Patents by Inventor Markus Brunnbauer

Markus Brunnbauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10748801
    Abstract: According to various embodiments, a method for processing a carrier may include: forming an arrangement of defects in the carrier, wherein a surface region of the carrier is disposed over the arrangement of defects at a first surface of the carrier, wherein the arrangement of defects is configured to generate a crack structure extending from the arrangement of defects into the surface region; partially removing the carrier to remove the arrangement of defects; and separating the surface region of the carrier into a plurality of surface region portions along the crack structure.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: August 18, 2020
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Gunther Mackh, Markus Brunnbauer, Adolf Koller, Jochen Mueller
  • Patent number: 10373871
    Abstract: Separation grooves are etched from a main surface into a semiconductor substrate. The separation grooves separate chip regions in horizontal directions parallel to the main surface. At least some of the separation grooves are spaced from a lateral outer surface of the semiconductor substrate by at most a first distance. An indentation is formed along a lateral surface. The indentation extends from the main surface into the semiconductor substrate. A minimum horizontal indentation width of the indentation is equal to or greater than the first distance. A with respect to the main surface vertical extension of the indentation is equal to or greater than a vertical extension of the separation grooves.
    Type: Grant
    Filed: May 1, 2018
    Date of Patent: August 6, 2019
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Markus Brunnbauer, Franco Mariani
  • Publication number: 20180286735
    Abstract: According to various embodiments, a method for processing a carrier may include: forming an arrangement of defects in the carrier, wherein a surface region of the carrier is disposed over the arrangement of defects at a first surface of the carrier, wherein the arrangement of defects is configured to generate a crack structure extending from the arrangement of defects into the surface region; partially removing the carrier to remove the arrangement of defects; and separating the surface region of the carrier into a plurality of surface region portions along the crack structure.
    Type: Application
    Filed: March 29, 2018
    Publication date: October 4, 2018
    Inventors: Gunther Mackh, Markus Brunnbauer, Adolf Koller, Jochen Mueller
  • Publication number: 20180247872
    Abstract: Separation grooves are etched from a main surface into a semiconductor substrate. The separation grooves separate chip regions in horizontal directions parallel to the main surface. At least some of the separation grooves are spaced from a lateral outer surface of the semiconductor substrate by at most a first distance. An indentation is formed along a lateral surface. The indentation extends from the main surface into the semiconductor substrate. A minimum horizontal indentation width of the indentation is equal to or greater than the first distance. A with respect to the main surface vertical extension of the indentation is equal to or greater than a vertical extension of the separation grooves.
    Type: Application
    Filed: May 1, 2018
    Publication date: August 30, 2018
    Inventors: Markus Brunnbauer, Franco Mariani
  • Publication number: 20180233470
    Abstract: A manufacturing method is provided which comprises forming recesses in a front side of a wafer, connecting a first temporary holding body to the front side of the recessed wafer, thereafter thinning the wafer from a back side, connecting a second temporary holding body to the back side, and thereafter removing the first temporary holding body.
    Type: Application
    Filed: February 15, 2018
    Publication date: August 16, 2018
    Applicant: Infineon Technologies AG
    Inventors: Thomas Killer, Markus Brunnbauer, Marina Janker, Adolf Koller, Gabriel Maier, Andreas Mueller-Hipper, Andreas Stueckjuergen, Christine Thoms
  • Patent number: 9972535
    Abstract: Separation grooves are etched from a main surface into a semiconductor substrate. The separation grooves separate chip regions in horizontal directions parallel to the main surface. At least some of the separation grooves are spaced from a lateral outer surface of the semiconductor substrate by at most a first distance. An indentation is formed along a lateral surface. The indentation extends from the main surface into the semiconductor substrate. A minimum horizontal indentation width of the indentation is equal to or greater than the first distance. A with respect to the main surface vertical extension of the indentation is equal to or greater than a vertical extension of the separation grooves.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: May 15, 2018
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Markus Brunnbauer, Franco Mariani
  • Patent number: 9911655
    Abstract: A method of dicing a wafer may include forming a plurality of active regions in a wafer, each active region including at least one electronic component, the active regions extending from a first surface of the wafer into the wafer by a height and being separated by separation regions, forming at least one trench in the wafer by plasma etching in at least one separation region from the first surface of the wafer. The at least one trench is extending into the wafer farther than the plurality of active regions. The method may further include processing a remaining portion of the wafer in the separation region to separate the wafer into individual chips.
