Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.

Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.

Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.

Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.

Abstract: A system and method for customizing an interface, or the set of methods, of a business object by pre-defining a number of parameters and fields available to the methods of the business object using a visual customization tool is provided. The interface of the business object consists of the set of methods available to it. The interface is customized such that only the necessary methods, parameters and fields are made available for programming. The set of methods is displayed in a menu-driven format through a graphical user interface. The user selects the method to customize, and the set of parameters available to that method is displayed. Then the user selects the parameters that are intended to be used, and the fields available to those parameters are displayed. The user can preset certain static fields to constant values. After customization, the underlying code of the method is generated automatically and saved.

Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.

Abstract: An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.

Abstract: An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.

Abstract: A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated.