate electrode layer is divided into multiple gate electrodes and at least one semiconducting carbon nanotube is synthesized by a chemical vapor deposition process on each of the catalyst pads. The completed device structure includes a gate electrode with a sidewall covered by a gate dielectric and at least one semiconducting carbon nanotube adjacent to the sidewall of the gate electrode. Source/drain contacts are electrically coupled with opposite ends of the semiconducting carbon nanotube to complete the device structure. Multiple device structures may be configured either as a memory circuit or as a logic circuit.
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: October 26, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaolav Horak, Charles William Koburger, III, Peter H. Mitchell, Larry Alan Nesbit
  • Patent number: 7786583
    Abstract: A conductive layer in an integrated circuit is formed as a sandwich having multiple sublayers, including at least one sublayer of oriented carbon nanotubes. The conductive layer sandwich preferably contains two sublayers of carbon nanotubes, in which the carbon nanotube orientation in one sublayer is substantially perpendicular to that of the other layer. The conductive layer sandwich preferably contains one or more additional sublayers of a conductive material, such as a metal. In one embodiment, oriented carbon nanotubes are created by forming a series of parallel surface ridges, covering the top and one side of the ridges with a catalyst inhibitor, and growing carbon nanotubes horizontally from the uncovered vertical sides of the ridges. In another embodiment, oriented carbon nanotubes are grown on the surface of a conductive material in the presence of a directional flow of reactant gases and a catalyst.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: August 31, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Peter H Mitchell
  • Patent number: 7750406
    Abstract: Design structure embodied in a machine readable medium for designing, manufacturing, or testing a design in which the design structure includes devices formed in a hybrid substrate characterized by semiconductor islands of different crystal orientations. An insulating layer divides the islands of at least one of the different crystal orientations into mutually aligned device and body regions. The body regions may be electrically floating relative to the device regions.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: July 6, 2010
    Assignee: International Business Machines Corporation
    Inventors: Ethan Harrison Cannon, Toshiharu Furukawa, John Gerard Gaudiello, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Jack Allan Mandelman, William Robert Tonti
  • Patent number: 7737504
    Abstract: A well isolation trenches for a CMOS device and the method for forming the same. The CMOS device includes (a) a semiconductor substrate, (b) a P well and an N well in the semiconductor substrate, (c) a well isolation region sandwiched between and in direct physical contact with the P well and the N well. The P well comprises a first shallow trench isolation (STI) region, and the N well comprises a second STI region. A bottom surface of the well isolation region is at a lower level than bottom surfaces of the first and second STI regions. When going from top to bottom of the well isolation region, an area of a horizontal cross section of the well isolation region is an essentially continuous function.
    Type: Grant
    Filed: June 8, 2007
    Date of Patent: June 15, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, David Vaclav Horak, Charles William Koburger, III, Jack Allan Mandelman, William Robert Tonti
  • Patent number: 7699996
    Abstract: A method for simultaneously forming multiple line-widths, one of which is less than that achievable employing conventional lithographic techniques. The method includes providing a structure which includes a memory layer and a sidewall image transfer (SIT) layer on top of the memory layer. Then, the SIT layer is patterned resulting in a SIT region. Then, the SIT region is used as a blocking mask during directional etching of the memory layer resulting in a first memory region. Then, a side wall of the SIT region is retreated a retreating distance D in a reference direction resulting in a SIT portion. Said patterning comprises a lithographic process. The retreating distance D is less than a critical dimension CD associated with the lithographic process. The SIT region includes a first dimension W2 and a second dimension W3 in the reference direction, wherein CD<W2<2D<W3.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: April 20, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, John G. Gaudiello, Mark Charles Hakey, David Vaclav Horak, Charles William Koburger, III
  • Patent number: 7691720
    Abstract: Vertical device structures incorporating at least one nanotube and methods for fabricating such device structures by chemical vapor deposition. Each nanotube is grown by chemical vapor deposition catalyzed by a catalyst pad and encased in a coating of a dielectric material. Vertical field effect transistors may be fashioned by forming a gate electrode about the encased nanotubes such that the encased nanotubes extend vertically through the thickness of the gate electrode. Capacitors may be fashioned in which the encased nanotubes and the corresponding catalyst pad bearing the encased nanotubes forms one capacitor plate.
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: April 6, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, III, Peter H. Mitchell, Larry Alan Nesbit
  • Patent number: 7674674
    Abstract: A memory gain cell for a memory circuit, a memory circuit formed from multiple memory gain cells, and methods of fabricating such memory gain cells and memory circuits. The memory gain cell includes a storage device capable of holding a stored electrical charge, a write device, and a read device. The read device includes a fin of semiconducting material, electrically-isolated first and second gate electrodes flanking the fin, and a source and drain formed in the fin adjacent to the first and the second gate electrodes. The first gate electrode is electrically coupled with the storage device. The first and second gate electrodes are operative for gating a region of the fin defined between the source and the drain to thereby regulate a current flowing from the source to the drain. When gated, the magnitude of the current is dependent upon the electrical charge stored by the storage device.
    Type: Grant
    Filed: June 23, 2008
    Date of Patent: March 9, 2010
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark Charles Hakey, David Vaclav Horak, Charles William Koburger, III, Mark Eliot Masters, Peter H. Mitchell