    Type: Grant
    Filed: December 27, 2016
    Date of Patent: March 6, 2018
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Markus Brunnbauer, Bernhard Drummer, Korbinian Kaspar, Gunther Mackh
  • Publication number: 20170345716
    Abstract: Separation grooves are etched from a main surface into a semiconductor substrate. The separation grooves separate chip regions in horizontal directions parallel to the main surface. At least some of the separation grooves are spaced from a lateral outer surface of the semiconductor substrate by at most a first distance. An indentation is formed along a lateral surface. The indentation extends from the main surface into the semiconductor substrate. A minimum horizontal indentation width of the indentation is equal to or greater than the first distance. A with respect to the main surface vertical extension of the indentation is equal to or greater than a vertical extension of the separation grooves.
    Type: Application
    Filed: May 16, 2017
    Publication date: November 30, 2017
    Inventors: Markus Brunnbauer, Franco Mariani
  • Publication number: 20170309577
    Abstract: A method for use in manufacturing semiconductor devices includes providing a wafer includes a semiconductor substrate that is mechanically homogeneous. The method further comprises forming a mechanical structure in the semiconductor substrate. In a wafer comprising a semiconductor device on a semiconductor substrate, the semiconductor substrate includes a mechanical structure. In a die comprising a semiconductor device on a semiconductor substrate, the semiconductor substrate includes a mechanical structure.
    Type: Application
    Filed: April 25, 2016
    Publication date: October 26, 2017
    Applicant: Infineon Technologies AG
    Inventor: Markus Brunnbauer
  • Publication number: 20170110371
    Abstract: A method of dicing a wafer may include forming a plurality of active regions in a wafer, each active region including at least one electronic component, the active regions extending from a first surface of the wafer into the wafer by a height and being separated by separation regions, forming at least one trench in the wafer by plasma etching in at least one separation region from the first surface of the wafer. The at least one trench is extending into the wafer farther than the plurality of active regions. The method may further include processing a remaining portion of the wafer in the separation region to separate the wafer into individual chips.
    Type: Application
    Filed: December 27, 2016
    Publication date: April 20, 2017
    Inventors: Markus BRUNNBAUER, Bernhard DRUMMER, Korbinian KASPAR, Gunther MACKH
  • Patent number: 9601475
    Abstract: A workpiece has at least two semiconductor chips, each semiconductor chip having a first main surface, which is at least partially exposed, and a second main surface. The workpiece also comprises an electrically conducting layer, arranged on the at least two semiconductor chips, the electrically conducting layer being arranged at least on regions of the second main surface, and a molding compound, arranged on the electrically conducting layer.
    Type: Grant
    Filed: February 11, 2016
    Date of Patent: March 21, 2017
    Assignee: Intel Deutschland GmbH
    Inventors: Markus Brunnbauer, Thorsten Meyer, Stephan Bradl, Ralf Plieninger, Jens Pohl, Klaus Pressel, Recai Sezi
  • Patent number: 9570352
    Abstract: A method of dicing a wafer may include forming a plurality of active regions in a wafer, each active region including at least one electronic component, the active regions extending from a first surface of the wafer into the wafer by a height and being separated by separation regions, the separation regions being free from metal, forming at least one trench in the wafer by plasma etching in at least one separation region from the first surface of the wafer. The at least one trench is extending into the wafer farther than the plurality of active regions. The method may further include processing a remaining portion of the wafer in the separation region to separate the wafer into individual chips.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: February 14, 2017
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Markus Brunnbauer, Bernhard Drummer, Korbinian Kaspar, Gunther Mackh
  • Publication number: 20160211178
    Abstract: A method of dicing a wafer may include forming a plurality of active regions in a wafer, each active region including at least one electronic component, the active regions extending from a first surface of the wafer into the wafer by a height and being separated by separation regions, the separation regions being free from metal, forming at least one trench in the wafer by plasma etching in at least one separation region from the first surface of the wafer. The at least one trench is extending into the wafer farther than the plurality of active regions. The method may further include processing a remaining portion of the wafer in the separation region to separate the wafer into individual chips.
    Type: Application
    Filed: December 10, 2015
    Publication date: July 21, 2016
    Inventors: Markus BRUNNBAUER, Bernhard DRUMMER, Korbinian KASPAR, Gunther MACKH
  • Publication number: 20160163682
    Abstract: A workpiece has at least two semiconductor chips, each semiconductor chip having a first main surface, which is at least partially exposed, and a second main surface. The workpiece also comprises an electrically conducting layer, arranged on the at least two semiconductor chips, the electrically conducting layer being arranged at least on regions of the second main surface, and a molding compound, arranged on the electrically conducting layer.
    Type: Application
    Filed: February 11, 2016
    Publication date: June 9, 2016
    Inventors: Markus Brunnbauer, Thorsten Meyer, Stephan Bradl, Ralf Plieninger, Jens Pohl, Klaus Pressel, Recai Sezi
  • Patent number: 9362144
    Abstract: A panel with a reconfigured wafer including semiconductor chips arranged in rows and columns on semiconductor device positions includes: at least one semiconductor chip having a front, a rear and edge sides provided per semiconductor device position. The reconfigured wafer includes: a front side that forms a coplanar area with the front sides of the at least one semiconductor chip and a plastic housing composition embedding the edge sides and the rear side of the at least one semiconductor chip. The reconfigured wafer includes, on a rear side of the wafer, structures configured to stabilize the panel. The structures are composed of the plastic housing composition and are formed as thickenings of the reconfigured wafer.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: June 7, 2016
    Assignee: INTEL DEUTSCHLAND GMBH
    Inventors: Thorsten Meyer, Markus Brunnbauer
  • Patent number: 9293423
    Abstract: A workpiece has at least two semiconductor chips, each semiconductor chip having a first main surface, which is at least partially exposed, and a second main surface. The workpiece also comprises an electrically conducting layer, arranged on the at least two semiconductor chips, the electrically conducting layer being arranged at least on regions of the second main surface, and a molding compound, arranged on the electrically conducting layer.
    Type: Grant
    Filed: July 14, 2014
    Date of Patent: March 22, 2016
    Assignee: Intel Deutschland GmbH
    Inventors: Markus Brunnbauer, Thorsten Meyer, Stephan Bradl, Ralf Plieninger, Jens Pohl, Klaus Pressel, Recai Sezi
  • Patent number: 9093322
    Abstract: A semiconductor device is disclosed. One embodiment includes a semiconductor substrate and at least two insulating elements located above the semiconductor substrate or above a mold compound embedding the semiconductor substrate. The at least two insulating elements have a first face facing the semiconductor substrate or the mold compound and a second face facing away from the semiconductor substrate or the mold compound. A conductive element for each of the at least two insulating elements extends from the first face of the insulating element to the second face of the insulating element.
    Type: Grant
    Filed: July 13, 2007
    Date of Patent: July 28, 2015
    Assignee: INTEL MOBILE COMMUNICATIONS GMBH
    Inventors: Thorsten Meyer, Markus Brunnbauer, Recai Sezi
  • Publication number: 20140357075
    Abstract: A semiconductor device includes a semiconductor chip and a metal layer electrically coupled to the semiconductor chip. The semiconductor device includes an array of solder balls coupled to the metal layer and a front side protect material directly contacting the metal layer and laterally surrounding a portion of at least a plurality of solder balls. The front side protect material is configured to become fluid during solder reflow.
    Type: Application
    Filed: August 15, 2014
    Publication date: December 4, 2014
    Inventors: Thorsten Meyer, Recai Sezi, Markus Brunnbauer
  • Publication number: 20140332937
    Abstract: A workpiece has at least two semiconductor chips, each semiconductor chip having a first main surface, which is at least partially exposed, and a second main surface. The workpiece also comprises an electrically conducting layer, arranged on the at least two semiconductor chips, the electrically conducting layer being arranged at least on regions of the second main surface, and a molding compound, arranged on the electrically conducting layer.
    Type: Application
    Filed: July 14, 2014
    Publication date: November 13, 2014
    Inventors: Markus Brunnbauer, Thorsten Meyer, Stephan Bradl, Ralf Plieninger, Jens Pohl, Klaus Pressel, Recai Sezi
  • Patent number: 8829663
    Abstract: A description is given of a device comprising a first semiconductor chip, a molding compound layer embedding the first semiconductor chip, a first electrically conductive layer applied to the molding compound layer, a through hole arranged in the molding compound layer, and a solder material filling the through hole.
    Type: Grant
    Filed: July 2, 2007
    Date of Patent: September 9, 2014
    Assignee: Infineon Technologies AG
    Inventors: Jens Pohl, Markus Brunnbauer, Irmgard Escher-Poeppel, Thorsten Meyer